JP6085384B2 - Breaking device for brittle material substrate - Google Patents

Description

  The present invention relates to a substrate breaker made of a brittle material such as glass, ceramic, sapphire, and a semiconductor wafer. In particular, the present invention relates to a breaking device that breaks a brittle material substrate in which a scribe line (cut groove) is formed in a previous step along the scribe line and takes out a unit substrate.

  Conventionally, scribe lines in the X and Y directions perpendicular to each other using a scribe means such as a cutter wheel (also referred to as a scribing wheel), a fixed blade, or a laser beam on the surface of a brittle material substrate (hereinafter simply referred to as a substrate). After that, a method of dividing the substrate into unit substrates by applying an external force along the scribe line and breaking the substrate is known. For example, Patent Document 1 and Patent Document 2 disclose the method. .

FIG. 5 is a schematic perspective view showing a general breaker for a substrate.
The breaking device 21 includes a horizontal table 22 that places and holds a substrate W to be processed. The table 22 can be rotated in a horizontal plane by a rotary drive unit 23 incorporating a motor, and can be moved in the Y direction along a horizontal rail 24. A beam (horizontal frame) 25 that extends horizontally in the X direction is provided above the table 22, and a plate-like break bar 26 that extends in the X direction parallel to the beam is attached to the beam 25. It can be moved up and down via a lifting shaft 28 driven by the motor.

FIG. 8 shows a rectangular substrate W in which the scribe line S1 and the scribe line S2 in the Y direction perpendicular to each other are formed on the surface by the scribe means in the preceding scribe process, A unit substrate to be a product, W2 is an end material region discarded after the break.
When the substrate W is broken by the break device 21, one of the scribe lines S1 and S2, for example, as shown in FIG. 5, the scribe line S1 in the long side direction of the substrate is placed on the table 22 along the X direction. The cushion sheet 13 made of an elastic material is sandwiched and placed. In this case, as shown in FIG. 7A, the scribe lines S1 and S2 are arranged on the lower surface. After that, as shown in FIG. 7B, the break bar 26 is lowered from above the substrate W toward the scribe line to press the substrate W, and the substrate W is slightly V-shaped on the cushion sheet. By bending, the crack of a scribe line is extended and the board | substrate W is broken. After breaking all the scribe lines in the long side direction in this way, as shown in FIG. 6, the table 22 is rotated 90 degrees so that the scribe line S2 in the short side direction of the substrate faces the X direction. Similarly to the above, when the break bar 26 is lowered to break all the scribe lines, the unit substrate W1 shown in FIG. 8 is taken out, and the end material region W2 at the edge is discarded.

Japanese Patent No. 3787489 JP 2002-187098 A

  In the above-described conventional break device, the break is caused by one break bar 26 extending in the X direction in parallel with the beam 25. Therefore, the number of scribe lines, that is, the scribe lines S1 in the long side direction and the short side direction It is necessary to raise and lower the break bar by the total number of the scribe lines S2. Usually, a large substrate is formed with many scribe lines, so as the number of scribe lines increases, the time required for the break increases and the wear and life of the break bar and its lifting mechanism increase. Also affects.

  Therefore, an object of the present invention is to provide a break device that can solve the above-described problems and can reduce the time required for break.

  In order to solve the above problems, the present invention takes the following technical means. That is, the break device of the present invention includes a table having a mounting surface on which a brittle material substrate is mounted, a beam disposed in parallel with the mounting surface above the table, and an extending direction of the beam. And a plurality of break bars formed to be movable along the guide shaft. Each of the plurality of break bars is formed to be movable up and down via a lifting shaft. In addition, the plurality of break bars are arranged in series along the beam extending direction, and are formed to be rotatable about an axis perpendicular to the mounting surface. In the separation posture, a plurality of break bars are simultaneously lowered to lower the plurality of slabs formed on the brittle material substrate. And wherein at the same time it can be break the live line.

  Since the present invention is as described above, when the length of the scribe line to be broken is shorter than the length of each break bar, a plurality of break bars are arranged along the direction orthogonal to the beam extending direction. Thus, a plurality of scribe lines can be broken simultaneously, and the time required for breaking can be shortened by simultaneously lowering toward the scribe lines of the substrate in a separation posture that is parallel to each other. Further, when the scribe line to be broken is longer than the length of each break bar, there is an effect that the two break bars can be broken by arranging them in series in the beam extending direction.

