JP4863715B2 - インクジェット用インク組成物 - Google Patents
インクジェット用インク組成物 Download PDFInfo
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- JP4863715B2 JP4863715B2 JP2005515254A JP2005515254A JP4863715B2 JP 4863715 B2 JP4863715 B2 JP 4863715B2 JP 2005515254 A JP2005515254 A JP 2005515254A JP 2005515254 A JP2005515254 A JP 2005515254A JP 4863715 B2 JP4863715 B2 JP 4863715B2
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- Prior art keywords
- ink composition
- ink
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- group
- wiring pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 239000000203 mixture Substances 0.000 title claims description 27
- 239000000758 substrate Substances 0.000 claims description 20
- 239000012190 activator Substances 0.000 claims description 16
- 239000006087 Silane Coupling Agent Substances 0.000 claims description 15
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 12
- 238000007772 electroless plating Methods 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- UGJPMSBRYUISGR-UHFFFAOYSA-N 1H-pyrrole silane Chemical compound [SiH4].N1C=CC=C1 UGJPMSBRYUISGR-UHFFFAOYSA-N 0.000 claims description 4
- 239000007822 coupling agent Substances 0.000 claims description 3
- 239000002904 solvent Substances 0.000 claims description 3
- ZDDUSDYMEXVQNJ-UHFFFAOYSA-N 1H-imidazole silane Chemical group [SiH4].N1C=NC=C1 ZDDUSDYMEXVQNJ-UHFFFAOYSA-N 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 238000007598 dipping method Methods 0.000 claims 1
- 238000007641 inkjet printing Methods 0.000 claims 1
- 239000000976 ink Substances 0.000 description 32
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 12
- 238000007747 plating Methods 0.000 description 10
- 239000000243 solution Substances 0.000 description 9
- -1 azole compound Chemical class 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 239000007864 aqueous solution Substances 0.000 description 5
- 239000007795 chemical reaction product Substances 0.000 description 5
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical group [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 125000002883 imidazolyl group Chemical group 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- PIBWKRNGBLPSSY-UHFFFAOYSA-L palladium(II) chloride Chemical compound Cl[Pd]Cl PIBWKRNGBLPSSY-UHFFFAOYSA-L 0.000 description 3
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 3
- 239000004034 viscosity adjusting agent Substances 0.000 description 3
- WYTZZXDRDKSJID-UHFFFAOYSA-N (3-aminopropyl)triethoxysilane Chemical compound CCO[Si](OCC)(OCC)CCCN WYTZZXDRDKSJID-UHFFFAOYSA-N 0.000 description 2
- KLSJWNVTNUYHDU-UHFFFAOYSA-N Amitrole Chemical group NC1=NC=NN1 KLSJWNVTNUYHDU-UHFFFAOYSA-N 0.000 description 2
- 125000003545 alkoxy group Chemical group 0.000 description 2
- 150000003851 azoles Chemical class 0.000 description 2
- 239000003607 modifier Substances 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- UGUHFDPGDQDVGX-UHFFFAOYSA-N 1,2,3-thiadiazole Chemical group C1=CSN=N1 UGUHFDPGDQDVGX-UHFFFAOYSA-N 0.000 description 1
- ODIRBFFBCSTPTO-UHFFFAOYSA-N 1,3-selenazole Chemical group C1=C[se]C=N1 ODIRBFFBCSTPTO-UHFFFAOYSA-N 0.000 description 1
- SJECZPVISLOESU-UHFFFAOYSA-N 3-trimethoxysilylpropan-1-amine Chemical compound CO[Si](OC)(OC)CCCN SJECZPVISLOESU-UHFFFAOYSA-N 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- FZWLAAWBMGSTSO-UHFFFAOYSA-N Thiazole Chemical group C1=CSC=N1 FZWLAAWBMGSTSO-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- YTLQFZVCLXFFRK-UHFFFAOYSA-N bendazol Chemical group N=1C2=CC=CC=C2NC=1CC1=CC=CC=C1 YTLQFZVCLXFFRK-UHFFFAOYSA-N 0.000 description 1
