JP4884370B2 - Brittle material sheet cutting method and apparatus - Google Patents

Description

  The present invention relates to a method and an apparatus for cutting a brittle material plate such as a glass plate or a ceramic plate into a lattice shape using a laser beam.

  Conventionally, a glass plate cutting method is known in which a glass plate is scribed using laser light and then the glass plate is cut using laser light.

And the method of cut | disconnecting a glass plate in a grid | lattice form using a laser beam is also proposed (refer patent document 1).
JP 2000-61677 A

  In the method described in Patent Document 1, in the case where secondary cutting is performed in a direction orthogonal to the primary cutting line using a laser cutting device, in consideration of the inconvenience that propagation of cracks stops before the intersection, In order to perform secondary cutting regardless of inconvenience, preliminary cutting grooves are also provided in advance at portions where cutting lines intersect.

  Therefore, not only a cutting process using a laser beam but also an extra preliminary cutting groove forming process is required, and the process becomes complicated as a whole. And this complication becomes remarkable according to the increase in a primary cutting line, and the increase in a secondary cutting line.

  Further explanation will be given.

  In the glass substrate cutting method of Patent Document 1, it is common to use an apparently flat table without paying special attention to the glass substrate holding method.

  When the glass substrate is cut in a lattice shape with the glass substrate held in this manner, the peripheral portion is often not supported because the central portion of the table is supported by, for example, a rotary motor. When the peripheral portion of the table is not supported, the table is deflected by its own weight, and a convex warp occurs. Further, the table is partially convexly warped due to the influence of the processing accuracy of the table.

  Further, even in the glass substrate itself, a convex warpage occurs partially due to the influence of the flatness of the glass.

  When such convex warpage occurs, the cut portions are separated from each other, and when the glass substrate is cut using a laser beam in a direction intersecting with the portions, the propagation of cracks may be interrupted. And the success rate of cutting the glass substrate in the cross direction decreases.

  This inconvenience is considered to occur in the same way when not only a glass plate but also a ceramic plate, a wafer or the like is cut into a lattice shape using a laser beam.

  The present invention has been made in view of the above-mentioned problems, and brittle material plate cutting that can cut a brittle material plate into a lattice shape using laser light without forming an extra preliminary cut groove. It is an object to provide a method and an apparatus thereof.

  In the brittle material sheet cutting method of the present invention, the brittle material sheet is cut in the first direction using a laser beam in a state where the brittle material sheet is supported on the support base, and then supported on the support base. By applying an external force to the brittle material plate, the cut portions are brought into pressure contact with each other, and in this state, the brittle material plate is cut in a second direction orthogonal to the first direction using a laser beam. is there.

  Here, the external force is generally a force positively given by some mechanism, but can also include a force given as a result, such as a force acting due to the weight of the glass substrate. Examples of the brittle material plate include a glass plate, a ceramic plate, and a wafer. The first direction is a direction in which the brittle material plate is first cut, and can be arbitrarily set.

  In this case, by changing the flatness of the upper surface of the support base, an external force may be applied to the brittle material plate so that the cut portions may be pressed against each other, or the upper surface of the support base may be changed into a concave shape. Thus, the portions cut by applying an external force to the brittle material plate may be brought into pressure contact with each other.

  In addition, the flatness of the support base or the brittle material plate is measured, and according to the necessity to be determined based on the measurement result, an external force is applied to the brittle material plate so that the cut parts are pressed against each other. It is preferable to change the flatness of the upper surface of the table and / or to change the upper surface of the support table into a concave shape.

  Furthermore, it is preferable to adsorb the brittle material plate on the support base.

  The brittle material sheet cutting apparatus according to the present invention includes a support base for supporting the brittle material sheet, a cutting means for cutting the brittle material sheet using a laser beam, and the support base and the cutting means relatively first. The plate made of brittle material is moved while the moving means for moving in the second direction and then moving in the second direction orthogonal to the first direction, and the support base and the cutting means are relatively moved in the second direction. And an external force means for applying an external force so as to press the cut portions.

