JP4919908B2 - 除電装置 - Google Patents

除電装置 Download PDF

Info

Publication number
JP4919908B2
JP4919908B2 JP2007238454A JP2007238454A JP4919908B2 JP 4919908 B2 JP4919908 B2 JP 4919908B2 JP 2007238454 A JP2007238454 A JP 2007238454A JP 2007238454 A JP2007238454 A JP 2007238454A JP 4919908 B2 JP4919908 B2 JP 4919908B2
Authority
JP
Japan
Prior art keywords
gas
air
gas blowing
nozzle
flow path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007238454A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009070707A (ja
JP2009070707A5 (enExample
Inventor
正康 池淵
智則 嶋田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Keyence Corp
Original Assignee
Keyence Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Keyence Corp filed Critical Keyence Corp
Priority to JP2007238454A priority Critical patent/JP4919908B2/ja
Publication of JP2009070707A publication Critical patent/JP2009070707A/ja
Publication of JP2009070707A5 publication Critical patent/JP2009070707A5/ja
Application granted granted Critical
Publication of JP4919908B2 publication Critical patent/JP4919908B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Elimination Of Static Electricity (AREA)
JP2007238454A 2007-09-13 2007-09-13 除電装置 Expired - Fee Related JP4919908B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007238454A JP4919908B2 (ja) 2007-09-13 2007-09-13 除電装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007238454A JP4919908B2 (ja) 2007-09-13 2007-09-13 除電装置

Publications (3)

Publication Number Publication Date
JP2009070707A JP2009070707A (ja) 2009-04-02
JP2009070707A5 JP2009070707A5 (enExample) 2010-05-06
JP4919908B2 true JP4919908B2 (ja) 2012-04-18

Family

ID=40606741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007238454A Expired - Fee Related JP4919908B2 (ja) 2007-09-13 2007-09-13 除電装置

Country Status (1)

Country Link
JP (1) JP4919908B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9543151B2 (en) 2014-08-20 2017-01-10 Samsung Electronics Co., Ltd. Ionizer and substrate transfer system having the same, and method of manufacturing a semiconductor device using the same

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101221939B1 (ko) * 2011-06-13 2013-01-15 한국기계연구원 고효율 광조사식 제전 시스템
KR101178783B1 (ko) * 2011-06-13 2012-09-07 한국기계연구원 연 엑스선을 이용한 광조사식 제전기
JP6960582B2 (ja) * 2017-10-19 2021-11-05 Smc株式会社 イオナイザ
KR102461342B1 (ko) * 2020-06-25 2022-11-01 (주)선재하이테크 이오나이저용 이온화 기류 이송 장치
KR102697464B1 (ko) * 2021-11-30 2024-08-21 (주)선재하이테크 에어 부스트 부재의 구조 및 바 타입의 정전기제거장치
JP2025165231A (ja) * 2024-04-22 2025-11-04 Smc株式会社 イオナイザ用取付具、それを有するイオナイザ、及びそれを用いた取付構造

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001035686A (ja) * 1999-07-15 2001-02-09 Kasuga Electric Works Ltd 直流除電器
JP4634186B2 (ja) * 2005-02-24 2011-02-16 株式会社テクノ菱和 シースエア式イオナイザー
JP4704192B2 (ja) * 2005-11-09 2011-06-15 株式会社キーエンス イオン化装置の電極針ユニットおよびイオン化装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9543151B2 (en) 2014-08-20 2017-01-10 Samsung Electronics Co., Ltd. Ionizer and substrate transfer system having the same, and method of manufacturing a semiconductor device using the same

Also Published As

Publication number Publication date
JP2009070707A (ja) 2009-04-02

Similar Documents

Publication Publication Date Title
JP4919908B2 (ja) 除電装置
TWI395516B (zh) 除電裝置以及放電模組
JP4308610B2 (ja) イオン発生装置
US7126807B2 (en) Ionized air flow discharge type non-dusting ionizer
US10312122B2 (en) Substrate storage container
EP3474396B1 (en) Ionizer
JP4874771B2 (ja) イオン化装置
CN101227062A (zh) 离子发生器
US7328617B2 (en) Air levitation apparatus with neutralization device, and neutralization method for levitation apparatus
JP4634186B2 (ja) シースエア式イオナイザー
CN103375866B (zh) 送风装置
JP2013037811A (ja) プラズマ処理装置
JP4919906B2 (ja) 除電装置
KR20160022699A (ko) 이온 발생기 및 이를 갖는 기판 이송 시스템
JP4919907B2 (ja) 除電装置
KR20120056013A (ko) 이온발생모듈
JP6470692B2 (ja) イオン発生器
JP2018119760A (ja) 浴室乾燥機
KR200175694Y1 (ko) 이오나이저 제전 장치
CN115552746B (zh) 放电装置以及空气调节系统
JP2007242568A (ja) 除電器
JP2009016096A (ja) イオナイザ
JP2008159389A (ja) イオン化装置及びその製造方法
JP2005100825A (ja) 除電装置及び除電装置の放出管
TWM613068U (zh) 一種氣流加速裝置

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100319

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100319

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20111110

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20111115

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20111228

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120124

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120131

R150 Certificate of patent or registration of utility model

Ref document number: 4919908

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150210

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees