JP4935404B2 - 電気光学装置用基板及びその製造方法、並びに電気光学装置及び電子機器 - Google Patents
電気光学装置用基板及びその製造方法、並びに電気光学装置及び電子機器 Download PDFInfo
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78618—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure
- H01L29/78621—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure with LDD structure or an extension or an offset region or characterised by the doping profile
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
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- G09G2320/02—Improving the quality of display appearance
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- G09G2320/0214—Crosstalk reduction, i.e. to reduce direct or indirect influences of signals directed to a certain pixel of the displayed image on other pixels of said image, inclusive of influences affecting pixels in different frames or fields or sub-images which constitute a same image, e.g. left and right images of a stereoscopic display with crosstalk due to leakage current of pixel switch in active matrix panels
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- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
- G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
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Description
本実施形態に係る液晶装置の全体構成について、図1及び図2を参照して説明する。ここに、図1は、TFTアレイ基板をその上に形成された各構成要素と共に、対向基板の側から見た液晶装置の概略的な平面図であり、図2は、図1のH−H’断面図である。
以下では、上述した本実施形態に係る液晶装置の製造プロセスについて、図15から図19を参照して説明する。図15及び図16、図18及び図19は、製造プロセスの各工程における図6に示す断面部分の構成を、順を追って示す工程図である。また、図17は、開口部を開口する工程における図8に示す断面部分の構成を示す断面図である。
次に、上述した電気光学装置である液晶装置を各種の電子機器に適用する場合について説明する。ここに図20は、プロジェクタの構成例を示す平面図である。以下では、この液晶装置をライトバルブとして用いたプロジェクタについて説明する。
Claims (10)
- 基板上に、
互いに交差して延びるデータ線及び走査線と、
前記データ線及び前記走査線の交差に対応して規定される画素毎に設けられた画素電極と、
(i)前記画素毎の開口領域を互いに隔てる非開口領域のうち第1方向に沿って延びる第1領域において前記第1方向に沿ったチャネル長を有するチャネル領域と、前記データ線に電気的に接続されたデータ線側ソースドレイン領域と、前記画素電極に電気的に接続された画素電極側ソースドレイン領域と、前記チャネル領域及び前記データ線側ソースドレイン領域間に形成された第1の接合領域と、前記チャネル領域及び前記画素電極側ソースドレイン領域間に形成された第2の接合領域とを有する半導体層、及び(ii)前記半導体層を覆うように配置された絶縁膜における前記チャネル領域に重なる部分に開口された開口部内に前記チャネル領域に対してゲート絶縁膜を介して配置された本体部と、該本体部から前記絶縁膜上に前記第2の接合領域を覆うように延設された延設部とを有するゲート電極を有するトランジスタと
を備え、
前記第2の接合領域は、前記非開口領域のうち前記第1方向に交わる第2方向に沿って延びる第2領域及び前記第1領域が相互に交差する交差領域内に位置する
ことを特徴とする電気光学装置用基板。 - 前記チャネル領域の少なくとも一部は、前記第1領域のうち前記交差領域を除く領域に配置されることを特徴とする請求項1に記載の電気光学装置用基板。
- 前記走査線は、前記延設部と同層において同一膜により一体的に形成されることを特徴とする請求項1又は2に記載の電気光学装置用基板。
- 前記延設部は、前記交差領域において前記データ線と重なるように形成されることを特徴とする請求項1から3のいずれか一項に記載の電気光学装置用基板。
- 前記半導体層より上層側であって前記絶縁膜より下層側に、前記絶縁膜に前記開口部を開口させる際のエッチング処理から前記チャネル領域を保護するために形成された後、前記開口部内に位置する一部が除去されて、前記開口部の周囲に形成された保護膜を備えることを特徴とする請求項1から4のいずれか一項に記載の電気光学装置用基板。
