JP4968116B2 - 垂直磁気記録媒体 - Google Patents
垂直磁気記録媒体 Download PDFInfo
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- JP4968116B2 JP4968116B2 JP2008054001A JP2008054001A JP4968116B2 JP 4968116 B2 JP4968116 B2 JP 4968116B2 JP 2008054001 A JP2008054001 A JP 2008054001A JP 2008054001 A JP2008054001 A JP 2008054001A JP 4968116 B2 JP4968116 B2 JP 4968116B2
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- 230000005291 magnetic effect Effects 0.000 title claims description 136
- 239000010410 layer Substances 0.000 claims description 231
- 238000005536 corrosion prevention Methods 0.000 claims description 48
- 239000011241 protective layer Substances 0.000 claims description 40
- 239000000758 substrate Substances 0.000 claims description 25
- 229910045601 alloy Inorganic materials 0.000 claims description 12
- 239000000956 alloy Substances 0.000 claims description 12
- 229910052750 molybdenum Inorganic materials 0.000 claims description 9
- 229910052721 tungsten Inorganic materials 0.000 claims description 9
- 229910052804 chromium Inorganic materials 0.000 claims description 8
- 229910052758 niobium Inorganic materials 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 229910052759 nickel Inorganic materials 0.000 claims description 7
- 229910052715 tantalum Inorganic materials 0.000 claims description 7
- 239000011521 glass Substances 0.000 claims description 6
- 229910052726 zirconium Inorganic materials 0.000 claims description 6
- 229910052742 iron Inorganic materials 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 229910052760 oxygen Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 238000010828 elution Methods 0.000 description 32
- 239000000463 material Substances 0.000 description 31
- 230000000052 comparative effect Effects 0.000 description 30
- 238000000034 method Methods 0.000 description 22
- 239000013078 crystal Substances 0.000 description 16
- 238000001755 magnetron sputter deposition Methods 0.000 description 14
- 230000007797 corrosion Effects 0.000 description 11
- 238000005260 corrosion Methods 0.000 description 11
- 238000006243 chemical reaction Methods 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 229910052799 carbon Inorganic materials 0.000 description 6
- 230000015556 catabolic process Effects 0.000 description 6
- 238000006731 degradation reaction Methods 0.000 description 6
- 230000006866 deterioration Effects 0.000 description 6
- 238000001771 vacuum deposition Methods 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 230000001050 lubricating effect Effects 0.000 description 5
- 229910018979 CoPt Inorganic materials 0.000 description 4
- 238000002003 electron diffraction Methods 0.000 description 4
- 230000005294 ferromagnetic effect Effects 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000010952 cobalt-chrome Substances 0.000 description 3
- 230000005415 magnetization Effects 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 2
- -1 NiCrZr Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000007885 magnetic separation Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000010702 perfluoropolyether Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910001149 41xx steel Inorganic materials 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 229910019932 CrNiMo Inorganic materials 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 241000511976 Hoya Species 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 229910006091 NiCrSi Inorganic materials 0.000 description 1
