ATE352123T1 - System und verfahren zur anpassung von elektrischen impedanzen - Google Patents
System und verfahren zur anpassung von elektrischen impedanzenInfo
- Publication number
- ATE352123T1 ATE352123T1 AT98948101T AT98948101T ATE352123T1 AT E352123 T1 ATE352123 T1 AT E352123T1 AT 98948101 T AT98948101 T AT 98948101T AT 98948101 T AT98948101 T AT 98948101T AT E352123 T1 ATE352123 T1 AT E352123T1
- Authority
- AT
- Austria
- Prior art keywords
- matching
- improved
- mnb
- mna
- mnc
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
- H03H7/38—Impedance-matching networks
- H03H7/40—Automatic matching of load impedance to source impedance
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H11/00—Networks using active elements
- H03H11/02—Multiple-port networks
- H03H11/28—Impedance matching networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
- H03H7/38—Impedance-matching networks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
Landscapes
- Plasma Technology (AREA)
- Networks Using Active Elements (AREA)
- Electrotherapy Devices (AREA)
- Drying Of Semiconductors (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US5917697P | 1997-09-17 | 1997-09-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE352123T1 true ATE352123T1 (de) | 2007-02-15 |
Family
ID=22021304
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT98948101T ATE352123T1 (de) | 1997-09-17 | 1998-09-17 | System und verfahren zur anpassung von elektrischen impedanzen |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP1023771B1 (de) |
JP (1) | JP2001516954A (de) |
KR (1) | KR100677012B1 (de) |
CN (1) | CN1129229C (de) |
AT (1) | ATE352123T1 (de) |
DE (1) | DE69836917D1 (de) |
WO (1) | WO1999014855A1 (de) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6265831B1 (en) | 1999-03-31 | 2001-07-24 | Lam Research Corporation | Plasma processing method and apparatus with control of rf bias |
TW584905B (en) | 2000-02-25 | 2004-04-21 | Tokyo Electron Ltd | Method and apparatus for depositing films |
US6677828B1 (en) * | 2000-08-17 | 2004-01-13 | Eni Technology, Inc. | Method of hot switching a plasma tuner |
US6657394B2 (en) * | 2001-04-06 | 2003-12-02 | Eni Technology, Inc. | Reflection coefficient phase detector |
US6818562B2 (en) | 2002-04-19 | 2004-11-16 | Applied Materials Inc | Method and apparatus for tuning an RF matching network in a plasma enhanced semiconductor wafer processing system |
KR100720989B1 (ko) * | 2005-07-15 | 2007-05-28 | 주식회사 뉴파워 프라즈마 | 멀티 챔버 플라즈마 프로세스 시스템 |
JP4879548B2 (ja) * | 2005-09-30 | 2012-02-22 | 株式会社ダイヘン | 高周波電源装置 |
CN101494947B (zh) * | 2008-01-23 | 2011-07-06 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 一种射频阻抗自动匹配的方法 |
JP4491029B2 (ja) * | 2008-08-12 | 2010-06-30 | 東京エレクトロン株式会社 | プラズマ処理装置及び高周波電力供給装置 |
CN102573261B (zh) * | 2010-12-10 | 2014-07-16 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 射频匹配方法及装置、等离子体设备 |
DE102011007597B4 (de) * | 2011-04-18 | 2014-07-10 | TRUMPF Hüttinger GmbH + Co. KG | Verfahren zur Impendanzanpassung und Hochfrequenz-Leistungsversorgung |
DE102011080035A1 (de) * | 2011-07-28 | 2013-01-31 | Hüttinger Elektronik Gmbh + Co. Kg | Verfahren und Vorrichtung zum Schutz von an einen Hochfrequenzgenerator angeschlossenen passiven Komponenten |
CN102420579A (zh) * | 2011-11-16 | 2012-04-18 | 中微半导体设备(上海)有限公司 | 一种自动实现射频功率匹配的方法和系统 |
US9171699B2 (en) * | 2012-02-22 | 2015-10-27 | Lam Research Corporation | Impedance-based adjustment of power and frequency |
US9082589B2 (en) * | 2012-10-09 | 2015-07-14 | Novellus Systems, Inc. | Hybrid impedance matching for inductively coupled plasma system |
