JP4838873B2 - 圧電振動片および圧電デバイス - Google Patents

圧電振動片および圧電デバイス Download PDF

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Publication number
JP4838873B2
JP4838873B2 JP2009169705A JP2009169705A JP4838873B2 JP 4838873 B2 JP4838873 B2 JP 4838873B2 JP 2009169705 A JP2009169705 A JP 2009169705A JP 2009169705 A JP2009169705 A JP 2009169705A JP 4838873 B2 JP4838873 B2 JP 4838873B2
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JP
Japan
Prior art keywords
base
vibrating piece
groove
excitation electrode
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2009169705A
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English (en)
Japanese (ja)
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JP2010050960A5 (enExample
JP2010050960A (ja
Inventor
信吾 川西
博 上原
昌裕 吉松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to JP2009169705A priority Critical patent/JP4838873B2/ja
Publication of JP2010050960A publication Critical patent/JP2010050960A/ja
Publication of JP2010050960A5 publication Critical patent/JP2010050960A5/ja
Application granted granted Critical
Publication of JP4838873B2 publication Critical patent/JP4838873B2/ja
Expired - Fee Related legal-status Critical Current
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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2009169705A 2008-07-22 2009-07-21 圧電振動片および圧電デバイス Expired - Fee Related JP4838873B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009169705A JP4838873B2 (ja) 2008-07-22 2009-07-21 圧電振動片および圧電デバイス

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008188182 2008-07-22
JP2008188182 2008-07-22
JP2009169705A JP4838873B2 (ja) 2008-07-22 2009-07-21 圧電振動片および圧電デバイス

Publications (3)

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JP2010050960A JP2010050960A (ja) 2010-03-04
JP2010050960A5 JP2010050960A5 (enExample) 2011-07-21
JP4838873B2 true JP4838873B2 (ja) 2011-12-14

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ID=42067634

Family Applications (1)

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JP2009169705A Expired - Fee Related JP4838873B2 (ja) 2008-07-22 2009-07-21 圧電振動片および圧電デバイス

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JP (1) JP4838873B2 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101214318B1 (ko) 2009-09-18 2013-01-09 세이코 엡슨 가부시키가이샤 진동편, 진동자, 발진기 및 전자기기
JP5659585B2 (ja) * 2010-07-09 2015-01-28 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
JP5617392B2 (ja) 2010-07-09 2014-11-05 セイコーエプソン株式会社 振動片、振動子及び発振器
JP2012054893A (ja) * 2010-09-03 2012-03-15 Nippon Dempa Kogyo Co Ltd 音叉型水晶振動片及び水晶デバイス
JP5534448B2 (ja) * 2010-09-29 2014-07-02 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器および電波時計
JP5912557B2 (ja) 2011-03-29 2016-04-27 日本電波工業株式会社 音叉型圧電振動片及び圧電デバイス
CN105210295B (zh) 2013-05-13 2017-10-03 株式会社村田制作所 振动装置
JP2015023422A (ja) * 2013-07-18 2015-02-02 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器および移動体
JP2015015770A (ja) * 2014-10-09 2015-01-22 セイコーエプソン株式会社 屈曲振動片、振動子、発振器及び電子機器
JP6479509B2 (ja) * 2015-03-09 2019-03-06 シチズン時計株式会社 圧電振動子
JP6647911B2 (ja) * 2016-02-23 2020-02-14 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、及び圧電振動子
JP2019087774A (ja) * 2017-11-01 2019-06-06 京セラ株式会社 音叉型水晶振動素子及び圧電デバイス
JP7060073B2 (ja) * 2020-12-23 2022-04-26 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5458395A (en) * 1977-10-19 1979-05-11 Matsushima Kogyo Kk Piezooelectric vibrator
JPH01236808A (ja) * 1988-03-17 1989-09-21 Matsushima Kogyo Co Ltd 捩水晶振動子
JP3931662B2 (ja) * 2001-01-15 2007-06-20 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
JP2004282230A (ja) * 2003-03-13 2004-10-07 Seiko Epson Corp 圧電振動片、及びこれを利用した圧電デバイス、並びにこれを利用した携帯電話装置、電子機器
JP2008022413A (ja) * 2006-07-14 2008-01-31 Epson Toyocom Corp 圧電振動片および圧電デバイス

Also Published As

Publication number Publication date
JP2010050960A (ja) 2010-03-04

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