WO2006090632A1 - Method and device for cutting fragile material plate - Google Patents
Method and device for cutting fragile material plate Download PDFInfo
- Publication number
- WO2006090632A1 WO2006090632A1 PCT/JP2006/302714 JP2006302714W WO2006090632A1 WO 2006090632 A1 WO2006090632 A1 WO 2006090632A1 JP 2006302714 W JP2006302714 W JP 2006302714W WO 2006090632 A1 WO2006090632 A1 WO 2006090632A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- brittle material
- material plate
- plate member
- support base
- external force
- Prior art date
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Classifications
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/09—Severing cooled glass by thermal shock
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/03—Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/0222—Scoring using a focussed radiation beam, e.g. laser
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/033—Apparatus for opening score lines in glass sheets
Definitions
- the present invention relates to a method and an apparatus for cutting a brittle material plate such as a glass plate or a ceramic plate into a lattice shape using a laser beam.
- Patent Document 1 JP 2000-61677 A
- Patent Document 1 takes into account the inconvenience that the propagation of cracks stops before the intersection when secondary cutting is performed in a direction orthogonal to the primary cutting line using a laser cutting device.
- a preliminary cutting groove is provided in advance at a portion where the cutting lines intersect.
- the central portion of the table is supported by, for example, a rotary motor, and thus the peripheral portion is not supported. If the peripheral part of the table is not supported, the table will bend due to its own weight, causing a convex warp. In addition, the influence of the processing accuracy of the table In response, a partial convex warpage occurs in the table.
- the present invention has been made in view of the above problems, and is a brittle material capable of cutting a brittle material plate into a lattice shape using laser light without forming an extra preliminary cut groove.
- the purpose of the present invention is to provide a method and apparatus for cutting a metal plate!
- the brittle material sheet cutting method of the present invention is cut in the first direction using a laser beam in a state where the brittle material sheet is supported on a support base, and then supported.
- the parts cut by applying an external force to the brittle material plate supported on the table are pressed against each other, and in this state, the brittle material is made in the second direction perpendicular to the first direction using a laser beam. This is a method of cutting a plate.
- the external force can include a force applied as a result, such as a force acting by the weight of the glass substrate, which is generally a force positively applied by some mechanism.
- a force applied as a result such as a force acting by the weight of the glass substrate, which is generally a force positively applied by some mechanism.
- the brittle material plate include a glass plate, a ceramic plate, and a wafer.
- the first direction is a direction in which the brittle material plate is first cut, and can be arbitrarily set.
- an external force may be applied to the brittle material plate so that the cut portions are pressed against each other, or the upper surface of the support table is concave. It is also possible to press the parts cut by applying an external force to the brittle material plate.
- the flatness of the support base or the brittle material plate is measured and determined based on the measurement result! If necessary, change the flatness of the upper surface of the support base and press the Z or the upper surface of the support base into a concave shape in order to bring the cut parts into pressure contact with each other by applying an external force to the brittle material plate. It is preferable to change.
- the brittle material plate is adsorbed on the support base.
- the brittle material plate cutting apparatus of the present invention includes a support base for supporting the brittle material plate, a cutting means for cutting the brittle material plate using laser light, and the support base and the cutting means. Between the moving means for moving in the first direction and then moving in the second direction orthogonal to the first direction, and the support base and the cutting means relatively moving in the second direction. And an external force means for applying an external force so that the cut portions of the brittle material plate are brought into pressure contact with each other.
- the external force may include a force that is applied as a result, such as a force that is applied by the weight of the glass substrate.
- the brittle material plate include a glass plate, a ceramic plate, and a wafer.
- the external force means may be one that presses the cut portions by applying an external force to the brittle material plate by changing the flatness of the upper surface of the support base.
- an external force may be applied to the brittle material plate to bring the cut portions into pressure contact with each other.
- it further includes a flatness measuring means for measuring the flatness of the support base or the brittle material plate, and the external force is applied to the brittle material plate according to the necessity determined based on the measurement result.
- a flatness measuring means for measuring the flatness of the support base or the brittle material plate, and the external force is applied to the brittle material plate according to the necessity determined based on the measurement result.
- the support table includes a lower plate member, an upper plate member, a connecting member that connects the lower plate member and the upper plate member at least in the center, and an upper plate.
- a separation member that separates the lower plate member force at the peripheral portion and the Z portion or the peripheral portion, or the lower plate member, the upper plate member, the lower plate member, and the upper plate member may be included in the peripheral portion.
- it may include a connecting member that is connected to each other in a state of being separated by a predetermined distance, and an access member that moves the upper plate member at least in the center and approaches the lower plate member!
- the upper plate member may include an adsorption unit that adsorbs and holds the brittle material plate, or may include an electrostatic unit that electrostatically holds the brittle material plate.
- the support base may include a lower plate member, and a protrusion member protruding from the lower plate member on the upper surface of the peripheral portion extending in the first direction. It preferably includes an adsorption means for adsorbing and holding a brittle material plate.
- the brittle material sheet cutting method of the present invention after cutting the brittle material sheet in the first direction using laser light, the portions cut by applying an external force to the brittle material sheet In this state, it is possible to cut the brittle material plate in the second direction perpendicular to the first direction by using laser light without providing an extra preliminary cutting groove, exceeding the intersection. Cracks can be propagated, so there is almost no failure of cutting in the second direction.
- the brittle material sheet cutting apparatus of the present invention After cutting the brittle material sheet in the first direction using laser light, the portions cut by applying an external force to the brittle material sheet In this state, it is possible to cut the brittle material plate in the second direction perpendicular to the first direction by using laser light without providing an extra preliminary cutting groove, exceeding the intersection. Cracks can be propagated, so there is almost no failure of cutting in the second direction.
- the brittle material sheet cutting method of the present invention makes it possible to simplify the entire process by eliminating the need for providing an extra preliminary cutting groove, and the force is also perpendicular to the first direction. There is a unique effect that cutting failure in the two directions can be almost eliminated.
- the brittle material sheet cutting device of the present invention eliminates the need for a mechanism for providing an extra preliminary cutting groove and can simplify the overall configuration, and the force is also perpendicular to the first direction. There is a unique effect that cutting failure in the two directions can be almost eliminated.
- FIG. 1 is a schematic perspective view showing an embodiment of a glass sheet cutting apparatus to which the brittle material sheet cutting method of the present invention is applied.
- the present glass plate cutting apparatus translates the rotary table 1 that supports the glass plate 10 to be cut, and the rotary table 1 in a plane parallel to the glass plate in directions orthogonal to each other X Axis
- a knit 4, a rotary table 1, an X-axis drive member 2, a Y-axis drive member 3, and a controller 5 that controls the laser cutting unit 4 are provided.
- a displacement meter 6 is used to measure the flatness of the upper surface of the rotary table 1 and the upper surface of the glass plate 10.
- various conventionally known configurations such as a mechanical displacement meter and an optical displacement meter can be used.
- FIG. 2 is a schematic perspective view illustrating a process of cutting the glass plate 10 using laser light.
- a cutting line 10b is assumed for the glass plate 10, and a notch (preliminary cutting groove) 10a is formed at a cutting start position by a conventionally known method.
- a laser beam (scribe beam) 4a is irradiated to cause local thermal expansion to generate a compressive stress.
- Nintendo Water) 4b is supplied to the portion irradiated with the laser beam and locally contracted to generate tensile stress.
- a laser beam (break beam) 4c is irradiated to locally expand the portion where the microcracks are continuously grown to generate a compressive stress, and the scribe line extends to the back surface of the glass plate 10. It can be grown to achieve cutting of the glass plate 10 (see Figure 3). A line in which the scribe line grows to the back surface of the glass plate 10 is called a break line. [0037] Therefore, by operating the Y-axis drive member 3 so that the irradiation of the scribe beam 4a, the supply of the quencher water 4b, and the irradiation of the break beam 4c are performed on the glass plate 10 in this order, the first axis is operated. The glass plate 10 can be cut in the direction of. Then, move the X-axis drive member 2 to set a different position. In this state, the scribe beam
- the glass plate 10 By operating the Y-axis drive member 3 so that the irradiation of 4a, the supply of quencher water 4b, and the irradiation of the break beam 4c are performed in this order on the glass plate 10, at different positions in the first direction
- the glass plate 10 can be cut.
- the glass plate 10 can be cut in the first direction at a desired location.
- the cut portions of the glass plate 10 are brought into contact (pressure contact) with each other by applying an external force.
- Turn table 1 90 degrees so that irradiation of scribe beam 4a, supply of quenching tower 4b, irradiation of break beam 4c is performed on glass plate 10 in this order in a second direction orthogonal to the direction of 1.
- the glass plate 10 can be cut in the second direction. Thereafter, the X-axis drive member 2 is operated to set different positions. In this state, the irradiation of the scribe beam 4a, the supply of the quencher water 4b, and the irradiation of the break beam 4c are applied to the glass plate 10 in this order. As performed, the glass plate 10 can be cut in the second direction at different positions by operating the Y-axis drive member 3. Thereafter, the glass plate 10 can be cut in the second direction in the same manner in the same manner.
- FIG. 4 is a schematic perspective view showing an example of a mechanism for bringing the cut portions of the glass plate 10 into contact with each other by applying an external force (pressure contact), and FIG. 5 shows a state in which no external force is applied.
- FIG. 6 is a schematic front view for explaining an external force acting state.
- This mechanism includes the rotary table 1 in a first direction so as to connect the rectangular lower plate member la, the rectangular upper plate member lb, and the lower plate member la and the upper plate member lb to each other.
- a spacer lc interposed along a parallel central axis, a connecting member lk, and an actuator Id provided at a corner portion of the lower plate member la and lifting the corner portion of the upper plate member lb.
- the upper plate member lb has a vacuum suction mechanism in which a plurality of holes are provided to make the holes negative pressure, or a porous surface to make them negative pressure, or static electricity using electrostatic force is used. It is preferable to have an electric chuck or an adhesive sheet.
- the pressure-sensitive adhesive sheet is a general one (for example, polyolefin, polyester, vinyl chloride, polyimide, fluorocarbon resin as a base material, acrylic-based, silicone-based, or other pressure-sensitive adhesive), ultraviolet irradiation Therefore, the adhesive strength is reduced by cooling (for example, a polyolefin resin based on a polyolefin resin with acrylic adhesive strength) or at room temperature.
- a material that disappears eg, a PET film as a base material and a thermosensitive adhesive
- the upper plate member lb can be deformed into a concave shape by the actuator Id, and the cut portions of the glass plate 10 can be brought into contact with each other (press contact).