- 125000003785 benzimidazolyl group Chemical group N1=C(NC2=C1C=CC=C2)* 0.000 description 1
- 125000003354 benzotriazolyl group Chemical group N1N=NC2=C1C=CC=C2* 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 125000003453 indazolyl group Chemical group N1N=C(C2=C1C=CC=C2)* 0.000 description 1
- 239000003999 initiator Substances 0.000 description 1
- ZLTPDFXIESTBQG-UHFFFAOYSA-N isothiazole Chemical group C=1C=NSC=1 ZLTPDFXIESTBQG-UHFFFAOYSA-N 0.000 description 1
- 125000000842 isoxazolyl group Chemical group 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- WCPAKWJPBJAGKN-UHFFFAOYSA-N oxadiazole Chemical group C1=CON=N1 WCPAKWJPBJAGKN-UHFFFAOYSA-N 0.000 description 1
- CQDAMYNQINDRQC-UHFFFAOYSA-N oxatriazole Chemical group C1=NN=NO1 CQDAMYNQINDRQC-UHFFFAOYSA-N 0.000 description 1
- 125000002971 oxazolyl group Chemical group 0.000 description 1
- 150000002940 palladium Chemical class 0.000 description 1
- 150000002941 palladium compounds Chemical class 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 1
- 125000003226 pyrazolyl group Chemical group 0.000 description 1
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical compound [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 150000003464 sulfur compounds Chemical class 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 125000003831 tetrazolyl group Chemical group 0.000 description 1
- YGNGABUJMXJPIJ-UHFFFAOYSA-N thiatriazole Chemical group C1=NN=NS1 YGNGABUJMXJPIJ-UHFFFAOYSA-N 0.000 description 1
- 150000003852 triazoles Chemical group 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D11/00—Inks
- C09D11/30—Inkjet printing inks
- C09D11/38—Inkjet printing inks characterised by non-macromolecular additives other than solvents, pigments or dyes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M5/00—Duplicating or marking methods; Sheet materials for use therein
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
- H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
- H05K3/182—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
- H05K1/092—Dispersed materials, e.g. conductive pastes or inks
- H05K1/097—Inks comprising nanoparticles and specially adapted for being sintered at low temperature
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/02—Fillers; Particles; Fibers; Reinforcement materials
- H05K2201/0203—Fillers and particles
- H05K2201/0206—Materials
- H05K2201/0239—Coupling agent for particles
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/01—Tools for processing; Objects used during processing
- H05K2203/0104—Tools for processing; Objects used during processing for patterning or coating
- H05K2203/013—Inkjet printing, e.g. for printing insulating material or resist
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/12—Using specific substances
- H05K2203/122—Organic non-polymeric compounds, e.g. oil, wax or thiol
- H05K2203/124—Heterocyclic organic compounds, e.g. azole, furan
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
- H05K3/1241—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by ink-jet printing or drawing by dispensing
- H05K3/125—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by ink-jet printing or drawing by dispensing by ink-jet printing
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Wood Science & Technology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Inks, Pencil-Leads, Or Crayons (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Chemically Coating (AREA)
- Ink Jet (AREA)
- Ink Jet Recording Methods And Recording Media Thereof (AREA)
Description
(1)基板上に配線パターンを描画するためのインクジェット用インク組成物において、活性化剤カップリング剤としてアゾール系シランカップリング剤を含み、水を溶媒とすることを特徴とするインク組成物。
(2)アゾール系シランカップリング剤がイミダゾールシランであることを特徴とする前記(1)記載のインク組成物。
(3)基板上にインクジェットにより配線パターンを描画する方法において、前記(1)記載のインク組成物を使用することを特徴とする配線パターンの描画方法。
(4)基板上にインクジェットにより配線パターンを描画し、次いで必要に応じて活性化剤溶液に浸漬した後、無電解めっきにより該配線パターンを金属被覆する方法において、配線パターンの描画に請求項1記載のインク組成物を使用することを特徴とする金属被覆方法。
イミダゾールとγ−グリシドキシプロピルトリメトキシシランとの等モル反応生成物の水溶液へ塩化パラジウム水溶液を添加して溶液を調製し、さらに水、粘度調整剤、表面張力調整剤を添加して前記等モル反応生成物が300mg/L、塩化パラジウム水溶液が100mg/Lとなるようにインク組成物を調製した。このインク組成物をインクジェットノズルより吐出し、基板に配線回路を描画した。その後、無電解ニッケルめっき(日鉱メタルプレーティング社製:ニコム7N−0)を膜厚0.2μm施した。さらに無電解銅めっき(日鉱メタルプレーティング社製:KC500)を1μm厚つけた。SEMでの断面観察の結果、パターン外析出は無く、めっき界面の明瞭な配線が形成された。そのめっき皮膜のピール強度は1.5kgf/cm2と高い密着度を示した。
イミダゾールとγ−グリシドキシプロピルトリメトキシシランとの等モル反応生成物水溶液に水、粘度調整剤、表面張力調整剤を加えて前記等モル反応生成物が300mg/Lになるようにインク組成物を調製した。このインク組成物をインクジェットノズルより吐出し、基板に配線を描画した。次いで塩化パラジウム水溶液(100mg/L)に浸漬し、パラジウムをイミダゾール環で固定化した。その後無電解ニッケルメッキ(日鉱メタルプレーティング社製:ニコム7N−0)を膜厚0.2μm施した。さらに無電解銅めっき(日鉱メタルプレーティング社製:KC500)を1μm厚つけた。SEMでの断面観察の結果、パターン外析出が無く、めっき界面の明瞭な配線が形成された。そのめっき皮膜のピール強度は、1.5kgf/cm2であった。
イミダゾールとγ−グリシドキシプロピルトリメトキシシランとの等モル反応生成物に代えて、γ−アミノプロピルトリメトキシシラン水溶液を使用する以外は実施例1と同様にしてインク組成物を調製し、また、このインク組成物を使用する以外は実施例1と同様にして配線パターンを形成し、無電解めっきを行った。
Claims (4)
- 基板上に配線パターンを描画するためのインクジェット用インク組成物において、活性化剤カップリング剤としてアゾール系シランカップリング剤を含み、水を溶媒とすることを特徴とするインク組成物。
- アゾール系シランカップリング剤がイミダゾールシランであることを特徴とする請求項1記載のインク組成物。
- 基板上にインクジェットにより配線パターンを描画する方法において、請求項1記載のインク組成物を使用することを特徴とする配線パターンの描画方法。
- 基板上にインクジェットにより配線パターンを描画し、次いで必要に応じて、活性化剤溶液に浸漬した後、無電解めっきにより該配線パターンを金属被覆する方法において、配線パターンの描画に請求項1記載のインク組成物を使用することを特徴とする金属被覆方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005515254A JP4863715B2 (ja) | 2003-11-05 | 2004-10-22 | インクジェット用インク組成物 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003375130 | 2003-11-05 | ||
JP2003375130 | 2003-11-05 | ||
JP2005515254A JP4863715B2 (ja) | 2003-11-05 | 2004-10-22 | インクジェット用インク組成物 |
PCT/JP2004/015707 WO2005044931A1 (ja) | 2003-11-05 | 2004-10-22 | インクジェット用インク組成物 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2005044931A1 JPWO2005044931A1 (ja) | 2007-11-29 |
JP4863715B2 true JP4863715B2 (ja) | 2012-01-25 |
Family
ID=34567060
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005515254A Expired - Lifetime JP4863715B2 (ja) | 2003-11-05 | 2004-10-22 | インクジェット用インク組成物 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20070120880A1 (ja) |
EP (1) | EP1681321B1 (ja) |
JP (1) | JP4863715B2 (ja) |
KR (1) | KR100764294B1 (ja) |
TW (1) | TWI289151B (ja) |
WO (1) | WO2005044931A1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4270517B2 (ja) * | 2003-06-09 | 2009-06-03 | 日鉱金属株式会社 | 無電解めっき方法及び金属めっき物 |
KR100796894B1 (ko) * | 2004-01-29 | 2008-01-22 | 닛코킨조쿠 가부시키가이샤 | 무전해 도금 전처리제, 그것을 이용하는 무전해 도금방법,및 무전해 도금물 |
JP4859232B2 (ja) * | 2004-09-10 | 2012-01-25 | Jx日鉱日石金属株式会社 | 無電解めっき前処理剤及びフレキシブル基板用銅張り積層体 |
JP4897384B2 (ja) * | 2006-08-03 | 2012-03-14 | 株式会社ブリヂストン | 光透過性電磁波シールド材の製造方法、光透過性電磁波シールド材、およびディスプレイ用フィルタ |
JP2008041823A (ja) * | 2006-08-03 | 2008-02-21 | Bridgestone Corp | 光透過性電磁波シールド材の製造方法、光透過性電磁波シールド材、およびディスプレイ用フィルタ |
JP5396871B2 (ja) * | 2009-01-20 | 2014-01-22 | コニカミノルタ株式会社 | インクジェットインクおよび金属パターン形成方法 |
JP2013226784A (ja) * | 2012-03-27 | 2013-11-07 | Toyobo Co Ltd | 積層体とその製造方法及びそれを用いたデバイス構造体の製造方法 |
