JP5031153B2 - 積層電気−機械エネルギー変換素子および振動波駆動装置 - Google Patents

積層電気−機械エネルギー変換素子および振動波駆動装置 Download PDF

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Publication number
JP5031153B2
JP5031153B2 JP2001232254A JP2001232254A JP5031153B2 JP 5031153 B2 JP5031153 B2 JP 5031153B2 JP 2001232254 A JP2001232254 A JP 2001232254A JP 2001232254 A JP2001232254 A JP 2001232254A JP 5031153 B2 JP5031153 B2 JP 5031153B2
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Prior art keywords
electrode
mechanical energy
energy conversion
vibration wave
conversion element
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Japanese (ja)
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JP2003046156A (ja
JP2003046156A5 (enExample
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裕 丸山
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Canon Inc
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Canon Inc
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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2001232254A 2001-07-31 2001-07-31 積層電気−機械エネルギー変換素子および振動波駆動装置 Expired - Fee Related JP5031153B2 (ja)

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JP2001232254A JP5031153B2 (ja) 2001-07-31 2001-07-31 積層電気−機械エネルギー変換素子および振動波駆動装置

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JP2001232254A JP5031153B2 (ja) 2001-07-31 2001-07-31 積層電気−機械エネルギー変換素子および振動波駆動装置

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JP2003046156A JP2003046156A (ja) 2003-02-14
JP2003046156A5 JP2003046156A5 (enExample) 2008-09-18
JP5031153B2 true JP5031153B2 (ja) 2012-09-19

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JP2001232254A Expired - Fee Related JP5031153B2 (ja) 2001-07-31 2001-07-31 積層電気−機械エネルギー変換素子および振動波駆動装置

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4576185B2 (ja) * 2004-09-22 2010-11-04 オリンパス株式会社 超音波振動子
JP4829495B2 (ja) * 2004-12-21 2011-12-07 キヤノン株式会社 振動波駆動装置
JP2006186099A (ja) * 2004-12-27 2006-07-13 Canon Inc 積層圧電素子及び振動波駆動装置
JP5074674B2 (ja) * 2005-07-04 2012-11-14 キヤノン株式会社 積層圧電素子および振動波モータ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3170634B2 (ja) * 1993-12-01 2001-05-28 キヤノン株式会社 超音波振動子及び超音波駆動装置
JP3402816B2 (ja) * 1994-12-22 2003-05-06 キヤノン株式会社 超音波モータの駆動回路
JP3432321B2 (ja) * 1995-01-31 2003-08-04 太平洋セメント株式会社 積層セラミックス圧電体素子
JP3867823B2 (ja) * 1998-03-13 2007-01-17 キヤノン株式会社 積層圧電素子の製造方法
JPH11252956A (ja) * 1998-03-02 1999-09-17 Star Micronics Co Ltd 積層型圧電素子とこれを用いた超音波モータ

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