- FIG. 7 is a schematic perspective view showing another example of a mechanism for bringing the cut portions of the glass plate 10 into contact with each other by applying an external force (pressure contact), and FIG. 8 illustrates a state in which no external force is applied.
- FIG. 9 is a schematic front view for explaining an external force acting state.
- This mechanism includes a rotary table 1 in a first direction so as to connect the rectangular lower plate member la, the rectangular upper plate member lb, and the lower plate member la and the upper plate member lb to each other.
- Spacer lc interposed along the parallel central axis, connecting member lk, and movable taper provided at the corner of lower plate member la and reciprocated in the second direction by actuator le and member If, provided corners of the upper plate member lb forms up of a fixed taper member l g which engages the movable tapered member If.
- the upper plate member lb has a vacuum suction mechanism in which a plurality of holes are provided to make the holes negative pressure, or a porous surface to make them negative pressure, or static electricity using electrostatic force is used. It is preferable to have an electric chuck or an adhesive sheet. Where Examples of the adhesive sheet include those that lose the adhesive strength by ultraviolet irradiation, or those that have adhesive strength at room temperature and decrease or disappear when cooled.
- the upper taper member lb can be deformed into a concave shape by moving the movable taper member If away from the spacer lc by the actuator le and engaging with the fixed taper member lg.
- the cut portions of the glass plate 10 can be brought into contact with each other (pressure contact).
- the actuator ld, the actuator le, the movable taper member lf, and the fixed taper member lg are provided only at the corners, but not only at the corners but also at the center. It is also possible to change the ascending distance of the upper plate member lb depending on the mounting position by providing them in other portions, and the same action can be achieved.
- FIG. 10 is a schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plates 10 into contact with each other by applying an external force (pressure contact), and FIG. 11 is a state in which no external force is applied.
- FIG. 12 is a schematic front view for explaining an external force acting state.
- This mechanism includes a rotary table 1 in a first direction so as to connect the rectangular lower plate member la, the rectangular upper plate member lb, and the lower plate member la and the upper plate member lb to each other.
- a pair of support rollers lh interposed between the peripheral parts of both members in parallel and the lower plate member la along the central axis parallel to the first direction and corresponding portions of the upper plate member lb The attractor li and attracting.
- the upper plate member lb is provided with a plurality of holes so that the holes have negative pressure, or are porous.
- a vacuum suction mechanism for making them negative pressure on the surface, an electrostatic chuck that utilizes electrostatic force, or an adhesive sheet.
- the adhesive sheet include those that lose the adhesive force by ultraviolet irradiation, or those that have the adhesive force at room temperature and decrease or disappear when cooled.
- the upper plate member lb can be deformed into a concave shape by the actuator li, and the cut portions of the glass plate 10 can be brought into contact with each other (pressure contact).
- the glass plate 10 applied to the embodiment of FIGS. It may be integrated in a stack.
- FIG. 13 is a schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plate 10 into contact with each other (pressure contact) by applying an external force.
- the rotary table 1 is composed of a rectangular lower plate member la and long projection members lj provided in the peripheral portions of the lower plate member la facing each other in parallel with the first direction. is doing.
- An example of the long protruding member lj is a tape having a predetermined thickness.
- the connecting member lj can be changed in the degree of projection, that is, the amount of deformation of the glass, or the glass can be made horizontal by an actuator (not shown).
- FIG. 13 is applicable only when the upper gas plate is cut into a lattice shape among the two glass plates integrally formed in a stacked manner.
- the reason for this is that the presence of an uncut glass plate is a condition that can be deformed into a concave shape under the influence of the stepped portion due to the presence of the long projection member lj and its own weight. It is.
- a film or sheet is applied in the direction opposite to the back side of the glass, that is, the irradiation side of the cutting beam, even a single sheet can be used.
- FIG. 14 is a partially cutaway schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plate 10 into contact with each other by applying an external force (pressure contact).
- This mechanism includes a rotary table 1, a rectangular lower plate member la, a rectangular upper plate member lb, a connecting member lk that connects the lower plate member la and the upper plate member lb to each other around the center, Of the upper surface of the plate member la, a movable tapered member If provided corresponding to a predetermined position of each side and reciprocated in a direction perpendicular to the corresponding side by the actuator le, and a corresponding predetermined value of the upper plate member lb
- a fixed taper member lg provided at a position (a predetermined position corresponding to the movable taper member If) and engaged with the movable taper member If, and an upper plate provided at the center of each side of the upper surface of the lower plate member la
- Spacer lm for supporting the corresponding part of member lb, and the lower surface of lower plate member la are provided corresponding to the center of each side, and connected and fixed member lp on the outer side of lower plate member la Actuator In which reciprocates in
- upper plate member 1 b has a vacuum suction mechanism in which a plurality of holes are provided to make the holes negative pressure, or a porous surface to make them negative pressure, or an electrostatic chuck that uses electrostatic force Or, it is preferable to have an adhesive sheet.
- the pressure-sensitive adhesive sheet include a sheet that loses adhesive force by irradiation with ultraviolet rays, or a sheet that has adhesive force at room temperature and decreases or disappears when cooled.
- the upper plate member lb can be deformed into a concave shape by moving it away from the plate and engaging with the fixed taper member lg, and the cut portions of the glass plate 10 are in contact with each other (press contact). be able to.
- the direction in which the upper plate member lb is deformed into a concave shape can be freely selected. Therefore, when cutting the glass plate 10 into a grid, the first direction is set to the horizontal direction as shown in Fig. 15 (A) in consideration of work convenience and ease of cutting. However, even if it is set in the vertical direction as shown in FIG.
- FIG. 16 is a schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plate 10 into contact with each other by applying an external force (pressure contact).
- This mechanism connects the rotary table 1 with a rectangular lower plate member la, a rectangular upper plate member lb, and a lower plate member la and an upper plate member lb at nine locations in three rows and three columns.
- the actuator is composed of lsl, Is2 '' ls9.
- the upper plate member lb has a vacuum suction mechanism in which a plurality of holes are provided and the holes are made negative pressure, or a porous surface is used to make them negative pressure, or static electricity using electrostatic force is used. It is preferable to have an electric chuck or an adhesive sheet.
- the pressure-sensitive adhesive sheet include those that lose the adhesive force by irradiation with ultraviolet rays, or those that have an adhesive force at room temperature and decrease or disappear when cooled.
- the activator corresponding to the first row and the third row is operated in the protruding direction, and the activator corresponding to the second row is operated in the retracting direction;
- the upper plate member lb is deformed into a concave shape by selecting the state in which the actuators corresponding to the first row and the third row are operated in the protruding direction and the actuator corresponding to the second row is operated in the retracting direction.
- the direction to be made can be freely selected. Therefore, when cutting the glass plate 10 into a lattice, the first direction is the horizontal direction as shown in Fig. 15 (A) in consideration of work convenience and ease of cutting. Even if it is set, even if it is set in the vertical direction as shown in FIG.
- a pneumatic drive mechanism capable of reciprocating operation a linear movement mechanism using a screw shape, a piezo element, a rotating cam mechanism, and a no-metal effect are used. Examples are possible, but other methods may be used as long as reciprocal motion is possible as a result.
- the degree of deformation of the upper plate member lb can be adjusted by controlling the operation amount of the actuator.
- the present invention is not limited to the above-described embodiment, and it is possible to adopt a device utilizing the bimetal effect as a means for deforming the table.
- the cut portions of the glass plate 10 can be brought into contact with each other, and a chuck mechanism for sandwiching the glass plate 10 as a whole can be provided. It is also possible to apply the adhesive tape to the lower surface of the glass plate while pulling it.
- the flatness of the upper surface of the rotary table 1 and the upper surface of the brittle material plate is measured in advance using a mechanical displacement meter, an optical displacement meter, etc., and the upper surface of the rotary table 1 is measured according to the measurement result. Flatness changed
- Or can be warped concavely.
- FIG. 1 is a schematic perspective view showing an embodiment of a glass sheet cutting apparatus to which the brittle material sheet cutting method of the present invention is applied.
- FIG. 2 is a schematic perspective view for explaining a process of cutting a glass plate using a laser beam.
- FIG. 3 is a schematic longitudinal sectional view explaining a process of cutting a glass plate using laser light.
- FIG. 4 is a schematic perspective view showing an example of a mechanism for bringing the cut portions of the glass plates into contact with each other by applying an external force (pressure contact).
- FIG. 5 is a schematic front view for explaining an external force inactive state.
- FIG. 6 is a schematic front view for explaining an external force acting state.
- FIG. 7 is a schematic perspective view showing another example of a mechanism for bringing the cut portions of the glass plates into contact with each other by applying an external force (pressure contact).
- FIG. 8 is a schematic front view for explaining an external force inactive state.
- FIG. 9 is a schematic front view for explaining an external force acting state.
- FIG. 10 is a schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plates into contact with each other by applying an external force (pressure contact).
- FIG. 11 is a schematic front view for explaining an external force non-operation state.
- FIG. 12 is a schematic front view for explaining an external force acting state.
- FIG. 13 is a schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plates into contact with each other by applying an external force (pressure contact).
- FIG. 14 is a schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plates into contact with each other by applying an external force (pressure contact).
- FIG. 15 is a schematic diagram for explaining a first direction and a second direction when a glass plate is cut into a lattice shape.
- FIG. 16 is a schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plates into contact with each other by applying an external force (pressure contact).
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- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Thermal Sciences (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Laser Beam Processing (AREA)
Abstract
[PROBLEMS] To cut a fragile material plate in a lattice shape by using laser beam without forming extra preliminary cutting groove. [MEANS FOR SOLVING PROBLEMS] This device comprises a rotary table (1) pivotally supporting a glass pane having a lower plate member (1a), an upper plate member (1b), a spacer (1c) interposed along a center axis parallel with a first direction so as to connect the lower plate member (1a) to the upper plate member (1b), and actuators (1d) installed at the corner parts of the lower plate member (1a) and raising the corner parts of the upper plate member (1b).
Description
明 細 書 Specification
脆性材料製板切断方法およびその装置 Brittle material sheet cutting method and apparatus
技術分野 Technical field
[0001] 本発明は、レーザ光を用いて、ガラス板、セラミック板などの脆性材料製板を格子 状に切断するための方法およびその装置に関する。 The present invention relates to a method and an apparatus for cutting a brittle material plate such as a glass plate or a ceramic plate into a lattice shape using a laser beam.
