JP4831446B2 - マイクロバルブ装置 - Google Patents

マイクロバルブ装置 Download PDF

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Publication number
JP4831446B2
JP4831446B2 JP2000569132A JP2000569132A JP4831446B2 JP 4831446 B2 JP4831446 B2 JP 4831446B2 JP 2000569132 A JP2000569132 A JP 2000569132A JP 2000569132 A JP2000569132 A JP 2000569132A JP 4831446 B2 JP4831446 B2 JP 4831446B2
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JP
Japan
Prior art keywords
layer
displaceable member
microvalve
actuator
patent document
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2000569132A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002524698A (ja
JP2002524698A5 (enExample
Inventor
ナディム アイ． マラフ，
カート アール． ウィリアムズ，
バート ピー． バンドリエンフイゼン，
エドワード ネルソン フラー，
リチャード ジェイ． バロン，
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of JP2002524698A publication Critical patent/JP2002524698A/ja
Publication of JP2002524698A5 publication Critical patent/JP2002524698A5/ja
Application granted granted Critical
Publication of JP4831446B2 publication Critical patent/JP4831446B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0024—Transducers for transforming thermal into mechanical energy or vice versa, e.g. thermal or bimorph actuators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C3/00—Circuit elements having moving parts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C4/00—Circuit elements characterised by their special functions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0011—Gate valves or sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0044—Electric operating means therefor using thermo-electric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/008—Multi-layer fabrications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0098—Refrigeration circuits, e.g. for cooling integrated circuits
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0396—Involving pressure control

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Fluid Mechanics (AREA)
  • Analytical Chemistry (AREA)
  • Micromachines (AREA)
  • Temperature-Responsive Valves (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Regulating Braking Force (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
JP2000569132A 1998-09-03 1999-08-31 マイクロバルブ装置 Expired - Lifetime JP4831446B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14802698A 1998-09-03 1998-09-03
US09/148,026 1998-09-03
PCT/US1999/019971 WO2000014415A2 (en) 1998-09-03 1999-08-31 Proportional micromechanical device

Publications (3)

Publication Number Publication Date
JP2002524698A JP2002524698A (ja) 2002-08-06
JP2002524698A5 JP2002524698A5 (enExample) 2006-11-02
JP4831446B2 true JP4831446B2 (ja) 2011-12-07

Family

ID=22523914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000569132A Expired - Lifetime JP4831446B2 (ja) 1998-09-03 1999-08-31 マイクロバルブ装置

Country Status (9)

Country Link
US (1) US6761420B2 (enExample)
EP (1) EP1117937B1 (enExample)
JP (1) JP4831446B2 (enExample)
KR (1) KR20010090720A (enExample)
CN (1) CN1322282A (enExample)
AT (1) ATE393319T1 (enExample)
AU (1) AU5905499A (enExample)
DE (1) DE69938602T2 (enExample)
WO (1) WO2000014415A2 (enExample)

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US6581640B1 (en) 2000-08-16 2003-06-24 Kelsey-Hayes Company Laminated manifold for microvalve
US6647164B1 (en) 2000-10-31 2003-11-11 3M Innovative Properties Company Gimbaled micro-mirror positionable by thermal actuators
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CN100436900C (zh) * 2003-11-24 2008-11-26 铝微有限公司 适于控制变容量压缩机的微阀装置
US8011388B2 (en) * 2003-11-24 2011-09-06 Microstaq, INC Thermally actuated microvalve with multiple fluid ports
US20070251586A1 (en) * 2003-11-24 2007-11-01 Fuller Edward N Electro-pneumatic control valve with microvalve pilot
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KR20060128042A (ko) * 2004-03-05 2006-12-13 알루미나 마이크로 엘엘씨 선택식 마이크로밸브 형성 접합방법
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US7913928B2 (en) 2005-11-04 2011-03-29 Alliant Techsystems Inc. Adaptive structures, systems incorporating same and related methods
US9028467B2 (en) * 2005-11-09 2015-05-12 The Invention Science Fund I, Llc Osmotic pump with remotely controlled osmotic pressure generation
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US20030098612A1 (en) 2003-05-29
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KR20010090720A (ko) 2001-10-19
WO2000014415A2 (en) 2000-03-16
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DE69938602D1 (de) 2008-06-05
US6761420B2 (en) 2004-07-13
CN1322282A (zh) 2001-11-14
ATE393319T1 (de) 2008-05-15

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