JP4971595B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP4971595B2 JP4971595B2 JP2005072600A JP2005072600A JP4971595B2 JP 4971595 B2 JP4971595 B2 JP 4971595B2 JP 2005072600 A JP2005072600 A JP 2005072600A JP 2005072600 A JP2005072600 A JP 2005072600A JP 4971595 B2 JP4971595 B2 JP 4971595B2
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- trench
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- 239000004065 semiconductor Substances 0.000 title claims description 85
- 239000000758 substrate Substances 0.000 claims description 18
- 239000012535 impurity Substances 0.000 claims description 17
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- 239000010410 layer Substances 0.000 description 74
- 238000009792 diffusion process Methods 0.000 description 37
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 15
- 229910052710 silicon Inorganic materials 0.000 description 15
- 239000010703 silicon Substances 0.000 description 15
- 238000004519 manufacturing process Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 8
- 229910052760 oxygen Inorganic materials 0.000 description 8
- 239000001301 oxygen Substances 0.000 description 8
- 239000011229 interlayer Substances 0.000 description 7
- -1 oxygen ions Chemical class 0.000 description 6
- 238000002513 implantation Methods 0.000 description 5
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 230000003071 parasitic effect Effects 0.000 description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 5
- 229920005591 polysilicon Polymers 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
- H01L21/26533—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically inactive species in silicon to make buried insulating layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0642—Isolation within the component, i.e. internal isolation
- H01L29/0649—Dielectric regions, e.g. SiO2 regions, air gaps
- H01L29/0653—Dielectric regions, e.g. SiO2 regions, air gaps adjoining the input or output region of a field-effect device, e.g. the source or drain region
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66674—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/66712—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/66734—Vertical DMOS transistors, i.e. VDMOS transistors with a step of recessing the gate electrode, e.g. to form a trench gate electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/0843—Source or drain regions of field-effect devices
- H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate
- H01L29/0852—Source or drain regions of field-effect devices of field-effect transistors with insulated gate of DMOS transistors
- H01L29/0873—Drain regions
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- High Energy & Nuclear Physics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Description
まず、本発明の実施の形態1にかかる半導体装置について説明する。本実施形態にかかる半導体装置は、トレンチ(ゲート電極)の下方に、ゲート酸化膜(トレンチ底面)と離間して形成された埋め込み酸化膜を有することを特徴としている。
発明の実施の形態2.
102 ソース電極
103 ゲート電極
103a トレンチ
104 ゲート酸化膜
105 チャネル領域
106 ソースコンタクト
107 ソース拡散層
108 バックゲート拡散層
109 ベース拡散層
110 ドレイン電極
111 シリコン基板
112 埋め込み酸化膜
113 エピタキシャル層
Claims (7)
- 第1導電型の半導体層と、
前記半導体層の上に形成された第2導電型のチャネル形成領域と、
前記チャネル形成領域の表面から前記半導体層に達するトレンチと、
前記トレンチ内面を被覆するゲート絶縁膜と、
前記トレンチ内部に埋め込まれたゲート電極と、
前記ゲート電極の直下のみの前記半導体層内に、前記半導体層を介在して前記ゲート絶縁膜と離間するように形成された埋め込み絶縁膜とを有する、
半導体装置。 - 前記埋め込み絶縁膜の誘電率は、前記半導体層よりも低い、
請求項1に記載の半導体装置。 - 前記埋め込み絶縁膜の底面の形状は、前記埋め込み絶縁膜の中心が前記半導体層の底面に対して近くなるような三角状または曲線状の形状である、
請求項1又は2に記載の半導体装置。 - 前記埋め込み絶縁膜の底面の形状は、前記トレンチの底面の形状と同じ形状である、
請求項1乃至3のいずれか一つに記載の半導体装置。 - 前記埋め込み絶縁膜の端部は、前記トレンチに向かって上方に湾曲している、
請求項1乃至4のいずれか一つに記載の半導体装置。 - 前記埋め込み絶縁膜は、深さ方向にそれぞれ離間して形成された複数の絶縁膜を有しており、前記複数の絶縁膜の間には前記半導体層を介在している、