  Here, the external force is generally a force positively given by some mechanism, but can also include a force given as a result, such as a force acting due to the weight of the glass substrate. Examples of the brittle material plate include a glass plate, a ceramic plate, and a wafer.

  In this case, the external force means may be one that presses the cut parts by applying an external force to the brittle material plate by changing the flatness of the upper surface of the support base, or By changing the upper surface into a concave shape, an external force may be applied to the brittle material plate to bring the cut portions into pressure contact with each other.

  Further, it further includes a flatness measuring means for measuring the flatness of the support base or the brittle material plate, and as an external force means, the external force is applied to the brittle material plate according to the necessity determined based on the measurement result. In order to bring the formed portions into pressure contact with each other, it is preferable to adopt a configuration in which the flatness of the upper surface of the support base is changed and / or the upper surface of the support base is changed into a concave shape.

  In these cases, the support base includes a lower plate member, an upper plate member, a connecting member that connects the lower plate member and the upper plate member at least in the center portion, and the upper plate member as a peripheral portion and / or a peripheral portion. May include a separating member that is separated from the lower plate member, or the lower plate member, the upper plate member, and the lower plate member and the upper plate member are connected to each other in a state of being separated from each other by a predetermined distance in the peripheral portion. The connecting member and an approach member that causes the upper plate member to approach the lower plate member at least in the center may be included.

  The upper plate member may include an adsorbing unit that adsorbs and holds the brittle material plate, or may include an electrostatic unit that electrostatically holds the brittle material plate.

  Furthermore, the support base may include a lower plate member and a protrusion member protruding from the lower plate member in the first direction and extending in the first direction. In this case, the lower plate member is brittle. It is preferable that a suction means for sucking and holding the material plate is included.

  With the brittle material sheet cutting method of the present invention, after cutting the brittle material sheet in the first direction using a laser beam, an external force is applied to the brittle material sheet to press the cut portions together. In this state, it is possible to cut the brittle material plate in the second direction orthogonal to the first direction by using laser light without providing an extra preliminary cutting groove, and cracks beyond the intersection. Since it can be propagated, there can be virtually no failure in cutting in the second direction.

  The brittle material sheet cutting method of the present invention can simplify processing as a whole by eliminating the need for providing an extra preliminary cutting groove, and also cutting in a second direction orthogonal to the first direction. There is a peculiar effect that almost no failure can be made.

  The brittle material sheet cutting apparatus of the present invention can simplify the overall configuration by eliminating the need for a mechanism for providing an extra preliminary cutting groove, and can also cut in a second direction orthogonal to the first direction. There is a peculiar effect that almost no failure can be made.

  DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments of a brittle material sheet cutting method and apparatus according to the present invention will be described in detail with reference to the accompanying drawings.

  In the following, glass will be described as an example of the brittle material, but the present invention can be similarly applied when other brittle materials are used.

  FIG. 1 is a schematic perspective view showing an embodiment of a glass sheet cutting apparatus to which the brittle material sheet cutting method of the present invention is applied.

The glass plate cutting apparatus includes a rotary table 1 that supports a glass plate 10 to be cut, an X-axis drive member 2 that translates the rotary table 1 in directions orthogonal to each other in a plane parallel to the glass plate, and a Y-axis. A driving member 3, a laser cutting unit 4 that cuts the glass plate 10 using laser light, a rotary table 1, an X-axis driving member 2, a Y-axis driving member 3, and a controller 5 that controls the laser cutting unit 4. Have. A displacement meter 6 is used to measure the flatness of the upper surface of the rotary table 1 and the upper surface of the glass plate 10. As this displacement meter 6, those of various known configurations such as a mechanical displacement meter and an optical displacement meter can be used.

  FIG. 2 is a schematic perspective view illustrating a process of cutting the glass plate 10 using laser light.

  A cutting line 10b is assumed for the glass plate 10, and a notch (preliminary cutting groove) 10a is formed at a cutting start position by a conventionally known method.