背景技術 Background art
[0002] 従来から、レーザ光を用いてガラス板をスクライブした後に、レーザ光を用いてガラ ス板を切断するガラス板切断方法が知られて 、る。 Conventionally, there has been known a glass plate cutting method in which a glass plate is cut using a laser beam after the glass plate is scribed using the laser beam.
[0003] そして、レーザ光を用いてガラス板を格子状に切断する方法も提案されて ヽる(特 許文献 1参照)。 [0003] A method of cutting a glass plate into a lattice shape using laser light has also been proposed (see Patent Document 1).
特許文献 1 :特開 2000— 61677号公報 Patent Document 1: JP 2000-61677 A
発明の開示 Disclosure of the invention
発明が解決しょうとする課題 Problems to be solved by the invention
[0004] 特許文献 1に記載された方法は、一次切断線と直交する方向に二次切断をレーザ 切断装置を用いて実行する場合、交差点前でクラックの伝播が止まってしまう不都合 を考慮し、このような不都合に拘らず二次切断を行うために、切断線の交差する部分 にも予め予備切断溝を設けるようにして ヽる。 [0004] The method described in Patent Document 1 takes into account the inconvenience that the propagation of cracks stops before the intersection when secondary cutting is performed in a direction orthogonal to the primary cutting line using a laser cutting device. In order to perform the secondary cutting regardless of such inconvenience, a preliminary cutting groove is provided in advance at a portion where the cutting lines intersect.
[0005] したがって、レーザ光を用いる切断処理のみならず、余分な予備切断溝の形成処 理が必要になり、全体として処理が煩雑ィ匕してしまう。そして、この煩雑ィ匕は、一次切 断線の増加、二次切断線の増加に応じて著しくなつてしまう。 Accordingly, not only a cutting process using a laser beam but also an extra preliminary cutting groove forming process is required, and the process becomes complicated as a whole. And this troublesomeness becomes remarkable according to the increase in the primary cutting line and the increase in the secondary cutting line.
[0006] さらに説明する。 [0006] Further description will be made.
[0007] 特許文献 1のガラス基板切断方法では、ガラス基板の保持方法については特に注 意を払わず、見かけ上平坦なテーブルを用いることが一般的であった。 [0007] In the glass substrate cutting method of Patent Document 1, no particular attention is paid to the glass substrate holding method, and it is common to use an apparently flat table.
[0008] このようにガラス基板を保持した状態で、ガラス基板を格子状に切断する場合、テ 一ブルの中央部分を例えば回転式モータで支えるため、周辺部が支承されないこと 力 Sしばしば生じる。そして、テーブルの周辺部が支承されていない場合、 自重により テーブルにたわみが生じ、凸状の反りが生じる。また、テーブルの加工精度の影響を
受けて、テーブルに部分的な凸状の反りが生じる。 [0008] When the glass substrate is cut in a lattice shape with the glass substrate held in this manner, the central portion of the table is supported by, for example, a rotary motor, and thus the peripheral portion is not supported. If the peripheral part of the table is not supported, the table will bend due to its own weight, causing a convex warp. In addition, the influence of the processing accuracy of the table In response, a partial convex warpage occurs in the table.
[0009] さらに、ガラス基板自体においても、ガラスの平坦度の影響で、部分的に凸状の反 りが生じる。 [0009] Further, even in the glass substrate itself, a partially convex warp occurs due to the flatness of the glass.
[0010] このような凸状の反りが生じると、切断された部分が互いに離れてしまい、その部分 と交差する方向にガラス基板をレーザ光を用いて切断する場合に、クラックの伝播が 中断されてしまう可能性が高くなり、交差方向のガラス基板の切断の成功率が下がる [0010] When such a convex warp occurs, the cut portions are separated from each other, and crack propagation is interrupted when the glass substrate is cut using a laser beam in a direction intersecting the portions. And the success rate of cutting the glass substrate in the cross direction decreases.
[0011] なお、この不都合は、ガラス板のみならず、セラミック板、ウェハーなどをレーザ光を 用いて格子状に切断する場合に、同様に生じると思われる。 [0011] Note that this inconvenience is likely to occur when not only a glass plate but also a ceramic plate, a wafer, or the like is cut into a lattice using a laser beam.
[0012] 本発明は上記の問題点に鑑みてなされたものであり、余分な予備切断溝を形成す ることなぐレーザ光を用いて脆性材料製板を格子状に切断することができる脆性材 料製板切断方法およびその装置を提供することを目的として!/、る。 [0012] The present invention has been made in view of the above problems, and is a brittle material capable of cutting a brittle material plate into a lattice shape using laser light without forming an extra preliminary cut groove. The purpose of the present invention is to provide a method and apparatus for cutting a metal plate!
課題を解決するための手段 Means for solving the problem
[0013] 本発明の脆性材料製板切断方法は、支持台上に脆性材料製板を支承した状態に おいて、レーザ光を用いて第 1の方向に脆性材料製板を切断し、次いで支持台上に 支承した脆性材料製板に外力を作用させて切断された部分同士を圧接させ、この状 態で、レーザ光を用いて、第 1の方向と直交する第 2の方向に脆性材料製板を切断 する方法である。 [0013] In the brittle material sheet cutting method of the present invention, the brittle material sheet is cut in the first direction using a laser beam in a state where the brittle material sheet is supported on a support base, and then supported. The parts cut by applying an external force to the brittle material plate supported on the table are pressed against each other, and in this state, the brittle material is made in the second direction perpendicular to the first direction using a laser beam. This is a method of cutting a plate.
[0014] ここで、外力とは、何らかの機構により積極的に与えられる力が一般的である力 ガ ラス基板の自重により作用する力のように結果的に与えられる力をも含むことができる 。また、脆性材料製板としては、ガラス板、セラミック板、ウェハーなどが例示できる。 第 1の方向とは、脆性材料製板を最初に切断する方向であり、任意に設定することが できる。 [0014] Here, the external force can include a force applied as a result, such as a force acting by the weight of the glass substrate, which is generally a force positively applied by some mechanism. Examples of the brittle material plate include a glass plate, a ceramic plate, and a wafer. The first direction is a direction in which the brittle material plate is first cut, and can be arbitrarily set.
[0015] この場合において、支持台の上面の平坦度を変化させることによって脆性材料製 板に外力を作用させて切断された部分同士を圧接させてもよぐまたは、支持台の上 面を凹状に変化させることによって脆性材料製板に外力を作用させて切断された部 分同士を圧接させてもよい。 [0015] In this case, by changing the flatness of the upper surface of the support table, an external force may be applied to the brittle material plate so that the cut portions are pressed against each other, or the upper surface of the support table is concave. It is also possible to press the parts cut by applying an external force to the brittle material plate.
[0016] また、支持台または脆性材料製板の平坦度を測定し、測定結果に基づ!/、て定まる
必要性に応じて、脆性材料製板に外力を作用させて切断された部分同士を圧接さ せるために、支持台の上面の平坦度を変化させ、および Zまたは支持台の上面を凹 状に変化させることが好まし 、。 [0016] Further, the flatness of the support base or the brittle material plate is measured and determined based on the measurement result! If necessary, change the flatness of the upper surface of the support base and press the Z or the upper surface of the support base into a concave shape in order to bring the cut parts into pressure contact with each other by applying an external force to the brittle material plate. It is preferable to change.
[0017] さらに、脆性材料製板を支持台上に吸着させることが好ましい。 [0017] Further, it is preferable that the brittle material plate is adsorbed on the support base.
[0018] 本発明の脆性材料製板切断装置は、脆性材料製板を支承する支持台と、脆性材 料製板をレーザ光を用いて切断する切断手段と、支持台と切断手段とを相対的に第 1の方向に移動させ、その後、第 1の方向と直交する第 2の方向に移動させる移動手 段と、支持台と切断手段とを相対的に第 2の方向に移動させる間に、脆性材料製板 の切断された部分同士を圧接させるように外力を作用させる外力手段とを含むもので ある。 [0018] The brittle material plate cutting apparatus of the present invention includes a support base for supporting the brittle material plate, a cutting means for cutting the brittle material plate using laser light, and the support base and the cutting means. Between the moving means for moving in the first direction and then moving in the second direction orthogonal to the first direction, and the support base and the cutting means relatively moving in the second direction. And an external force means for applying an external force so that the cut portions of the brittle material plate are brought into pressure contact with each other.
[0019] ここで、外力とは、何らかの機構により積極的に与えられる力が一般的である力 ガ ラス基板の自重により作用する力のように結果的に与えられる力をも含むことができる 。また、脆性材料製板としては、ガラス板、セラミック板、ウェハーなどが例示できる。 Here, the external force may include a force that is applied as a result, such as a force that is applied by the weight of the glass substrate. Examples of the brittle material plate include a glass plate, a ceramic plate, and a wafer.
[0020] この場合にお 、て、外力手段は、支持台の上面の平坦度を変化させることによって 脆性材料製板に外力を作用させて切断された部分同士を圧接させるものであっても よぐまたは、支持台の上面を凹状に変化させることによって脆性材料製板に外力を 作用させて切断された部分同士を圧接させるものであってもよい。 [0020] In this case, the external force means may be one that presses the cut portions by applying an external force to the brittle material plate by changing the flatness of the upper surface of the support base. Alternatively, by changing the upper surface of the support base into a concave shape, an external force may be applied to the brittle material plate to bring the cut portions into pressure contact with each other.
[0021] また、支持台または脆性材料製板の平坦度を測定する平坦度測定手段をさらに含 み、外力手段として、測定結果に基づいて定まる必要性に応じて、脆性材料製板に 外力を作用させて切断された部分同士を圧接させるために、支持台の上面の平坦度 を変化させ、および Zまたは支持台の上面を凹状に変化させるものを採用することが 好ましい。 [0021] Further, it further includes a flatness measuring means for measuring the flatness of the support base or the brittle material plate, and the external force is applied to the brittle material plate according to the necessity determined based on the measurement result. In order to press the parts cut by the action, it is preferable to change the flatness of the upper surface of the support base and change the Z or the upper surface of the support base into a concave shape.
[0022] これらの場合にぉ 、て、支持台は、下板部材と、上板部材と、下板部材および上板 部材を少なくとも中心部にお!、て互いに連結する連結部材と、上板部材を周辺部お よび Zまたは周辺寄り部において下板部材力 離間させる離間部材とを含んでいて もよぐまたは、下板部材と、上板部材と、下板部材および上板部材を周辺部におい て所定距離だけ離れた状態で互!、に連結する連結部材と、上板部材を少なくとも中 心部にぉ 、て下板部材に接近させる接近部材とを含んで 、てもよ!、。
[0023] そして、上板部材は、脆性材料製板を吸着保持する吸着手段を含んでいてもよぐ または、脆性材料製板を静電保持する静電手段を含んで 、てもよ 、。 [0022] In these cases, the support table includes a lower plate member, an upper plate member, a connecting member that connects the lower plate member and the upper plate member at least in the center, and an upper plate. Or a separation member that separates the lower plate member force at the peripheral portion and the Z portion or the peripheral portion, or the lower plate member, the upper plate member, the lower plate member, and the upper plate member may be included in the peripheral portion. In this case, it may include a connecting member that is connected to each other in a state of being separated by a predetermined distance, and an access member that moves the upper plate member at least in the center and approaches the lower plate member! [0023] The upper plate member may include an adsorption unit that adsorbs and holds the brittle material plate, or may include an electrostatic unit that electrostatically holds the brittle material plate.
[0024] さらに、支持台は、下板部材と、下板部材のうち、第 1の方向に延びる周辺部上面 に突出した突条部材とを含んでいてもよぐこの場合において、下板部材は、脆性材 料製板を吸着保持する吸着手段を含んで 、ることが好ま 、。 [0024] Further, in this case, the support base may include a lower plate member, and a protrusion member protruding from the lower plate member on the upper surface of the peripheral portion extending in the first direction. It preferably includes an adsorption means for adsorbing and holding a brittle material plate.
[0025] 本発明の脆性材料製板切断方法であれば、レーザ光を用いて第 1の方向に脆性 材料製板を切断した後に、脆性材料製板に外力を作用させて切断された部分同士 を圧接させ、この状態において、余分な予備切断溝を設けることなぐレーザ光を用 いて、第 1の方向と直交する第 2の方向に脆性材料製板を切断することができ、交差 点を超えてクラックを伝播させることができるので、第 2の方向における切断の失敗を 殆ど皆無にすることができる。 [0025] With the brittle material sheet cutting method of the present invention, after cutting the brittle material sheet in the first direction using laser light, the portions cut by applying an external force to the brittle material sheet In this state, it is possible to cut the brittle material plate in the second direction perpendicular to the first direction by using laser light without providing an extra preliminary cutting groove, exceeding the intersection. Cracks can be propagated, so there is almost no failure of cutting in the second direction.
[0026] 本発明の脆性材料製板切断装置であれば、レーザ光を用いて第 1の方向に脆性 材料製板を切断した後に、脆性材料製板に外力を作用させて切断された部分同士 を圧接させ、この状態において、余分な予備切断溝を設けることなぐレーザ光を用 いて、第 1の方向と直交する第 2の方向に脆性材料製板を切断することができ、交差 点を超えてクラックを伝播させることができるので、第 2の方向における切断の失敗を 殆ど皆無にすることができる。 [0026] With the brittle material sheet cutting apparatus of the present invention, after cutting the brittle material sheet in the first direction using laser light, the portions cut by applying an external force to the brittle material sheet In this state, it is possible to cut the brittle material plate in the second direction perpendicular to the first direction by using laser light without providing an extra preliminary cutting groove, exceeding the intersection. Cracks can be propagated, so there is almost no failure of cutting in the second direction.
発明の効果 The invention's effect
[0027] 本発明の脆性材料製板切断方法は、余分な予備切断溝を設ける処理を不要にし て全体としての処理を簡単ィ匕することができ、し力も、第 1の方向と直交する第 2の方 向における切断の失敗を殆ど皆無にすることができるという特有の効果を奏する。 [0027] The brittle material sheet cutting method of the present invention makes it possible to simplify the entire process by eliminating the need for providing an extra preliminary cutting groove, and the force is also perpendicular to the first direction. There is a unique effect that cutting failure in the two directions can be almost eliminated.
[0028] 本発明の脆性材料製板切断装置は、余分な予備切断溝を設ける機構を不要にし て全体としての構成を簡単ィ匕することができ、し力も、第 1の方向と直交する第 2の方 向における切断の失敗を殆ど皆無にすることができるという特有の効果を奏する。 発明を実施するための最良の形態 [0028] The brittle material sheet cutting device of the present invention eliminates the need for a mechanism for providing an extra preliminary cutting groove and can simplify the overall configuration, and the force is also perpendicular to the first direction. There is a unique effect that cutting failure in the two directions can be almost eliminated. BEST MODE FOR CARRYING OUT THE INVENTION
[0029] 以下、添付図面を参照して、本発明の脆性材料製板切断方法およびその装置の 実施の形態を詳細に説明する。 [0029] Hereinafter, embodiments of a brittle material sheet cutting method and apparatus according to the present invention will be described in detail with reference to the accompanying drawings.
[0030] なお、以下にぉ 、ては、脆性材料としてガラスを例にとって説明する力 他の脆性
材料を採用する場合にも同様に適用することが可能である。 [0030] It should be noted that, in the following, the force described by taking glass as an example of the brittle material, other brittleness The same applies to the case of employing a material.
[0031] 図 1は本発明の脆性材料製板切断方法が適用されるガラス板切断装置の一実施 形態を示す概略斜視図である。 FIG. 1 is a schematic perspective view showing an embodiment of a glass sheet cutting apparatus to which the brittle material sheet cutting method of the present invention is applied.
[0032] 本ガラス板切断装置は、切断対象のガラス板 10を支承する回転テーブル 1と、回 転テーブル 1を、ガラス板と平行な平面内にぉ ヽて互いに直交する方向に平行移動 させる X軸 [0032] The present glass plate cutting apparatus translates the rotary table 1 that supports the glass plate 10 to be cut, and the rotary table 1 in a plane parallel to the glass plate in directions orthogonal to each other X Axis
駆動部材 2、 Y軸駆動部材 3と、レーザ光を用いてガラス板 10を切断するレーザ切断 ュ Drive member 2, Y-axis drive member 3, and laser cutting unit that cuts glass plate 10 using laser light
ニット 4と、回転テーブル 1、 X軸駆動部材 2、 Y軸駆動部材 3、およびレーザ切断ュ- ット 4を制御するコントローラ 5とを有している。なお、 6は変位計であり、回転テーブル 1の上面、ガラス板 10の上面の平坦度を測定するために使用される。この変位計 6と しては、機械的変位計、光学的変位計など、従来公知の種々の構成のものが使用可 能である。 A knit 4, a rotary table 1, an X-axis drive member 2, a Y-axis drive member 3, and a controller 5 that controls the laser cutting unit 4 are provided. A displacement meter 6 is used to measure the flatness of the upper surface of the rotary table 1 and the upper surface of the glass plate 10. As the displacement meter 6, various conventionally known configurations such as a mechanical displacement meter and an optical displacement meter can be used.
[0033] 図 2はレーザ光を用いてガラス板 10を切断する処理を説明する概略斜視図である FIG. 2 is a schematic perspective view illustrating a process of cutting the glass plate 10 using laser light.
[0034] ガラス板 10に対して切断線 10bを想定し、切断開始位置に、従来公知の方法によ つて、切欠(予備切断溝) 10aを形成する。 A cutting line 10b is assumed for the glass plate 10, and a notch (preliminary cutting groove) 10a is formed at a cutting start position by a conventionally known method.
[0035] そして、切欠 10aを起点として、切断線 10bに沿って、先ず、レーザ光 (スクライブビ ーム) 4aを照射して局所的に熱膨張させて圧縮応力を生じさせ、次いで、ミスト (タエ ンチンダウオーター) 4bを、レーザ光が照射された箇所に供給して局所的に収縮させ て引張応力を生じさせる。これらの処理 (スクライブ処理)によって、微小クラックを連 続成長させることができる。この連続成長された微小クラックをスクライブラインと称す る。 [0035] Then, starting from the notch 10a, along the cutting line 10b, first, a laser beam (scribe beam) 4a is irradiated to cause local thermal expansion to generate a compressive stress. Nintendo Water) 4b is supplied to the portion irradiated with the laser beam and locally contracted to generate tensile stress. By these treatments (scribe process), microcracks can be continuously grown. This continuously grown microcrack is called a scribe line.
[0036] スクライブ後に、レーザ光 (ブレークビーム) 4cを照射して、微小クラックが連続成長 された部分を局所的に熱膨張させて圧縮応力を生じさせ、スクライブラインをガラス 板 10の裏面にまで成長させてガラス板 10の切断を達成することができる(図 3参照) 。なお、スクライブラインがガラス板 10の裏面にまで成長する線をブレークラインと称 する。
[0037] したがって、スクライブビーム 4aの照射、クェンチンダウオーター 4bの供給、ブレー クビーム 4cの照射がこの順にガラス板 10に対して行われるように、 Y軸駆動部材 3 を動作させることにより、第 1の方向にガラス板 10を切断することができる。その後、 X 軸駆動部材 2を動作させて異なる位置を設定し、この状態において、スクライブビー ム [0036] After scribing, a laser beam (break beam) 4c is irradiated to locally expand the portion where the microcracks are continuously grown to generate a compressive stress, and the scribe line extends to the back surface of the glass plate 10. It can be grown to achieve cutting of the glass plate 10 (see Figure 3). A line in which the scribe line grows to the back surface of the glass plate 10 is called a break line. [0037] Therefore, by operating the Y-axis drive member 3 so that the irradiation of the scribe beam 4a, the supply of the quencher water 4b, and the irradiation of the break beam 4c are performed on the glass plate 10 in this order, the first axis is operated. The glass plate 10 can be cut in the direction of. Then, move the X-axis drive member 2 to set a different position. In this state, the scribe beam
4aの照射、クェンチンダウオーター 4bの供給、ブレークビーム 4cの照射がこの順に ガラス板 10に対して行われるように、 Y軸駆動部材 3を動作させることにより、異なる 位置において、第 1の方向にガラス板 10を切断することができる。以下、同様にして、 所望の箇所において、第 1の方向にガラス板 10を切断することができる。 By operating the Y-axis drive member 3 so that the irradiation of 4a, the supply of quencher water 4b, and the irradiation of the break beam 4c are performed in this order on the glass plate 10, at different positions in the first direction The glass plate 10 can be cut. Hereinafter, similarly, the glass plate 10 can be cut in the first direction at a desired location.
