JP2007250074A - 垂直磁気記録ヘッド及びその製造方法 - Google Patents
垂直磁気記録ヘッド及びその製造方法 Download PDFInfo
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
- G11B5/3143—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding
- G11B5/3146—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding magnetic layers
- G11B5/315—Shield layers on both sides of the main pole, e.g. in perpendicular magnetic heads
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- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
- Y10T29/49044—Plural magnetic deposition layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
- Y10T29/49046—Depositing magnetic layer or coating with etching or machining of magnetic material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
- Y10T29/49052—Machining magnetic material [e.g., grinding, etching, polishing] by etching
Abstract
【解決手段】主磁極12上にエッチングシグナル層16を設け、その層に起因するシグナルを検知したときにイオンミリングを停止することによって、主磁極のトレーリング側のギャップ長を高精度に制御する。
【選択図】図3
Description
Claims (23)
- 主磁極と、補助磁極と、前記主磁極のトレーリング側に配置されたトレーリングシールドとを有する垂直磁気記録ヘッドの製造方法において、
エッチングシグナル層を上部に有する主磁極を形成する工程と、
前記エッチングシグナル層を上部に有する主磁極の上方及び側方を非磁性ギャップ層で被覆する工程と、
前記エッチングシグナル層の手前まで、前記非磁性ギャップ層を研磨する平坦化工程と、
エッチングシグナル検出装置により前記エッチングシグナル層に起因するシグナルが検出されるまで、前記非磁性ギャップ層をエッチングする工程と、
前記エッチング後の非磁性ギャップ層の上にトレーリングシールドを形成する工程と
を有することを特徴とする垂直磁気記録ヘッドの製造方法。 - 請求項1記載の垂直磁気記録ヘッドの製造方法において、前記エッチングシグナル層を上部に有する主磁極を形成する工程は、主磁極となる磁性層の上にエッチングシグナル層を形成する工程と、前記エッチングシグナル層を上部に有する磁性層を加工して主磁極を形成する工程とを有することを特徴とする垂直磁気記録ヘッドの製造方法。
- 請求項1記載の垂直磁気記録ヘッドの製造方法において、前記エッチングシグナル層を上部に有する主磁極を形成する工程は、主磁極となる磁性層を加工して主磁極を形成する工程と、前記主磁極の上にエッチングシグナル層を形成する工程とを有することを特徴とする垂直磁気記録ヘッドの製造方法。
- 請求項1記載の垂直磁気記録ヘッドの製造方法において、前記エッチングシグナル検出装置は前記エッチングシグナル層に起因するイオンを検出する質量分析装置であることを特徴とする垂直磁気記録ヘッドの製造方法。
- 請求項1記載の垂直磁気記録ヘッドの製造方法において、前記エッチングシグナル検出装置は前記エッチングシグナル層に起因する発光を検出する装置であることを特徴とする垂直磁気記録ヘッドの製造方法。
- 請求項1記載の垂直磁気記録ヘッドの製造方法において、前記トレーリングシールドを形成する前に前記エッチングシグナル層を除去することを特徴とする垂直磁気記録ヘッドの製造方法。
- 請求項1記載の垂直磁気記録ヘッドの製造方法において、前記非磁性ギャップ層のエッチングをイオンミリングによって行うことを特徴とする垂直磁気記録ヘッドの製造方法。
- 請求項1記載の垂直磁気記録ヘッドの製造方法において、前記エッチングシグナル層はTa,Cr,Mo,W,Nb,Rh又はSiを含む非磁性層であることを特徴とする垂直磁気記録ヘッドの製造方法。
- 請求項1記載の垂直磁気記録ヘッドの製造方法において、前記非磁性ギャップ層はアルミナからなることを特徴とする垂直磁気記録ヘッドの製造方法。
- 主磁極と、補助磁極と、前記主磁極のトレーリング側及びトラック幅方向側に配置されたトレーリングサイドシールドとを有する垂直磁気記録ヘッドの製造方法において、
エッチングシグナル層を上部に有する主磁極を形成する工程と、
前記エッチングシグナル層を上部に有する主磁極の上方及び側方を、サイドシールドが形成される領域を空けて非磁性ギャップ層で被覆する工程と、
エッチングシグナル検出装置により前記エッチングシグナル層に起因するシグナルが検出されるまで、前記非磁性ギャップ層をエッチングする工程と、
前記エッチング後の非磁性ギャップ層の上及び側方にトレーリングサイドシールドを形成する工程と
を有することを特徴とする垂直磁気記録ヘッドの製造方法。 - 請求項10記載の垂直磁気記録ヘッドの製造方法において、前記エッチングシグナル層を上部に有する主磁極を形成する工程は、主磁極となる磁性層の上にエッチングシグナル層を形成する工程と、前記エッチングシグナル層を上部に有する磁性層を加工して主磁極を形成する工程とを有することを特徴とする垂直磁気記録ヘッドの製造方法。
- 請求項10記載の垂直磁気記録ヘッドの製造方法において、前記エッチングシグナル層を上部に有する主磁極を形成する工程は、主磁極となる磁性層を加工して主磁極を形成する工程と、前記主磁極の上にエッチングシグナル層を形成する工程とを有することを特徴とする垂直磁気記録ヘッドの製造方法。
- 請求項10記載の垂直磁気記録ヘッドの製造方法において、前記エッチングシグナル検出装置は前記エッチングシグナル層に起因するイオンを検出する質量分析装置であることを特徴とする垂直磁気記録ヘッドの製造方法。
- 請求項10記載の垂直磁気記録ヘッドの製造方法において、前記エッチングシグナル検出装置は前記エッチングシグナル層に起因する発光を検出する装置であることを特徴とする垂直磁気記録ヘッドの製造方法。
- 請求項10記載の垂直磁気記録ヘッドの製造方法において、前記トレーリングサイドシールドを形成する前に前記エッチングシグナル層を除去することを特徴とする垂直磁気記録ヘッドの製造方法。
- 請求項10記載の垂直磁気記録ヘッドの製造方法において、前記非磁性ギャップ層のエッチングをイオンミリングによって行うことを特徴とする垂直磁気記録ヘッドの製造方法。
- 請求項16記載の垂直磁気記録ヘッドの製造方法において、前記イオンミリングの入射角度が45度から65度の間であることを特徴とする垂直磁気記録ヘッドの製造方法。