  Then, starting from the notch 10a, along the cutting line 10b, first, a laser beam (scribe beam) 4a is irradiated to cause local thermal expansion to generate a compressive stress, and then a mist (quenching water) 4b. Is supplied to the portion irradiated with the laser beam and locally contracted to generate tensile stress. By these processes (scribe process), microcracks can be continuously grown. This continuously grown microcrack is called a scribe line.

  After scribing, a laser beam (break beam) 4c is irradiated to locally expand the portion where the microcracks are continuously grown to generate a compressive stress, and the scribe line is grown to the back surface of the glass plate 10. Cutting of the glass plate 10 can be achieved (see FIG. 3). In addition, the line which a scribe line grows to the back surface of the glass plate 10 is called a break line.

Accordingly, the Y-axis drive member 3 is so arranged that the irradiation of the scribe beam 4a, the supply of the quenching water 4b, and the irradiation of the break beam 4c are performed on the glass plate 10 in this order.
Is operated, the glass plate 10 can be cut in the first direction. Thereafter, the X-axis driving member 2 is operated to set different positions. In this state, the scribe beam 4a is irradiated, the quenching water 4b is supplied, and the break beam 4c is irradiated in this order on the glass plate 10. Thus, by operating the Y-axis drive member 3, the glass plate 10 can be cut in the first direction at different positions. In the same manner, the glass plate 10 can be cut in the first direction at a desired location.

After cutting the glass plate 10 in the first direction a desired number of times in this way, the cut portions of the glass plate 10 are brought into contact with each other (pressure contact) by applying an external force, and the first direction. The rotating table 1 is rotated by 90 degrees so that the irradiation with the scribe beam 4a, the supply of the quenching water 4b, and the irradiation with the break beam 4c are performed on the glass plate 10 in this order in a second direction orthogonal to In this state, the glass plate 10 can be cut in the second direction by operating the Y-axis driving member 3. Then, X-axis drive member 2
The Y-axis driving member is set so that irradiation with the scribe beam 4a, supply of the quenching water 4b, and irradiation with the break beam 4c are performed in this order on the glass plate 10 in this order. By operating 3 at different positions,
The glass plate 10 can be cut in the second direction. In the same manner, the glass plate 10 can be cut in the second direction at a desired location.

  When the glass plate 10 is cut in the second direction, an external force is applied to bring the cut portions of the glass plate 10 into contact with each other (pressure contact), so that the microcracks are interrupted. Therefore, it is possible to continuously grow, there is no need to form an extra preliminary cutting groove, and it is possible to almost eliminate the failure of cutting in the second direction.

  FIG. 4 is a schematic perspective view showing an example of a mechanism for bringing the cut portions of the glass plates 10 into contact with each other by applying an external force (pressure contact), and FIG. 5 is a schematic front view for explaining an external force non-operation state. FIG. 6 is a schematic front view for explaining an external force acting state.

In this mechanism, the rotary table 1 has a center parallel to the first direction so as to connect the square lower plate member 1a, the square upper plate member 1b, and the lower plate member 1a and the upper plate member 1b to each other. A spacer 1c interposed along the axis, a connecting member 1k, and an actuator 1d provided at a corner portion of the lower plate member 1a and lifting the corner portion of the upper plate member 1b. The upper plate member 1b has a vacuum suction mechanism in which a plurality of holes are provided to make the holes negative pressure, or a porous surface that makes them negative pressure, or static electricity using electrostatic force is used. It is preferable to have an electric chuck or an adhesive sheet. Here, the pressure-sensitive adhesive sheet is a general one (for example, a polyolefin, polyester, vinyl chloride, polyimide, fluororesin, etc. as a base material and made of acrylic, silicon, or other pressure-sensitive adhesive), and is adhered by ultraviolet irradiation. Those that lose strength (for example, those made of a polyolefin resin as a base material and made of an acrylic pressure-sensitive adhesive), or those that have adhesive strength at room temperature and decrease or disappear when cooled (for example, PET) Examples thereof include a film as a base material and a thermosensitive adhesive.

  In this case, the upper plate member 1b can be deformed into a concave shape by the actuator 1d, and the cut portions of the glass plate 10 can be brought into contact with each other (pressure contact).

