WO2006090632A1

WO2006090632A1 - Method and device for cutting fragile material plate

Info

Publication number: WO2006090632A1
Application number: PCT/JP2006/302714
Authority: WO
Inventors: Yukihiro Uehara; Tomoo Uchikata; Chisa Inaka; Toshiyuki Jinda; Yasushi Maeda; Akihiro Kanazawa
Original assignee: Toray Engineering Co., Ltd.
Priority date: 2005-02-23
Filing date: 2006-02-16
Publication date: 2006-08-31
Also published as: JPWO2006090632A1; KR20070106714A; CN101128294B; JP4884370B2; CN101128294A; TW200635687A

Abstract

[PROBLEMS] To cut a fragile material plate in a lattice shape by using laser beam without forming extra preliminary cutting groove. [MEANS FOR SOLVING PROBLEMS] This device comprises a rotary table (1) pivotally supporting a glass pane having a lower plate member (1a), an upper plate member (1b), a spacer (1c) interposed along a center axis parallel with a first direction so as to connect the lower plate member (1a) to the upper plate member (1b), and actuators (1d) installed at the corner parts of the lower plate member (1a) and raising the corner parts of the upper plate member (1b).

Description

Specification

Brittle material sheet cutting method and apparatus

Technical field

The present invention relates to a method and an apparatus for cutting a brittle material plate such as a glass plate or a ceramic plate into a lattice shape using a laser beam.

Background art

Conventionally, there has been known a glass plate cutting method in which a glass plate is cut using a laser beam after the glass plate is scribed using the laser beam.

[0003] A method of cutting a glass plate into a lattice shape using laser light has also been proposed (see Patent Document 1).

Patent Document 1: JP 2000-61677 A

Disclosure of the invention

Problems to be solved by the invention

[0004] The method described in Patent Document 1 takes into account the inconvenience that the propagation of cracks stops before the intersection when secondary cutting is performed in a direction orthogonal to the primary cutting line using a laser cutting device. In order to perform the secondary cutting regardless of such inconvenience, a preliminary cutting groove is provided in advance at a portion where the cutting lines intersect.

Accordingly, not only a cutting process using a laser beam but also an extra preliminary cutting groove forming process is required, and the process becomes complicated as a whole. And this troublesomeness becomes remarkable according to the increase in the primary cutting line and the increase in the secondary cutting line.

[0006] Further description will be made.

[0007] In the glass substrate cutting method of Patent Document 1, no particular attention is paid to the glass substrate holding method, and it is common to use an apparently flat table.

[0008] When the glass substrate is cut in a lattice shape with the glass substrate held in this manner, the central portion of the table is supported by, for example, a rotary motor, and thus the peripheral portion is not supported. If the peripheral part of the table is not supported, the table will bend due to its own weight, causing a convex warp. In addition, the influence of the processing accuracy of the table In response, a partial convex warpage occurs in the table.

[0009] Further, even in the glass substrate itself, a partially convex warp occurs due to the flatness of the glass.

[0010] When such a convex warp occurs, the cut portions are separated from each other, and crack propagation is interrupted when the glass substrate is cut using a laser beam in a direction intersecting the portions. And the success rate of cutting the glass substrate in the cross direction decreases.

[0011] Note that this inconvenience is likely to occur when not only a glass plate but also a ceramic plate, a wafer, or the like is cut into a lattice using a laser beam.

[0012] The present invention has been made in view of the above problems, and is a brittle material capable of cutting a brittle material plate into a lattice shape using laser light without forming an extra preliminary cut groove. The purpose of the present invention is to provide a method and apparatus for cutting a metal plate!

Means for solving the problem

[0013] In the brittle material sheet cutting method of the present invention, the brittle material sheet is cut in the first direction using a laser beam in a state where the brittle material sheet is supported on a support base, and then supported. The parts cut by applying an external force to the brittle material plate supported on the table are pressed against each other, and in this state, the brittle material is made in the second direction perpendicular to the first direction using a laser beam. This is a method of cutting a plate.

[0014] Here, the external force can include a force applied as a result, such as a force acting by the weight of the glass substrate, which is generally a force positively applied by some mechanism. Examples of the brittle material plate include a glass plate, a ceramic plate, and a wafer. The first direction is a direction in which the brittle material plate is first cut, and can be arbitrarily set.

[0015] In this case, by changing the flatness of the upper surface of the support table, an external force may be applied to the brittle material plate so that the cut portions are pressed against each other, or the upper surface of the support table is concave. It is also possible to press the parts cut by applying an external force to the brittle material plate.

[0016] Further, the flatness of the support base or the brittle material plate is measured and determined based on the measurement result! If necessary, change the flatness of the upper surface of the support base and press the Z or the upper surface of the support base into a concave shape in order to bring the cut parts into pressure contact with each other by applying an external force to the brittle material plate. It is preferable to change.

[0017] Further, it is preferable that the brittle material plate is adsorbed on the support base.

[0018] The brittle material plate cutting apparatus of the present invention includes a support base for supporting the brittle material plate, a cutting means for cutting the brittle material plate using laser light, and the support base and the cutting means. Between the moving means for moving in the first direction and then moving in the second direction orthogonal to the first direction, and the support base and the cutting means relatively moving in the second direction. And an external force means for applying an external force so that the cut portions of the brittle material plate are brought into pressure contact with each other.

Here, the external force may include a force that is applied as a result, such as a force that is applied by the weight of the glass substrate. Examples of the brittle material plate include a glass plate, a ceramic plate, and a wafer.

[0020] In this case, the external force means may be one that presses the cut portions by applying an external force to the brittle material plate by changing the flatness of the upper surface of the support base. Alternatively, by changing the upper surface of the support base into a concave shape, an external force may be applied to the brittle material plate to bring the cut portions into pressure contact with each other.

[0021] Further, it further includes a flatness measuring means for measuring the flatness of the support base or the brittle material plate, and the external force is applied to the brittle material plate according to the necessity determined based on the measurement result. In order to press the parts cut by the action, it is preferable to change the flatness of the upper surface of the support base and change the Z or the upper surface of the support base into a concave shape.

[0022] In these cases, the support table includes a lower plate member, an upper plate member, a connecting member that connects the lower plate member and the upper plate member at least in the center, and an upper plate. Or a separation member that separates the lower plate member force at the peripheral portion and the Z portion or the peripheral portion, or the lower plate member, the upper plate member, the lower plate member, and the upper plate member may be included in the peripheral portion. In this case, it may include a connecting member that is connected to each other in a state of being separated by a predetermined distance, and an access member that moves the upper plate member at least in the center and approaches the lower plate member! [0023] The upper plate member may include an adsorption unit that adsorbs and holds the brittle material plate, or may include an electrostatic unit that electrostatically holds the brittle material plate.

[0024] Further, in this case, the support base may include a lower plate member, and a protrusion member protruding from the lower plate member on the upper surface of the peripheral portion extending in the first direction. It preferably includes an adsorption means for adsorbing and holding a brittle material plate.

[0025] With the brittle material sheet cutting method of the present invention, after cutting the brittle material sheet in the first direction using laser light, the portions cut by applying an external force to the brittle material sheet In this state, it is possible to cut the brittle material plate in the second direction perpendicular to the first direction by using laser light without providing an extra preliminary cutting groove, exceeding the intersection. Cracks can be propagated, so there is almost no failure of cutting in the second direction.

[0026] With the brittle material sheet cutting apparatus of the present invention, after cutting the brittle material sheet in the first direction using laser light, the portions cut by applying an external force to the brittle material sheet In this state, it is possible to cut the brittle material plate in the second direction perpendicular to the first direction by using laser light without providing an extra preliminary cutting groove, exceeding the intersection. Cracks can be propagated, so there is almost no failure of cutting in the second direction.

The invention's effect

[0027] The brittle material sheet cutting method of the present invention makes it possible to simplify the entire process by eliminating the need for providing an extra preliminary cutting groove, and the force is also perpendicular to the first direction. There is a unique effect that cutting failure in the two directions can be almost eliminated.

[0028] The brittle material sheet cutting device of the present invention eliminates the need for a mechanism for providing an extra preliminary cutting groove and can simplify the overall configuration, and the force is also perpendicular to the first direction. There is a unique effect that cutting failure in the two directions can be almost eliminated. BEST MODE FOR CARRYING OUT THE INVENTION

[0029] Hereinafter, embodiments of a brittle material sheet cutting method and apparatus according to the present invention will be described in detail with reference to the accompanying drawings.

