JP4867858B2 - Ｓａｗセンサ - Google Patents

Ｓａｗセンサ Download PDF

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Publication number
JP4867858B2
JP4867858B2 JP2007222229A JP2007222229A JP4867858B2 JP 4867858 B2 JP4867858 B2 JP 4867858B2 JP 2007222229 A JP2007222229 A JP 2007222229A JP 2007222229 A JP2007222229 A JP 2007222229A JP 4867858 B2 JP4867858 B2 JP 4867858B2
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JP
Japan
Prior art keywords
saw
mode
saw sensor
sensor element
fundamental wave
Prior art date
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Expired - Fee Related
Application number
JP2007222229A
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English (en)
Japanese (ja)
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JP2009053138A (ja
JP2009053138A5 (cg-RX-API-DMAC7.html
Inventor
道明 ▲高▼木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2007222229A priority Critical patent/JP4867858B2/ja
Publication of JP2009053138A publication Critical patent/JP2009053138A/ja
Publication of JP2009053138A5 publication Critical patent/JP2009053138A5/ja
Application granted granted Critical
Publication of JP4867858B2 publication Critical patent/JP4867858B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Oscillators With Electromechanical Resonators (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2007222229A 2007-08-29 2007-08-29 Ｓａｗセンサ Expired - Fee Related JP4867858B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007222229A JP4867858B2 (ja) 2007-08-29 2007-08-29 Ｓａｗセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007222229A JP4867858B2 (ja) 2007-08-29 2007-08-29 Ｓａｗセンサ

Publications (3)

Publication Number Publication Date
JP2009053138A JP2009053138A (ja) 2009-03-12
JP2009053138A5 JP2009053138A5 (cg-RX-API-DMAC7.html) 2010-09-30
JP4867858B2 true JP4867858B2 (ja) 2012-02-01

Family

ID=40504325

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007222229A Expired - Fee Related JP4867858B2 (ja) 2007-08-29 2007-08-29 Ｓａｗセンサ

Country Status (1)

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JP (1) JP4867858B2 (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104019886B (zh) * 2014-06-11 2018-02-13 常州智梭传感科技有限公司 基于声表面波的具有温度补偿的感测振动传感结构
CN104006875B (zh) * 2014-06-11 2018-04-10 常州智梭传感科技有限公司 基于声表面波的具有温度补偿的感测振动传感器

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4333342A (en) * 1980-11-03 1982-06-08 United Technologies Corporation Fluid damped saw accelerometer
JPS6182130A (ja) * 1984-09-28 1986-04-25 Shimadzu Corp 表面弾性波圧力センサ
JPH0275963A (ja) * 1988-09-12 1990-03-15 Honda Motor Co Ltd 半導体センサ
JPH08160068A (ja) * 1994-11-30 1996-06-21 Tokimec Inc 加速度計及びその製造方法
JP2000121659A (ja) * 1998-10-14 2000-04-28 Tokimec Inc 加速度計
US7109633B2 (en) * 2003-09-30 2006-09-19 Charles Stark Draper Laboratory, Inc. Flexural plate wave sensor
JP2007057287A (ja) * 2005-08-23 2007-03-08 Seiko Epson Corp 弾性表面波デバイス
JP4411539B2 (ja) * 2005-08-25 2010-02-10 セイコーエプソン株式会社 Ｓａｗ共振子
US20070079656A1 (en) * 2005-10-11 2007-04-12 Honeywell International Inc. Micro-machined acoustic wave accelerometer

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Publication number Publication date
JP2009053138A (ja) 2009-03-12

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