[0038] このようにして第 1の方向に所望回数だけガラス板 10を切断した後は、外力を作用 させることによって、ガラス板 10の切断された部分同士を互いに接触させ (圧接させ) 、第 1の方向と直交する第 2の方向に、スクライブビーム 4aの照射、クェンチングゥォ 一ター 4bの供給、ブレークビーム 4cの照射がこの順にガラス板 10に対して行われる ように、回転テーブル 1を 90度だけ回転させ、この状態で Y軸駆動部材 3を動作させ るこ [0038] After the glass plate 10 is cut a desired number of times in the first direction in this way, the cut portions of the glass plate 10 are brought into contact (pressure contact) with each other by applying an external force. Turn table 1 90 degrees so that irradiation of scribe beam 4a, supply of quenching tower 4b, irradiation of break beam 4c is performed on glass plate 10 in this order in a second direction orthogonal to the direction of 1. To rotate the Y-axis drive member 3 in this state.
とにより、第 2の方向にガラス板 10を切断することができる。その後、 X軸駆動部材 2 を動作させて異なる位置を設定し、この状態において、スクライブビーム 4aの照射、ク ェンチンダウオーター 4bの供給、ブレークビーム 4cの照射がこの順にガラス板 10に 対して行われるように、 Y軸駆動部材 3を動作させることにより、異なる位置において、 第 2の方向にガラス板 10を切断することができる。以下、同様にして、所望の箇所に お!、て、第 2の方向にガラス板 10を切断することができる。 Thus, the glass plate 10 can be cut in the second direction. Thereafter, the X-axis drive member 2 is operated to set different positions. In this state, the irradiation of the scribe beam 4a, the supply of the quencher water 4b, and the irradiation of the break beam 4c are applied to the glass plate 10 in this order. As performed, the glass plate 10 can be cut in the second direction at different positions by operating the Y-axis drive member 3. Thereafter, the glass plate 10 can be cut in the second direction in the same manner in the same manner.
[0039] 上記の第 2の方向におけるガラス板 10の切断に当たって、外力を作用させることに よって、ガラス板 10の切断された部分同士を互いに接触させて 、る (圧接させて 、る )ので、微小クラックは、中断されることなぐ連続成長されることになり、余分な予備切 断溝を形成する必要がなぐし力も、第 2の方向における切断の失敗を殆ど皆無にす ることがでさる。 [0039] When the glass plate 10 is cut in the second direction, an external force is applied so that the cut portions of the glass plate 10 are brought into contact with each other (pressure contact). Microcracks will continue to grow without being interrupted, and there is almost no failure in the second direction due to the extra force required to form extra precut grooves. .
[0040] 図 4は外力を作用させることによって、ガラス板 10の切断された部分同士を互いに 接触させる (圧接させる)機構の一例を示す概略斜視図、図 5は外力非作用状態を
説明する概略正面図、図 6は外力作用状態を説明する概略正面図である。 FIG. 4 is a schematic perspective view showing an example of a mechanism for bringing the cut portions of the glass plate 10 into contact with each other by applying an external force (pressure contact), and FIG. 5 shows a state in which no external force is applied. FIG. 6 is a schematic front view for explaining an external force acting state.
[0041] この機構は、回転テーブル 1を、方形の下板部材 laと、方形の上板部材 lbと、下板 部材 laと上板部材 lbとを互いに連結するように、第 1の方向と平行な中心軸に沿つ て介在されたスぺーサ lcと、連結部材 lkと、下板部材 laの隅角部に設けられて上 板部材 lbの隅角部を持ち上げるァクチユエータ Idとで構成している。そして、上板 部材 lbは、孔を複数設けてその孔を負圧にし、または多孔質状の表面にしてそれら を負圧にする真空吸着機構を有し、または、静電気の力を利用する静電チャックを有 し、または、粘着シートを有することが好ましい。ここで、粘着シートとしては、一般のも の(例えば、ポリオレフイン、ポリエステル、塩化ビニル、ポリイミド、フッ素榭脂などを 基材とし、アクリル系、シリコン系、その他の粘着剤力もなるもの)、紫外線照射によつ て粘着力をなくするもの(例えば、ポリオレフイン系榭脂を基材とし、アクリル系粘着剤 力もなるもの)、または常温で粘着力を持ち、冷却することにより粘着力が低下し、ま たはなくなるもの(例えば、 PETフィルムを基材とし、感温性粘着剤からなるもの)が例 示できる。 [0041] This mechanism includes the rotary table 1 in a first direction so as to connect the rectangular lower plate member la, the rectangular upper plate member lb, and the lower plate member la and the upper plate member lb to each other. A spacer lc interposed along a parallel central axis, a connecting member lk, and an actuator Id provided at a corner portion of the lower plate member la and lifting the corner portion of the upper plate member lb. ing. The upper plate member lb has a vacuum suction mechanism in which a plurality of holes are provided to make the holes negative pressure, or a porous surface to make them negative pressure, or static electricity using electrostatic force is used. It is preferable to have an electric chuck or an adhesive sheet. Here, the pressure-sensitive adhesive sheet is a general one (for example, polyolefin, polyester, vinyl chloride, polyimide, fluorocarbon resin as a base material, acrylic-based, silicone-based, or other pressure-sensitive adhesive), ultraviolet irradiation Therefore, the adhesive strength is reduced by cooling (for example, a polyolefin resin based on a polyolefin resin with acrylic adhesive strength) or at room temperature. For example, a material that disappears (eg, a PET film as a base material and a thermosensitive adhesive) can be exemplified.
[0042] この場合には、ァクチユエータ Idによって上板部材 lbを凹状に変形させることがで き、ガラス板 10の切断された部分同士を互いに接触させる (圧接させる)ことができる In this case, the upper plate member lb can be deformed into a concave shape by the actuator Id, and the cut portions of the glass plate 10 can be brought into contact with each other (press contact).
[0043] 図 7は外力を作用させることによって、ガラス板 10の切断された部分同士を互いに 接触させる (圧接させる)機構の他の例を示す概略斜視図、図 8は外力非作用状態を 説明する概略正面図、図 9は外力作用状態を説明する概略正面図である。 FIG. 7 is a schematic perspective view showing another example of a mechanism for bringing the cut portions of the glass plate 10 into contact with each other by applying an external force (pressure contact), and FIG. 8 illustrates a state in which no external force is applied. FIG. 9 is a schematic front view for explaining an external force acting state.
[0044] この機構は、回転テーブル 1を、方形の下板部材 laと、方形の上板部材 lbと、下板 部材 laと上板部材 lbとを互いに連結するように、第 1の方向と平行な中心軸に沿つ て介在されたスぺーサ lcと、連結部材 lkと、下板部材 laの隅角部に設けられてァク チユエータ leにより第 2の方向に往復動される可動テーパー部材 Ifと、上板部材 lb の隅角部に設けられて可動テーパー部材 Ifと係合する固定テーパー部材 lgとで構 成している。そして、上板部材 lbは、孔を複数設けてその孔を負圧にし、または多孔 質状の表面にしてそれらを負圧にする真空吸着機構を有し、または、静電気の力を 利用する静電チャックを有し、または、粘着シートを有することが好ましい。ここで、粘
着シートとしては、紫外線照射によって粘着力をなくするもの、または常温で粘着力 を持ち、冷却することにより粘着力が低下し、またはなくなるものが例示できる。 [0044] This mechanism includes a rotary table 1 in a first direction so as to connect the rectangular lower plate member la, the rectangular upper plate member lb, and the lower plate member la and the upper plate member lb to each other. Spacer lc interposed along the parallel central axis, connecting member lk, and movable taper provided at the corner of lower plate member la and reciprocated in the second direction by actuator le and member If, provided corners of the upper plate member lb forms up of a fixed taper member l g which engages the movable tapered member If. The upper plate member lb has a vacuum suction mechanism in which a plurality of holes are provided to make the holes negative pressure, or a porous surface to make them negative pressure, or static electricity using electrostatic force is used. It is preferable to have an electric chuck or an adhesive sheet. Where Examples of the adhesive sheet include those that lose the adhesive strength by ultraviolet irradiation, or those that have adhesive strength at room temperature and decrease or disappear when cooled.
[0045] この場合には、ァクチユエータ leによって可動テーパー部材 Ifをスぺーサ lcから 離れる方向に移動させ、固定テーパー部材 lgと係合させることにより、上板部材 lb を凹状に変形させることができ、ガラス板 10の切断された部分同士を互いに接触さ せる (圧接させる)ことがでさる。 In this case, the upper taper member lb can be deformed into a concave shape by moving the movable taper member If away from the spacer lc by the actuator le and engaging with the fixed taper member lg. The cut portions of the glass plate 10 can be brought into contact with each other (pressure contact).
[0046] 以上の実施形態にお!、ては、ァクチユエータ ld、ァクチユエータ le、可動テーパー 部材 lf、固定テーパー部材 lgを隅角部のみに設けているが、隅角部のみならず、中 心寄りの他の部分にも設け、これらによる上板部材 lbの上昇距離を取り付け位置に 応じて変化させることが可能であり、同様の作用を達成することができる。 [0046] In the above embodiment, the actuator ld, the actuator le, the movable taper member lf, and the fixed taper member lg are provided only at the corners, but not only at the corners but also at the center. It is also possible to change the ascending distance of the upper plate member lb depending on the mounting position by providing them in other portions, and the same action can be achieved.
[0047] 図 10は外力を作用させることによって、ガラス板 10の切断された部分同士を互い に接触させる (圧接させる)機構のさらに他の例を示す概略斜視図、図 11は外力非 作用状態を説明する概略正面図、図 12は外力作用状態を説明する概略正面図で ある。 FIG. 10 is a schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plates 10 into contact with each other by applying an external force (pressure contact), and FIG. 11 is a state in which no external force is applied. FIG. 12 is a schematic front view for explaining an external force acting state.
[0048] この機構は、回転テーブル 1を、方形の下板部材 laと、方形の上板部材 lbと、下板 部材 laと上板部材 lbとを互いに連結するように、第 1の方向と平行に両部材の周辺 部間に介在された 1対の支持ローラ lhと、下板部材 laの、第 1の方向と平行な中心 軸に沿って設けられて上板部材 lbの対応する部分を引きつけるァクチユエータ liと で構成している。そして、上板部材 lbは、孔を複数設けてその孔を負圧にし、または 多孔質状 [0048] This mechanism includes a rotary table 1 in a first direction so as to connect the rectangular lower plate member la, the rectangular upper plate member lb, and the lower plate member la and the upper plate member lb to each other. A pair of support rollers lh interposed between the peripheral parts of both members in parallel and the lower plate member la along the central axis parallel to the first direction and corresponding portions of the upper plate member lb The attractor li and attracting. The upper plate member lb is provided with a plurality of holes so that the holes have negative pressure, or are porous.
