JP4914040B2 - 干渉測定装置 - Google Patents

干渉測定装置 Download PDF

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Publication number
JP4914040B2
JP4914040B2 JP2005218980A JP2005218980A JP4914040B2 JP 4914040 B2 JP4914040 B2 JP 4914040B2 JP 2005218980 A JP2005218980 A JP 2005218980A JP 2005218980 A JP2005218980 A JP 2005218980A JP 4914040 B2 JP4914040 B2 JP 4914040B2
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JP
Japan
Prior art keywords
light
interference
flux
measurement
divided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005218980A
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English (en)
Japanese (ja)
Other versions
JP2007033317A (ja
JP2007033317A5 (enExample
Inventor
秀次郎 門脇
公 石塚
成樹 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2005218980A priority Critical patent/JP4914040B2/ja
Priority to EP06253843A priority patent/EP1748277B1/en
Priority to DE602006004515T priority patent/DE602006004515D1/de
Priority to US11/459,851 priority patent/US7551290B2/en
Publication of JP2007033317A publication Critical patent/JP2007033317A/ja
Publication of JP2007033317A5 publication Critical patent/JP2007033317A5/ja
Application granted granted Critical
Publication of JP4914040B2 publication Critical patent/JP4914040B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP2005218980A 2005-07-28 2005-07-28 干渉測定装置 Expired - Fee Related JP4914040B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2005218980A JP4914040B2 (ja) 2005-07-28 2005-07-28 干渉測定装置
EP06253843A EP1748277B1 (en) 2005-07-28 2006-07-21 Interference measurement apparatus
DE602006004515T DE602006004515D1 (de) 2005-07-28 2006-07-21 Vorrichtung zur Interferenzmessung
US11/459,851 US7551290B2 (en) 2005-07-28 2006-07-25 Absolute position measurement apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005218980A JP4914040B2 (ja) 2005-07-28 2005-07-28 干渉測定装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011241561A Division JP5355659B2 (ja) 2011-11-02 2011-11-02 干渉測定装置及び測定原点決定方法

Publications (3)

Publication Number Publication Date
JP2007033317A JP2007033317A (ja) 2007-02-08
JP2007033317A5 JP2007033317A5 (enExample) 2008-09-11
JP4914040B2 true JP4914040B2 (ja) 2012-04-11

Family

ID=37307168

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005218980A Expired - Fee Related JP4914040B2 (ja) 2005-07-28 2005-07-28 干渉測定装置

Country Status (4)

Country Link
US (1) US7551290B2 (enExample)
EP (1) EP1748277B1 (enExample)
JP (1) JP4914040B2 (enExample)
DE (1) DE602006004515D1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4804058B2 (ja) * 2005-07-28 2011-10-26 キヤノン株式会社 干渉測定装置
CN100547344C (zh) * 2007-02-07 2009-10-07 中国科学院上海光学精密机械研究所 实时测量表面形貌的正弦相位调制干涉仪
JP5188127B2 (ja) * 2007-09-14 2013-04-24 キヤノン株式会社 絶対位置の計測装置および計測方法
JP4898639B2 (ja) * 2007-11-22 2012-03-21 キヤノン株式会社 絶対位置の計測装置及び計測方法
JP2010169402A (ja) * 2009-01-20 2010-08-05 Canon Inc 変位測定装置及び変位測定方法
JP5629455B2 (ja) * 2009-12-14 2014-11-19 キヤノン株式会社 干渉計
CN101738160B (zh) * 2009-12-25 2011-07-13 中国科学院上海光学精密机械研究所 双光源正弦相位调制位移测量干涉仪
CN103383247B (zh) * 2013-07-30 2016-08-10 中国计量科学研究院 一种光学检测系统及装置
CN120113993B (zh) * 2025-04-11 2025-12-12 安徽大学 基于自混合游标效应的多参数眼轴测量系统

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH678108A5 (enExample) * 1987-04-28 1991-07-31 Wild Leitz Ag
JPH05149708A (ja) * 1991-11-27 1993-06-15 Jasco Corp 二光束干渉計の基準位置決め方法及び装置
JPH07190712A (ja) * 1993-12-27 1995-07-28 Nikon Corp 干渉計
DE19522262C2 (de) * 1995-06-20 1997-05-22 Zeiss Carl Jena Gmbh Heterodyn-Interferometer-Anordnung
US6407816B1 (en) * 1998-02-23 2002-06-18 Zygo Corporation Interferometer and method for measuring the refractive index and optical path length effects of air
US6181430B1 (en) * 1999-03-15 2001-01-30 Ohio Aerospace Institute Optical device for measuring a surface characteristic of an object by multi-color interferometry
JP2001076325A (ja) * 1999-09-07 2001-03-23 Canon Inc 変位検出装置及び情報記録装置
JP4846909B2 (ja) * 2000-02-15 2011-12-28 キヤノン株式会社 光学式エンコーダ及び回折格子の変位測定方法
JP2001336952A (ja) * 2000-05-26 2001-12-07 Canon Inc 測定装置
DE10249409B4 (de) * 2001-10-25 2007-09-20 Canon K.K. Interferometer und Positionsmessvorrichtung
US6934035B2 (en) * 2001-12-18 2005-08-23 Massachusetts Institute Of Technology System and method for measuring optical distance
US7006232B2 (en) * 2002-04-05 2006-02-28 Case Western Reserve University Phase-referenced doppler optical coherence tomography
JP3921129B2 (ja) * 2002-05-27 2007-05-30 富士通株式会社 プリズムアレイ形状の計測方法および計測装置
JP4062606B2 (ja) * 2003-01-20 2008-03-19 フジノン株式会社 低可干渉測定／高可干渉測定共用干渉計装置およびその測定方法
US7298493B2 (en) * 2004-06-30 2007-11-20 Zygo Corporation Interferometric optical assemblies and systems including interferometric optical assemblies
JP4514209B2 (ja) * 2004-10-15 2010-07-28 キヤノン株式会社 位置検出装置及び方法
JP4804058B2 (ja) * 2005-07-28 2011-10-26 キヤノン株式会社 干渉測定装置
US7292347B2 (en) * 2005-08-01 2007-11-06 Mitutoyo Corporation Dual laser high precision interferometer
JP2007132727A (ja) * 2005-11-09 2007-05-31 Canon Inc 干渉測定装置
JP2007225392A (ja) * 2006-02-22 2007-09-06 Spectratech Inc 光干渉装置

Also Published As

Publication number Publication date
US7551290B2 (en) 2009-06-23
JP2007033317A (ja) 2007-02-08
EP1748277A1 (en) 2007-01-31
EP1748277B1 (en) 2008-12-31
DE602006004515D1 (de) 2009-02-12
US20070024862A1 (en) 2007-02-01

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