US9645193B2 (en) * | 2012-10-23 | 2017-05-09 | Keithley Instruments, Llc | Impedance source ranging apparatus and method |
CN105206494B (zh) * | 2014-06-18 | 2017-06-06 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 脉冲射频电源的阻抗匹配方法及等离子体设备的匹配方法 |
CN105826154B (zh) | 2015-01-06 | 2017-12-19 | 北京北方华创微电子装备有限公司 | 针对脉冲射频电源的阻抗匹配方法及装置 |
US10192763B2 (en) * | 2015-10-05 | 2019-01-29 | Applied Materials, Inc. | Methodology for chamber performance matching for semiconductor equipment |
JP6817889B2 (ja) * | 2016-05-10 | 2021-01-20 | 東京エレクトロン株式会社 | プラズマ処理装置及びプラズマ処理方法 |
TWM531596U (zh) * | 2016-06-29 | 2016-11-01 | Fairtech Corp | 射頻(rf)匹配器定位裝置 |
CN108536628B (zh) * | 2017-03-03 | 2021-09-17 | 联发科技(新加坡)私人有限公司 | 阻抗匹配电路与接口电路 |
CN111380332A (zh) * | 2018-12-29 | 2020-07-07 | 中国科学院微电子研究所 | 一种具有功率自适应调节的微波干燥装置 |
CN111383946A (zh) * | 2018-12-29 | 2020-07-07 | 中国科学院微电子研究所 | 一种纳米图形快速固化装置 |
KR20220106820A (ko) | 2019-12-02 | 2022-07-29 | 램 리써치 코포레이션 | Rf (radio-frequency) 보조된 플라즈마 생성시 임피던스 변환 |
JP7465657B2 (ja) | 2019-12-27 | 2024-04-11 | 株式会社ダイヘン | インピーダンス調整装置 |
JP7450387B2 (ja) | 2019-12-27 | 2024-03-15 | 株式会社ダイヘン | インピーダンス調整装置 |
US11994542B2 (en) | 2020-03-27 | 2024-05-28 | Lam Research Corporation | RF signal parameter measurement in an integrated circuit fabrication chamber |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2939167A1 (de) * | 1979-08-21 | 1981-04-02 | Coulter Systems Corp., Bedford, Mass. | Vorrichtung und verfahren zur leistungszufuehrung an eine von dem entladungsplasma einer zerstaeubungsvorrichtung gebildeten last |
US4621242A (en) * | 1984-03-19 | 1986-11-04 | The Perkin-Elmer Corporation | R.F. impedance match control system |
US5195045A (en) * | 1991-02-27 | 1993-03-16 | Astec America, Inc. | Automatic impedance matching apparatus and method |
US5468296A (en) * | 1993-12-17 | 1995-11-21 | Lsi Logic Corporation | Apparatus for igniting low pressure inductively coupled plasma |
EP0713230B1 (de) * | 1994-11-21 | 1998-01-28 | Comet Technik AG | Variabler Kondensator |
CN2233660Y (zh) * | 1995-05-05 | 1996-08-21 | 浙江大学 | 网格式射频等离子体发生器 |
US5793162A (en) * | 1995-12-29 | 1998-08-11 | Lam Research Corporation | Apparatus for controlling matching network of a vacuum plasma processor and memory for same |
US5654679A (en) * | 1996-06-13 | 1997-08-05 | Rf Power Products, Inc. | Apparatus for matching a variable load impedance with an RF power generator impedance |
-
1998
- 1998-09-17 CN CN98809276A patent/CN1129229C/zh not_active Expired - Fee Related
- 1998-09-17 WO PCT/US1998/018497 patent/WO1999014855A1/en active IP Right Grant
- 1998-09-17 EP EP98948101A patent/EP1023771B1/de not_active Expired - Lifetime
- 1998-09-17 DE DE69836917T patent/DE69836917D1/de not_active Expired - Lifetime
- 1998-09-17 KR KR1020007002773A patent/KR100677012B1/ko not_active IP Right Cessation
- 1998-09-17 AT AT98948101T patent/ATE352123T1/de not_active IP Right Cessation
- 1998-09-17 JP JP2000512287A patent/JP2001516954A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP1023771A4 (de) | 2004-05-26 |
JP2001516954A (ja) | 2001-10-02 |
KR20010015590A (ko) | 2001-02-26 |
KR100677012B1 (ko) | 2007-01-31 |
WO1999014855A1 (en) | 1999-03-25 |
CN1270711A (zh) | 2000-10-18 |
EP1023771A1 (de) | 2000-08-02 |
EP1023771B1 (de) | 2007-01-17 |
DE69836917D1 (de) | 2007-03-08 |
CN1129229C (zh) | 2003-11-26 |
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Legal Events
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RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |