JP4854256B2 - パネル処理装置及び処理方法 - Google Patents

パネル処理装置及び処理方法 Download PDF

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Publication number
JP4854256B2
JP4854256B2 JP2005293116A JP2005293116A JP4854256B2 JP 4854256 B2 JP4854256 B2 JP 4854256B2 JP 2005293116 A JP2005293116 A JP 2005293116A JP 2005293116 A JP2005293116 A JP 2005293116A JP 4854256 B2 JP4854256 B2 JP 4854256B2
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panel
holder
processing
processing stage
arm
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JP2007099466A (ja
JP2007099466A5 (enrdf_load_stackoverflow
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淳 斧城
一洋 安藤
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Hitachi High Tech Corp
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Hitachi High Technologies Corp
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JP2005293116A 2005-10-06 2005-10-06 パネル処理装置及び処理方法 Expired - Fee Related JP4854256B2 (ja)

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JP2005293116A JP4854256B2 (ja) 2005-10-06 2005-10-06 パネル処理装置及び処理方法

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JP2005293116A JP4854256B2 (ja) 2005-10-06 2005-10-06 パネル処理装置及び処理方法

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JP2007099466A JP2007099466A (ja) 2007-04-19
JP2007099466A5 JP2007099466A5 (enrdf_load_stackoverflow) 2008-11-20
JP4854256B2 true JP4854256B2 (ja) 2012-01-18

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JP2005293116A Expired - Fee Related JP4854256B2 (ja) 2005-10-06 2005-10-06 パネル処理装置及び処理方法

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Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4841537B2 (ja) * 2007-11-30 2011-12-21 株式会社日立ハイテクノロジーズ 基板処理方法及びフラットパネルディスプレイの製造方法
JP4845903B2 (ja) * 2008-02-05 2011-12-28 株式会社日立ハイテクノロジーズ ワークハンドリング装置及び部品搭載装置
JP5373331B2 (ja) * 2008-07-29 2013-12-18 株式会社日立ハイテクノロジーズ 基板処理装置
JP5479701B2 (ja) * 2008-10-06 2014-04-23 株式会社日立ハイテクノロジーズ 表示パネルモジュール組立装置
JP5352329B2 (ja) * 2009-04-13 2013-11-27 株式会社日立ハイテクノロジーズ 実装処理作業装置及び実装処理作業方法並びに表示基板モジュール組立ライン
JP2012203304A (ja) * 2011-03-28 2012-10-22 Hitachi High-Technologies Corp Ｆｐｄモジュールの組立装置
JP2013110114A (ja) * 2012-12-27 2013-06-06 Hitachi High-Technologies Corp 有機ｅｌデバイス製造装置及び角度補正機構
JP2022154234A (ja) * 2021-03-30 2022-10-13 東京エレクトロン株式会社 プラズマ処理システム、搬送アーム及び環状部材の搬送方法
KR102482535B1 (ko) * 2022-06-09 2022-12-29 에이치비솔루션(주) 기판 이송 장치 및 이를 위한 시스템

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11322069A (ja) * 1998-05-12 1999-11-24 Canon Inc 基板搬送用フィンガ組立体
JP2002026104A (ja) * 2000-06-30 2002-01-25 Dainippon Printing Co Ltd 受け渡し装置、およびロボットによる受け渡し方法
JP2004006467A (ja) * 2002-05-31 2004-01-08 Osaki Engineering Co Ltd パネルまたは基板のパーツ実装装置
JP4334369B2 (ja) * 2004-02-09 2009-09-30 富士機械製造株式会社 基板搬送装置

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