- 229910052775 Thulium Inorganic materials 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000005345 chemically strengthened glass Substances 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000005341 toughened glass Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
- G11B5/658—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing oxygen, e.g. molecular oxygen or magnetic oxide
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
- G11B5/7369—Two or more non-magnetic underlayers, e.g. seed layers or barrier layers
- G11B5/737—Physical structure of underlayer, e.g. texture
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
- G11B5/7379—Seed layer, e.g. at least one non-magnetic layer is specifically adapted as a seed or seeding layer
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/739—Magnetic recording media substrates
- G11B5/73911—Inorganic substrates
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/739—Magnetic recording media substrates
- G11B5/73911—Inorganic substrates
- G11B5/73917—Metallic substrates, i.e. elemental metal or metal alloy substrates
- G11B5/73919—Aluminium or titanium elemental or alloy substrates
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/739—Magnetic recording media substrates
- G11B5/73911—Inorganic substrates
- G11B5/73921—Glass or ceramic substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- Metallurgy (AREA)
- Ceramic Engineering (AREA)
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Magnetic Record Carriers (AREA)
Description
前記軟磁性層が少なくともCoを含み、
前記シード層がfcc構造もしくはhcp構造を有する結晶質合金からなり、
前記中間層及び前記磁性層がhcp構造を有し、
前記シード層と前記中間層の間に腐食防止層を有し、前記腐食防止層がCr元素と、W、MoまたはTiから選択される元素の少なくとも1種を含み、Cr以外の成分の総量が原子比で40at%以下であり、
前記腐食防止層の膜厚が1.0nm〜0.3nmであることを特徴とする。
非磁性基板102として、直径65mm、板厚0.635mmの化学強化ガラス基板(HOYA社製N−5ガラス基板)を用いた。これを洗浄し、スパッタ装置内に導入後、Co5Zr8Nb(式中の数字は、この数字の後に続く元素の原子%を表し、この例ではZrが5原子%、Nbが8原子%、残部がCoであることを表す。以下、同様である。)ターゲットを用いて、CoZrNb軟磁性裏打ち層104を100nmの膜厚で形成した。引続きNi12Fe8Bターゲットを用いて、シード層106を5nmの膜厚で形成した。続いて、Cr25Mo5Wを用いて腐食防止層108をArガス圧2.0Pa下において0.8nmの膜厚で形成した。続いて、非磁性中間層110をRuターゲットを用いてArガス圧4.0Pa下において12nmの膜厚で形成した。続いて、磁性層112を90モル%(Co8Cr16Pt)−8モル%SiO2ターゲットを用いて、Arガス圧4.0Pa下において膜厚15nmで形成した。引続きカーボン保護層114をCVD法により膜厚2.5nmで形成した後、真空装置から取り出した。これらの成膜は、カーボン保護層を除き、全てDCマグネトロンスパッタリング法により行った。その後、得られた磁気記録媒体上に、パーフルオロポリエーテルからなる液体潤滑層116を、ディップ法により膜厚1.5nmで形成した。以上のようにして作製された垂直磁気記録媒体を実施例1とした。
腐食防止層108を形成しなかった以外は、実施例1と同様にして比較例1の磁気記録媒体を作製した。
保護層114の膜厚を3.5nmとした以外は、比較例1と同様にして比較例2の磁気記録媒体を作製した。
腐食防止層108の膜厚を1.5nmとした以外は、実施例1と同様にして比較例3の磁気記録媒体を作製した。
腐食防止層108の膜厚を0.2nmとした以外は、実施例1と同様にして比較例4の磁気記録媒体を作製した。
シード層106の材料をCr30Moとした以外は、実施例1と同様にして比較例5の磁気記録媒体を作製した。
腐食防止層108の材料をCr50Tiとした以外は、実施例1と同様にして比較例6の磁気記録媒体を作製した。
腐食防止層108の材料をCr30Mo10Tiとした以外は、実施例1と同様にして実施例2の磁気記録媒体を作製した。
腐食防止層108の材料をCr30Mo10Wとした以外は、実施例1と同様にして実施例3の磁気記録媒体を作製した。
シード層106の材料をNi30Crとした以外は、実施例1と同様にして実施例4の磁気記録媒体を作製した。
シード層106の材料をCo30Cr4Fe2Siとした以外は、実施例1と同様にして実施例5の磁気記録媒体を作製した。
非磁性基板にNiPメッキを施したAl合金基板とした以外は、実施例1と同様にして実施例6の磁気記録媒体を作製した。
102 非磁性基板
104 軟磁性裏打ち層
106 シード層
108 腐食防止層
110 非磁性中間層
112 磁性層
114 保護層
116 液体潤滑層
Claims (5)
- 非磁性基板と、前記非磁性基板上に、少なくとも軟磁性層と、前記軟磁性層上のシード層と、前記シード層上の中間層と、前記中間層上の磁性層と、前記磁性層上の保護層を有する垂直磁気記録媒体において、
前記軟磁性層が少なくともCoを含み、
前記シード層がfcc構造もしくはhcp構造を有する結晶質合金からなり、
前記中間層及び前記磁性層がhcp構造を有し、
前記シード層と前記中間層の間に腐食防止層を有し、前記腐食防止層がCr元素と、W、MoまたはTiから選択される元素の少なくとも1種を含み、Cr以外の成分の総量が原子比で40at%以下であり、
前記腐食防止層の膜厚が1.0nm〜0.3nmであることを特徴とする垂直磁気記録媒体。 - 前記シード層は、NiまたはCo元素と、Cr、Ta、W、Fe、Mo、Nb、Zr、SiまたはBから選択される元素の少なくとも1種を含むことを特徴とする請求項1に記載の垂直磁気記録媒体。
- 前記中間層が、Ru元素を含むことを特徴とする請求項1または2に記載の垂直磁気記録媒体。
