JP4852330B2 - 垂直磁気記録ヘッド及びその製造方法 - Google Patents
垂直磁気記録ヘッド及びその製造方法 Download PDFInfo
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- JP4852330B2 JP4852330B2 JP2006071135A JP2006071135A JP4852330B2 JP 4852330 B2 JP4852330 B2 JP 4852330B2 JP 2006071135 A JP2006071135 A JP 2006071135A JP 2006071135 A JP2006071135 A JP 2006071135A JP 4852330 B2 JP4852330 B2 JP 4852330B2
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
- G11B5/3143—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding
- G11B5/3146—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding magnetic layers
- G11B5/315—Shield layers on both sides of the main pole, e.g. in perpendicular magnetic heads
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
- Y10T29/49044—Plural magnetic deposition layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
- Y10T29/49046—Depositing magnetic layer or coating with etching or machining of magnetic material
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
- Y10T29/49052—Machining magnetic material [e.g., grinding, etching, polishing] by etching
Description
Claims (10)
- 主磁極と、補助磁極と、前記主磁極のトレーリング側及びトラック幅方向側に配置されたトレーリングサイドシールドとを有する垂直磁気記録ヘッドの製造方法において、
非磁性キャップ層と非磁性エッチングマスク層とエッチングシグナル層をこの積層順に上部に有する主磁極を形成する工程と、
前記エッチングシグナル層を上部に有する主磁極の上方及び側方を、サイドシールドが形成される領域を空けて非磁性ギャップ層で被覆する工程と、
エッチングシグナル検出装置により前記エッチングシグナル層に起因するシグナルが検出されるまで、前記非磁性ギャップ層をエッチングする工程と、
前記エッチング後の非磁性ギャップ層の上及び側方と前記エッチングシグナル層の上に非磁性のめっき下地層を介してトレーリングサイドシールドを形成する工程と
を有することを特徴とする垂直磁気記録ヘッドの製造方法。 - 請求項1記載の垂直磁気記録ヘッドの製造方法において、前記エッチングシグナル層を上部に有する主磁極を形成する工程は、主磁極となる磁性層の上にエッチングシグナル層を形成する工程と、前記エッチングシグナル層を上部に有する磁性層を加工して主磁極を形成する工程とを有することを特徴とする垂直磁気記録ヘッドの製造方法。
- 請求項1記載の垂直磁気記録ヘッドの製造方法において、前記エッチングシグナル層を上部に有する主磁極を形成する工程は、主磁極となる磁性層を加工して主磁極を形成する工程と、前記主磁極の上にエッチングシグナル層を形成する工程とを有することを特徴とする垂直磁気記録ヘッドの製造方法。
- 請求項1記載の垂直磁気記録ヘッドの製造方法において、前記エッチングシグナル検出装置は前記エッチングシグナル層に起因するイオンを検出する質量分析装置であることを特徴とする垂直磁気記録ヘッドの製造方法。
- 請求項1記載の垂直磁気記録ヘッドの製造方法において、前記エッチングシグナル検出装置は前記エッチングシグナル層に起因する発光を検出する装置であることを特徴とする垂直磁気記録ヘッドの製造方法。
- 請求項1記載の垂直磁気記録ヘッドの製造方法において、前記トレーリングサイドシールドを形成する前に前記エッチングシグナル層を除去することを特徴とする垂直磁気記録ヘッドの製造方法。
- 請求項1記載の垂直磁気記録ヘッドの製造方法において、前記非磁性ギャップ層のエッチングをイオンミリングによって行うことを特徴とする垂直磁気記録ヘッドの製造方法。
- 請求項7記載の垂直磁気記録ヘッドの製造方法において、前記イオンミリングの入射角度が45度から65度の間であることを特徴とする垂直磁気記録ヘッドの製造方法。
- 請求項1記載の垂直磁気記録ヘッドの製造方法において、前記エッチングシグナル層はTa,Cr,Mo,W,Nb,Rh又はSiを含む非磁性層であることを特徴とする垂直磁気記録ヘッドの製造方法。
- 請求項1記載の垂直磁気記録ヘッドの製造方法において、前記非磁性ギャップ層はアルミナからなることを特徴とする垂直磁気記録ヘッドの製造方法。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006071135A JP4852330B2 (ja) | 2006-03-15 | 2006-03-15 | 垂直磁気記録ヘッド及びその製造方法 |
TW095148207A TW200805314A (en) | 2006-03-15 | 2006-12-21 | Perpendicular magnetic recording head and method for manufacturing the same |
KR1020070003724A KR20070093799A (ko) | 2006-03-15 | 2007-01-12 | 수직 자기 기록 헤드 및 그의 제조 방법 |
EP07250350A EP1835489A3 (en) | 2006-03-15 | 2007-01-29 | Perpendicular magnetic recording head and method for manufacturing the same |
SG200701714-8A SG136053A1 (en) | 2006-03-15 | 2007-03-07 | Perpendicular magnetic recording head and method for manufacturing the same |
CNA2007100862766A CN101042873A (zh) | 2006-03-15 | 2007-03-13 | 垂直磁记录磁头及其制造方法 |
US11/724,952 US7895732B2 (en) | 2006-03-15 | 2007-03-15 | Method for manufacturing a perpendicular magnetic recording head |
Applications Claiming Priority (1)
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JP2006071135A JP4852330B2 (ja) | 2006-03-15 | 2006-03-15 | 垂直磁気記録ヘッド及びその製造方法 |
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JP2007250074A JP2007250074A (ja) | 2007-09-27 |
JP4852330B2 true JP4852330B2 (ja) | 2012-01-11 |
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JP2006071135A Expired - Fee Related JP4852330B2 (ja) | 2006-03-15 | 2006-03-15 | 垂直磁気記録ヘッド及びその製造方法 |
Country Status (7)
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US (1) | US7895732B2 (ja) |
EP (1) | EP1835489A3 (ja) |
JP (1) | JP4852330B2 (ja) |
KR (1) | KR20070093799A (ja) |
CN (1) | CN101042873A (ja) |
SG (1) | SG136053A1 (ja) |
TW (1) | TW200805314A (ja) |
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KR100426988B1 (ko) * | 2001-11-08 | 2004-04-14 | 삼성전자주식회사 | 반도체 제조장비의 식각 종말점 검출장치 및 그에 따른검출방법 |
JP2004022004A (ja) * | 2002-06-12 | 2004-01-22 | Tdk Corp | 薄膜磁気ヘッド |
US6838389B2 (en) * | 2002-08-02 | 2005-01-04 | Veeco Instruments, Inc. | High selectivity etching of a lead overlay structure |
JP4060224B2 (ja) * | 2003-03-31 | 2008-03-12 | 新科實業有限公司 | 薄膜磁気ヘッドの製造方法 |
US7120988B2 (en) * | 2003-09-26 | 2006-10-17 | Hitachi Global Storage Technologies Netherlands B.V. | Method for forming a write head having air bearing surface (ABS) |
US7196871B2 (en) * | 2003-09-26 | 2007-03-27 | Hitachi Global Storage Technologies Netherlands B.V. | Head for perpendicular recording with a floating trailing shield |
JP4260002B2 (ja) * | 2003-12-24 | 2009-04-30 | ヒタチグローバルストレージテクノロジーズネザーランドビーブイ | 磁気ヘッドとその製造方法および磁気記録再生装置 |
US7120989B2 (en) * | 2004-02-18 | 2006-10-17 | Headway Technologies, Inc. | Process of manufacturing a perpendicular magnetic pole structure |
JP4032030B2 (ja) * | 2004-02-20 | 2008-01-16 | アルプス電気株式会社 | 磁気ヘッドの製造方法 |
JP2005285193A (ja) * | 2004-03-29 | 2005-10-13 | Tdk Corp | 薄膜磁気ヘッドの製造方法、および電子部品の製造方法 |
US7296338B2 (en) * | 2004-07-30 | 2007-11-20 | Hitachi Global Storage Technologies Netherlands B.V. | Method and apparatus for providing a reverse air bearing surface head with trailing shield design for perpendicular recording |
US7576951B2 (en) * | 2006-04-25 | 2009-08-18 | Hitachi Global Storage Technologies Netherlands B.V. | Perpendicular magnetic write head having a magnetic write pole with a concave trailing edge |
-
2006
- 2006-03-15 JP JP2006071135A patent/JP4852330B2/ja not_active Expired - Fee Related
- 2006-12-21 TW TW095148207A patent/TW200805314A/zh unknown
-
2007
- 2007-01-12 KR KR1020070003724A patent/KR20070093799A/ko not_active Application Discontinuation
- 2007-01-29 EP EP07250350A patent/EP1835489A3/en not_active Withdrawn
- 2007-03-07 SG SG200701714-8A patent/SG136053A1/en unknown
- 2007-03-13 CN CNA2007100862766A patent/CN101042873A/zh active Pending
- 2007-03-15 US US11/724,952 patent/US7895732B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN101042873A (zh) | 2007-09-26 |
EP1835489A2 (en) | 2007-09-19 |
KR20070093799A (ko) | 2007-09-19 |
EP1835489A3 (en) | 2008-03-26 |
SG136053A1 (en) | 2007-10-29 |
TW200805314A (en) | 2008-01-16 |
US20070217069A1 (en) | 2007-09-20 |
US7895732B2 (en) | 2011-03-01 |
JP2007250074A (ja) | 2007-09-27 |
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