[0030] It should be noted that, in the following, the force described by taking glass as an example of the brittle material, other brittleness The same applies to the case of employing a material.

FIG. 1 is a schematic perspective view showing an embodiment of a glass sheet cutting apparatus to which the brittle material sheet cutting method of the present invention is applied.

[0032] The present glass plate cutting apparatus translates the rotary table 1 that supports the glass plate 10 to be cut, and the rotary table 1 in a plane parallel to the glass plate in directions orthogonal to each other X Axis

Drive member 2, Y-axis drive member 3, and laser cutting unit that cuts glass plate 10 using laser light

A knit 4, a rotary table 1, an X-axis drive member 2, a Y-axis drive member 3, and a controller 5 that controls the laser cutting unit 4 are provided. A displacement meter 6 is used to measure the flatness of the upper surface of the rotary table 1 and the upper surface of the glass plate 10. As the displacement meter 6, various conventionally known configurations such as a mechanical displacement meter and an optical displacement meter can be used.

FIG. 2 is a schematic perspective view illustrating a process of cutting the glass plate 10 using laser light.

A cutting line 10b is assumed for the glass plate 10, and a notch (preliminary cutting groove) 10a is formed at a cutting start position by a conventionally known method.

[0035] Then, starting from the notch 10a, along the cutting line 10b, first, a laser beam (scribe beam) 4a is irradiated to cause local thermal expansion to generate a compressive stress. Nintendo Water) 4b is supplied to the portion irradiated with the laser beam and locally contracted to generate tensile stress. By these treatments (scribe process), microcracks can be continuously grown. This continuously grown microcrack is called a scribe line.

[0036] After scribing, a laser beam (break beam) 4c is irradiated to locally expand the portion where the microcracks are continuously grown to generate a compressive stress, and the scribe line extends to the back surface of the glass plate 10. It can be grown to achieve cutting of the glass plate 10 (see Figure 3). A line in which the scribe line grows to the back surface of the glass plate 10 is called a break line. [0037] Therefore, by operating the Y-axis drive member 3 so that the irradiation of the scribe beam 4a, the supply of the quencher water 4b, and the irradiation of the break beam 4c are performed on the glass plate 10 in this order, the first axis is operated. The glass plate 10 can be cut in the direction of. Then, move the X-axis drive member 2 to set a different position. In this state, the scribe beam

By operating the Y-axis drive member 3 so that the irradiation of 4a, the supply of quencher water 4b, and the irradiation of the break beam 4c are performed in this order on the glass plate 10, at different positions in the first direction The glass plate 10 can be cut. Hereinafter, similarly, the glass plate 10 can be cut in the first direction at a desired location.

[0038] After the glass plate 10 is cut a desired number of times in the first direction in this way, the cut portions of the glass plate 10 are brought into contact (pressure contact) with each other by applying an external force. Turn table 1 90 degrees so that irradiation of scribe beam 4a, supply of quenching tower 4b, irradiation of break beam 4c is performed on glass plate 10 in this order in a second direction orthogonal to the direction of 1. To rotate the Y-axis drive member 3 in this state.

Thus, the glass plate 10 can be cut in the second direction. Thereafter, the X-axis drive member 2 is operated to set different positions. In this state, the irradiation of the scribe beam 4a, the supply of the quencher water 4b, and the irradiation of the break beam 4c are applied to the glass plate 10 in this order. As performed, the glass plate 10 can be cut in the second direction at different positions by operating the Y-axis drive member 3. Thereafter, the glass plate 10 can be cut in the second direction in the same manner in the same manner.

[0039] When the glass plate 10 is cut in the second direction, an external force is applied so that the cut portions of the glass plate 10 are brought into contact with each other (pressure contact). Microcracks will continue to grow without being interrupted, and there is almost no failure in the second direction due to the extra force required to form extra precut grooves. .

FIG. 4 is a schematic perspective view showing an example of a mechanism for bringing the cut portions of the glass plate 10 into contact with each other by applying an external force (pressure contact), and FIG. 5 shows a state in which no external force is applied. FIG. 6 is a schematic front view for explaining an external force acting state.

[0041] This mechanism includes the rotary table 1 in a first direction so as to connect the rectangular lower plate member la, the rectangular upper plate member lb, and the lower plate member la and the upper plate member lb to each other. A spacer lc interposed along a parallel central axis, a connecting member lk, and an actuator Id provided at a corner portion of the lower plate member la and lifting the corner portion of the upper plate member lb. ing. The upper plate member lb has a vacuum suction mechanism in which a plurality of holes are provided to make the holes negative pressure, or a porous surface to make them negative pressure, or static electricity using electrostatic force is used. It is preferable to have an electric chuck or an adhesive sheet. Here, the pressure-sensitive adhesive sheet is a general one (for example, polyolefin, polyester, vinyl chloride, polyimide, fluorocarbon resin as a base material, acrylic-based, silicone-based, or other pressure-sensitive adhesive), ultraviolet irradiation Therefore, the adhesive strength is reduced by cooling (for example, a polyolefin resin based on a polyolefin resin with acrylic adhesive strength) or at room temperature. For example, a material that disappears (eg, a PET film as a base material and a thermosensitive adhesive) can be exemplified.

In this case, the upper plate member lb can be deformed into a concave shape by the actuator Id, and the cut portions of the glass plate 10 can be brought into contact with each other (press contact).

FIG. 7 is a schematic perspective view showing another example of a mechanism for bringing the cut portions of the glass plate 10 into contact with each other by applying an external force (pressure contact), and FIG. 8 illustrates a state in which no external force is applied. FIG. 9 is a schematic front view for explaining an external force acting state.

[0044] This mechanism includes a rotary table 1 in a first direction so as to connect the rectangular lower plate member la, the rectangular upper plate member lb, and the lower plate member la and the upper plate member lb to each other. Spacer lc interposed along the parallel central axis, connecting member lk, and movable taper provided at the corner of lower plate member la and reciprocated in the second direction by actuator le and member If, provided corners of the upper plate member lb forms up of a fixed taper member l _g which engages the movable tapered member If. The upper plate member lb has a vacuum suction mechanism in which a plurality of holes are provided to make the holes negative pressure, or a porous surface to make them negative pressure, or static electricity using electrostatic force is used. It is preferable to have an electric chuck or an adhesive sheet. Where Examples of the adhesive sheet include those that lose the adhesive strength by ultraviolet irradiation, or those that have adhesive strength at room temperature and decrease or disappear when cooled.

In this case, the upper taper member lb can be deformed into a concave shape by moving the movable taper member If away from the spacer lc by the actuator le and engaging with the fixed taper member lg. The cut portions of the glass plate 10 can be brought into contact with each other (pressure contact).

[0046] In the above embodiment, the actuator ld, the actuator le, the movable taper member lf, and the fixed taper member lg are provided only at the corners, but not only at the corners but also at the center. It is also possible to change the ascending distance of the upper plate member lb depending on the mounting position by providing them in other portions, and the same action can be achieved.

FIG. 10 is a schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plates 10 into contact with each other by applying an external force (pressure contact), and FIG. 11 is a state in which no external force is applied. FIG. 12 is a schematic front view for explaining an external force acting state.

[0048] This mechanism includes a rotary table 1 in a first direction so as to connect the rectangular lower plate member la, the rectangular upper plate member lb, and the lower plate member la and the upper plate member lb to each other. A pair of support rollers lh interposed between the peripheral parts of both members in parallel and the lower plate member la along the central axis parallel to the first direction and corresponding portions of the upper plate member lb The attractor li and attracting. The upper plate member lb is provided with a plurality of holes so that the holes have negative pressure, or are porous.

It is preferable to have a vacuum suction mechanism for making them negative pressure on the surface, an electrostatic chuck that utilizes electrostatic force, or an adhesive sheet. Here, examples of the adhesive sheet include those that lose the adhesive force by ultraviolet irradiation, or those that have the adhesive force at room temperature and decrease or disappear when cooled.

[0049] In this case, the upper plate member lb can be deformed into a concave shape by the actuator li, and the cut portions of the glass plate 10 can be brought into contact with each other (pressure contact).

