JP4926691B2 - インクジェット記録ヘッド、およびインクジェット記録ヘッドの製造方法 - Google Patents

インクジェット記録ヘッド、およびインクジェット記録ヘッドの製造方法 Download PDF

Info

Publication number
JP4926691B2
JP4926691B2 JP2006344632A JP2006344632A JP4926691B2 JP 4926691 B2 JP4926691 B2 JP 4926691B2 JP 2006344632 A JP2006344632 A JP 2006344632A JP 2006344632 A JP2006344632 A JP 2006344632A JP 4926691 B2 JP4926691 B2 JP 4926691B2
Authority
JP
Japan
Prior art keywords
ink
heating resistor
recording head
heating
resistors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006344632A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008155406A5 (https=
JP2008155406A (ja
Inventor
祐貴 小塚
義範 三隅
一郎 斉藤
宇 横山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2006344632A priority Critical patent/JP4926691B2/ja
Priority to US11/960,088 priority patent/US7967421B2/en
Publication of JP2008155406A publication Critical patent/JP2008155406A/ja
Publication of JP2008155406A5 publication Critical patent/JP2008155406A5/ja
Application granted granted Critical
Publication of JP4926691B2 publication Critical patent/JP4926691B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin-film techniques
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin-film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin-film techniques by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2006344632A 2006-12-21 2006-12-21 インクジェット記録ヘッド、およびインクジェット記録ヘッドの製造方法 Expired - Fee Related JP4926691B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2006344632A JP4926691B2 (ja) 2006-12-21 2006-12-21 インクジェット記録ヘッド、およびインクジェット記録ヘッドの製造方法
US11/960,088 US7967421B2 (en) 2006-12-21 2007-12-19 Ink jet print head and method for manufacturing ink jet print head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006344632A JP4926691B2 (ja) 2006-12-21 2006-12-21 インクジェット記録ヘッド、およびインクジェット記録ヘッドの製造方法

Publications (3)

Publication Number Publication Date
JP2008155406A JP2008155406A (ja) 2008-07-10
JP2008155406A5 JP2008155406A5 (https=) 2010-02-12
JP4926691B2 true JP4926691B2 (ja) 2012-05-09

Family

ID=39542156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006344632A Expired - Fee Related JP4926691B2 (ja) 2006-12-21 2006-12-21 インクジェット記録ヘッド、およびインクジェット記録ヘッドの製造方法

Country Status (2)

Country Link
US (1) US7967421B2 (https=)
JP (1) JP4926691B2 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5046838B2 (ja) * 2007-10-02 2012-10-10 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP5311975B2 (ja) * 2007-12-12 2013-10-09 キヤノン株式会社 液体吐出ヘッド用基体及びこれを用いる液体吐出ヘッド
JP5312202B2 (ja) * 2008-06-20 2013-10-09 キヤノン株式会社 液体吐出ヘッド及びその製造方法
JP5349122B2 (ja) * 2009-04-14 2013-11-20 株式会社ミツトヨ 同期移動装置および画像測定装置

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0461935B1 (en) * 1990-06-15 1997-10-08 Canon Kabushiki Kaisha Ink jet recording head and recording apparatus using said recording head
JPH08118641A (ja) * 1994-10-20 1996-05-14 Canon Inc インクジェットヘッド、インクジェットヘッドカートリッジ、インクジェット装置およびインクが再注入されたインクジェットヘッドカートリッジ用インク容器
JPH08224879A (ja) * 1994-12-19 1996-09-03 Xerox Corp 液滴エジェクタ閾値調整方法
JPH106503A (ja) * 1996-06-26 1998-01-13 Canon Inc インクジェット記録ヘッド用基板、インクジェット記録ヘッドおよび記録装置
US6527813B1 (en) * 1996-08-22 2003-03-04 Canon Kabushiki Kaisha Ink jet head substrate, an ink jet head, an ink jet apparatus, and a method for manufacturing an ink jet recording head
JP3554148B2 (ja) 1996-08-22 2004-08-18 キヤノン株式会社 インクジェット記録ヘッド用基体、インクジェット記録ヘッド及びインクジェット記録装置
US6234612B1 (en) * 1997-03-25 2001-05-22 Lexmark International, Inc. Ink jet printing apparatus having first and second print cartridges receiving energy pulses from a common drive circuit
JP3501619B2 (ja) * 1997-05-07 2004-03-02 キヤノン株式会社 インクジェット記録ヘッド
JP3697089B2 (ja) * 1998-11-04 2005-09-21 キヤノン株式会社 インクジェットヘッド用基体、インクジェットヘッド、インクジェットカートリッジおよびインクジェット記録装置
JP3738313B2 (ja) * 1999-05-13 2006-01-25 カシオ計算機株式会社 発熱抵抗体とその製造方法
US6439680B1 (en) * 1999-06-14 2002-08-27 Canon Kabushiki Kaisha Recording head, substrate for use of recording head, and recording apparatus
US6137502A (en) * 1999-08-27 2000-10-24 Lexmark International, Inc. Dual droplet size printhead
US6568792B2 (en) * 2000-12-11 2003-05-27 Xerox Corporation Segmented heater configurations for an ink jet printhead
JP2003136726A (ja) * 2001-10-30 2003-05-14 Kyocera Corp 記録ヘッド
JP2003246068A (ja) * 2002-02-27 2003-09-02 Kyocera Corp インクジェットヘッド
JP2004001344A (ja) * 2002-03-27 2004-01-08 Kyocera Corp インクジェットプリンタ
JP4126456B2 (ja) * 2002-03-27 2008-07-30 京セラ株式会社 インクジェットヘッド及びその抵抗値調整方法、並びにインクジェットプリンタ
JP2003311967A (ja) * 2002-04-24 2003-11-06 Kyocera Corp サーマルインクジェットヘッド及びそれを用いたサーマルインクジェットプリンタ並びにサーマルインクジェットヘッドの抵抗値調整方法
US7249825B2 (en) * 2003-05-09 2007-07-31 Hewlett-Packard Development Company, L.P. Fluid ejection device with data storage structure
US7344218B2 (en) * 2003-11-06 2008-03-18 Canon Kabushiki Kaisha Printhead driving method, printhead substrate, printhead, head cartridge and printing apparatus
JP2005186622A (ja) * 2003-12-05 2005-07-14 Canon Inc 発熱抵抗体、該発熱抵抗体を有する液体吐出ヘッド用基体、液体吐出ヘッドおよびその製造方法
JP2006168170A (ja) * 2004-12-15 2006-06-29 Canon Inc 発熱抵抗体膜、その製造方法、それを用いたインクジェットヘッドおよびその製造方法
JP5188049B2 (ja) * 2006-09-13 2013-04-24 キヤノン株式会社 記録ヘッド

