JP5013478B2 - 印字ヘッドモジュール - Google Patents
印字ヘッドモジュール Download PDFInfo
- Publication number
- JP5013478B2 JP5013478B2 JP2007546946A JP2007546946A JP5013478B2 JP 5013478 B2 JP5013478 B2 JP 5013478B2 JP 2007546946 A JP2007546946 A JP 2007546946A JP 2007546946 A JP2007546946 A JP 2007546946A JP 5013478 B2 JP5013478 B2 JP 5013478B2
- Authority
- JP
- Japan
- Prior art keywords
- nozzle plate
- pumping chamber
- printhead
- nozzle
- print head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000007788 liquid Substances 0.000 claims abstract description 37
- 238000005086 pumping Methods 0.000 claims description 106
- 238000007639 printing Methods 0.000 claims description 52
- 239000012530 fluid Substances 0.000 claims description 51
- 239000000463 material Substances 0.000 claims description 25
- 238000004891 communication Methods 0.000 claims description 24
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 90
- 239000000758 substrate Substances 0.000 description 40
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 33
- 229910052710 silicon Inorganic materials 0.000 description 33
- 239000010703 silicon Substances 0.000 description 33
- 238000000034 method Methods 0.000 description 27
- 238000004519 manufacturing process Methods 0.000 description 23
- 230000008569 process Effects 0.000 description 22
- 229910052751 metal Inorganic materials 0.000 description 13
- 239000002184 metal Substances 0.000 description 13
- 229920002120 photoresistant polymer Polymers 0.000 description 12
- 238000005530 etching Methods 0.000 description 9
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 7
- 239000004020 conductor Substances 0.000 description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 238000001020 plasma etching Methods 0.000 description 4
- 239000002318 adhesion promoter Substances 0.000 description 3
- 238000000708 deep reactive-ion etching Methods 0.000 description 3
- 229910001120 nichrome Inorganic materials 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- MAKDTFFYCIMFQP-UHFFFAOYSA-N titanium tungsten Chemical compound [Ti].[W] MAKDTFFYCIMFQP-UHFFFAOYSA-N 0.000 description 3
- 241000252506 Characiformes Species 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- RILZRCJGXSFXNE-UHFFFAOYSA-N 2-[4-(trifluoromethoxy)phenyl]ethanol Chemical compound OCCC1=CC=C(OC(F)(F)F)C=C1 RILZRCJGXSFXNE-UHFFFAOYSA-N 0.000 description 1
- 238000009623 Bosch process Methods 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical class OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- -1 for example Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910001338 liquidmetal Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000003134 recirculating effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/17—Ink jet characterised by ink handling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/145—Arrangement thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/17—Ink jet characterised by ink handling
- B41J2/175—Ink supply systems ; Circuit parts therefor
- B41J2/17503—Ink cartridges
- B41J2/17553—Outer structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14362—Assembling elements of heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/1437—Back shooter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14403—Structure thereof only for on-demand ink jet heads including a filter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14419—Manifold
