JP4578373B2 - 基板処理装置 - Google Patents
基板処理装置 Download PDFInfo
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- JP4578373B2 JP4578373B2 JP2005283367A JP2005283367A JP4578373B2 JP 4578373 B2 JP4578373 B2 JP 4578373B2 JP 2005283367 A JP2005283367 A JP 2005283367A JP 2005283367 A JP2005283367 A JP 2005283367A JP 4578373 B2 JP4578373 B2 JP 4578373B2
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- JP
- Japan
- Prior art keywords
- fluid
- meniscus
- wafer
- proximity head
- proximity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S134/00—Cleaning and liquid contact with solids
- Y10S134/902—Semiconductor wafer
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Weting (AREA)
- Coating Apparatus (AREA)
Description
Claims (13)
- 基板を処理する基板処理装置であって、
前記基板の一方の面に対向するヘッド表面を有する近接ヘッドであって、
前記ヘッド表面に設けられ、前記基板の前記一方の面と前記ヘッド表面との間に流体を導入する複数の導入領域と
前記ヘッド表面に設けられ、前記基板の前記一方の面と前記ヘッド表面との間から流体を除去する複数の除去領域と、
前記複数の導入領域の少なくとも一つの導入領域内に配列され、該導入領域へと流体を流す複数の導管と
を含む近接ヘッドと、
前記近接ヘッドに連結され、前記基板の前記一方の面と前記ヘッド表面との間に流体メニスカスが形成されるように、前記導入領域へと流体を供給すると共に前記除去領域を通じて流体を除去する流体供給部と、
前記流体供給部と前記複数の導管の各々との間にそれぞれ設けられ、各導管を流れる流体の流量を制御する複数の流量制御装置と
を備え、
前記複数の流量制御装置は、前記複数の導管の各々を流れる流体の流量をそれぞれ制御することによって、前記複数の導管の配列に沿って前記流体メニスカスの形状を変化させる、基板処理装置。 - 請求項1に記載の基板処理装置であって、
前記複数の導管は、
前記流体メニスカスを形成する第1流体を流す複数の第1導管と、
前記第1流体とは異なる第2流体を流す複数の第2導管と
を含む、基板処理装置。 - 前記基板の前記一方の面と前記ヘッド表面との間に形成された流体メニスカスにおいて、エッチング工程,洗浄工程,すすぎ工程,メッキ工程,乾燥工程,リソグラフィ工程の少なくとも一つを実施する請求項1に記載の基板処理装置。
- 前記第2流体は、前記第1流体の表面張力を変化させる請求項2に記載の基板処理装置。
- 前記複数の流量制御装置の各々は、弁および栓の少なくとも一方である請求項1に記載の基板処理装置。
- 更に、前記近接ヘッドにおける前記複数の除去領域の少なくとも一つの除去領域から除去される流体の流量を制御する他の流体制御装置を備える請求項1に記載の基板処理装置。
- 前記他の流量制御装置は、弁および栓の少なくとも一方である請求項6に記載の基板処理装置。
- 前記他の流量制御装置である前記弁は、前記近接ヘッドにおける前記複数の除去領域の少なくとも一つの除去領域から除去される流体の流量を促進する請求項7に記載の基板処理装置。
- 基板を処理する基板処理装置であって、
複数の近接ヘッドであって、
前記基板の一方の面に対向するヘッド表面を有する第1近接ヘッドと、
前記基板における前記一方の面とは異なる他方の面に対向するヘッド表面を有する第2近接ヘッドと
を含み、前記第1および第2近接ヘッドの各々は、
前記ヘッド表面に設けられ、前記基板と前記ヘッド表面との間に流体を導入する複数の導入領域と
前記ヘッド表面に設けられ、前記基板と前記ヘッド表面との間から流体を除去する複数の除去領域と、
前記複数の導入領域の少なくとも一つの導入領域内に配列され、該導入領域へと流体を流す複数の導管と
を含む、複数の近接ヘッドと、
前記複数の近接ヘッドに連結され、前記基板の前記一方の面と前記第1近接ヘッドの前記ヘッド表面との間、および前記基板の前記他方の面と前記第2近接ヘッドの前記ヘッド表面との間の各々に、流体メニスカスが形成されるように、前記導入領域へと流体を供給すると共に前記除去領域を通じて流体を除去する流体供給部と、
前記流体供給部と前記複数の導管の各々との間にそれぞれ設けられ、各導管を流れる流体の流量を制御する複数の流量制御装置と
を備え、
前記複数の流量制御装置は、前記複数の導管の各々を流れる流体の流量をそれぞれ制御することによって、前記複数の導管の配列に沿って前記流体メニスカスの形状を変化させる、基板処理装置。 - 更に、前記第1および第2近接ヘッドの各々における前記複数の除去領域の少なくとも一つの除去領域から除去される流体の流量を制御する他の流体制御装置を備える請求項9に記載の基板処理装置。
- 請求項9に記載の基板処理装置であって、
前記第1および第2近接ヘッドの各々における前記複数の導管は、
前記流体メニスカスを形成する第1流体を流す複数の第1導管と、
前記第1流体とは異なる第2流体を流す複数の第2導管と
を含む、基板処理装置。 - 前記基板の前記一方の面および前記他方の面の各々における前記流体メニスカスの形状は、前記流体制御装置によって流体の導入が制限される導管の数に基づいて変化する請求項9に記載の基板処理装置。
- 前記基板の前記一方の面および前記他方の面の各々における前記流体メニスカスは、前記流体制御装置によって幅および長さの少なくとも一方が変化する請求項9に記載の基板処理装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/957,260 US7520285B2 (en) | 2002-09-30 | 2004-09-30 | Apparatus and method for processing a substrate |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006148069A JP2006148069A (ja) | 2006-06-08 |
JP4578373B2 true JP4578373B2 (ja) | 2010-11-10 |
Family
ID=35482287
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005283367A Expired - Fee Related JP4578373B2 (ja) | 2004-09-30 | 2005-09-29 | 基板処理装置 |
Country Status (8)
Country | Link |
---|---|
US (2) | US7520285B2 (ja) |
EP (1) | EP1643541B1 (ja) |
JP (1) | JP4578373B2 (ja) |
KR (1) | KR101164826B1 (ja) |
CN (1) | CN1794420B (ja) |
MY (1) | MY163666A (ja) |
SG (1) | SG121162A1 (ja) |
TW (1) | TWI278358B (ja) |
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US8485120B2 (en) | 2007-04-16 | 2013-07-16 | Lam Research Corporation | Method and apparatus for wafer electroless plating |
US8844461B2 (en) * | 2007-04-16 | 2014-09-30 | Lam Research Corporation | Fluid handling system for wafer electroless plating and associated methods |
US20060201425A1 (en) * | 2005-03-08 | 2006-09-14 | Applied Microstructures, Inc. | Precursor preparation for controlled deposition coatings |
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JP4971078B2 (ja) * | 2007-08-30 | 2012-07-11 | 東京応化工業株式会社 | 表面処理装置 |
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KR101679432B1 (ko) * | 2008-02-08 | 2016-12-06 | 램 리써치 코포레이션 | 메니스커스에 의한 웨이퍼 표면의 프로세싱에서 근접 헤드에 대한 실질적으로 균일한 유체 흐름 레이트를 위한 장치 |
JP5239457B2 (ja) * | 2008-03-31 | 2013-07-17 | Jfeスチール株式会社 | 金属帯への塗装方法 |
US8421993B2 (en) * | 2008-05-08 | 2013-04-16 | Asml Netherlands B.V. | Fluid handling structure, lithographic apparatus and device manufacturing method |
US8828145B2 (en) * | 2009-03-10 | 2014-09-09 | Lam Research Corporation | Method of particle contaminant removal |
KR20100066631A (ko) * | 2008-12-10 | 2010-06-18 | 삼성전자주식회사 | 세정설비 및 그의 세정방법 |
US8317934B2 (en) * | 2009-05-13 | 2012-11-27 | Lam Research Corporation | Multi-stage substrate cleaning method and apparatus |
EP2315235B1 (en) * | 2009-10-21 | 2019-04-24 | IMEC vzw | Method and apparatus for cleaning a semiconductor substrate |
