JP4879548B2 - 高周波電源装置 - Google Patents

高周波電源装置 Download PDF

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Publication number
JP4879548B2
JP4879548B2 JP2005289437A JP2005289437A JP4879548B2 JP 4879548 B2 JP4879548 B2 JP 4879548B2 JP 2005289437 A JP2005289437 A JP 2005289437A JP 2005289437 A JP2005289437 A JP 2005289437A JP 4879548 B2 JP4879548 B2 JP 4879548B2
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JP
Japan
Prior art keywords
frequency
signal
oscillation
power supply
output
Prior art date
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Expired - Lifetime
Application number
JP2005289437A
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English (en)
Japanese (ja)
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JP2007103102A5 (enExample
JP2007103102A (ja
Inventor
悟 濱石
佳樹 福本
一▲隆▼ 清
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Daihen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihen Corp filed Critical Daihen Corp
Priority to JP2005289437A priority Critical patent/JP4879548B2/ja
Priority to US11/536,171 priority patent/US7615983B2/en
Priority to KR1020060095688A priority patent/KR101293877B1/ko
Publication of JP2007103102A publication Critical patent/JP2007103102A/ja
Publication of JP2007103102A5 publication Critical patent/JP2007103102A5/ja
Application granted granted Critical
Publication of JP4879548B2 publication Critical patent/JP4879548B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
    • H02M7/42—Conversion of DC power input into AC power output without possibility of reversal
    • H02M7/44—Conversion of DC power input into AC power output without possibility of reversal by static converters
    • H02M7/48—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32522—Temperature

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Control Of Amplification And Gain Control (AREA)
  • Drying Of Semiconductors (AREA)
JP2005289437A 2005-09-30 2005-09-30 高周波電源装置 Expired - Lifetime JP4879548B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2005289437A JP4879548B2 (ja) 2005-09-30 2005-09-30 高周波電源装置
US11/536,171 US7615983B2 (en) 2005-09-30 2006-09-28 High frequency power device for protecting an amplifying element therein
KR1020060095688A KR101293877B1 (ko) 2005-09-30 2006-09-29 고주파 전원 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005289437A JP4879548B2 (ja) 2005-09-30 2005-09-30 高周波電源装置

Publications (3)

Publication Number Publication Date
JP2007103102A JP2007103102A (ja) 2007-04-19
JP2007103102A5 JP2007103102A5 (enExample) 2008-10-30
JP4879548B2 true JP4879548B2 (ja) 2012-02-22

Family

ID=37942151

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005289437A Expired - Lifetime JP4879548B2 (ja) 2005-09-30 2005-09-30 高周波電源装置

Country Status (3)