[0050] The glass plate 10 applied to the embodiment of FIGS. It may be integrated in a stack.

FIG. 13 is a schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plate 10 into contact with each other (pressure contact) by applying an external force.

[0052] In this mechanism, the rotary table 1 is composed of a rectangular lower plate member la and long projection members lj provided in the peripheral portions of the lower plate member la facing each other in parallel with the first direction. is doing. An example of the long protruding member lj is a tape having a predetermined thickness.

[0053] The connecting member lj can be changed in the degree of projection, that is, the amount of deformation of the glass, or the glass can be made horizontal by an actuator (not shown).

However, the embodiment of FIG. 13 is applicable only when the upper gas plate is cut into a lattice shape among the two glass plates integrally formed in a stacked manner. The reason for this is that the presence of an uncut glass plate is a condition that can be deformed into a concave shape under the influence of the stepped portion due to the presence of the long projection member lj and its own weight. It is. However, even if a film or sheet is applied in the direction opposite to the back side of the glass, that is, the irradiation side of the cutting beam, even a single sheet can be used.

FIG. 14 is a partially cutaway schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plate 10 into contact with each other by applying an external force (pressure contact).

[0056] This mechanism includes a rotary table 1, a rectangular lower plate member la, a rectangular upper plate member lb, a connecting member lk that connects the lower plate member la and the upper plate member lb to each other around the center, Of the upper surface of the plate member la, a movable tapered member If provided corresponding to a predetermined position of each side and reciprocated in a direction perpendicular to the corresponding side by the actuator le, and a corresponding predetermined value of the upper plate member lb A fixed taper member lg provided at a position (a predetermined position corresponding to the movable taper member If) and engaged with the movable taper member If, and an upper plate provided at the center of each side of the upper surface of the lower plate member la Spacer lm for supporting the corresponding part of member lb, and the lower surface of lower plate member la are provided corresponding to the center of each side, and connected and fixed member lp on the outer side of lower plate member la Actuator In which reciprocates in and away from each other, and each side of upper plate member lb The engaging hole lq is formed on the outer surface of the connecting fixing member lp, and the protruding member lr is provided at a predetermined upper position of the coupling fixing member lp and engageable with the corresponding engaging hole lq. And upper plate member 1 b has a vacuum suction mechanism in which a plurality of holes are provided to make the holes negative pressure, or a porous surface to make them negative pressure, or an electrostatic chuck that uses electrostatic force Or, it is preferable to have an adhesive sheet. Here, examples of the pressure-sensitive adhesive sheet include a sheet that loses adhesive force by irradiation with ultraviolet rays, or a sheet that has adhesive force at room temperature and decreases or disappears when cooled.

[0057] In this case, the pair of connecting and fixing members lp facing each other in one direction are operated to protrude the members

Lr is engaged with the engagement hole lq to prevent upward deformation of the center of the corresponding side of the upper plate member lb, and the movable taper member If is spaced by the actuator le corresponding to the other side. lc The upper plate member lb can be deformed into a concave shape by moving it away from the plate and engaging with the fixed taper member lg, and the cut portions of the glass plate 10 are in contact with each other (press contact). be able to.

[0058] Further, the direction in which the upper plate member lb is deformed into a concave shape can be freely selected. Therefore, when cutting the glass plate 10 into a grid, the first direction is set to the horizontal direction as shown in Fig. 15 (A) in consideration of work convenience and ease of cutting. However, even if it is set in the vertical direction as shown in FIG.

FIG. 16 is a schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plate 10 into contact with each other by applying an external force (pressure contact).

[0060] This mechanism connects the rotary table 1 with a rectangular lower plate member la, a rectangular upper plate member lb, and a lower plate member la and an upper plate member lb at nine locations in three rows and three columns. The actuator is composed of lsl, Is2 '' ls9. The upper plate member lb has a vacuum suction mechanism in which a plurality of holes are provided and the holes are made negative pressure, or a porous surface is used to make them negative pressure, or static electricity using electrostatic force is used. It is preferable to have an electric chuck or an adhesive sheet. Here, examples of the pressure-sensitive adhesive sheet include those that lose the adhesive force by irradiation with ultraviolet rays, or those that have an adhesive force at room temperature and decrease or disappear when cooled.

[0061] In this case, the activator corresponding to the first row and the third row is operated in the protruding direction, and the activator corresponding to the second row is operated in the retracting direction; The upper plate member lb is deformed into a concave shape by selecting the state in which the actuators corresponding to the first row and the third row are operated in the protruding direction and the actuator corresponding to the second row is operated in the retracting direction. The direction to be made can be freely selected. Therefore, when cutting the glass plate 10 into a lattice, the first direction is the horizontal direction as shown in Fig. 15 (A) in consideration of work convenience and ease of cutting. Even if it is set, even if it is set in the vertical direction as shown in FIG.

However, it is also possible to arbitrarily set the deformation degree (curvature) of the upper plate member lb by arranging the actuators in 4 rows and 4 columns or more.

[0063] As the actuator used in each of the above embodiments, a pneumatic drive mechanism capable of reciprocating operation, a linear movement mechanism using a screw shape, a piezo element, a rotating cam mechanism, and a no-metal effect are used. Examples are possible, but other methods may be used as long as reciprocal motion is possible as a result. The degree of deformation of the upper plate member lb can be adjusted by controlling the operation amount of the actuator.

[0064] The present invention is not limited to the above-described embodiment, and it is possible to adopt a device utilizing the bimetal effect as a means for deforming the table. The cut portions of the glass plate 10 can be brought into contact with each other, and a chuck mechanism for sandwiching the glass plate 10 as a whole can be provided. It is also possible to apply the adhesive tape to the lower surface of the glass plate while pulling it.

[0065] Further, the flatness of the upper surface of the rotary table 1 and the upper surface of the brittle material plate is measured in advance using a mechanical displacement meter, an optical displacement meter, etc., and the upper surface of the rotary table 1 is measured according to the measurement result. Flatness changed

Or can be warped concavely.

Brief Description of Drawings

FIG. 2 is a schematic perspective view for explaining a process of cutting a glass plate using a laser beam.

FIG. 3 is a schematic longitudinal sectional view explaining a process of cutting a glass plate using laser light. FIG. 4 is a schematic perspective view showing an example of a mechanism for bringing the cut portions of the glass plates into contact with each other by applying an external force (pressure contact).

FIG. 5 is a schematic front view for explaining an external force inactive state.

FIG. 6 is a schematic front view for explaining an external force acting state.

FIG. 7 is a schematic perspective view showing another example of a mechanism for bringing the cut portions of the glass plates into contact with each other by applying an external force (pressure contact).

FIG. 8 is a schematic front view for explaining an external force inactive state.

FIG. 9 is a schematic front view for explaining an external force acting state.

FIG. 10 is a schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plates into contact with each other by applying an external force (pressure contact).

FIG. 11 is a schematic front view for explaining an external force non-operation state.

FIG. 12 is a schematic front view for explaining an external force acting state.

FIG. 13 is a schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plates into contact with each other by applying an external force (pressure contact).

FIG. 14 is a schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plates into contact with each other by applying an external force (pressure contact).

FIG. 15 is a schematic diagram for explaining a first direction and a second direction when a glass plate is cut into a lattice shape.

FIG. 16 is a schematic perspective view showing still another example of a mechanism for bringing the cut portions of the glass plates into contact with each other by applying an external force (pressure contact).

Explanation of symbols

1 rotating table

3 Y-axis drive member

4 Laser cutting unit

6 Displacement meter

10 Glass plate

la Lower plate member

lb Upper plate member lc spacer

Idactuator leactuator

If movable taper member lg fixed taper member lh support roller

li Actuator lj Long protrusion

lk connecting member

lsl--ls9 Actuator

Claims

The scope of the claims

[1] With the brittle material plate (10) supported on the support base (1), use a laser beam to cut the brittle material plate (10) in the first direction. 1) An external force is applied to the brittle material plate (10) supported above, and the cut parts are brought into pressure contact with each other. In this state, a laser beam is used in a second direction perpendicular to the first direction. A method for cutting a brittle material plate, comprising cutting the brittle material plate (10).