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14491—Electrical connection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/20—Modules
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Ink Jet (AREA)
- Recording Measured Values (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US63725404P | 2004-12-17 | 2004-12-17 | |
| US60/637,254 | 2004-12-17 | ||
| US69913405P | 2005-07-13 | 2005-07-13 | |
| US60/699,134 | 2005-07-13 | ||
| PCT/US2005/045672 WO2006066102A1 (en) | 2004-12-17 | 2005-12-16 | Printhead module |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008524031A JP2008524031A (ja) | 2008-07-10 |
| JP2008524031A5 JP2008524031A5 (enExample) | 2009-01-22 |
| JP5013478B2 true JP5013478B2 (ja) | 2012-08-29 |
Family
ID=36177858
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007546946A Expired - Fee Related JP5013478B2 (ja) | 2004-12-17 | 2005-12-16 | 印字ヘッドモジュール |
| JP2007547001A Expired - Lifetime JP4767262B2 (ja) | 2004-12-17 | 2005-12-16 | 使い捨てドロップレット排出モジュール |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007547001A Expired - Lifetime JP4767262B2 (ja) | 2004-12-17 | 2005-12-16 | 使い捨てドロップレット排出モジュール |
Country Status (8)
| Country | Link |
|---|---|
| US (3) | US7631962B2 (enExample) |
| EP (2) | EP1848592B1 (enExample) |
| JP (2) | JP5013478B2 (enExample) |
| KR (2) | KR101274631B1 (enExample) |
| CN (1) | CN101927603B (enExample) |
| AT (2) | ATE526167T1 (enExample) |
| TW (2) | TWI343323B (enExample) |
| WO (2) | WO2006066102A1 (enExample) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI343323B (en) * | 2004-12-17 | 2011-06-11 | Fujifilm Dimatix Inc | Printhead module |
| EP1907212B1 (en) * | 2005-07-13 | 2012-10-24 | Fujifilm Dimatix, Inc. | Method and apparatus for scalable droplet ejection manufacturing |
| KR101153562B1 (ko) * | 2006-01-26 | 2012-06-11 | 삼성전기주식회사 | 압전 방식의 잉크젯 프린트헤드 및 그 제조방법 |
| JP2008062568A (ja) * | 2006-09-08 | 2008-03-21 | Seiko Epson Corp | 液体噴射ヘッドのアライメント治具及びアライメント装置 |
| US8236187B2 (en) * | 2006-12-22 | 2012-08-07 | Telecom Italia S.P.A. | Ink-jet printhead manufacturing process |
| JP2008179039A (ja) * | 2007-01-24 | 2008-08-07 | Canon Inc | 液体吐出ヘッド及び液体吐出ヘッドの製造方法 |
| US8056999B2 (en) * | 2007-01-31 | 2011-11-15 | Fujifilm Dimatix, Inc. | Printer with configurable memory |
| US8579412B2 (en) | 2008-05-22 | 2013-11-12 | Fujifilm Corporation | Actuatable device with die and integrated circuit element |
| WO2010039343A1 (en) * | 2008-09-30 | 2010-04-08 | Fujifilm Corporation | Method for nozzle velocity control |
| JP2012504072A (ja) * | 2008-09-30 | 2012-02-16 | フジフィルム ディマティックス, インコーポレイテッド | ノズル流過速度の制御 |
| JP5851677B2 (ja) | 2009-08-12 | 2016-02-03 | ローム株式会社 | インクジェットプリンタヘッド |
| US8303076B2 (en) * | 2009-11-04 | 2012-11-06 | Xerox Corporation | Solid ink jet printhead having a polymer layer and processes therefor |
| US8454132B2 (en) * | 2009-12-14 | 2013-06-04 | Fujifilm Corporation | Moisture protection of fluid ejector |
| WO2012072435A1 (en) | 2010-11-30 | 2012-06-07 | Oce-Technologies B.V. | Ink jet print head with piezoelectric actuator |
| US8517522B2 (en) | 2011-02-07 | 2013-08-27 | Fujifilm Dimatix, Inc. | Fluid circulation |
| DE102012002414A1 (de) * | 2012-02-09 | 2013-08-14 | Peiker Acustic Gmbh & Co. Kg | Fahrzeug mit einer mehrschichtig aufgebauten Dachkonstruktion und einer in die Dachkonstruktion integrierten Mikrofoneinheit |
