JP4859174B2 - プローブカード - Google Patents

プローブカード Download PDF

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Publication number
JP4859174B2
JP4859174B2 JP2005201242A JP2005201242A JP4859174B2 JP 4859174 B2 JP4859174 B2 JP 4859174B2 JP 2005201242 A JP2005201242 A JP 2005201242A JP 2005201242 A JP2005201242 A JP 2005201242A JP 4859174 B2 JP4859174 B2 JP 4859174B2
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JP
Japan
Prior art keywords
probe card
chip
probe
card unit
axis direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005201242A
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English (en)
Japanese (ja)
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JP2007017363A (ja
JP2007017363A5 (enrdf_load_stackoverflow
Inventor
英徳 福島
学 山内
晃史 田代
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Electronic Materials Corp
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Japan Electronic Materials Corp
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Publication date
Application filed by Japan Electronic Materials Corp filed Critical Japan Electronic Materials Corp
Priority to JP2005201242A priority Critical patent/JP4859174B2/ja
Publication of JP2007017363A publication Critical patent/JP2007017363A/ja
Publication of JP2007017363A5 publication Critical patent/JP2007017363A5/ja
Application granted granted Critical
Publication of JP4859174B2 publication Critical patent/JP4859174B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2005201242A 2005-07-11 2005-07-11 プローブカード Expired - Fee Related JP4859174B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005201242A JP4859174B2 (ja) 2005-07-11 2005-07-11 プローブカード

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005201242A JP4859174B2 (ja) 2005-07-11 2005-07-11 プローブカード

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011187376A Division JP5152941B2 (ja) 2011-08-30 2011-08-30 プローブカード

Publications (3)

Publication Number Publication Date
JP2007017363A JP2007017363A (ja) 2007-01-25
JP2007017363A5 JP2007017363A5 (enrdf_load_stackoverflow) 2008-07-03
JP4859174B2 true JP4859174B2 (ja) 2012-01-25

Family

ID=37754641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005201242A Expired - Fee Related JP4859174B2 (ja) 2005-07-11 2005-07-11 プローブカード

Country Status (1)

Country Link
JP (1) JP4859174B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7847568B2 (en) * 2007-08-17 2010-12-07 Advanced Micro Devices, Inc. Multi-site probe
CN113777369B (zh) * 2020-06-10 2023-12-19 台湾中华精测科技股份有限公司 悬臂式薄膜探针卡
CN115754388B (zh) * 2022-10-19 2023-09-29 深圳锐盟半导体有限公司 一种探针卡、芯片测试方法、测试机及存储介质

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1116963A (ja) * 1997-06-25 1999-01-22 Ii S J:Kk 半導体ウェハーのテスト方法および装置
JP2001291749A (ja) * 2000-04-06 2001-10-19 Seiko Epson Corp プローブカード及びそれを用いたチップ領域ソート方法
JP2001291750A (ja) * 2000-04-06 2001-10-19 Seiko Epson Corp プローブカード及びそれを用いたチップ領域ソート方法
JP4689070B2 (ja) * 2001-04-12 2011-05-25 ルネサスエレクトロニクス株式会社 半導体素子試験装置およびこれを用いた半導体素子試験方法

Also Published As

Publication number Publication date
JP2007017363A (ja) 2007-01-25

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