[2] The brittle material plate according to claim 1, wherein the cut portions of the brittle material plate (10) are subjected to external force by changing the flatness of the upper surface of the support base (1). Cutting method.

[3] The method for cutting a brittle material plate according to claim 1, wherein the cut portion is pressed by applying an external force to the brittle material plate (10) by changing the upper surface of the support base (1) into a concave shape. .

[4] Measure the flatness of the support base (1) or the brittle material plate (10) and apply an external force to the brittle material plate (10) according to the necessity determined based on the measurement results. In order to press the cut parts together, the flatness of the upper surface of the support base (1) is changed, and Z or the support base (

The brittle material sheet cutting method according to claim 1, wherein the upper surface of 1) is changed into a concave shape.

[5] The brittle material plate cutting method according to any one of claims 1 to 4, wherein the brittle material plate (10) is adsorbed on the support base (1).

[6] Support base (1) for supporting the brittle material plate (10), cutting means (4) for cutting the brittle material plate (10) using laser light, support base (1) and cutting means (4) is moved relative to the first direction, and then moved to a second direction orthogonal to the first direction (1) (3), and the support base (1) is cut off External force means (Id) (le) (External force means to apply an external force so that the cut portions of the brittle material plate (10) are pressed against each other while the means (4) is moved in the second direction relatively. If) (lg) (li) (lsl) (ls2) (ls3) (ls4) (ls5) (ls6) (ls7) (ls8) (ls9) .

[7] External force means (Id) (le) (If) (lg) (li) (lsl) (ls2) (ls3) (ls4) (ls5) (ls6) (ls7) (1 s8) (ls9) 7. The brittle material plate according to claim 6, wherein an external force is applied to the brittle material plate (10) by changing the flatness of the upper surface of the support base (1) to press the cut portions together. Cutting device.

[8] External force means (Id) (le) (If) (lg) (li) (lsl) (ls2) (ls3) (ls4) (ls5) (ls6) (ls7) (1 s8) (ls9) 7. The brittle material plate cutting apparatus according to claim 6, wherein the cut portion is formed by pressing the brittle material plate (10) by applying an external force by changing the upper surface of the support base (1) into a concave shape. .

[9] Further includes a flatness measuring means (6) for measuring the flatness of the support base (1) or the brittle material plate (10), and external force means (Id) (le) (If) (lg) ( (li) (lsl) (ls2) (ls3) (ls4) (ls5) (ls6) (ls7) (ls8) (ls9) is a brittle material plate (10) depending on the necessity determined based on the measurement results. In order to press the parts cut by applying an external force to each other, the flatness of the upper surface of the support base (1) is changed, and the upper surface of Z or the support base (1) is changed to a concave shape. Item 7. A brittle material sheet cutting device according to Item 6.

[10] The support base (1) includes the lower plate member (la), the upper plate member (lb), the lower plate member (la) and the upper plate member (la).

The connecting member (lk) that connects the plate member (lb) to at least the central portion, and the lower plate member (la) force separates the upper plate member (lb) at the peripheral portion and Z or the peripheral portion. The brittle material sheet cutting device according to any one of claims 6 to 9, comprising a member (Id) (le) (If) (lg).

[11] The support base (1) has the lower plate member (la), the upper plate member (lb), the lower plate member (la), and the upper plate member (lb) separated from each other by a predetermined distance in the peripheral portion. The connecting member (1 h) for connecting to each other, and an approach member (li) for causing the upper plate member (lb) to approach the lower plate member (la) at least in the center portion. The brittle material plate cutting device described in any one of the above.

12. The brittle material plate cutting apparatus according to claim 10 or 11, wherein the upper plate member (lb) includes an adsorption means for adsorbing and holding the brittle material plate (10).

[13] The brittle material plate cutting apparatus according to [10] or [11], wherein the upper plate member (lb) includes electrostatic means for electrostatically holding the brittle material plate (10).

[14] The support base (1) includes a lower plate member (la) and a protrusion member (lj) protruding from the upper surface of the peripheral portion extending in the first direction of the lower plate member (la). The brittle material sheet cutting device according to any one of claims 6 to 9.

[15] The lower plate member (la) includes a suction means for sucking and holding the brittle material plate (10). Item 15. A plate cutting apparatus made of a brittle material according to Item 14.