の表面にしてそれらを負圧にする真空吸着機構を有し、または、静電気の力を利用 する静電チャックを有し、または、粘着シートを有することが好ましい。ここで、粘着シ ートとしては、紫外線照射によって粘着力をなくするもの、または常温で粘着力を持 ち、冷却することにより粘着力が低下し、またはなくなるものが例示できる。 It is preferable to have a vacuum suction mechanism for making them negative pressure on the surface, an electrostatic chuck that utilizes electrostatic force, or an adhesive sheet. Here, examples of the adhesive sheet include those that lose the adhesive force by ultraviolet irradiation, or those that have the adhesive force at room temperature and decrease or disappear when cooled.
[0049] この場合には、ァクチユエータ liによって上板部材 lbを凹状に変形させることがで き、ガラス板 10の切断された部分同士を互いに接触させる (圧接させる)ことができる [0049] In this case, the upper plate member lb can be deformed into a concave shape by the actuator li, and the cut portions of the glass plate 10 can be brought into contact with each other (pressure contact).
[0050] 図 4から図 12の実施形態に適用されるガラス板 10は、 1枚のものであっても、 2枚
重ね状に一体化されたものであってもよ 、。 [0050] The glass plate 10 applied to the embodiment of FIGS. It may be integrated in a stack.
[0051] 図 13は外力を作用させることによって、ガラス板 10の切断された部分同士を互い に接触させる (圧接させる)機構のさらに他の例を示す概略斜視図である。 FIG. 13 is a schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plate 10 into contact with each other (pressure contact) by applying an external force.
[0052] この機構は、回転テーブル 1を、方形の下板部材 laと、第 1の方向と平行に下板部 材 laの互いに対向する周辺部に設けられた長尺突起部材 ljとで構成している。長尺 突起部材 ljとしては、所定の厚みのテープが例示できる。 [0052] In this mechanism, the rotary table 1 is composed of a rectangular lower plate member la and long projection members lj provided in the peripheral portions of the lower plate member la facing each other in parallel with the first direction. is doing. An example of the long protruding member lj is a tape having a predetermined thickness.
[0053] 連結部材 ljは、ァクチユエータ(図示せず)などにより、突起の程度すなわちガラス を変形させる量を変えたり、あるいはガラスを水平にすることも可能である。 [0053] The connecting member lj can be changed in the degree of projection, that is, the amount of deformation of the glass, or the glass can be made horizontal by an actuator (not shown).
[0054] ただし、図 13の実施態様は、 2枚重ね状に一体ィ匕されたガラス板のうち、上側のガ ス板を格子状に切断する場合にのみ適用可能である。その理由は、切断されていな いガラス板が存在していることが、長尺突起部材 ljの存在に起因する段部、および自 重の影響を受けて凹状に変形できるための条件になるからである。しかし、ガラスの 裏面つまり切断用ビームの照射側と反対の方向にフィルムやシートなどが貼られて いれば 1枚のものでも通用ができる。 However, the embodiment of FIG. 13 is applicable only when the upper gas plate is cut into a lattice shape among the two glass plates integrally formed in a stacked manner. The reason for this is that the presence of an uncut glass plate is a condition that can be deformed into a concave shape under the influence of the stepped portion due to the presence of the long projection member lj and its own weight. It is. However, even if a film or sheet is applied in the direction opposite to the back side of the glass, that is, the irradiation side of the cutting beam, even a single sheet can be used.
[0055] 図 14は外力を作用させることによって、ガラス板 10の切断された部分同士を互い に接触させる (圧接させる)機構のさらに他の例を示す一部切欠概略斜視図である。 FIG. 14 is a partially cutaway schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plate 10 into contact with each other by applying an external force (pressure contact).
[0056] この機構は、回転テーブル 1を、方形の下板部材 laと、方形の上板部材 lbと、下板 部材 laと上板部材 lbとを中心において互いに連結する連結部材 lkと、下板部材 la の上面のうち、各辺の所定位置に対応して設けられてァクチユエータ leにより対応す る辺と直交する方向に往復動される可動テーパー部材 Ifと、上板部材 lbの対応する 所定位置 (可動テーパー部材 Ifに対応する所定位置)に設けられて可動テーパー 部材 Ifと係合する固定テーパー部材 lgと、下板部材 laの上面のうち、各辺の中心 部に設けられて上板部材 lbの対応する箇所を支承するスぺーサ lmと、下板部材 la の下面のうち、各辺の中心部に対応して設けられて、下板部材 laの外方において連 結固定部材 lpを接離方向に往復動させるァクチユエータ Inと、上板部材 lbの各辺 の外側面に形成された係合孔 lqと、連結固定部材 lpの上部所定位置に設けられ、 対応する係合孔 lqに係合可能な突出部材 lrとで構成している。そして、上板部材 1
bは、孔を複数設けてその孔を負圧にし、または多孔質状の表面にしてそれらを負圧 にする真空吸着機構を有し、または、静電気の力を利用する静電チャックを有し、ま たは、粘着シートを有することが好ましい。ここで、粘着シートとしては、紫外線照射に よって粘着力をなくするもの、または常温で粘着力を持ち、冷却することにより粘着力 が低下し、またはなくなるものが例示できる。 [0056] This mechanism includes a rotary table 1, a rectangular lower plate member la, a rectangular upper plate member lb, a connecting member lk that connects the lower plate member la and the upper plate member lb to each other around the center, Of the upper surface of the plate member la, a movable tapered member If provided corresponding to a predetermined position of each side and reciprocated in a direction perpendicular to the corresponding side by the actuator le, and a corresponding predetermined value of the upper plate member lb A fixed taper member lg provided at a position (a predetermined position corresponding to the movable taper member If) and engaged with the movable taper member If, and an upper plate provided at the center of each side of the upper surface of the lower plate member la Spacer lm for supporting the corresponding part of member lb, and the lower surface of lower plate member la are provided corresponding to the center of each side, and connected and fixed member lp on the outer side of lower plate member la Actuator In which reciprocates in and away from each other, and each side of upper plate member lb The engaging hole lq is formed on the outer surface of the connecting fixing member lp, and the protruding member lr is provided at a predetermined upper position of the coupling fixing member lp and engageable with the corresponding engaging hole lq. And upper plate member 1 b has a vacuum suction mechanism in which a plurality of holes are provided to make the holes negative pressure, or a porous surface to make them negative pressure, or an electrostatic chuck that uses electrostatic force Or, it is preferable to have an adhesive sheet. Here, examples of the pressure-sensitive adhesive sheet include a sheet that loses adhesive force by irradiation with ultraviolet rays, or a sheet that has adhesive force at room temperature and decreases or disappears when cooled.
[0057] この場合には、 1方向に互いに対向する 1対の連結固定部材 lpを動作させて突出 部材 [0057] In this case, the pair of connecting and fixing members lp facing each other in one direction are operated to protrude the members
lrを係合孔 lqと係合させ、上板部材 lbの対応する辺の中心部の上方への変形を阻 止し、他の辺に対応するァクチユエータ leによって可動テーパー部材 Ifをスぺーサ lcから離れる方向に移動させ、固定テーパー部材 lgと係合させることにより、上板部 材 lbを凹状に変形させることができ、ガラス板 10の切断された部分同士を互いに接 虫させる (圧接させる)ことができる。 Lr is engaged with the engagement hole lq to prevent upward deformation of the center of the corresponding side of the upper plate member lb, and the movable taper member If is spaced by the actuator le corresponding to the other side. lc The upper plate member lb can be deformed into a concave shape by moving it away from the plate and engaging with the fixed taper member lg, and the cut portions of the glass plate 10 are in contact with each other (press contact). be able to.
[0058] また、上板部材 lbを凹状に変形させる方向を自由に選択することができる。したが つて、ガラス板 10を格子状に切断するに当たって、作業上の都合や切断のし易さを 考慮して、第 1の方向が図 15中 (A)に示すように横方向に設定されても、図 15中(B )に示すように縦方向に設定されても、簡単に対処することができる。 [0058] Further, the direction in which the upper plate member lb is deformed into a concave shape can be freely selected. Therefore, when cutting the glass plate 10 into a grid, the first direction is set to the horizontal direction as shown in Fig. 15 (A) in consideration of work convenience and ease of cutting. However, even if it is set in the vertical direction as shown in FIG.
[0059] 図 16は外力を作用させることによって、ガラス板 10の切断された部分同士を互い に接触させる (圧接させる)機構のさらに他の例を示す概略斜視図である。 FIG. 16 is a schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plate 10 into contact with each other by applying an external force (pressure contact).
[0060] この機構は、回転テーブル 1を、方形の下板部材 laと、方形の上板部材 lbと、下板 部材 laと上板部材 lbとを、 3行 3列の 9箇所において互いに連結するァクチユエータ lsl, Is2 ' ' ls9とで構成している。そして、上板部材 lbは、孔を複数設けてその孔 を負圧にし、または多孔質状の表面にしてそれらを負圧にする真空吸着機構を有し 、または、静電気の力を利用する静電チャックを有し、または、粘着シートを有するこ とが好ましい。ここで、粘着シートとしては、紫外線照射によって粘着力をなくするもの 、または常温で粘着力を持ち、冷却することにより粘着力が低下し、またはなくなるも のが例示できる。 [0060] This mechanism connects the rotary table 1 with a rectangular lower plate member la, a rectangular upper plate member lb, and a lower plate member la and an upper plate member lb at nine locations in three rows and three columns. The actuator is composed of lsl, Is2 '' ls9. The upper plate member lb has a vacuum suction mechanism in which a plurality of holes are provided and the holes are made negative pressure, or a porous surface is used to make them negative pressure, or static electricity using electrostatic force is used. It is preferable to have an electric chuck or an adhesive sheet. Here, examples of the pressure-sensitive adhesive sheet include those that lose the adhesive force by irradiation with ultraviolet rays, or those that have an adhesive force at room temperature and decrease or disappear when cooled.
[0061] この場合には、第 1行および第 3行に対応するァクチユエータを突出方向に動作さ せるとともに、第 2行に対応するァクチユエータを引き込み方向に動作させる状態と、
第 1列および第 3列に対応するァクチユエータを突出方向に動作させるとともに、第 2 列に対応するァクチユエータを引き込み方向に動作させる状態とを選択することによ つて、上板部材 lbを凹状に変形させる方向を自由に選択することができる。したがつ て、ガラス板 10を格子状に切断するに当たって、作業上の都合や切断のし易さを考 慮して、第 1の方向が図 15中 (A)に示すように横方向に設定されても、図 15中(B) に示すように縦方向に設定されても、簡単に対処することができる。 [0061] In this case, the activator corresponding to the first row and the third row is operated in the protruding direction, and the activator corresponding to the second row is operated in the retracting direction; The upper plate member lb is deformed into a concave shape by selecting the state in which the actuators corresponding to the first row and the third row are operated in the protruding direction and the actuator corresponding to the second row is operated in the retracting direction. The direction to be made can be freely selected. Therefore, when cutting the glass plate 10 into a lattice, the first direction is the horizontal direction as shown in Fig. 15 (A) in consideration of work convenience and ease of cutting. Even if it is set, even if it is set in the vertical direction as shown in FIG.
