JP4864041B2 - 有機デバイスの製造装置 - Google Patents

有機デバイスの製造装置 Download PDF

Info

Publication number
JP4864041B2
JP4864041B2 JP2008117962A JP2008117962A JP4864041B2 JP 4864041 B2 JP4864041 B2 JP 4864041B2 JP 2008117962 A JP2008117962 A JP 2008117962A JP 2008117962 A JP2008117962 A JP 2008117962A JP 4864041 B2 JP4864041 B2 JP 4864041B2
Authority
JP
Japan
Prior art keywords
ink
substrate
scanning
lid
inkjet head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2008117962A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009266753A5 (enrdf_load_stackoverflow
JP2009266753A (ja
Inventor
嘉朗 北村
真弘 室
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2008117962A priority Critical patent/JP4864041B2/ja
Publication of JP2009266753A publication Critical patent/JP2009266753A/ja
Publication of JP2009266753A5 publication Critical patent/JP2009266753A5/ja
Application granted granted Critical
Publication of JP4864041B2 publication Critical patent/JP4864041B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Electroluminescent Light Sources (AREA)
  • Coating Apparatus (AREA)
JP2008117962A 2008-04-30 2008-04-30 有機デバイスの製造装置 Expired - Fee Related JP4864041B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008117962A JP4864041B2 (ja) 2008-04-30 2008-04-30 有機デバイスの製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008117962A JP4864041B2 (ja) 2008-04-30 2008-04-30 有機デバイスの製造装置

Publications (3)

Publication Number Publication Date
JP2009266753A JP2009266753A (ja) 2009-11-12
JP2009266753A5 JP2009266753A5 (enrdf_load_stackoverflow) 2010-03-25
JP4864041B2 true JP4864041B2 (ja) 2012-01-25

Family

ID=41392300

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008117962A Expired - Fee Related JP4864041B2 (ja) 2008-04-30 2008-04-30 有機デバイスの製造装置

Country Status (1)

Country Link
JP (1) JP4864041B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6833388B2 (ja) 2016-08-01 2021-02-24 株式会社Ｊｏｌｅｄ 有機ｅｌ用インク
JP6688909B2 (ja) * 2017-01-10 2020-04-28 株式会社Ｊｏｌｅｄ 有機ｅｌ表示パネルの製造方法、及びインク乾燥装置
CN112670212B (zh) * 2020-12-24 2024-05-07 武汉理工大学 一种大面积印刷与激光退火制造装置及半导体制造方法
CN117414984B (zh) * 2023-12-18 2024-02-23 四川华体照明科技股份有限公司 一种led荧光胶涂覆装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003340339A (ja) * 2002-05-27 2003-12-02 Hirata Corp 基板処理装置
JP2004160336A (ja) * 2002-11-12 2004-06-10 Seiko Epson Corp 膜形成装置及び膜形成方法、有機ｅｌ装置の製造方法、並びに液体吐出装置
JP4728629B2 (ja) * 2004-11-29 2011-07-20 株式会社東芝 インクジェット塗布装置及びインクジェット塗布方法
JP2008249986A (ja) * 2007-03-30 2008-10-16 Dainippon Printing Co Ltd カラーフィルタ製造装置、カラーフィルタ製造方法、表示装置の製造装置、表示装置の製造方法

Also Published As

Publication number Publication date
JP2009266753A (ja) 2009-11-12

Similar Documents

Publication Publication Date Title
KR102052331B1 (ko) 잉크젯 프린트 헤드, 이를 포함한 유기 발광 표시 장치의 제조 장치 및 그 방법
JP4604131B2 (ja) 有機ｅｌディスプレイおよびその製造方法
KR100856624B1 (ko) 표시장치의 제조장치 및 표시장치의 제조방법
CN1986224B (zh) 显示装置的制造装置及显示装置的制造方法
CN111192979B (zh) 显示面板的制造方法及功能层形成装置
JP4612741B2 (ja) 有機ｅｌディスプレイパネルおよびその製造方法
JP2010277944A (ja) 有機ｅｌディスプレイパネルおよびその製造方法
JP4311084B2 (ja) 薄膜パターンの製造方法、有機電界発光素子の製造方法、カラーフィルタの製造方法、プラズマディスプレイパネルの製造方法、液晶表示パネルの製造方法
WO2009087966A1 (ja) 有機エレクトロルミネッセンス装置およびその製造方法
JP4432358B2 (ja) 電気光学装置の製造方法
JP2009064642A (ja) 有機エレクトロルミネッセンス表示装置の製造方法、および製造装置
JP4864041B2 (ja) 有機デバイスの製造装置
KR20140134601A (ko) 유기 일렉트로루미넨스 표시 장치의 제조 방법 및 제조 장치
JP4755314B2 (ja) 有機ｅｌディスプレイパネルおよびその製造方法
JP2005056614A (ja) 有機エレクトロルミネッセンス素子の製造装置及びその製造方法
JP2020087909A (ja) 有機ｅｌ表示パネルの製造方法及び機能層形成装置
JP5317873B2 (ja) 有機ｅｌ素子用基板、有機ｅｌ層の製造方法、および有機ｅｌ素子用基板に搭載された有機ｅｌ素子を備える装置
JP2009238708A (ja) 有機エレクトロルミネッセンス装置の製造方法
JP2015207527A (ja) 有機発光デバイスの機能層の形成方法及び有機発光デバイスの製造方法
JP2005183184A (ja) 有機ｅｌ表示装置の製造方法
JP4907947B2 (ja) 塗布装置及び塗布装置の調整方法
JP4918470B2 (ja) 有機デバイスおよびその製造方法
JP2009266517A (ja) 有機ｅｌ表示装置及びその製造方法
JP2012038617A (ja) 有機ｅｌ素子及びその製造方法
WO2013111300A1 (ja) 有機ｅｌパネル及びその製造方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100208

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100208

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20110804

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110809

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110901

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20111011

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20111108

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20141118

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20141118

Year of fee payment: 3

LAPS Cancellation because of no payment of annual fees