JP4927158B2 (ja) * | 2009-12-25 | 2012-05-09 | 東京エレクトロン株式会社 | 基板処理方法、その基板処理方法を実行させるためのプログラムを記録した記録媒体及び基板処理装置 |
US20120260517A1 (en) * | 2011-04-18 | 2012-10-18 | Lam Research Corporation | Apparatus and Method for Reducing Substrate Pattern Collapse During Drying Operations |
CN102214559A (zh) * | 2011-05-23 | 2011-10-12 | 叶伟清 | 晶圆亲水面表面清洗方法 |
CN102214558A (zh) * | 2011-05-23 | 2011-10-12 | 叶伟清 | 晶圆表面局部定位清洗方法 |
CN102194726A (zh) * | 2011-05-23 | 2011-09-21 | 叶伟清 | 晶圆表面局部定位采样方法 |
CN102214553A (zh) * | 2011-05-23 | 2011-10-12 | 叶伟清 | 晶圆端面清洗方法 |
EP3900618A1 (en) * | 2014-10-17 | 2021-10-27 | G-Tech Medical, Inc. | Systems and methods for processing electromyographic signals of the gastrointestinal tract |
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JP6916003B2 (ja) * | 2017-02-24 | 2021-08-11 | 株式会社Screenホールディングス | 基板処理方法および基板処理装置 |
KR102116534B1 (ko) * | 2018-06-25 | 2020-05-28 | 주식회사 에이치에스하이테크 | 기판 세정용 노즐 및 그 제조 방법 |
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-
2004
- 2004-09-30 US US10/957,260 patent/US7520285B2/en not_active Expired - Fee Related
-
2005
- 2005-09-21 SG SG200506095A patent/SG121162A1/en unknown
- 2005-09-27 EP EP05256011.7A patent/EP1643541B1/en not_active Not-in-force
- 2005-09-27 TW TW094133482A patent/TWI278358B/zh not_active IP Right Cessation
- 2005-09-29 JP JP2005283367A patent/JP4578373B2/ja not_active Expired - Fee Related
- 2005-09-29 MY MYPI20054608A patent/MY163666A/en unknown
- 2005-09-30 KR KR1020050092631A patent/KR101164826B1/ko active IP Right Grant
- 2005-09-30 CN CN2005101283102A patent/CN1794420B/zh not_active Expired - Fee Related
-
2009
- 2009-03-13 US US12/381,643 patent/US7862663B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2003142450A (ja) * | 2001-11-08 | 2003-05-16 | Seiko Epson Corp | 表面処理装置および表面処理方法 |
JP2003151948A (ja) * | 2001-11-08 | 2003-05-23 | Seiko Epson Corp | 表面処理装置および表面処理方法 |
Also Published As
Publication number | Publication date |
---|---|
EP1643541B1 (en) | 2014-02-26 |
US7862663B2 (en) | 2011-01-04 |
US20060005860A1 (en) | 2006-01-12 |
MY163666A (en) | 2017-10-13 |
JP2006148069A (ja) | 2006-06-08 |
CN1794420B (zh) | 2010-11-03 |
KR20060051981A (ko) | 2006-05-19 |
TWI278358B (en) | 2007-04-11 |
CN1794420A (zh) | 2006-06-28 |
EP1643541A3 (en) | 2011-03-09 |
KR101164826B1 (ko) | 2012-07-11 |
US20090176360A1 (en) | 2009-07-09 |
EP1643541A2 (en) | 2006-04-05 |
US7520285B2 (en) | 2009-04-21 |
SG121162A1 (en) | 2006-04-26 |
TW200628236A (en) | 2006-08-16 |
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