- 前記磁性層が、Pt、CrおよびOを更に含むことを特徴とする請求項1から3のいずれか1項に記載の垂直磁気記録媒体。
- 前記非磁性基板がガラス、アルミ、シリコンのいずれかであることを特徴とする請求項1から4のいずれか1項に記載の垂直磁気記録媒体。
Priority Applications (2)
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JP2008054001A JP4968116B2 (ja) | 2008-03-04 | 2008-03-04 | 垂直磁気記録媒体 |
US12/396,714 US8883328B2 (en) | 2008-03-04 | 2009-03-03 | Perpendicular magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2008054001A JP4968116B2 (ja) | 2008-03-04 | 2008-03-04 | 垂直磁気記録媒体 |
Publications (2)
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JP2009211764A JP2009211764A (ja) | 2009-09-17 |
JP4968116B2 true JP4968116B2 (ja) | 2012-07-04 |
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JP2008054001A Active JP4968116B2 (ja) | 2008-03-04 | 2008-03-04 | 垂直磁気記録媒体 |
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JP (1) | JP4968116B2 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5443065B2 (ja) * | 2009-06-09 | 2014-03-19 | エイチジーエスティーネザーランドビーブイ | 垂直磁気記録媒体 |
JP2011076683A (ja) * | 2009-09-30 | 2011-04-14 | Wd Media Singapore Pte Ltd | 垂直磁気記録媒体 |
JP5569213B2 (ja) * | 2010-07-26 | 2014-08-13 | 富士電機株式会社 | 垂直磁気記録媒体 |
JP2015130220A (ja) * | 2013-12-06 | 2015-07-16 | 株式会社東芝 | 垂直磁気記録媒体および垂直磁気記録媒体の製造方法 |
US10210895B2 (en) * | 2015-03-19 | 2019-02-19 | Western Digital Technologies, Inc. | Anti-corrosion insulation layer for magnetic recording medium |
KR102451098B1 (ko) | 2015-09-23 | 2022-10-05 | 삼성전자주식회사 | 자기 메모리 장치 및 이의 제조 방법 |
US9934797B2 (en) * | 2016-04-26 | 2018-04-03 | Tdk Corporation | Multilayer element including base multilayer body, magnetic sensor and microwave assisted magnetic head |
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JP2002100036A (ja) | 2000-09-27 | 2002-04-05 | Fujitsu Ltd | 磁性体装置及びその製造方法 |
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JP2006079718A (ja) * | 2004-09-09 | 2006-03-23 | Fuji Electric Device Technology Co Ltd | 垂直磁気記録媒体 |
JP2006244684A (ja) * | 2005-02-04 | 2006-09-14 | Fujitsu Ltd | 磁気記録媒体およびその製造方法、磁気記憶装置 |
US20060269797A1 (en) * | 2005-05-26 | 2006-11-30 | Seagate Technology Llc | Perpendicular magnetic recording media including a uniform exchange enhancement layer |
JP2007035139A (ja) * | 2005-07-26 | 2007-02-08 | Hitachi Global Storage Technologies Netherlands Bv | 垂直磁気記録媒体及び磁気記録再生装置 |
JP4527645B2 (ja) * | 2005-10-17 | 2010-08-18 | ヒタチグローバルストレージテクノロジーズネザーランドビーブイ | 垂直磁気記録媒体 |
JP4499044B2 (ja) | 2006-01-04 | 2010-07-07 | ヒタチグローバルストレージテクノロジーズネザーランドビーブイ | 垂直磁気記録媒体及びこれを用いた磁気記憶装置 |
JP2007257740A (ja) * | 2006-03-23 | 2007-10-04 | Hitachi Global Storage Technologies Netherlands Bv | 磁気記憶装置 |
JP4922648B2 (ja) * | 2006-03-31 | 2012-04-25 | 昭和電工株式会社 | 垂直磁気記録媒体、その製造方法、および磁気記憶装置 |
JP4358208B2 (ja) * | 2006-06-30 | 2009-11-04 | 昭和電工株式会社 | 垂直磁気記録媒体 |
US7662492B2 (en) * | 2007-03-02 | 2010-02-16 | Hitachi Global Storage Techologies Netherlands, B.V. | Perpendicular magnetic recording medium having a multi-layer interlayer that includes BCC material |
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2008
- 2008-03-04 JP JP2008054001A patent/JP4968116B2/ja active Active
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- 2009-03-03 US US12/396,714 patent/US8883328B2/en active Active
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Publication number | Publication date |
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US8883328B2 (en) | 2014-11-11 |
JP2009211764A (ja) | 2009-09-17 |
US20090226765A1 (en) | 2009-09-10 |
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