In the present invention, the plurality of break bars are formed so that they can move simultaneously along the guide shaft while maintaining the distance between the break bars in a separation posture parallel to each other, and can be moved individually. Good.
This makes it possible to perform scribe line breaks with a plurality of break bars continuously at the same pitch when performing a break in a separation posture in which a plurality of break bars are parallel to each other, thereby improving work efficiency. it can. Further, since each of them can be moved independently, even when the pitch of the scribe lines of the substrate to be broken changes, a plurality of scribe lines can be broken simultaneously.

It is a perspective view which shows an example of the breaking apparatus concerning this invention, Comprising: The case where the scribe line of the short side direction of a board | substrate is broken is shown. FIG. 2 is a perspective view similar to FIG. 1, showing a case where a scribe line in the long side direction of the substrate is broken. It is sectional drawing which shows the state at the time of a substrate break. It is a partial perspective view which shows the other Example of a break bar. It is a perspective view which shows an example of the conventional break device, Comprising: The case where the scribe line of the long side direction of a board | substrate is broken is shown. FIG. 6 is a perspective view similar to FIG. 5, showing a case where a scribe line in the short side direction of the substrate is broken. It is sectional drawing which shows the state at the time of the substrate break by the conventional break device. It is a top view which shows an example of the board | substrate with which the scribe line was formed.

Hereinafter, the breaking device of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a perspective view showing an example of the breaking device of the present invention, showing a case where a scribe line in the short side direction of the substrate is broken. FIG. 2 is a diagram showing a break in the scribe line in the long side direction of the substrate. FIG. 3 is a perspective view similar to FIG. 1 showing the case, and FIG. 3 is an enlarged sectional view at the time of substrate break.

  The breaking device 1 includes a table 2 on which a substrate W to be broken is placed. The table 2 can move in the Y direction along the horizontal rails 3 and 3 and is driven by a screw shaft 4 that is rotated by a motor M1. The table 2 can be rotated in a horizontal plane by a drive unit 5 incorporating a motor.

  The table 2 includes holding means so that the substrate W placed thereon can be held at a fixed position. As this holding means, for example, it can be sucked and held by air suction from a large number of small suction holes (not shown) opened in the table 2.

  A horizontal beam (horizontal frame) 7 extending in the X direction is installed on support columns 6, 6 erected with the table 2 interposed therebetween so as to straddle the table 2. The beam 7 is provided with a guide shaft 8 driven by the motor M2 along the extending direction of the beam 7, that is, the X direction. Two holders 9 and 9 are movably attached to the guide shaft 8, and long plate-like break bars 10 and 10 are attached to the holders 9 and 9, respectively.

Each break bar 10 is formed to be movable up and down by a fluid cylinder 11 and a lifting shaft 12 driven by the fluid cylinder 11. Moreover, the lower end of the break bar 10 is formed as a downward triangle having a ridge line 10a in the length direction, as shown in FIG.
Further, each break bar 10 is formed to be rotatable about an axis (in this embodiment, a lifting shaft 12) perpendicular to the surface of the table 2, so that the two break bars 10, 10 are As shown in FIG. 1, a series posture arranged in series along the extending direction of the beam 7, that is, the X direction, and a direction orthogonal to the extending direction of the beam 7, that is, the Y direction, as shown in FIG. 2. It forms so that it may become a separation posture which becomes mutually parallel. In the present embodiment, the break bar 10 is fixed to the elevating shaft 12, and the break bar 10 can be rotated by rotating the elevating shaft 12 by a rotating mechanism (not shown) incorporated in the holder 9. It has become.

  The two holders 9 that respectively hold the break bar 10 can move in conjunction with each other along the guide shaft 8 while maintaining a distance from each other by driving the motor M2, and can also move independently. It is formed as follows. By this single movement, the interval between the break bars can be adjusted. This configuration is achieved, for example, by interposing a transmission blocking mechanism (not shown) such as a clutch that releases the engagement and temporarily blocks the transmission between the two at the meshing portion of the holder 9 and the guide shaft 8. it can. When adjusting the space | interval of the break bars 10 and 10, the transmission interruption | blocking mechanism of any one holder is turned ON, and only the other holder drives the motor M2 and moves it. In addition, when the break bars 10 and 10 are moved with the interval maintained, both transmission blocking mechanisms may be released to be in the transmission state.

