JP2009070707A5 - - Google Patents
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- Publication number
- JP2009070707A5 JP2009070707A5 JP2007238454A JP2007238454A JP2009070707A5 JP 2009070707 A5 JP2009070707 A5 JP 2009070707A5 JP 2007238454 A JP2007238454 A JP 2007238454A JP 2007238454 A JP2007238454 A JP 2007238454A JP 2009070707 A5 JP2009070707 A5 JP 2009070707A5
- Authority
- JP
- Japan
- Prior art keywords
- gas
- gas blowing
- main body
- electrode needle
- flow path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007664 blowing Methods 0.000 claims 27
- 230000003068 static effect Effects 0.000 claims 8
- 150000002500 ions Chemical class 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007238454A JP4919908B2 (ja) | 2007-09-13 | 2007-09-13 | 除電装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007238454A JP4919908B2 (ja) | 2007-09-13 | 2007-09-13 | 除電装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009070707A JP2009070707A (ja) | 2009-04-02 |
| JP2009070707A5 true JP2009070707A5 (enExample) | 2010-05-06 |
| JP4919908B2 JP4919908B2 (ja) | 2012-04-18 |
Family
ID=40606741
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007238454A Expired - Fee Related JP4919908B2 (ja) | 2007-09-13 | 2007-09-13 | 除電装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4919908B2 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101221939B1 (ko) * | 2011-06-13 | 2013-01-15 | 한국기계연구원 | 고효율 광조사식 제전 시스템 |
| KR101178783B1 (ko) * | 2011-06-13 | 2012-09-07 | 한국기계연구원 | 연 엑스선을 이용한 광조사식 제전기 |
| KR102164671B1 (ko) | 2014-08-20 | 2020-10-12 | 삼성전자주식회사 | 이온 발생기 및 이를 갖는 기판 이송 시스템 |
| JP6960582B2 (ja) * | 2017-10-19 | 2021-11-05 | Smc株式会社 | イオナイザ |
| KR102461342B1 (ko) * | 2020-06-25 | 2022-11-01 | (주)선재하이테크 | 이오나이저용 이온화 기류 이송 장치 |
| KR102697464B1 (ko) * | 2021-11-30 | 2024-08-21 | (주)선재하이테크 | 에어 부스트 부재의 구조 및 바 타입의 정전기제거장치 |
| JP2025165231A (ja) * | 2024-04-22 | 2025-11-04 | Smc株式会社 | イオナイザ用取付具、それを有するイオナイザ、及びそれを用いた取付構造 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001035686A (ja) * | 1999-07-15 | 2001-02-09 | Kasuga Electric Works Ltd | 直流除電器 |
| JP4634186B2 (ja) * | 2005-02-24 | 2011-02-16 | 株式会社テクノ菱和 | シースエア式イオナイザー |
| JP4704192B2 (ja) * | 2005-11-09 | 2011-06-15 | 株式会社キーエンス | イオン化装置の電極針ユニットおよびイオン化装置 |
-
2007
- 2007-09-13 JP JP2007238454A patent/JP4919908B2/ja not_active Expired - Fee Related
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