  FIG. 7 is a schematic perspective view showing another example of a mechanism for bringing the cut portions of the glass plates 10 into contact with each other by applying an external force (pressure contact), and FIG. 8 is a schematic front view illustrating a state in which no external force is applied. FIG. 9 is a schematic front view for explaining the external force acting state.

  In this mechanism, the rotary table 1 has a center parallel to the first direction so as to connect the square lower plate member 1a, the square upper plate member 1b, and the lower plate member 1a and the upper plate member 1b to each other. A spacer 1c interposed along the axis, a connecting member 1k, a movable taper member 1f provided at a corner of the lower plate member 1a and reciprocated in the second direction by an actuator 1e, and an upper plate member 1b The fixed taper member 1g which is provided at the corner portion of the slab and engages with the movable taper member 1f. The upper plate member 1b has a vacuum suction mechanism in which a plurality of holes are provided to make the holes negative pressure, or a porous surface that makes them negative pressure, or static electricity using electrostatic force is used. It is preferable to have an electric chuck or an adhesive sheet. Here, examples of the pressure-sensitive adhesive sheet include a sheet that loses adhesive force by irradiation with ultraviolet light, or a sheet that has adhesive force at room temperature and decreases or disappears when cooled.

  In this case, by moving the movable taper member 1f away from the spacer 1c by the actuator 1e and engaging with the fixed taper member 1g, the upper plate member 1b can be deformed into a concave shape. The cut parts can be brought into contact with each other (pressure contact).

  In the above embodiment, the actuator 1d, the actuator 1e, the movable taper member 1f, and the fixed taper member 1g are provided only at the corner portion, but are provided not only at the corner portion but also at other portions near the center, The rising distance of the upper plate member 1b by these can be changed according to the attachment position, and the same effect can be achieved.

  FIG. 10 is a schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plate 10 into contact with each other by applying an external force (pressure contact), and FIG. 11 is a schematic for explaining a state in which no external force is applied. FIG. 12 is a schematic front view illustrating an external force acting state.

In this mechanism, the rotary table 1 is arranged in parallel with the first direction so as to connect the rectangular lower plate member 1a, the rectangular upper plate member 1b, and the lower plate member 1a and the upper plate member 1b to each other. A pair of support rollers 1h interposed between the peripheral portions of the members, and an actuator 1i that is provided along a central axis parallel to the first direction of the lower plate member 1a and attracts a corresponding portion of the upper plate member 1b. It consists of and. The upper plate member 1b has a vacuum suction mechanism in which a plurality of holes are provided to make the holes negative pressure, or a porous surface that makes them negative pressure, or static electricity using electrostatic force is used. It is preferable to have an electric chuck or an adhesive sheet. Here, examples of the pressure-sensitive adhesive sheet include a sheet that loses adhesive force by irradiation with ultraviolet light, or a sheet that has adhesive force at room temperature and decreases or disappears when cooled.

  In this case, the upper plate member 1b can be deformed into a concave shape by the actuator 1i, and the cut portions of the glass plate 10 can be brought into contact (pressure contact) with each other.

The glass plate 10 applied to the embodiment shown in FIGS. 4 to 12 may be a single glass plate or may be a single glass plate integrated in a two-layer manner.

  FIG. 13 is a schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plate 10 into contact with each other by applying an external force.

  In this mechanism, the rotary table 1 includes a rectangular lower plate member 1a and long projection members 1j provided in peripheral portions of the lower plate member 1a facing each other in parallel with the first direction. An example of the long protruding member 1j is a tape having a predetermined thickness.

  The connecting member 1j can be changed in the degree of protrusion, that is, the amount of deformation of the glass, or the glass can be made horizontal by an actuator (not shown).

However, the embodiment of FIG. 13 is applicable only when the upper glass plate is cut into a lattice shape among the two glass plates integrated in a stacked manner. The reason is that the presence of an uncut glass plate is a condition for deforming into a concave shape under the influence of the stepped portion due to the presence of the long projection member 1j and its own weight. . However, even if a film or sheet is applied in the direction opposite to the back side of the glass, that is, the irradiation side of the cutting beam, even one sheet can be used.

  FIG. 14 is a partially cutaway schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plate 10 into contact with each other by applying an external force (pressure contact).

  This mechanism includes a rotary table 1 having a rectangular lower plate member 1a, a rectangular upper plate member 1b, a connecting member 1k for connecting the lower plate member 1a and the upper plate member 1b to each other, and a lower plate member 1a. A movable taper member 1f provided corresponding to a predetermined position on each side and reciprocated in a direction orthogonal to the corresponding side by the actuator 1e, and a corresponding predetermined position (movable taper) of the upper plate member 1b. The fixed taper member 1g provided at a predetermined position corresponding to the member 1f and engaged with the movable taper member 1f, and the upper plate member 1b provided at the center of each side of the upper surface of the lower plate member 1a. The spacer 1m for supporting the place to be mounted and the lower surface of the lower plate member 1a are provided corresponding to the center of each side, and the connecting and fixing member 1p is reciprocated in the contact / separation direction outside the lower plate member 1a. Actu 1n, an engagement hole 1q formed on the outer surface of each side of the upper plate member 1b, and a protruding member provided at a predetermined upper position of the coupling fixing member 1p and engageable with the corresponding engagement hole 1q. 1r. The upper plate member 1b has a vacuum suction mechanism in which a plurality of holes are provided to make the holes negative pressure, or a porous surface that makes them negative pressure, or static electricity using electrostatic force is used. It is preferable to have an electric chuck or an adhesive sheet. Here, examples of the pressure-sensitive adhesive sheet include a sheet that loses adhesive force by irradiation with ultraviolet light, or a sheet that has adhesive force at room temperature and decreases or disappears when cooled.

In this case, a pair of connecting and fixing members 1p facing each other in one direction are operated to engage the projecting member 1r with the engaging hole 1q, and the upper side of the corresponding side of the upper plate member 1b is moved upward. The upper plate member 1b can be deformed into a concave shape by preventing the deformation and moving the movable taper member 1f away from the spacer 1c by the actuator 1e corresponding to the other side and engaging with the fixed taper member 1g. The cut portions of the glass plate 10 can be brought into contact with each other (pressure contact).

  In addition, the direction in which the upper plate member 1b is deformed into a concave shape can be freely selected. Therefore, when cutting the glass plate 10 into a lattice shape, the first direction is set to the lateral direction as shown in FIG. 15A in consideration of work convenience and ease of cutting. Even if it is set in the vertical direction as shown in FIG. 15B, it can be easily dealt with.

  FIG. 16 is a schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plate 10 into contact with each other by applying an external force.

  This mechanism includes an actuator 1s1 that connects a rotary table 1 to a rectangular lower plate member 1a, a rectangular upper plate member 1b, and a lower plate member 1a and an upper plate member 1b at nine locations in three rows and three columns. , 1s2,... 1s9. The upper plate member 1b has a vacuum suction mechanism in which a plurality of holes are provided to make the holes negative pressure, or a porous surface that makes them negative pressure, or static electricity using electrostatic force is used. It is preferable to have an electric chuck or an adhesive sheet. Here, examples of the pressure-sensitive adhesive sheet include a sheet that loses adhesive force by irradiation with ultraviolet light, or a sheet that has adhesive force at room temperature and decreases or disappears when cooled.

  In this case, the actuators corresponding to the first row and the third row are operated in the protruding direction, and the actuator corresponding to the second row is operated in the retracting direction, and the first column and the third column are corresponded. By selecting the state in which the actuator is operated in the protruding direction and the actuator corresponding to the second row is operated in the retracting direction, the direction in which the upper plate member 1b is deformed into the concave shape can be freely selected. Therefore, when cutting the glass plate 10 into a lattice shape, the first direction is set to the lateral direction as shown in FIG. 15A in consideration of work convenience and ease of cutting. Even if it is set in the vertical direction as shown in FIG. 15B, it can be easily dealt with.

