JP4892203B2 - 非親和性の障壁によるメニスカスの分離および閉じ込め - Google Patents
非親和性の障壁によるメニスカスの分離および閉じ込め Download PDFInfo
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
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- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
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- H01L21/67017—Apparatus for fluid treatment
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- H01L21/67005—Apparatus not specifically provided for elsewhere
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- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
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- H—ELECTRICITY
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
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- H—ELECTRICITY
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
Description
12…液体/気体移動界面
20…親水性の領域
22…疎水性の領域
26…流体
100…ウエハ処理システム
102a,102b…ローラ
104a,104b…アーム
106a,106b…プロキシミティヘッド
106−1,106−2,106−3,106−4,106−5…マルチメニスカスプロキシミティヘッド
108…ウエハ
108’…疎水性のウエハ
108”…親水性のウエハ
108a…上面
108b…下面
116…メニスカス
116a…第1の流体メニスカス
116b…第2の流体メニスカス
116a’,116b’…流体メニスカス
118…IPA/処理流体界面
302…供給口
304…排出口
304a,304b…排出口
306…供給口
306a,306b…供給口
310…IPA
312…吸引
314…処理流体
402…第1の流体メニスカス領域
404…第2の流体メニスカス領域
452…隆起領域
453…表面
454…設備プレート
456…ボディ
458…処理表面
502,504a,504b,506a,506b…流路
602…非親和性の障壁
602’…親水性の障壁
650,650’,650”…メニスカス分離領域
655,660,665,670,675,680,685…領域
Claims (25)
- 第1の流体供給口および第1の流体排出口からなる第1の供給口排出口パターンと、第2の流体供給口および第2の流体排出口からなる第2の供給口排出口パターンと、前記第1の供給口排出口パターンと前記第2の供給口排出口パターンとの間に設けられている障壁とを備え、基板に近接させて用いられる近接ヘッドを用いて基板を処理するための方法であって、
前記第1の流体供給口および第1の流体排出口を用いて第1の流体メニスカスを前記基板表面上に生成し、前記第2の流体供給口および第2の流体排出口を用いて前記第1の流体メニスカスに隣接する第2の流体メニスカスを前記基板表面上に生成し、
前記第1の流体メニスカスと前記第2の流体メニスカスとを前記障壁として前記第1の流体メニスカスと前記第2の流体メニスカスの少なくとも一方に対して非親和性の材料からなる非親和性障壁を用いて分離することと
を備える方法。 - 請求項1に記載の基板を処理するための方法は更に、
前記第1の流体メニスカスを用いて前記基板の前記表面を処理し、
前記第2の流体メニスカスを用いて前記基板の前記表面を処理すること
を備える方法。 - 請求項2に記載の基板を処理するための方法であって、
前記第1の流体メニスカスを用いる前記基板の前記表面の処理は、エッチング、洗浄、すすぎ、メッキ、およびリソグラフィのうちの1つの作業を含む、方法。 - 請求項2に記載の基板を処理するための方法であって、
前記第2の流体メニスカスを用いる前記基板の前記表面の処理は、エッチング、洗浄、すすぎ、メッキ、乾燥、およびリソグラフィのうちの1つの作業を含む、方法。 - 請求項1に記載の基板を処理するための方法であって、
前記第1の流体メニスカスの生成は、前記第1の流体供給口を通じて前記基板の前記表面に第1の流体を供給すること、および前記第1の流体排出口を通じて前記基板の前記表面から前記第1の流体を除去することを含む、方法。 - 請求項5に記載の基板を処理するための方法であって、
前記第2の流体メニスカスの生成は、前記第2の流体供給口を通じて前記基板の前記表面に第2の流体を供給すること、前記第1の流体排出口および前記第2の流体排出口を通じて前記基板の前記表面から前記第2の流体を除去すること、並びに第3の供給口を通じて第3の流体を供給することを含む、方法。 - 請求項5に記載の基板を処理するための方法であって、
前記第1の流体は、リソグラフィ流体、エッチング流体、メッキ流体、洗浄流体、およびすすぎ流体のうちの1つである、方法。 - 請求項6に記載の基板を処理するための方法であって、
前記第2の流体は、リソグラフィ流体、エッチング流体、メッキ流体、洗浄流体、乾燥流体、およびすすぎ流体のうちの1つである、方法。 - 請求項6に記載の基板を処理するための方法であって、
前記第3の流体は、前記第2の流体の表面張力を低下させる、方法。 - 請求項1に記載の基板を処理するための方法であって、
前記非親和性障壁は、前記第1の流体メニスカスおよび前記第2の流体メニスカスの少なくとも一方に対して少なくとも部分的に非親和性である、方法。 - 請求項1に記載の基板を処理するための方法であって、前記障壁は、前記第1の流体メニスカスに対して親和性である親和性材料からなる親和性障壁部を有する、方法。