Country Link
US (1) US7615983B2 (enExample)
JP (1) JP4879548B2 (enExample)
KR (1) KR101293877B1 (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7517437B2 (en) * 2006-03-29 2009-04-14 Applied Materials, Inc. RF powered target for increasing deposition uniformity in sputtering systems
JP5090986B2 (ja) * 2008-03-26 2012-12-05 株式会社ダイヘン 高周波電源装置
JP4932787B2 (ja) * 2008-05-30 2012-05-16 株式会社ダイヘン 高周波電源装置
JP5283475B2 (ja) * 2008-10-21 2013-09-04 Ｓｐｐテクノロジーズ株式会社 プラズマ制御用電源装置
JP5398058B2 (ja) * 2008-10-31 2014-01-29 株式会社ダイヘン 高周波電源装置
JP5595134B2 (ja) * 2010-06-11 2014-09-24 富士フイルム株式会社 ドライエッチング装置及びドライエッチング方法
JP5729693B2 (ja) 2011-03-30 2015-06-03 株式会社ダイヘン 高周波電源装置
JP2013223380A (ja) * 2012-04-18 2013-10-28 Sony Corp 送電装置、非接触電力伝送システムおよび信号生成方法
JP6219057B2 (ja) * 2013-04-02 2017-10-25 株式会社ダイヘン 高周波電源
JP6342235B2 (ja) * 2014-03-19 2018-06-13 株式会社ダイヘン 高周波電源
US9947514B2 (en) 2015-09-01 2018-04-17 Mks Instruments, Inc. Plasma RF bias cancellation system
JP6761173B2 (ja) * 2016-08-15 2020-09-23 富士通株式会社 無線解析装置、無線解析方法、及びプログラム
KR101927439B1 (ko) * 2017-01-04 2018-12-10 주식회사 메디플 플라즈마 생성을 위한 전력 공급 장치
CN110504149B (zh) * 2018-05-17 2022-04-22 北京北方华创微电子装备有限公司 射频电源的脉冲调制系统及方法
JP6842443B2 (ja) * 2018-06-22 2021-03-17 東京エレクトロン株式会社 プラズマ処理装置及びプラズマを生成する方法
JP7437142B2 (ja) * 2019-11-25 2024-02-22 株式会社ダイヘン 高周波電源システム
CN113394067A (zh) * 2020-03-13 2021-09-14 Asm Ip私人控股有限公司 基板处理设备
JP7383533B2 (ja) 2020-03-16 2023-11-20 株式会社京三製作所 高周波電源装置及びその出力制御方法
JP7544594B2 (ja) * 2020-12-25 2024-09-03 株式会社ダイヘン 高周波電源システム
WO2022163535A1 (ja) * 2021-01-29 2022-08-04 東京エレクトロン株式会社 プラズマ処理装置及びソース高周波電力のソース周波数を制御する方法
JP7763099B2 (ja) * 2021-12-28 2025-10-31 株式会社ダイヘン 高周波電源装置
JP2023098297A (ja) 2021-12-28 2023-07-10 株式会社ダイヘン 高周波電源装置
JP2024094846A (ja) 2022-12-28 2024-07-10 株式会社ダイヘン 高周波電源装置
JP2024095373A (ja) * 2022-12-28 2024-07-10 株式会社ダイヘン 高周波電力供給システム

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08236294A (ja) * 1995-02-28 1996-09-13 Jeol Ltd 高周波プラズマ応用装置
JP3220383B2 (ja) * 1996-07-23 2001-10-22 東京エレクトロン株式会社 プラズマ処理装置及びその方法
ATE352123T1 (de) * 1997-09-17 2007-02-15 Tokyo Electron Ltd System und verfahren zur anpassung von elektrischen impedanzen
GB9817675D0 (en) * 1998-08-13 1998-10-07 Simoco Int Ltd Error correction in amplifiers
JP2000144416A (ja) * 1998-11-06 2000-05-26 Sanyo Shinku Kogyo Kk 電力印加装置および電力印加方法
JP2000150478A (ja) * 1998-11-12 2000-05-30 Matsushita Electronics Industry Corp プラズマ発生方法及びプラズマ発生装置
JP2002026137A (ja) * 2000-07-05 2002-01-25 Hitachi Ltd 半導体集積回路装置およびその製造方法
JP2002353809A (ja) * 2001-05-28 2002-12-06 Mitsubishi Electric Corp クロック発生回路
US6489731B1 (en) * 2001-07-27 2002-12-03 Koninklijke Philips Electronics N.V. Power supply and/or ballast system controlled by desired load power spectrum
JP2003143861A (ja) 2001-10-31 2003-05-16 Daihen Corp 高周波電源装置
GB2389252B (en) * 2002-05-31 2006-09-27 Zarlink Semiconductor Ltd A frequency modulation system & method
JP4111845B2 (ja) * 2003-02-28 2008-07-02 三菱電機株式会社 Ｄ級増幅器
EP1529491A4 (en) * 2003-04-03 2009-05-27 Panasonic Corp ULTRASONIC EQUIPMENT AND METHOD FOR CHECKING AN ULTRASONIC EQUIPMENT
KR100980598B1 (ko) * 2003-11-27 2010-09-07 가부시키가이샤 다이헨 고주파 전력 공급 시스템
WO2005052533A1 (ja) * 2003-11-27 2005-06-09 Kyocera Corporation 圧力センサ装置
JP4799947B2 (ja) * 2005-02-25 2011-10-26 株式会社ダイヘン 高周波電源装置および高周波電源の制御方法

Also Published As

Publication number Publication date
KR101293877B1 (ko) 2013-08-07
JP2007103102A (ja) 2007-04-19
US20070076344A1 (en) 2007-04-05
US7615983B2 (en) 2009-11-10
KR20070037394A (ko) 2007-04-04

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