  However, it is also possible to arbitrarily set the deformation degree (curvature) of the upper plate member 1b by arranging the actuators in 4 rows and 4 columns or more.

  Examples of the actuator used in each of the above embodiments include a pneumatic drive mechanism capable of reciprocating movement, a linear movement mechanism utilizing a screw shape, a piezo element, a rotating cam mechanism, and an actuator utilizing a bimetal effect. As long as a reciprocating operation is possible as a result, another method may be used. The degree of deformation of the upper plate member 1b can be adjusted by controlling the operation amount of the actuator.

  The present invention is not limited to the above-described embodiment, and it is possible to adopt a device utilizing the bimetal effect as a means for deforming the table. In addition, the table 1 is simply tilted, and the glass plate 10 is self-weighted. The cut portions can be brought into contact with each other, and a chuck mechanism for sandwiching the glass plate 10 as a whole can be provided. Furthermore, it is also possible to affix on the lower surface of a glass plate in the state which pulled the adhesive tape.

Further, the flatness of the upper surface of the rotary table 1 and the upper surface of the brittle material plate is measured in advance using a mechanical displacement meter, an optical displacement meter, etc., and the flatness of the upper surface of the rotary table 1 is changed according to the measurement result. Or can be warped concavely.

It is a schematic perspective view which shows one Embodiment of the glass plate cutting device with which the brittle material board cutting method of this invention is applied. It is a schematic perspective view explaining the process which cut | disconnects a glass plate using a laser beam. It is a schematic longitudinal cross-sectional view explaining the process which cut | disconnects a glass plate using a laser beam. It is a schematic perspective view which shows an example of the mechanism which makes the part cut | disconnected of the glass plate mutually contact (press-contact) by making an external force act. It is a schematic front view explaining an external force non-action state. It is a schematic front view explaining an external force action state. It is a schematic perspective view which shows the other example of the mechanism in which the part which the glass plate cut | disconnected mutually is made to contact (press-contact) by applying an external force. It is a schematic front view explaining an external force non-action state. It is a schematic front view explaining an external force action state. It is a schematic perspective view which shows the further another example of the mechanism which makes the part which the glass plate cut | disconnected mutually contacted by applying external force (pressure contact). It is a schematic front view explaining an external force non-action state. It is a schematic front view explaining an external force action state. It is a schematic perspective view which shows the further another example of the mechanism which makes the part which the glass plate cut | disconnected mutually contacted by applying external force (pressure contact). It is a schematic perspective view which shows the further another example of the mechanism which makes the part which the glass plate cut | disconnected mutually contacted by applying external force (pressure contact). It is the schematic explaining the 1st direction in the case of cut | disconnecting a glass plate in a grid | lattice form, and a 2nd direction. It is a schematic perspective view which shows the further another example of the mechanism which makes the part which the glass plate cut | disconnected mutually contacted by applying external force (pressure contact).

Explanation of symbols

1 Rotary table (support)
2 X-axis moving member (moving means)
3 Y-axis drive member (moving means)
4 Laser cutting unit (cutting means)
6 Displacement meter (flatness measuring means)
10 Glass plate (brittle material plate)
1a Lower plate member 1b Upper plate member 1c Spacer 1d Actuator (external force means)
1e Actuator (External force means)
1f Movable taper member (external force means)
1g Fixed taper member (external force means)
1h Support roller (external force means)
1i Actuator (External force means)
1j Long projection member 1k Connecting member 1s1, 1s9 Actuator

Claims (15)

  In a state where the brittle material plate (10) is supported on the support base (1), the brittle material plate (10) is cut in the first direction using a laser beam, and then the support base (1) is supported. The portions cut by applying an external force to the brittle material plate (10) are pressed against each other, and in this state, the brittle material plate (in a second direction orthogonal to the first direction is used by using laser light). 10. A method for cutting a brittle material made by cutting 10).   The method of cutting a brittle material plate according to claim 1, wherein the cut portions of the brittle material plate (10) are pressed by applying an external force by changing the flatness of the upper surface of the support base (1).   The brittle material sheet cutting method according to claim 1, wherein by cutting an upper surface of the support base (1) into a concave shape, an external force is applied to the brittle material sheet (10) to press the cut portions. The flatness of the support (1) or brittle material-made plate (10) is previously measured, the measurement results depending, brittle material-made plate (10) in order to press the cut portions together by applying an external force the brittle material-made plate cutting method according to claim 1 for changing the flatness of the upper surface of the support base (1) in a concave shape. The brittle material sheet cutting method according to any one of claims 1 to 4, wherein the brittle material sheet (10) is adsorbed on the support base (1). A support base (1) for supporting the brittle material plate (10), a cutting means (4) for cutting the brittle material plate (10) using laser light, a support base (1) and a cutting means (4). Moving means ( 2 ) (3), supporting base (1) and cutting means (4) that are moved relatively in the first direction and then moved in the second direction orthogonal to the first direction. Are moved in the second direction relatively so that the flatness of the upper surface of the brittle material plate (10) is changed so that the cut portions of the brittle material plate (10) are brought into pressure contact with each other. External force means (1d) (1e) (1f) (1g) (1i) (1s1) (1s2) (1s3) (1s4) (1s5) (1s6) (1s7) (1s8) (1s9) A brittle material sheet cutting apparatus comprising:   External force means (1d) (1e) (1f) (1g) (1i) (1s1) (1s2) (1s3) (1s4) (1s5) (1s6) (1s7) (1s8) (1s9) The apparatus for cutting a brittle material plate according to claim 6, wherein the cut portion is pressed by applying an external force to the brittle material plate (10) by changing the flatness of the upper surface.   External force means (1d) (1e) (1f) (1g) (1i) (1s1) (1s2) (1s3) (1s4) (1s5) (1s6) (1s7) (1s8) (1s9) The apparatus for cutting a brittle material according to claim 6, wherein the cut portion is pressed by applying an external force to the brittle material plate (10) by changing the upper surface of the plate to a concave shape. It further includes flatness measuring means (6) for measuring the flatness of the support base (1) or the brittle material plate (10), and external force means (1d) (1e) (1f) (1g) (1i) (1s1) (1s2) (1s3) (1s4 ) (1s5) (1s6) (1s7) (1s8) (1s9) is, depending on the measurement result, is cleaved by the action of an external force to the brittle material-made plate (10) portion to press to each other, brittle material-made plate cutting device according to claim 6 flatness of the upper surface is intended to vary in a concave shape of the support (1). The support base (1) includes a lower plate member (1a), an upper plate member (1b), and a connecting member (1k) that connects the lower plate member (1a) and the upper plate member (1b) to each other at least in the center. And a separating member (1d) (1e) (1f) (1g) for separating the upper plate member (1b) from the lower plate member (1a) at the peripheral portion and the peripheral portion. A brittle material sheet cutting device according to any one of the preceding claims . The support base (1) connects the lower plate member (1a), the upper plate member (1b), the lower plate member (1a), and the upper plate member (1b) to each other in a state where they are separated from each other by a predetermined distance. 10. The claim according to any one of claims 6 to 9, comprising a connecting member (1h) and an approach member (1i) for causing the upper plate member (1b) to approach the lower plate member (1a) at least in the center. The brittle material plate cutting device according to item .   The brittle material plate cutting apparatus according to claim 10 or 11, wherein the upper plate member (1b) includes an adsorbing means for adsorbing and holding the brittle material plate (10).   The brittle material plate cutting apparatus according to claim 10 or 11, wherein the upper plate member (1b) includes electrostatic means for electrostatically holding the brittle material plate (10). The support base (1) includes a lower plate member (1a) and a ridge member (1j) protruding from the lower plate member (1a) on the upper surface of the peripheral portion extending in the first direction. The board | plate cutting apparatus made from a brittle material as described in any one of Claim 9 to Claim 9.   15. The brittle material plate cutting apparatus according to claim 14, wherein the lower plate member (1a) includes a suction means for sucking and holding the brittle material plate (10).

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