- 基板を処理するための装置であって、
基板に近接させて用いられる近接ヘッドであって、
前記近接ヘッド内に設けられ、第1の流体メニスカスを生成するように構成された第1の供給口排出口パターンであって、
第1の流体を前記ウェハの前記表面に供給するための少なくとも1つの供給口と、
少なくとも前記第1の流体を前記ウェハの前記表面から除去するための少なくとも1つの排出口と
を含む、第1の供給口排出口パターンと、
前記近接ヘッド内に設けられ、第2の流体メニスカスを生成するように構成された第2の供給口排出口パターンであって、
第2の流体を前記ウェハの前記表面に供給するための少なくとも1つの供給口と、
前記第2の流体を前記ウェハの前記表面から除去するための少なくとも1つの排出口と
を含み、前記第1の流体を前記ウェハの前記表面から除去するための前記少なくとも1つの排出口は、前記第2の流体の少なくとも一部も除去する、第2の供給口排出口パターンと、
前記第1の供給口排出口パターンと前記第2の供給口排出口パターンとの間に設けられ、前記第1の流体メニスカスと前記第2の流体メニスカスとをほぼ分離するように構成された非親和性材料からなる非親和性障壁と
を含む近接ヘッドを備える装置。 - 請求項12に記載の基板を処理するための装置であって、
前記第2の供給口排出口パターンは、更に、第3の流体を前記ウェハの前記表面に供給するための少なくとも1つの供給口を含む、装置。 - 請求項12に記載の基板を処理するための装置であって、
前記第1の流体メニスカスは、エッチング、洗浄、すすぎ、メッキ、およびリソグラフィのうちの少なくとも1つの作業を実施することができる、装置。 - 請求項12に記載の基板を処理するための装置であって、
前記第2の流体メニスカスは、エッチング、洗浄、すすぎ、メッキ、乾燥、およびリソグラフィのうちの少なくとも1つの作業を実施することができる、装置。 - 請求項12に記載の基板を処理するための装置であって、
前記第3の流体は、前記第2の流体の表面張力を低下させる、装置。 - 請求項12に記載の基板を処理するための装置であって、
前記非親和性障壁は、前記第1の流体メニスカスおよび前記第2の流体メニスカスの少なくとも一方に対して部分的に非親和性である、装置。 - 請求項12に記載の基板を処理するための装置であって、前記非親和性障壁は、前記第1の流体メニスカスおよび前記第2の流体メニスカスの少なくとも一方に対して親和性である親和性材料からなる親和性障壁部を備える、装置。
- 基板を処理するための装置であって、
基板に近接させて用いられ、第1の流体メニスカスを生成すること、および第2の流体メニスカスを生成することができる近接ヘッドであって、
前記近接ヘッドの処理表面内に設けられ、第1の流体を前記ウェハの表面に供給するように構成された少なくとも1つの第1の供給口と、
前記近接ヘッドの前記処理表面内に設けられ、前記第1の流体と第2の流体の少なくとも一部とを前記ウェハの前記表面から除去するように構成された、少なくとも1つの第1の排出口と、
前記近接ヘッドの前記処理表面内に設けられ、前記第2の流体を前記ウェハの前記表面に供給するように構成された少なくとも1つの第2の供給口と、
前記近接ヘッドの前記処理表面内に設けられ、前記第2の流体の少なくとも一部を前記ウェハの前記表面から除去するように構成された、少なくとも1つの第2の排出口と
を含む近接ヘッドと、
前記少なくとも1つの第1の排出口と前記少なくとも1つの第2の排出口との間に設けられ、前記第1の流体メニスカスと前記第2の流体メニスカスとを分離する障壁と
を備える装置。 - 請求項19に記載の基板を処理するための装置であって、
前記近接ヘッドは、更に、前記近接ヘッドの前記処理表面内に設けられ、第3の流体を前記ウェハの前記表面に供給するように構成された少なくとも1つの第3の供給口を含む、装置。 - 請求項19に記載の基板を処理するための装置であって、
前記第1の流体メニスカスは、エッチング、洗浄、すすぎ、メッキ、およびリソグラフィのうちの少なくとも1つの作業を実施することができる、装置。 - 請求項19に記載の基板を処理するための装置であって、
前記第2の流体メニスカスは、エッチング、洗浄、すすぎ、メッキ、乾燥、およびリソグラフィのうちの少なくとも1つの作業を実施することができる、装置。 - 請求項20に記載の基板を処理するための装置であって、
前記第3の流体は、前記第2の流体の表面張力を低下させる、装置。 - 請求項20に記載の基板を処理するための装置であって、
前記障壁は、前記第1の流体メニスカスおよび前記第2の流体メニスカスの少なくとも一方に対して非親和性である、装置。 - 請求項20に記載の基板を処理するための装置であって、さらに、
前記障壁は、前記第1の流体メニスカスおよび前記第2の流体メニスカスの少なくとも一方に対して非親和性である非親和性材料からなる非親和性障壁部と、前記第1の流体メニスカスおよび前記第2の流体メニスカスの少なくとも一方に対して親和性である親和性材料からなる親和性障壁部とを備える、装置。
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Application Number | Priority Date | Filing Date | Title |
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US10/883301 | 2004-06-30 | ||
US10/883,301 US6954993B1 (en) | 2002-09-30 | 2004-06-30 | Concentric proximity processing head |
US10/957384 | 2004-09-30 | ||
US10/957,384 US6988326B2 (en) | 2002-09-30 | 2004-09-30 | Phobic barrier meniscus separation and containment |
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JP4892203B2 true JP4892203B2 (ja) | 2012-03-07 |
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US (1) | US6988326B2 (ja) |
EP (1) | EP1612845B1 (ja) |
JP (1) | JP4892203B2 (ja) |
KR (1) | KR101118006B1 (ja) |
AT (1) | ATE556428T1 (ja) |
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US7293571B2 (en) | 2002-09-30 | 2007-11-13 | Lam Research Corporation | Substrate proximity processing housing and insert for generating a fluid meniscus |
US8236382B2 (en) * | 2002-09-30 | 2012-08-07 | Lam Research Corporation | Proximity substrate preparation sequence, and method, apparatus, and system for implementing the same |
US7383843B2 (en) * | 2002-09-30 | 2008-06-10 | Lam Research Corporation | Method and apparatus for processing wafer surfaces using thin, high velocity fluid layer |
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JP4003441B2 (ja) * | 2001-11-08 | 2007-11-07 | セイコーエプソン株式会社 | 表面処理装置および表面処理方法 |
US7240679B2 (en) * | 2002-09-30 | 2007-07-10 | Lam Research Corporation | System for substrate processing with meniscus, vacuum, IPA vapor, drying manifold |
US7069937B2 (en) * | 2002-09-30 | 2006-07-04 | Lam Research Corporation | Vertical proximity processor |
US7252097B2 (en) * | 2002-09-30 | 2007-08-07 | Lam Research Corporation | System and method for integrating in-situ metrology within a wafer process |
US7153400B2 (en) * | 2002-09-30 | 2006-12-26 | Lam Research Corporation | Apparatus and method for depositing and planarizing thin films of semiconductor wafers |
EP1500128B1 (en) * | 2002-09-30 | 2007-06-20 | Lam Research Corporation | Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces |
SG121822A1 (en) * | 2002-11-12 | 2006-05-26 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method |
-
2004
- 2004-09-30 US US10/957,384 patent/US6988326B2/en not_active Expired - Fee Related
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2005
- 2005-06-20 SG SG200503944A patent/SG118397A1/en unknown
- 2005-06-22 EP EP05253879A patent/EP1612845B1/en not_active Not-in-force
- 2005-06-22 AT AT05253879T patent/ATE556428T1/de active
- 2005-06-28 MY MYPI20052944A patent/MY139423A/en unknown
- 2005-06-29 JP JP2005189340A patent/JP4892203B2/ja not_active Expired - Fee Related
- 2005-06-30 KR KR1020050058859A patent/KR101118006B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
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KR20060049726A (ko) | 2006-05-19 |
US20050217135A1 (en) | 2005-10-06 |
SG118397A1 (en) | 2006-01-27 |
JP2006041504A (ja) | 2006-02-09 |
MY139423A (en) | 2009-09-30 |
EP1612845A2 (en) | 2006-01-04 |
EP1612845B1 (en) | 2012-05-02 |
ATE556428T1 (de) | 2012-05-15 |
KR101118006B1 (ko) | 2012-02-27 |
EP1612845A3 (en) | 2009-12-02 |
US6988326B2 (en) | 2006-01-24 |
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