- 請求項10記載の垂直磁気記録ヘッドの製造方法において、前記エッチングシグナル層はTa,Cr,Mo,W,Nb,Rh又はSiを含む非磁性層であることを特徴とする垂直磁気記録ヘッドの製造方法。
- 請求項10記載の垂直磁気記録ヘッドの製造方法において、前記非磁性ギャップ層はアルミナからなることを特徴とする垂直磁気記録ヘッドの製造方法。
- 主磁極と、補助磁極と、前記主磁極のトレーリング側に配置されたトレーリングシールドとを有する垂直磁気記録ヘッドにおいて、
前記主磁極のトレーリング側に非磁性のキャップ層、エッチングマスクとなる非磁性層、エッチングシグナル層、めっき下地の密着層が順次積層され、その上に前記トレーリングシールドがあり、前記主磁極のトレーリングエッジから前記トレーリングシールドまでの距離が50nm以下であることを特徴とする垂直磁気記録ヘッド。 - 請求項20記載の垂直磁気記録ヘッドにおいて、前記主磁極のトレーリングエッジから前記トレーリングシールドまでの距離は、前記非磁性のキャップ層、エッチングマスクとなる非磁性層、エッチングシグナル層、めっき下地の密着層の合計膜厚であることを特徴とする垂直磁気記録ヘッド。
- 主磁極と、補助磁極と、前記主磁極のトレーリング側及びトラック幅方向側に配置されたトレーリングサイドシールドとを有する垂直磁気記録ヘッドにおいて、
前記主磁極のトレーリング側に非磁性のキャップ層、エッチングマスクとなる非磁性層、エッチングシグナル層、めっき下地の密着層が順次積層され、その上に前記トレーリングサイドシールドがあり、前記主磁極のトレーリングエッジから前記トレーリングサイドシールドまでの距離が50nm以下であることを特徴とることを特徴とする垂直磁気記録ヘッド。 - 請求項22記載の垂直磁気記録ヘッドにおいて、前記主磁極のトレーリングエッジから前記トレーリングサイドシールドまでの距離は、前記非磁性のキャップ層、エッチングマスクとなる非磁性層、エッチングシグナル層、めっき下地の密着層の合計膜厚であることを特徴とする垂直磁気記録ヘッド。
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JP2006071135A JP4852330B2 (ja) | 2006-03-15 | 2006-03-15 | 垂直磁気記録ヘッド及びその製造方法 |
TW095148207A TW200805314A (en) | 2006-03-15 | 2006-12-21 | Perpendicular magnetic recording head and method for manufacturing the same |
KR1020070003724A KR20070093799A (ko) | 2006-03-15 | 2007-01-12 | 수직 자기 기록 헤드 및 그의 제조 방법 |
EP07250350A EP1835489A3 (en) | 2006-03-15 | 2007-01-29 | Perpendicular magnetic recording head and method for manufacturing the same |
SG200701714-8A SG136053A1 (en) | 2006-03-15 | 2007-03-07 | Perpendicular magnetic recording head and method for manufacturing the same |
CNA2007100862766A CN101042873A (zh) | 2006-03-15 | 2007-03-13 | 垂直磁记录磁头及其制造方法 |
US11/724,952 US7895732B2 (en) | 2006-03-15 | 2007-03-15 | Method for manufacturing a perpendicular magnetic recording head |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009199712A (ja) * | 2008-02-25 | 2009-09-03 | Headway Technologies Inc | 垂直磁気記録ヘッドおよびその製造方法 |
JP2010061785A (ja) * | 2008-09-05 | 2010-03-18 | Headway Technologies Inc | 垂直磁気記録ヘッドおよびその製造方法 |
JP2011090767A (ja) * | 2009-10-21 | 2011-05-06 | Headway Technologies Inc | 磁気記録ヘッドおよびその製造方法 |
US8355222B2 (en) | 2010-06-30 | 2013-01-15 | Sae Magnetics (H.K.) Ltd. | Perpendicular magnetic write head including high magnetic moment seed layer for trailing shield therein and/or method of making the same |
US8559133B2 (en) | 2009-06-01 | 2013-10-15 | Tdk Corporation | Perpendicular magnetic write head and magnetic write device |
US8908329B2 (en) | 2012-07-06 | 2014-12-09 | Kabushiki Kaisha Toshiba | Magnetic head with beveled main pole and spin torque oscillator, method of manufacturing the same, and magnetic recording/reproduction apparatus |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
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Also Published As
Publication number | Publication date |
---|---|
EP1835489A2 (en) | 2007-09-19 |
SG136053A1 (en) | 2007-10-29 |
JP4852330B2 (ja) | 2012-01-11 |
US20070217069A1 (en) | 2007-09-20 |
EP1835489A3 (en) | 2008-03-26 |
CN101042873A (zh) | 2007-09-26 |
US7895732B2 (en) | 2011-03-01 |
KR20070093799A (ko) | 2007-09-19 |
TW200805314A (en) | 2008-01-16 |
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