Next, the operation of breaking the substrate W shown in FIG. 8, that is, the rectangular substrate W in which the scribe lines S1 and S2 orthogonal to each other on the surface are formed at a predetermined pitch will be described.
First, when the scribe line S1 in the long side direction of the substrate W is divided, as shown in FIG. 1, the two break bars 10 and 10 are arranged in series along the X direction. In this embodiment, they are connected to each other. And as shown to Fig.3 (a), it mounts on the upper surface of the cushioning material 13 on the table 2 so that the scribe lines S1 and S2 may face downward. In this case, the scribe line S1 in the long side direction is placed so as to coincide with the connecting direction of the break bars 10 and 10, that is, the X direction. The length when the two break bars 10, 10 are connected is set in advance so as to be longer than the length of the scribe line S1 in the long side direction to be broken. In this state, the connected break bars 10 and 10 are lowered from directly above the scribe line S1, the first scribe line is broken, and then the table 2 is moved in the Y direction by the pitch of the scribe line S1 to Break the scribe line S1. In the substrate W shown in the figure, since there are two scribe lines S1 in the long side direction, the breaking of the scribe lines in the long side direction is completed in two descendings.

When the breaking of the scribe line S1 in the long side direction is completed, as shown in FIG. 2, the two break bars 10 and 10 are separated, and they are separated from each other along the direction perpendicular to the extending direction of the beam 7, that is, the Y direction. The separation posture becomes parallel, and the interval between the break bars 10 and 10 is adjusted to coincide with the pitch of the scribe lines S2. The length of each break bar 10 is set in advance so as to be longer than the length of the scribe line S2 in the short side direction to be broken. In this state, the two break bars 10, 10 are simultaneously lowered from directly above the scribe line S2, thereby breaking the two scribe lines S2, S2 simultaneously (see FIGS. 3A and 3B).
Next, the break bars 10 and 10 are moved along the guide shaft 8 to the position immediately above the scribe line S2 to be broken next while maintaining the interval, and the break bars 10 and 10 are lowered and broken as described above. This operation is repeated until all the scribe lines S2 in the short side direction are broken. In the substrate W shown in the figure, since there are five scribe lines S2 in the short side direction, the scribe line break in the short side direction is completed by being lowered three times. If there are 10 scribe lines S2 in the short side direction, all 10 scribe lines S2 can be divided by 5 descendings.

  In this way, by simultaneously lowering the two break bars 10 and 10 in the separated posture, two scribe lines can be broken simultaneously, so that the time required for the break can be shortened and the distance between each other can be reduced. Breaking can be performed continuously at the same interval by moving along the guide shaft 8 while maintaining the above.

  When the length of the scribe line S1 in the long side direction of the substrate W is shorter than the length of each break bar 10, the break bars 10 and 10 are parallel to each other as in the case of the break of the scribe line S2 in the short side direction. By arranging the substrate W so that the table 2 is rotated and the scribe line S1 is aligned with the Y direction, the two scribe lines S1 in the long side direction can be simultaneously broken. Thereby, shortening of the time required for the break can be further promoted.

  In addition, as shown in FIG. 4, when connecting the two break bars 10 and 10, it is good to provide the recessed part 10a and the convex part 10b which mesh with each other in the adjacent side edge part of the break bars 10 and 10. FIG. Thereby, both connection state can be hold | maintained reliably.

  As mentioned above, although the typical Example of this invention was described, this invention is not necessarily limited only to said Example. For example, in the above-described embodiment, an example in which two break bars 10 are provided has been described. However, three or more break bars 10 may be provided. In addition, the object of the present invention can be achieved and modified and changed as appropriate without departing from the scope of the claims.

  The present invention can be applied to a substrate breaker made of a brittle material such as glass, ceramic, sapphire, and a semiconductor wafer.

W Brittle material substrate S1 Long-side scribe line S2 Short-side scribe line 1 Break device 2 Table 7 Beam 8 Guide shaft 9 Holder 10 Break bar 11 Fluid cylinder 12 Elevating shaft 13 Cushion

Claims (2)

A table having a mounting surface for mounting a brittle material substrate;
A beam disposed above the table and parallel to the placement surface;
A guide shaft provided on the beam along the extending direction of the beam;
A plurality of break bars formed to be movable along the guide shaft,
Each of the plurality of break bars is formed so as to be movable up and down via a lifting shaft, and is formed to be rotatable around an axis perpendicular to the placement surface, whereby the plurality of break bars are It is formed so as to have a series posture aligned in series along the extending direction of the beam and a separating posture parallel to each other along a direction orthogonal to the extending direction of the beam,
In the separating posture, a plurality of scribe lines formed on the brittle material substrate can be broken at the same time by simultaneously lowering the plurality of break bars. 2. The break bar according to claim 1, wherein the plurality of break bars are configured to be able to move simultaneously along the guide shaft while maintaining an interval between the break bars in the separation posture, and to be able to move individually. apparatus.