JP2017526159A (ja) * | 2014-05-20 | 2017-09-07 | アルファ・アセンブリー・ソリューションズ・インコーポレイテッドAlpha Assembly Solutions Inc. | 太陽電池及び半導体製造用の噴射可能なインク |
Citations (5)
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JPH0499272A (ja) * | 1990-08-09 | 1992-03-31 | Nec Corp | マグネトロンスパッタ装置用強磁性ターゲット交換治具 |
JPH05186479A (ja) * | 1991-08-01 | 1993-07-27 | Nikko Kyodo Co Ltd | 新規イミダゾールシラン化合物及びその製造方法並びにそれを用いる金属表面処理剤 |
JPH10317159A (ja) * | 1997-05-22 | 1998-12-02 | Japan Energy Corp | 印刷回路用銅箔 |
JP3380880B2 (ja) * | 1999-01-14 | 2003-02-24 | 学校法人立命館 | 3次元デバイス構造の形成方法 |
JP2004353027A (ja) * | 2003-05-28 | 2004-12-16 | Taiyo Ink Mfg Ltd | 無電解めっきパターン形成用組成物、無電解めっきパターン及びその形成方法 |
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US7045461B2 (en) * | 2000-01-07 | 2006-05-16 | Nikkon Materials Co., Ltd. | Metal plating method, pretreatment agent, and semiconductor wafer and semiconductor device obtained using these |
US6780467B2 (en) * | 2000-04-25 | 2004-08-24 | Nikko Materials Co., Ltd. | Plating pretreatment agent and metal plating method using the same |
JP2002359347A (ja) * | 2001-03-28 | 2002-12-13 | Seiko Epson Corp | 半導体装置及びその製造方法、回路基板並びに電子機器 |
JP3758532B2 (ja) * | 2001-06-28 | 2006-03-22 | 株式会社日鉱マテリアルズ | 銅あるいは銅合金上への無電解ニッケルめっき用前処理液及び無電解ニッケルめっき方法 |
US7179741B2 (en) * | 2002-04-23 | 2007-02-20 | Nikko Materials Co., Ltd. | Electroless plating method and semiconductor wafer on which metal plating layer is formed |
JP4270517B2 (ja) * | 2003-06-09 | 2009-06-03 | 日鉱金属株式会社 | 無電解めっき方法及び金属めっき物 |
US20050006339A1 (en) * | 2003-07-11 | 2005-01-13 | Peter Mardilovich | Electroless deposition methods and systems |
WO2005038087A1 (ja) * | 2003-10-17 | 2005-04-28 | Nikko Materials Co., Ltd. | 無電解銅めっき液および無電解銅めっき方法 |
KR100796894B1 (ko) * | 2004-01-29 | 2008-01-22 | 닛코킨조쿠 가부시키가이샤 | 무전해 도금 전처리제, 그것을 이용하는 무전해 도금방법,및 무전해 도금물 |
JP4859232B2 (ja) * | 2004-09-10 | 2012-01-25 | Jx日鉱日石金属株式会社 | 無電解めっき前処理剤及びフレキシブル基板用銅張り積層体 |
JP4428579B2 (ja) * | 2005-03-10 | 2010-03-10 | 日鉱金属株式会社 | 樹脂基材、それに無電解めっきを施した電子部品基材、および電子部品基材の製造方法 |
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- 2004-10-22 WO PCT/JP2004/015707 patent/WO2005044931A1/ja active Application Filing
- 2004-10-22 JP JP2005515254A patent/JP4863715B2/ja not_active Expired - Lifetime
- 2004-10-22 US US10/576,658 patent/US20070120880A1/en not_active Abandoned
- 2004-10-22 EP EP20040792849 patent/EP1681321B1/en not_active Expired - Lifetime
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JPH0499272A (ja) * | 1990-08-09 | 1992-03-31 | Nec Corp | マグネトロンスパッタ装置用強磁性ターゲット交換治具 |
JPH05186479A (ja) * | 1991-08-01 | 1993-07-27 | Nikko Kyodo Co Ltd | 新規イミダゾールシラン化合物及びその製造方法並びにそれを用いる金属表面処理剤 |
JPH10317159A (ja) * | 1997-05-22 | 1998-12-02 | Japan Energy Corp | 印刷回路用銅箔 |
JP3380880B2 (ja) * | 1999-01-14 | 2003-02-24 | 学校法人立命館 | 3次元デバイス構造の形成方法 |
JP2004353027A (ja) * | 2003-05-28 | 2004-12-16 | Taiyo Ink Mfg Ltd | 無電解めっきパターン形成用組成物、無電解めっきパターン及びその形成方法 |
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Publication number | Publication date |
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TW200526745A (en) | 2005-08-16 |
KR100764294B1 (ko) | 2007-10-05 |
EP1681321B1 (en) | 2011-08-10 |
EP1681321A4 (en) | 2006-11-22 |
US20070120880A1 (en) | 2007-05-31 |
KR20060088899A (ko) | 2006-08-07 |
WO2005044931A1 (ja) | 2005-05-19 |
EP1681321A1 (en) | 2006-07-19 |
TWI289151B (en) | 2007-11-01 |
JPWO2005044931A1 (ja) | 2007-11-29 |
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