JP5032741B2 - ３次元形状測定方法及び３次元形状測定装置 - Google Patents

３次元形状測定方法及び３次元形状測定装置 Download PDF

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Publication number
JP5032741B2
JP5032741B2 JP2004333500A JP2004333500A JP5032741B2 JP 5032741 B2 JP5032741 B2 JP 5032741B2 JP 2004333500 A JP2004333500 A JP 2004333500A JP 2004333500 A JP2004333500 A JP 2004333500A JP 5032741 B2 JP5032741 B2 JP 5032741B2
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probe
axis
shape
measured
moving
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JP2005172810A (ja
JP2005172810A5 (enExample
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宏史 小林
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Olympus Corp
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Olympus Corp
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  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2004333500A 2003-11-18 2004-11-17 ３次元形状測定方法及び３次元形状測定装置 Expired - Fee Related JP5032741B2 (ja)

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JP2004333500A JP5032741B2 (ja) 2003-11-18 2004-11-17 ３次元形状測定方法及び３次元形状測定装置

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JP2003388149 2003-11-18
JP2003388149 2003-11-18
JP2004333500A JP5032741B2 (ja) 2003-11-18 2004-11-17 ３次元形状測定方法及び３次元形状測定装置

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JP2005172810A JP2005172810A (ja) 2005-06-30
JP2005172810A5 JP2005172810A5 (enExample) 2008-01-10
JP5032741B2 true JP5032741B2 (ja) 2012-09-26

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103890535A (zh) * 2011-10-19 2014-06-25 斯比特机械部件有限及两合公司 用于测量三维物体的方法

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5322402B2 (ja) * 2007-05-21 2013-10-23 株式会社東京精密 形状測定装置及び形状測定方法
JP4480769B2 (ja) * 2008-01-11 2010-06-16 パナソニック株式会社 形状測定方法
JP4705142B2 (ja) 2008-10-10 2011-06-22 パナソニック株式会社 ３次元形状測定方法
JP2011145303A (ja) * 2011-03-23 2011-07-28 Nikon Corp 形状測定装置
JP6107212B2 (ja) * 2013-02-20 2017-04-05 日本精工株式会社 物品の形状測定方法及び測定装置
CN110142518B (zh) * 2019-05-21 2020-11-13 奔腾激光(温州)有限公司 一种用于激光切割的旋转中心精度的检测方法及其调节装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63128219A (ja) * 1986-11-18 1988-05-31 Matsushita Electric Ind Co Ltd 非球面形状測定機
JPH1151624A (ja) * 1997-08-04 1999-02-26 Canon Inc 面形状測定装置
JPH11211426A (ja) * 1998-01-29 1999-08-06 Fuji Xerox Co Ltd 面形状測定装置
DE10019962B4 (de) * 1999-04-22 2006-08-17 Linos Photonics Gmbh & Co. Kg Verfahren und eine Vorrichtung zur Messung von Flächen, insbesondere zur Messung von sphärischen und von asphärischen Flächen
JP2003039282A (ja) * 2001-07-30 2003-02-12 Sharp Corp 自由曲面加工装置および自由曲面加工方法
TW550375B (en) * 2001-09-07 2003-09-01 Olympus Optical Co Apparatus for measuring a surface profile

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103890535A (zh) * 2011-10-19 2014-06-25 斯比特机械部件有限及两合公司 用于测量三维物体的方法
CN103890535B (zh) * 2011-10-19 2018-02-27 斯比特机械部件有限及两合公司 用于测量三维物体的方法

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