DE09770219T8 - Bewegliche struktur und lichtabtastspiegel damit - Google Patents

Bewegliche struktur und lichtabtastspiegel damit Download PDF

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Publication number
DE09770219T8
DE09770219T8 DE09770219T DE09770219T DE09770219T8 DE 09770219 T8 DE09770219 T8 DE 09770219T8 DE 09770219 T DE09770219 T DE 09770219T DE 09770219 T DE09770219 T DE 09770219T DE 09770219 T8 DE09770219 T8 DE 09770219T8
Authority
DE
Germany
Prior art keywords
movable structure
lighting mirrors
mirrors
lighting
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE09770219T
Other languages
English (en)
Other versions
DE09770219T1 (de
Inventor
wird später genannt werden Erfinder
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Panasonic Electric Works Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2008166584A external-priority patent/JP4988655B2/ja
Priority claimed from JP2008185893A external-priority patent/JP5049904B2/ja
Priority claimed from JP2008186189A external-priority patent/JP5053194B2/ja
Application filed by Panasonic Electric Works Co Ltd filed Critical Panasonic Electric Works Co Ltd
Publication of DE09770219T1 publication Critical patent/DE09770219T1/de
Application granted granted Critical
Publication of DE09770219T8 publication Critical patent/DE09770219T8/de
Active legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/11—Treatments for avoiding stiction of elastic or moving parts of MEMS
    • B81C2201/112—Depositing an anti-stiction or passivation coating, e.g. on the elastic or moving parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/01—Packaging MEMS
    • B81C2203/0118—Bonding a wafer on the substrate, i.e. where the cap consists of another wafer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/03—Bonding two components
    • B81C2203/031—Anodic bondings
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T403/00—Joints and connections
    • Y10T403/32—Articulated members
    • Y10T403/32549—Articulated members including limit means
    • Y10T403/32557—Articulated members including limit means for pivotal motion

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
DE09770219T 2008-06-25 2009-06-25 Bewegliche struktur und lichtabtastspiegel damit Active DE09770219T8 (de)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP2008166584A JP4988655B2 (ja) 2008-06-25 2008-06-25 半導体機械構造体
JP2008166584 2008-06-25
JP2008185893A JP5049904B2 (ja) 2008-07-17 2008-07-17 可動構造体及びそれを用いた光走査ミラー
JP2008186189A JP5053194B2 (ja) 2008-07-17 2008-07-17 可動構造体及びそれを用いた光走査ミラー
JP2008186189 2008-07-17
JP2008185893 2008-07-17
PCT/JP2009/061583 WO2009157509A1 (ja) 2008-06-25 2009-06-25 可動構造体及びそれを用いた光走査ミラー
EP09770219.5A EP2299584A4 (de) 2008-06-25 2009-06-25 Bewegliche struktur und lichtabtastspiegel damit

Publications (2)

Publication Number Publication Date
DE09770219T1 DE09770219T1 (de) 2012-09-06
DE09770219T8 true DE09770219T8 (de) 2013-04-25

Family

ID=41444572

Family Applications (1)

Application Number Title Priority Date Filing Date
DE09770219T Active DE09770219T8 (de) 2008-06-25 2009-06-25 Bewegliche struktur und lichtabtastspiegel damit

Country Status (7)

Country Link
US (1) US20110188104A1 (de)
EP (1) EP2299584A4 (de)
KR (1) KR101183915B1 (de)
CN (1) CN102067433A (de)
DE (1) DE09770219T8 (de)
SG (2) SG189737A1 (de)
WO (1) WO2009157509A1 (de)

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WO2008072248A2 (en) 2006-12-14 2008-06-19 Ramot At Tel-Aviv University Ltd. Tilting actuator with close-gap electrodes
US9397585B2 (en) * 2010-11-15 2016-07-19 DigitalOptics Corporation MEMS MEMS shock cushion spring systems and methods
CN102059576B (zh) * 2010-11-25 2012-02-08 西安理工大学 双轴直线移动微驱动装置
US9065358B2 (en) * 2011-07-11 2015-06-23 Taiwan Semiconductor Manufacturing Company, Ltd. MEMS structure and method of forming same
JP2014143533A (ja) * 2013-01-23 2014-08-07 Nippon Dempa Kogyo Co Ltd 共振子及び発振器
US9809448B2 (en) 2013-03-13 2017-11-07 Invensense, Inc. Systems and apparatus having MEMS acoustic sensors and other MEMS sensors and methods of fabrication of the same
US8692340B1 (en) * 2013-03-13 2014-04-08 Invensense, Inc. MEMS acoustic sensor with integrated back cavity
DE102013209238B4 (de) * 2013-05-17 2017-10-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. MEMS-Struktur und Verfahren zum Herstellen derselben
KR101599968B1 (ko) * 2014-03-25 2016-03-08 포항공과대학교 산학협력단 광음향 단층 촬영을 위한 스캐너 및 그에 따른 광음향 단층 촬영장치
JP6343994B2 (ja) * 2014-03-25 2018-06-20 セイコーエプソン株式会社 光スキャナー、画像表示装置およびヘッドマウントディスプレイ
DE102014211338A1 (de) * 2014-06-13 2015-12-17 Robert Bosch Gmbh Mikrospiegelanordnung und projektionseinrichtung
JP2016059191A (ja) * 2014-09-11 2016-04-21 ソニー株式会社 静電型デバイス
US9920874B2 (en) 2015-07-30 2018-03-20 Nec Corporation Linkage rod including limited-displacement flexible mechanism
US10161561B2 (en) 2015-07-30 2018-12-25 Nec Corporation Linkage rod including limited-displacement flexible mechanism
US10322925B2 (en) * 2015-12-30 2019-06-18 Mems Drive, Inc. Shock caging features for MEMS actuator structures
US10196259B2 (en) 2015-12-30 2019-02-05 Mems Drive, Inc. MEMS actuator structures resistant to shock
US10384929B2 (en) 2016-03-22 2019-08-20 Murata Manufacturing Co., Ltd. Impact element for a sensor device and a manufacturing method
JP2019522570A (ja) 2016-05-26 2019-08-15 メムズ ドライブ インク． Ｍｅｍｓアクチュエータ構造の為の衝撃ケージング機構
DE102017215575A1 (de) * 2017-09-05 2019-03-07 Robert Bosch Gmbh Mikromechanische Vorrichtung
CN107942509B (zh) * 2017-12-11 2020-06-12 无锡英菲感知技术有限公司 一种具有分布式弹性结构的微镜
JP7089157B2 (ja) * 2018-03-02 2022-06-22 ミツミ電機株式会社 アクチュエータ及び光走査装置
JP2019212992A (ja) * 2018-05-31 2019-12-12 キヤノン株式会社 静電容量型トランスデューサ、及びその製造方法
KR102032287B1 (ko) * 2018-11-07 2019-10-15 고려오트론(주) 고정 전극용 스페이서부를 구비하는 정전 구동기 및 그를 갖는 광 스캐너
WO2020096125A1 (ko) * 2018-11-07 2020-05-14 고려오트론(주) 리프트 방식의 정전 구동기 및 그를 갖는 광 스캐너
WO2020101110A1 (ko) * 2018-11-14 2020-05-22 고려오트론(주) 스페이서부를 구비하는 광 스캐너
JP2021021676A (ja) 2019-07-30 2021-02-18 セイコーエプソン株式会社 慣性センサー、電子機器および移動体
KR102055129B1 (ko) * 2019-10-07 2019-12-12 고려오트론(주) 고정 전극용 스페이서부를 구비하는 정전 구동기 및 그를 갖는 광 스캐너
US12007554B2 (en) * 2020-01-30 2024-06-11 Lumentum Operations Llc Self-aligned vertical comb drive assembly
US11668925B2 (en) * 2020-03-25 2023-06-06 Compertum Microsystems Inc. MEMS micro-mirror device with stopper and method of making same
CN113460956B (zh) * 2020-03-30 2024-05-24 绍兴中芯集成电路制造股份有限公司 Mems器件及其形成方法
US12007555B2 (en) * 2020-06-18 2024-06-11 Lumentum Operations Llc MEMS device with a dual hinge structure

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Also Published As

Publication number Publication date
CN102067433A (zh) 2011-05-18
US20110188104A1 (en) 2011-08-04
SG189737A1 (en) 2013-05-31
EP2299584A1 (de) 2011-03-23
WO2009157509A1 (ja) 2009-12-30
DE09770219T1 (de) 2012-09-06
EP2299584A4 (de) 2014-10-08
KR20110013520A (ko) 2011-02-09
SG189738A1 (en) 2013-05-31
KR101183915B1 (ko) 2012-09-21

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