| WO2014003772A1 (en) * | 2012-06-29 | 2014-01-03 | Hewlett-Packard Development Company, L.P. | Fabricating a fluid ejection device |
| US20140307032A1 (en) * | 2013-04-10 | 2014-10-16 | Yonglin Xie | Membrane mems actuator including fluidic impedance structure |
| US9211712B2 (en) * | 2013-12-27 | 2015-12-15 | Palo Alto Research Center Incorporated | Injection molded ink jet modules |
| EP2987636B1 (en) | 2014-08-20 | 2021-03-03 | Canon Production Printing Netherlands B.V. | Droplet generating device |
| US10406811B2 (en) | 2016-12-19 | 2019-09-10 | Fujifilm Dimatix, Inc. | Actuators for fluid delivery systems |
| US10052875B1 (en) * | 2017-02-23 | 2018-08-21 | Fujifilm Dimatix, Inc. | Reducing size variations in funnel nozzles |
| WO2019013792A1 (en) | 2017-07-13 | 2019-01-17 | Hewlett-Packard Development Company, L.P. | Fluidic die |
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-
2005
- 2005-12-15 TW TW094144548A patent/TWI343323B/zh not_active IP Right Cessation
- 2005-12-16 TW TW094144867A patent/TWI353929B/zh active
- 2005-12-16 JP JP2007546946A patent/JP5013478B2/ja not_active Expired - Fee Related
- 2005-12-16 EP EP05854400A patent/EP1848592B1/en not_active Expired - Lifetime
- 2005-12-16 US US11/305,824 patent/US7631962B2/en active Active
- 2005-12-16 WO PCT/US2005/045672 patent/WO2006066102A1/en not_active Ceased
- 2005-12-16 JP JP2007547001A patent/JP4767262B2/ja not_active Expired - Lifetime
- 2005-12-16 AT AT05854400T patent/ATE526167T1/de not_active IP Right Cessation
- 2005-12-16 WO PCT/US2005/045919 patent/WO2006066201A1/en not_active Ceased
- 2005-12-16 CN CN2010102425633A patent/CN101927603B/zh not_active Expired - Fee Related
- 2005-12-16 KR KR1020077015749A patent/KR101274631B1/ko not_active Expired - Fee Related
- 2005-12-16 KR KR1020077016293A patent/KR101340633B1/ko not_active Expired - Fee Related
- 2005-12-16 AT AT05854598T patent/ATE546290T1/de active
- 2005-12-16 US US11/303,743 patent/US7494209B2/en active Active
- 2005-12-16 EP EP05854598A patent/EP1831026B1/en not_active Expired - Lifetime
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2009
- 2009-01-22 US US12/357,677 patent/US20090122118A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| EP1831026A1 (en) | 2007-09-12 |
| JP4767262B2 (ja) | 2011-09-07 |
| ATE546290T1 (de) | 2012-03-15 |
| KR20070087658A (ko) | 2007-08-28 |
| JP2008524031A (ja) | 2008-07-10 |
| WO2006066102A1 (en) | 2006-06-22 |
| HK1127578A1 (en) | 2009-10-02 |
| TW200628319A (en) | 2006-08-16 |
| HK1147974A1 (en) | 2011-08-26 |
| EP1831026B1 (en) | 2012-02-22 |
| TWI353929B (en) | 2011-12-11 |
| CN101927603A (zh) | 2010-12-29 |
| EP1848592B1 (en) | 2011-09-28 |
| EP1848592A1 (en) | 2007-10-31 |
| US7631962B2 (en) | 2009-12-15 |
| US20060158489A1 (en) | 2006-07-20 |
| JP2008524032A (ja) | 2008-07-10 |
| KR101274631B1 (ko) | 2013-06-13 |
| CN101927603B (zh) | 2012-03-28 |
| US20060158486A1 (en) | 2006-07-20 |
| TW200630233A (en) | 2006-09-01 |
| KR20070087010A (ko) | 2007-08-27 |
| US20090122118A1 (en) | 2009-05-14 |
| ATE526167T1 (de) | 2011-10-15 |
| US7494209B2 (en) | 2009-02-24 |
| WO2006066201A1 (en) | 2006-06-22 |
| KR101340633B1 (ko) | 2013-12-11 |
| TWI343323B (en) | 2011-06-11 |
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