JP2009053138A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2009053138A5 JP2009053138A5 JP2007222229A JP2007222229A JP2009053138A5 JP 2009053138 A5 JP2009053138 A5 JP 2009053138A5 JP 2007222229 A JP2007222229 A JP 2007222229A JP 2007222229 A JP2007222229 A JP 2007222229A JP 2009053138 A5 JP2009053138 A5 JP 2009053138A5
- Authority
- JP
- Japan
- Prior art keywords
- saw
- mode
- saw sensor
- resonance frequency
- resonator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008878 coupling Effects 0.000 claims 2
- 238000010168 coupling process Methods 0.000 claims 2
- 238000005859 coupling reaction Methods 0.000 claims 2
- 230000009977 dual effect Effects 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007222229A JP4867858B2 (ja) | 2007-08-29 | 2007-08-29 | Ｓａｗセンサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007222229A JP4867858B2 (ja) | 2007-08-29 | 2007-08-29 | Ｓａｗセンサ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009053138A JP2009053138A (ja) | 2009-03-12 |
| JP2009053138A5 true JP2009053138A5 (cg-RX-API-DMAC7.html) | 2010-09-30 |
| JP4867858B2 JP4867858B2 (ja) | 2012-02-01 |
Family
ID=40504325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007222229A Expired - Fee Related JP4867858B2 (ja) | 2007-08-29 | 2007-08-29 | Ｓａｗセンサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4867858B2 (cg-RX-API-DMAC7.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104019886B (zh) * | 2014-06-11 | 2018-02-13 | 常州智梭传感科技有限公司 | 基于声表面波的具有温度补偿的感测振动传感结构 |
| CN104006875B (zh) * | 2014-06-11 | 2018-04-10 | 常州智梭传感科技有限公司 | 基于声表面波的具有温度补偿的感测振动传感器 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4333342A (en) * | 1980-11-03 | 1982-06-08 | United Technologies Corporation | Fluid damped saw accelerometer |
| JPS6182130A (ja) * | 1984-09-28 | 1986-04-25 | Shimadzu Corp | 表面弾性波圧力センサ |
| JPH0275963A (ja) * | 1988-09-12 | 1990-03-15 | Honda Motor Co Ltd | 半導体センサ |
| JPH08160068A (ja) * | 1994-11-30 | 1996-06-21 | Tokimec Inc | 加速度計及びその製造方法 |
| JP2000121659A (ja) * | 1998-10-14 | 2000-04-28 | Tokimec Inc | 加速度計 |
| US7109633B2 (en) * | 2003-09-30 | 2006-09-19 | Charles Stark Draper Laboratory, Inc. | Flexural plate wave sensor |
| JP2007057287A (ja) * | 2005-08-23 | 2007-03-08 | Seiko Epson Corp | 弾性表面波デバイス |
| JP4411539B2 (ja) * | 2005-08-25 | 2010-02-10 | セイコーエプソン株式会社 | Ｓａｗ共振子 |
| US20070079656A1 (en) * | 2005-10-11 | 2007-04-12 | Honeywell International Inc. | Micro-machined acoustic wave accelerometer |
-
2007
- 2007-08-29 JP JP2007222229A patent/JP4867858B2/ja not_active Expired - Fee Related