JP5007846B2 - 化学増幅ネガ型レジスト組成物及びパターン形成方法 - Google Patents

化学増幅ネガ型レジスト組成物及びパターン形成方法 Download PDF

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Publication number
JP5007846B2
JP5007846B2 JP2010041472A JP2010041472A JP5007846B2 JP 5007846 B2 JP5007846 B2 JP 5007846B2 JP 2010041472 A JP2010041472 A JP 2010041472A JP 2010041472 A JP2010041472 A JP 2010041472A JP 5007846 B2 JP5007846 B2 JP 5007846B2
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group
carbon atoms
general formula
resist composition
repeating unit
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Japanese (ja)
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JP2011180185A (ja
JP2011180185A5 (https=
Inventor
恵一 増永
聡 渡邉
畠山　　潤
洋一 大澤
大将 土門
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Shin Etsu Chemical Co Ltd
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Shin Etsu Chemical Co Ltd
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Priority to JP2010041472A priority Critical patent/JP5007846B2/ja
Priority to US13/033,647 priority patent/US8859181B2/en
Priority to EP11001591A priority patent/EP2362267B1/en
Priority to CN201110141668.4A priority patent/CN102253600B/zh
Priority to TW100106397A priority patent/TWI446113B/zh
Priority to KR1020110016896A priority patent/KR101623604B1/ko
Publication of JP2011180185A publication Critical patent/JP2011180185A/ja
Publication of JP2011180185A5 publication Critical patent/JP2011180185A5/ja
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0382—Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/106—Binder containing
    • Y10S430/11—Vinyl alcohol polymer or derivative
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/106—Binder containing
    • Y10S430/111—Polymer of unsaturated acid or ester

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
JP2010041472A 2010-02-26 2010-02-26 化学増幅ネガ型レジスト組成物及びパターン形成方法 Active JP5007846B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2010041472A JP5007846B2 (ja) 2010-02-26 2010-02-26 化学増幅ネガ型レジスト組成物及びパターン形成方法
US13/033,647 US8859181B2 (en) 2010-02-26 2011-02-24 Chemically amplified negative resist composition and patterning process
CN201110141668.4A CN102253600B (zh) 2010-02-26 2011-02-25 化学放大负性抗蚀剂组合物和图案形成方法
TW100106397A TWI446113B (zh) 2010-02-26 2011-02-25 化學增幅負型光阻組成物及圖型之形成方法
EP11001591A EP2362267B1 (en) 2010-02-26 2011-02-25 Chemically amplified negative resist composition and patterning process
KR1020110016896A KR101623604B1 (ko) 2010-02-26 2011-02-25 화학 증폭 네가티브형 레지스트 조성물 및 패턴 형성 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010041472A JP5007846B2 (ja) 2010-02-26 2010-02-26 化学増幅ネガ型レジスト組成物及びパターン形成方法

Publications (3)

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JP2011180185A JP2011180185A (ja) 2011-09-15
JP2011180185A5 JP2011180185A5 (https=) 2011-10-27
JP5007846B2 true JP5007846B2 (ja) 2012-08-22

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Country Link
US (1) US8859181B2 (https=)
EP (1) EP2362267B1 (https=)
JP (1) JP5007846B2 (https=)
KR (1) KR101623604B1 (https=)
CN (1) CN102253600B (https=)
TW (1) TWI446113B (https=)

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JP2017132827A (ja) * 2016-01-25 2017-08-03 信越化学工業株式会社 高分子化合物、ネガ型レジスト組成物、積層体、パターン形成方法、及び化合物

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JP5703197B2 (ja) * 2011-01-18 2015-04-15 富士フイルム株式会社 化学増幅型レジスト組成物、それを用いたレジスト膜、レジスト塗布マスクブランクス、レジストパターン形成方法、及び、フォトマスク、並びに、高分子化合物
JP5365651B2 (ja) * 2011-02-28 2013-12-11 信越化学工業株式会社 化学増幅ネガ型レジスト組成物及びパターン形成方法
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JP6059675B2 (ja) * 2014-03-24 2017-01-11 信越化学工業株式会社 化学増幅型ネガ型レジスト組成物及びレジストパターン形成方法
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JP6451469B2 (ja) * 2015-04-07 2019-01-16 信越化学工業株式会社 フォトマスクブランク、レジストパターン形成方法、及びフォトマスクの製造方法
JP6531684B2 (ja) * 2015-04-13 2019-06-19 信越化学工業株式会社 新規オニウム塩化合物を用いた化学増幅型ネガ型レジスト組成物及びレジストパターン形成方法
JP6743781B2 (ja) * 2016-08-08 2020-08-19 信越化学工業株式会社 レジスト材料及びパターン形成方法
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017132827A (ja) * 2016-01-25 2017-08-03 信越化学工業株式会社 高分子化合物、ネガ型レジスト組成物、積層体、パターン形成方法、及び化合物

Also Published As

Publication number Publication date
JP2011180185A (ja) 2011-09-15
KR101623604B1 (ko) 2016-05-23
EP2362267A1 (en) 2011-08-31
CN102253600A (zh) 2011-11-23
KR20110098663A (ko) 2011-09-01
US8859181B2 (en) 2014-10-14
US20110212390A1 (en) 2011-09-01
TWI446113B (zh) 2014-07-21
CN102253600B (zh) 2014-09-24
TW201142503A (en) 2011-12-01
EP2362267B1 (en) 2013-01-23

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