[0062] 但し、ァクチユエータを 4行 4列以上に配置して、上板部材 lbの変形度合い(曲率) を任意に設定することも可能である。 However, it is also possible to arbitrarily set the deformation degree (curvature) of the upper plate member lb by arranging the actuators in 4 rows and 4 columns or more.
[0063] 上記の各実施形態において使用されているァクチユエータとしては、往復動作が可 能な空気圧駆動機構、ネジ形状を利用した直線移動機構、ピエゾ素子、回転カム機 構、ノ ィメタル効果を利用したものなどが例示できるが、結果として往復動作が可能 であれば、他の方式でもよい。そして、ァクチユエータの動作量を制御することによつ て、上板部材 lbの変形の程度を調整することが可能である。 [0063] As the actuator used in each of the above embodiments, a pneumatic drive mechanism capable of reciprocating operation, a linear movement mechanism using a screw shape, a piezo element, a rotating cam mechanism, and a no-metal effect are used. Examples are possible, but other methods may be used as long as reciprocal motion is possible as a result. The degree of deformation of the upper plate member lb can be adjusted by controlling the operation amount of the actuator.
[0064] 本発明は上記の実施形態に限定されるものではなぐテーブルを変形させる手段と してバイメタル効果を利用するものを採用することが可能であるほか、単にテーブル 1 を傾斜させ、自重によってガラス板 10の切断された部分同士を互いに接触させるよう にすることが可能であり、さらにガラス板 10を全体として挟み込むチャック機構を設け ることも可能である。さらにまた、粘着テープを引っ張った状態でガラス板の下面に貼 り付けておくことも可能である。 [0064] The present invention is not limited to the above-described embodiment, and it is possible to adopt a device utilizing the bimetal effect as a means for deforming the table. The cut portions of the glass plate 10 can be brought into contact with each other, and a chuck mechanism for sandwiching the glass plate 10 as a whole can be provided. It is also possible to apply the adhesive tape to the lower surface of the glass plate while pulling it.
[0065] また、機械的変位計、光学的変位計などを用いて回転テーブル 1の上面、脆性材 料製板の上面の平坦度を予め測定し、測定結果に応じて回転テーブル 1の上面の 平坦度を変化さ [0065] Further, the flatness of the upper surface of the rotary table 1 and the upper surface of the brittle material plate is measured in advance using a mechanical displacement meter, an optical displacement meter, etc., and the upper surface of the rotary table 1 is measured according to the measurement result. Flatness changed
せ、または凹状に反らせることが可能である。 Or can be warped concavely.
図面の簡単な説明 Brief Description of Drawings
[0066] [図 1]本発明の脆性材料製板切断方法が適用されるガラス板切断装置の一実施形 態を示す概略斜視図である。 FIG. 1 is a schematic perspective view showing an embodiment of a glass sheet cutting apparatus to which the brittle material sheet cutting method of the present invention is applied.
[図 2]レーザ光を用いてガラス板を切断する処理を説明する概略斜視図である。 FIG. 2 is a schematic perspective view for explaining a process of cutting a glass plate using a laser beam.
[図 3]レーザ光を用いてガラス板を切断する処理を説明する概略縦断面図である。
[図 4]外力を作用させることによって、ガラス板の切断された部分同士を互いに接触さ せる (圧接させる)機構の一例を示す概略斜視図である。 FIG. 3 is a schematic longitudinal sectional view explaining a process of cutting a glass plate using laser light. FIG. 4 is a schematic perspective view showing an example of a mechanism for bringing the cut portions of the glass plates into contact with each other by applying an external force (pressure contact).
[図 5]外力非作用状態を説明する概略正面図である。 FIG. 5 is a schematic front view for explaining an external force inactive state.
[図 6]外力作用状態を説明する概略正面図である。 FIG. 6 is a schematic front view for explaining an external force acting state.
[図 7]外力を作用させることによって、ガラス板の切断された部分同士を互いに接触さ せる (圧接させる)機構の他の例を示す概略斜視図である。 FIG. 7 is a schematic perspective view showing another example of a mechanism for bringing the cut portions of the glass plates into contact with each other by applying an external force (pressure contact).
[図 8]外力非作用状態を説明する概略正面図である。 FIG. 8 is a schematic front view for explaining an external force inactive state.
[図 9]外力作用状態を説明する概略正面図である。 FIG. 9 is a schematic front view for explaining an external force acting state.
[図 10]外力を作用させることによって、ガラス板の切断された部分同士を互いに接触 させる (圧接させる)機構のさらに他の例を示す概略斜視図である。 FIG. 10 is a schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plates into contact with each other by applying an external force (pressure contact).
[図 11]外力非作用状態を説明する概略正面図である。 FIG. 11 is a schematic front view for explaining an external force non-operation state.
[図 12]外力作用状態を説明する概略正面図である。 FIG. 12 is a schematic front view for explaining an external force acting state.
[図 13]外力を作用させることによって、ガラス板の切断された部分同士を互いに接触 させる (圧接させる)機構のさらに他の例を示す概略斜視図である。 FIG. 13 is a schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plates into contact with each other by applying an external force (pressure contact).
[図 14]外力を作用させることによって、ガラス板の切断された部分同士を互いに接触 させる (圧接させる)機構のさらに他の例を示す概略斜視図である。 FIG. 14 is a schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plates into contact with each other by applying an external force (pressure contact).
[図 15]ガラス板を格子状に切断する場合の第 1の方向と第 2の方向とを説明する概略 図である。 FIG. 15 is a schematic diagram for explaining a first direction and a second direction when a glass plate is cut into a lattice shape.
[図 16]外力を作用させることによって、ガラス板の切断された部分同士を互いに接触 させる (圧接させる)機構のさらに他の例を示す概略斜視図である。 FIG. 16 is a schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plates into contact with each other by applying an external force (pressure contact).
符号の説明 Explanation of symbols
1 回転テーブル 1 rotating table
3 Y軸駆動部材 3 Y-axis drive member
4 レーザ切断ユニット 4 Laser cutting unit
6 変位計 6 Displacement meter
10 ガラス板 10 Glass plate
la 下板部材 la Lower plate member
lb 上板部材
lc スぺーサ lb Upper plate member lc spacer
Id ァクチユエータ le ァクチユエータ Idactuator leactuator
If 可動テーパ部材 lg 固定テーパ部材 lh 支持ローラ If movable taper member lg fixed taper member lh support roller
li ァクチユエータ lj 長尺突起部材 li Actuator lj Long protrusion
lk 連結部材 lk connecting member
lsl--ls9 ァクチユエータ
lsl--ls9 Actuator
Claims
[1] 支持台(1)上に脆性材料製板(10)を支承した状態において、レーザ光を用いて第 1 の方向に脆性材料製板(10)を切断し、次 ヽで支持台(1)上に支承した脆性材料製 板(10)に外力を作用させて切断された部分同士を圧接させ、この状態で、レーザ光 を用いて、第 1の方向と直交する第 2の方向に脆性材料製板(10)を切断することを 特徴とする脆性材料製板切断方法。 [1] With the brittle material plate (10) supported on the support base (1), use a laser beam to cut the brittle material plate (10) in the first direction. 1) An external force is applied to the brittle material plate (10) supported above, and the cut parts are brought into pressure contact with each other. In this state, a laser beam is used in a second direction perpendicular to the first direction. A method for cutting a brittle material plate, comprising cutting the brittle material plate (10).
[2] 支持台(1)の上面の平坦度を変化させることによって脆性材料製板(10)に外力を作 用させて切断された部分同士を圧接させる請求項 1に記載の脆性材料製板切断方 法。 [2] The brittle material plate according to claim 1, wherein the cut portions of the brittle material plate (10) are subjected to external force by changing the flatness of the upper surface of the support base (1). Cutting method.
[3] 支持台(1)の上面を凹状に変化させることによって脆性材料製板(10)に外力を作用 させて切断された部分同士を圧接させる請求項 1に記載の脆性材料製板切断方法。 [3] The method for cutting a brittle material plate according to claim 1, wherein the cut portion is pressed by applying an external force to the brittle material plate (10) by changing the upper surface of the support base (1) into a concave shape. .
[4] 支持台(1)または脆性材料製板(10)の平坦度を測定し、測定結果に基づいて定ま る必要性に応じて、脆性材料製板(10)に外力を作用させて切断された部分同士を 圧接させるために、支持台(1)の上面の平坦度を変化させ、および Zまたは支持台( [4] Measure the flatness of the support base (1) or the brittle material plate (10) and apply an external force to the brittle material plate (10) according to the necessity determined based on the measurement results. In order to press the cut parts together, the flatness of the upper surface of the support base (1) is changed, and Z or the support base (
1)の上面を凹状に変化させる請求項 1に記載の脆性材料製板切断方法。 The brittle material sheet cutting method according to claim 1, wherein the upper surface of 1) is changed into a concave shape.
[5] 脆性材料製板(10)を支持台(1)上に吸着させる請求項 1から請求項 4の何れかに 記載の脆性材料製板切断方法。 [5] The brittle material plate cutting method according to any one of claims 1 to 4, wherein the brittle material plate (10) is adsorbed on the support base (1).
[6] 脆性材料製板(10)を支承する支持台(1)と、脆性材料製板(10)をレーザ光を用い て切断する切断手段 (4)と、支持台(1)と切断手段 (4)とを相対的に第 1の方向に移 動させ、その後、第 1の方向と直交する第 2の方向に移動させる移動手段(1) (3)と、 支持台(1)と切断手段 (4)とを相対的に第 2の方向に移動させる間に、脆性材料製 板(10)の切断された部分同士を圧接させるように外力を作用させる外力手段(Id) ( le) (If) (lg) (li) (lsl) (ls2) (ls3) (ls4) (ls5) (ls6) (ls7) (ls8) (ls9)とを含 むことを特徴とする脆性材料製板切断装置。 [6] Support base (1) for supporting the brittle material plate (10), cutting means (4) for cutting the brittle material plate (10) using laser light, support base (1) and cutting means (4) is moved relative to the first direction, and then moved to a second direction orthogonal to the first direction (1) (3), and the support base (1) is cut off External force means (Id) (le) (External force means to apply an external force so that the cut portions of the brittle material plate (10) are pressed against each other while the means (4) is moved in the second direction relatively. If) (lg) (li) (lsl) (ls2) (ls3) (ls4) (ls5) (ls6) (ls7) (ls8) (ls9) .
