JP4854331B2 - 流体混合装置 - Google Patents

流体混合装置 Download PDF

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Publication number
JP4854331B2
JP4854331B2 JP2006055235A JP2006055235A JP4854331B2 JP 4854331 B2 JP4854331 B2 JP 4854331B2 JP 2006055235 A JP2006055235 A JP 2006055235A JP 2006055235 A JP2006055235 A JP 2006055235A JP 4854331 B2 JP4854331 B2 JP 4854331B2
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JP
Japan
Prior art keywords
valve
fluid
diaphragm
flow rate
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006055235A
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English (en)
Japanese (ja)
Other versions
JP2007175691A5 (enrdf_load_stackoverflow
JP2007175691A (ja
Inventor
清志 黒沢
典宏 野田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Yukizai Corp
Original Assignee
Asahi Organic Chemicals Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Organic Chemicals Industry Co Ltd filed Critical Asahi Organic Chemicals Industry Co Ltd
Priority to JP2006055235A priority Critical patent/JP4854331B2/ja
Priority to US11/646,596 priority patent/US20070204914A1/en
Priority to KR1020070007538A priority patent/KR20070090079A/ko
Publication of JP2007175691A publication Critical patent/JP2007175691A/ja
Publication of JP2007175691A5 publication Critical patent/JP2007175691A5/ja
Priority to US12/899,950 priority patent/US20110044125A1/en
Application granted granted Critical
Publication of JP4854331B2 publication Critical patent/JP4854331B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Flow Control (AREA)
  • Control Of Fluid Pressure (AREA)
  • Accessories For Mixers (AREA)
JP2006055235A 2005-12-02 2006-03-01 流体混合装置 Expired - Fee Related JP4854331B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2006055235A JP4854331B2 (ja) 2005-12-02 2006-03-01 流体混合装置
US11/646,596 US20070204914A1 (en) 2006-03-01 2006-12-28 Fluid mixing system
KR1020070007538A KR20070090079A (ko) 2006-03-01 2007-01-24 유체혼합장치
US12/899,950 US20110044125A1 (en) 2006-03-01 2010-10-07 Fluid mixing system

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005349892 2005-12-02
JP2005349892 2005-12-02
JP2006055235A JP4854331B2 (ja) 2005-12-02 2006-03-01 流体混合装置

Publications (3)

Publication Number Publication Date
JP2007175691A JP2007175691A (ja) 2007-07-12
JP2007175691A5 JP2007175691A5 (enrdf_load_stackoverflow) 2009-04-09
JP4854331B2 true JP4854331B2 (ja) 2012-01-18

Family

ID=38301402

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006055235A Expired - Fee Related JP4854331B2 (ja) 2005-12-02 2006-03-01 流体混合装置

Country Status (1)

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JP (1) JP4854331B2 (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5001757B2 (ja) 2007-08-31 2012-08-15 シーケーディ株式会社 流体混合システム及び流体混合装置
JP2011176125A (ja) * 2010-02-24 2011-09-08 Tokyo Electron Ltd 液処理装置、液処理方法、プログラムおよびプログラム記録媒体
JP5850565B2 (ja) * 2011-10-25 2016-02-03 アイシン機工株式会社 油水ミスト用給水安定化装置及び油水ミスト生成システム
AT513651B1 (de) * 2012-11-21 2015-06-15 Waizenauer Dietmar Bsc Mischanlage für viskose Medien
TW201501784A (zh) * 2013-04-26 2015-01-16 Graco Minnesota Inc 複數組分比例調配系統及方法
US10146233B2 (en) 2015-04-06 2018-12-04 Horiba Stec, Co., Ltd. Flow rate ratio control apparatus and program for flow rate ratio control apparatus
CN109200929A (zh) * 2018-09-18 2019-01-15 四川合众民生新能源科技有限公司 一种蓄电池生产加工用酸液配制装置
CN113952852A (zh) * 2021-11-12 2022-01-21 济南华信流体控制有限公司 一种气体混合配比装置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56119255A (en) * 1981-02-02 1981-09-18 Toray Industries Method and device for preparing mixed liquid of ratio accurately adjusted
JPS61146329A (ja) * 1984-12-18 1986-07-04 Cosmo Co Ltd 混合装置
JP4033925B2 (ja) * 1996-04-03 2008-01-16 大陽日酸株式会社 混合ガス供給装置
JP3383184B2 (ja) * 1997-06-18 2003-03-04 株式会社アグルー・ジャパン 希薄溶液の製造方法および装置
JP2931289B1 (ja) * 1998-03-04 1999-08-09 日本酸素株式会社 ガス混合装置
JP2000218148A (ja) * 1999-01-29 2000-08-08 Tokico Ltd 混合装置
JP3655155B2 (ja) * 1999-12-22 2005-06-02 アドバンス電気工業株式会社 マニホールド弁構造体
JP3741253B2 (ja) * 1999-12-24 2006-02-01 富士通株式会社 薬品製造装置
JP2002081557A (ja) * 2000-09-07 2002-03-22 Advance Denki Kogyo Kk 混合比率制御弁構造
JP4557413B2 (ja) * 2000-12-05 2010-10-06 旭有機材工業株式会社 ピンチバルブ
US20030098069A1 (en) * 2001-11-26 2003-05-29 Sund Wesley E. High purity fluid delivery system
JP2003329159A (ja) * 2002-05-13 2003-11-19 Saginomiya Seisakusho Inc 流量制御弁
JP3995543B2 (ja) * 2002-07-03 2007-10-24 旭有機材工業株式会社 流体制御弁
JP2004164033A (ja) * 2002-11-08 2004-06-10 Asahi Organic Chem Ind Co Ltd 流量制御装置
JP4222821B2 (ja) * 2002-11-27 2009-02-12 旭有機材工業株式会社 定流量弁
JP4417642B2 (ja) * 2003-03-17 2010-02-17 芝浦メカトロニクス株式会社 処理液の製造装置、製造方法及び基板の処理装置
JP4512913B2 (ja) * 2003-04-07 2010-07-28 旭有機材工業株式会社 流体混合装置
JP4247386B2 (ja) * 2003-11-28 2009-04-02 旭有機材工業株式会社 流量調節弁

Also Published As

Publication number Publication date
JP2007175691A (ja) 2007-07-12

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