- 請求項1から5のいずれか一項に記載の電気光学装置用基板を備えたことを特徴とする電気光学装置。
- 請求項6に記載の電気光学装置を具備してなることを特徴とする電子機器。
- 基板上に、データ線及び走査線の交差に対応して規定される画素毎の開口領域を互いに隔てる非開口領域のうち第1方向に沿って延びる第1領域において前記第1方向に沿ったチャネル長を有するチャネル領域と、データ線に電気的に接続されるデータ線側ソースドレイン領域と、画素電極に電気的に接続される画素電極側ソースドレイン領域と、前記チャネル領域及び前記データ線側ソースドレイン領域間に形成された第1の接合領域と、前記チャネル領域及び前記画素電極側ソースドレイン領域間に形成された第2の接合領域とを有する半導体層を、前記第2の接合領域が、前記非開口領域のうち前記第1方向に交わる第2方向に沿って延びる第2領域及び前記第1領域が相互に交差する交差領域内に位置するように、形成する工程と、
前記チャネル領域を覆うように保護膜を形成する工程と、
前記保護膜を形成する工程の後に、前記半導体層を覆うように絶縁膜を形成する工程と、
前記絶縁膜における前記チャネル領域に重なる部分に、第1エッチャントを用いたエッチングを施すことにより、前記保護膜を露出させる開口部を開口する工程と、
前記開口部から露出された保護膜に、前記第1エッチャントと異なる第2エッチャントを用いたエッチングを施すことにより、前記チャネル領域を露出させる工程と、
前記開口部内における前記露出されたチャネル領域上にゲート絶縁膜を形成する工程と、
前記開口部内に形成された本体部と該本体部から前記絶縁膜上に前記第2の接合領域を覆うように延設された延設部とを有するようにゲート電極を形成することで、トランジスタを形成する工程と
を含み、
前記第1エッチャントによる前記絶縁膜に対するエッチングレートは、前記第1エッチャントによる前記保護膜に対するエッチングレートよりも大きく、
前記第2エッチャントによる前記保護膜に対するエッチングレートは、前記第2エッチャントによる前記半導体層に対するエッチングレートよりも大きく、
前記第1エッチャントによる前記半導体層に対する前記エッチングレートは、前記第2エッチャントによる前記半導体層に対するエッチングレートよりも大きい
ことを特徴とする電気光学装置用基板の製造方法。 - 前記半導体層を形成する工程は、前記半導体層をシリコンから形成し、
前記保護膜を形成する工程は、前記保護膜をシリコン窒化膜から形成し、
前記絶縁膜を形成する工程は、前記絶縁膜をシリコン酸化膜から形成することを特徴とする請求項8に記載の電気光学装置用基板の製造方法。 - 前記走査線を、前記ゲート電極に電気的に接続するように形成する工程と、
前記データ線を、前記走査線と互いに交差するように且つ前記データ線側ソースドレイン領域に電気的に接続するように形成する工程と、
前記画素電極を、前記画素電極側ソースドレイン領域に電気的に接続するように、前記画素毎に形成する工程と
を含み、
前記データ線を形成する工程及び前記画素電極を形成する工程の少なくとも一方は、前記データ線及び前記画素電極の少なくとも一方を、前記トランジスタより上層側に形成する
ことを特徴とする請求項8又は9に記載の電気光学装置用基板の製造方法。
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KR1020080009153A KR20080076737A (ko) | 2007-02-16 | 2008-01-29 | 전기 광학 장치용 기판 및 그 제조 방법, 그리고 전기 광학장치 및 전자 기기 |
TW097105243A TW200903123A (en) | 2007-02-16 | 2008-02-14 | Electro-optical device substrate, method of manufacturing the same, electro-optical device and electronic apparatus |
US12/031,035 US7839461B2 (en) | 2007-02-16 | 2008-02-14 | Electro-optical device substrate, method of manufacturing the same, electro-optical device and electronic apparatus |
CN2008100055545A CN101246290B (zh) | 2007-02-16 | 2008-02-15 | 电光装置用基板、其制造方法、电光装置及电子设备 |
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JP2013057823A (ja) * | 2011-09-08 | 2013-03-28 | Sony Corp | 空間光変調素子および投射型表示装置 |
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CN104483796A (zh) * | 2015-01-04 | 2015-04-01 | 京东方科技集团股份有限公司 | 一种阵列基板及其制备方法、显示面板及显示装置 |
US10790311B2 (en) | 2018-01-22 | 2020-09-29 | Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Display substrate |
CN108257981B (zh) * | 2018-01-22 | 2020-11-27 | 深圳市华星光电半导体显示技术有限公司 | 显示基板 |
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