[7] 外力手段(Id) (le) (If) (lg) (li) (lsl) (ls2) (ls3) (ls4) (ls5) (ls6) (ls7) (1 s8) (ls9)は、支持台(1)の上面の平坦度を変化させることによって脆性材料製板(1 0)に外力を作用させて切断された部分同士を圧接させるものである請求項 6に記載 の脆性材料製板切断装置。
[7] External force means (Id) (le) (If) (lg) (li) (lsl) (ls2) (ls3) (ls4) (ls5) (ls6) (ls7) (1 s8) (ls9) 7. The brittle material plate according to claim 6, wherein an external force is applied to the brittle material plate (10) by changing the flatness of the upper surface of the support base (1) to press the cut portions together. Cutting device.
[8] 外力手段(Id) (le) (If) (lg) (li) (lsl) (ls2) (ls3) (ls4) (ls5) (ls6) (ls7) (1 s8) (ls9)は、支持台(1)の上面を凹状に変化させることによって脆性材料製板(10 )に外力を作用させて切断された部分同士を圧接させるものである請求項 6に記載の 脆性材料製板切断装置。 [8] External force means (Id) (le) (If) (lg) (li) (lsl) (ls2) (ls3) (ls4) (ls5) (ls6) (ls7) (1 s8) (ls9) 7. The brittle material plate cutting apparatus according to claim 6, wherein the cut portion is formed by pressing the brittle material plate (10) by applying an external force by changing the upper surface of the support base (1) into a concave shape. .
[9] 支持台(1)または脆性材料製板(10)の平坦度を測定する平坦度測定手段 (6)をさ らに含み、外力手段(Id) (le) (If) (lg) (li) (lsl) (ls2) (ls3) (ls4) (ls5) (ls6 ) (ls7) (ls8) (ls9)は、測定結果に基づいて定まる必要性に応じて、脆性材料製 板(10)に外力を作用させて切断された部分同士を圧接させるために、支持台(1)の 上面の平坦度を変化させ、および Zまたは支持台(1)の上面を凹状に変化させるも のである請求項 6に記載の脆性材料製板切断装置。 [9] Further includes a flatness measuring means (6) for measuring the flatness of the support base (1) or the brittle material plate (10), and external force means (Id) (le) (If) (lg) ( (li) (lsl) (ls2) (ls3) (ls4) (ls5) (ls6) (ls7) (ls8) (ls9) is a brittle material plate (10) depending on the necessity determined based on the measurement results. In order to press the parts cut by applying an external force to each other, the flatness of the upper surface of the support base (1) is changed, and the upper surface of Z or the support base (1) is changed to a concave shape. Item 7. A brittle material sheet cutting device according to Item 6.
[10] 支持台(1)は、下板部材(la)と、上板部材(lb)と、下板部材(la)および上 [10] The support base (1) includes the lower plate member (la), the upper plate member (lb), the lower plate member (la) and the upper plate member (la).
板部材(lb)を少なくとも中心部にぉ 、て互いに連結する連結部材(lk)と、上板部 材(lb)を周辺部および Zまたは周辺寄り部において下板部材(la)力 離間させる 離間部材(Id) (le) (If) (lg)とを含んでいる請求項 6から請求項 9の何れかに記載 の脆性材料製板切断装置。 The connecting member (lk) that connects the plate member (lb) to at least the central portion, and the lower plate member (la) force separates the upper plate member (lb) at the peripheral portion and Z or the peripheral portion. The brittle material sheet cutting device according to any one of claims 6 to 9, comprising a member (Id) (le) (If) (lg).
[11] 支持台(1)は、下板部材(la)と、上板部材(lb)と、下板部材(la)および上板部材( lb)を周辺部において所定距離だけ離れた状態で互いに連結する連結部材 (1 h)と、上板部材(lb)を少なくとも中心部において下板部材(la)に接近させる接近 部材(li)とを含んで ヽる請求項 6から請求項 9の何れか〖こ記載の脆性材料製板切断 装置。 [11] The support base (1) has the lower plate member (la), the upper plate member (lb), the lower plate member (la), and the upper plate member (lb) separated from each other by a predetermined distance in the peripheral portion. The connecting member (1 h) for connecting to each other, and an approach member (li) for causing the upper plate member (lb) to approach the lower plate member (la) at least in the center portion. The brittle material plate cutting device described in any one of the above.
[12] 上板部材 (lb)は、脆性材料製板 (10)を吸着保持する吸着手段を含んでいる請求 項 10または請求項 11に記載の脆性材料製板切断装置。 12. The brittle material plate cutting apparatus according to claim 10 or 11, wherein the upper plate member (lb) includes an adsorption means for adsorbing and holding the brittle material plate (10).
[13] 上板部材 (lb)は、脆性材料製板 (10)を静電保持する静電手段を含んでいる請求 項 10または請求項 11に記載の脆性材料製板切断装置。 [13] The brittle material plate cutting apparatus according to [10] or [11], wherein the upper plate member (lb) includes electrostatic means for electrostatically holding the brittle material plate (10).
[14] 支持台(1)は、下板部材(la)と、下板部材(la)のうち、第 1の方向に延びる周辺部 上面に突出した突条部材(lj)とを含んでいる請求項 6から請求項 9の何れかに記載 の脆性材料製板切断装置。 [14] The support base (1) includes a lower plate member (la) and a protrusion member (lj) protruding from the upper surface of the peripheral portion extending in the first direction of the lower plate member (la). The brittle material sheet cutting device according to any one of claims 6 to 9.
[15] 下板部材 (la)は、脆性材料製板 (10)を吸着保持する吸着手段を含んでいる請求
項 14に記載の脆性材料製板切断装置。
[15] The lower plate member (la) includes a suction means for sucking and holding the brittle material plate (10). Item 15. A plate cutting apparatus made of a brittle material according to Item 14.
Priority Applications (2)
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JP2007504679A JP4884370B2 (en) | 2005-02-23 | 2006-02-16 | Brittle material sheet cutting method and apparatus |
CN2006800057198A CN101128294B (en) | 2005-02-23 | 2006-02-16 | Method and device for cutting fragile material plate |
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JP2005-046365 | 2005-02-23 | ||
JP2005046365 | 2005-02-23 |
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PCT/JP2006/302714 WO2006090632A1 (en) | 2005-02-23 | 2006-02-16 | Method and device for cutting fragile material plate |
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JP (1) | JP4884370B2 (en) |
KR (1) | KR20070106714A (en) |
CN (1) | CN101128294B (en) |
TW (1) | TW200635687A (en) |
WO (1) | WO2006090632A1 (en) |
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WO2006090632A1 (en) * | 2005-02-23 | 2006-08-31 | Toray Engineering Co., Ltd. | Method and device for cutting fragile material plate |
JP2011131229A (en) * | 2009-12-24 | 2011-07-07 | Hitachi High-Technologies Corp | Laser beam machining method, laser beam machining apparatus, and solar panel manufacturing method |
KR101395054B1 (en) | 2012-08-08 | 2014-05-14 | 삼성코닝정밀소재 주식회사 | Cutting method and stage for cutting of tempered glass |
KR101457445B1 (en) * | 2013-05-09 | 2014-11-06 | 주식회사 케이엔제이 | Cover glass manufacturing method |
JP6428643B2 (en) * | 2013-12-27 | 2018-11-28 | Agc株式会社 | Method for processing brittle plate and apparatus for processing brittle plate |
CN105643819B (en) * | 2016-03-18 | 2017-10-03 | 武汉华工激光工程有限责任公司 | Sapphire wafer sliver apparatus and method based on laser scribing processing technology |
KR102394243B1 (en) * | 2021-12-15 | 2022-05-03 | 이성준 | Ceramic Plate Orthogonal Cutting System |
CN114473245A (en) * | 2022-03-18 | 2022-05-13 | 无锡革新幕墙装饰工程有限公司 | Cutting device is used in production of curved surface curtain |
KR102506881B1 (en) * | 2022-10-24 | 2023-03-07 | 주식회사 조호레이저 | Laser Cutting Method |
CN116393842A (en) * | 2023-05-26 | 2023-07-07 | 深圳铭创智能装备有限公司 | Curved glass edge film cutting device and application method thereof |
Citations (3)
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JPS603990A (en) * | 1983-06-22 | 1985-01-10 | Hitachi Ltd | Laser working device |
JPH08175837A (en) * | 1994-12-26 | 1996-07-09 | Asahi Glass Co Ltd | Method for dividing plate glass and device therefor |
JPH10244387A (en) * | 1997-03-04 | 1998-09-14 | Toshiba Corp | Device and method for cutting multilayer heat insulation material |
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DE10041519C1 (en) * | 2000-08-24 | 2001-11-22 | Schott Spezialglas Gmbh | Cutting flat glass plate into several rectangular plates comprises cutting the flat glass plate along cutting lines into several partial plates |
WO2006090632A1 (en) * | 2005-02-23 | 2006-08-31 | Toray Engineering Co., Ltd. | Method and device for cutting fragile material plate |
-
2006
- 2006-02-16 WO PCT/JP2006/302714 patent/WO2006090632A1/en active Application Filing
- 2006-02-16 JP JP2007504679A patent/JP4884370B2/en not_active Expired - Fee Related
- 2006-02-16 CN CN2006800057198A patent/CN101128294B/en not_active Expired - Fee Related
- 2006-02-16 KR KR1020077018209A patent/KR20070106714A/en not_active Application Discontinuation
- 2006-02-23 TW TW095106167A patent/TW200635687A/en unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS603990A (en) * | 1983-06-22 | 1985-01-10 | Hitachi Ltd | Laser working device |
JPH08175837A (en) * | 1994-12-26 | 1996-07-09 | Asahi Glass Co Ltd | Method for dividing plate glass and device therefor |
JPH10244387A (en) * | 1997-03-04 | 1998-09-14 | Toshiba Corp | Device and method for cutting multilayer heat insulation material |
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JPWO2006090632A1 (en) | 2008-07-24 |
KR20070106714A (en) | 2007-11-05 |
CN101128294B (en) | 2011-12-07 |
JP4884370B2 (en) | 2012-02-29 |
CN101128294A (en) | 2008-02-20 |
TW200635687A (en) | 2006-10-16 |
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