請求項1乃至5のいずれか一つに記載の半導体装置。 - 前記半導体層は、半導体基板と、前記半導体基板上に形成され、前記半導体基板よりも不純物濃度の低いエピタキシャル層とを有し、
前記埋め込み絶縁膜は、前記エピタキシャル層に形成されている、
請求項1乃至6のいずれか一つに記載の半導体装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005072600A JP4971595B2 (ja) | 2005-03-15 | 2005-03-15 | 半導体装置 |
US11/365,871 US7652327B2 (en) | 2005-03-15 | 2006-03-02 | Semiconductor device and manufacturing method for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005072600A JP4971595B2 (ja) | 2005-03-15 | 2005-03-15 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006261184A JP2006261184A (ja) | 2006-09-28 |
JP4971595B2 true JP4971595B2 (ja) | 2012-07-11 |
Family
ID=37009415
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005072600A Expired - Fee Related JP4971595B2 (ja) | 2005-03-15 | 2005-03-15 | 半導体装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US7652327B2 (ja) |
JP (1) | JP4971595B2 (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7285480B1 (en) * | 2006-04-07 | 2007-10-23 | International Business Machines Corporation | Integrated circuit chip with FETs having mixed body thicknesses and method of manufacture thereof |
US20080054951A1 (en) * | 2006-09-01 | 2008-03-06 | Bhajan Singh | Track and hold circuit |
JP4564514B2 (ja) * | 2007-05-18 | 2010-10-20 | 株式会社東芝 | 半導体装置 |
JP5767430B2 (ja) * | 2007-08-10 | 2015-08-19 | ローム株式会社 | 半導体装置および半導体装置の製造方法 |
JP4256901B1 (ja) * | 2007-12-21 | 2009-04-22 | 株式会社豊田中央研究所 | 半導体装置 |
JP5386120B2 (ja) * | 2008-07-15 | 2014-01-15 | ローム株式会社 | 半導体装置および半導体装置の製造方法 |
JP5317560B2 (ja) * | 2008-07-16 | 2013-10-16 | 株式会社東芝 | 電力用半導体装置 |
DE112009005299B4 (de) | 2009-10-01 | 2015-08-06 | Toyota Jidosha Kabushiki Kaisha | Halbleitervorrichtung |
US10522549B2 (en) * | 2018-02-17 | 2019-12-31 | Varian Semiconductor Equipment Associates, Inc. | Uniform gate dielectric for DRAM device |
EP3742476A1 (en) * | 2019-05-20 | 2020-11-25 | Infineon Technologies AG | Method of implanting an implant species into a substrate at different depths |
JP7470075B2 (ja) | 2021-03-10 | 2024-04-17 | 株式会社東芝 | 半導体装置 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1179853A1 (en) * | 1994-09-16 | 2002-02-13 | Kabushiki Kaisha Toshiba | High breakdown voltage semiconductor device |
US5894149A (en) * | 1996-04-11 | 1999-04-13 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device having high breakdown voltage and method of manufacturing the same |
JPH09331063A (ja) * | 1996-04-11 | 1997-12-22 | Mitsubishi Electric Corp | 高耐圧半導体装置およびその製造方法 |
JP3280232B2 (ja) * | 1996-05-30 | 2002-04-30 | 日本碍子株式会社 | 半導体装置 |
JP5116910B2 (ja) * | 1999-02-23 | 2013-01-09 | パナソニック株式会社 | 絶縁ゲート型半導体素子の製造方法 |
US6433385B1 (en) * | 1999-05-19 | 2002-08-13 | Fairchild Semiconductor Corporation | MOS-gated power device having segmented trench and extended doping zone and process for forming same |
JP3518427B2 (ja) * | 1999-07-01 | 2004-04-12 | トヨタ自動車株式会社 | 半導体装置 |
US7012005B2 (en) | 2002-06-25 | 2006-03-14 | Siliconix Incorporated | Self-aligned differential oxidation in trenches by ion implantation |
JP4202149B2 (ja) * | 2003-01-28 | 2008-12-24 | ローム株式会社 | 半導体装置およびその製造方法 |
TWI241012B (en) * | 2004-06-25 | 2005-10-01 | Mosel Vitelic Inc | Method of manufacturing power device |
JP2006066611A (ja) * | 2004-08-26 | 2006-03-09 | Toshiba Corp | 半導体装置 |
-
2005
- 2005-03-15 JP JP2005072600A patent/JP4971595B2/ja not_active Expired - Fee Related
-
2006
- 2006-03-02 US US11/365,871 patent/US7652327B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US7652327B2 (en) | 2010-01-26 |
US20060208314A1 (en) | 2006-09-21 |
JP2006261184A (ja) | 2006-09-28 |
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