Also Published As

Publication number Publication date
US20080151007A1 (en) 2008-06-26
US7967421B2 (en) 2011-06-28
JP2008155406A (ja) 2008-07-10

Similar Documents

Publication Publication Date Title
US7832843B2 (en) Liquid jet head
JP5025345B2 (ja) インクジェット記録ヘッドおよびインクジェット記録装置
JP5147282B2 (ja) インクジェット記録用基板、該基板を備えた記録ヘッド及び記録装置
US9604453B2 (en) Element substrate, liquid discharge head, and printing apparatus
US6769755B2 (en) Ink jet printing method and ink jet printing apparatus
KR20050043688A (ko) 프린트헤드 기판, 기판을 사용하는 프린트헤드, 프린트헤드를 포함하는 헤드 카트리지, 프린트헤드 구동 방법 및프린트헤드를 사용하는 인쇄 장치
JP2009083227A (ja) インクジェット記録ヘッドおよびそれを備えるインクジェット記録装置
JP3083441B2 (ja) プリントヘッド及びその製造装置及び製造方法及びプリント装置
JP2000141662A (ja) インクジェットヘッド用基体、インクジェットヘッド、インクジェットカートリッジおよびインクジェット記録装置
US7967421B2 (en) Ink jet print head and method for manufacturing ink jet print head
JP4574385B2 (ja) インクジェット記録ヘッドおよび記録装置
JP3200098B2 (ja) インクジェット記録ヘッドおよびインクジェット記録装置
JP4669278B2 (ja) 記録ヘッド用素子基板、記録ヘッドおよび記録装置
JP7336286B2 (ja) 素子基板、液体吐出ヘッド、及び記録装置
US7530666B2 (en) Liquid discharge head, liquid discharge recording apparatus and liquid discharge recording method
JP3986076B2 (ja) 液体吐出記録装置、および液体吐出記録方法
JP2009166257A (ja) インクジェット記録ヘッド、ヘッドカートリッジ及び記録装置
US7441878B2 (en) Ink jet recording head including temperature adjustment heater
JP4974664B2 (ja) 記録ヘッド用基板、その基板を用いた記録ヘッド又はヘッドカートリッジ、及びその記録ヘッドを用いた記録装置
JP4101245B2 (ja) 液体吐出ヘッド、液体吐出記録装置、および液体吐出記録方法
JP4455013B2 (ja) 記録ヘッドの駆動方法、記録ヘッド、及び記録装置
JP5166970B2 (ja) 記録ヘッド用素子基板及びその処理方法、記録ヘッド、並びに記録装置
JP2005138428A (ja) 記録ヘッド用基板、その基板を用いた記録ヘッド、記録ヘッドの駆動方法、及びその記録ヘッドを用いた記録装置
JP2004090246A (ja) 記録ヘッド用基板、インクジェット記録ヘッド、記録装置およびランクヒーター測定方法
JPH09123452A (ja) インクジェット記録ヘッド用基体、インクジェット記録ヘッドおよびインクジェット記録装置

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20091216

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20091216

RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20101106

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110916

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20111115

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20111209

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120113

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120203

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120208

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150217

Year of fee payment: 3

R151 Written notification of patent or utility model registration

Ref document number: 4926691

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150217

Year of fee payment: 3

LAPS Cancellation because of no payment of annual fees