JP4829793B2 - 精密ポリシリコン・レジスタ・プロセス - Google Patents
精密ポリシリコン・レジスタ・プロセス Download PDFInfo
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- JP4829793B2 JP4829793B2 JP2006534157A JP2006534157A JP4829793B2 JP 4829793 B2 JP4829793 B2 JP 4829793B2 JP 2006534157 A JP2006534157 A JP 2006534157A JP 2006534157 A JP2006534157 A JP 2006534157A JP 4829793 B2 JP4829793 B2 JP 4829793B2
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- polysilicon
- polysilicon layer
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- ion implantation
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims description 149
- 229920005591 polysilicon Polymers 0.000 title claims description 147
- 238000000034 method Methods 0.000 title claims description 65
- 230000008569 process Effects 0.000 title claims description 39
- 238000000137 annealing Methods 0.000 claims description 34
- 239000002019 doping agent Substances 0.000 claims description 33
- 239000000758 substrate Substances 0.000 claims description 25
- 239000004065 semiconductor Substances 0.000 claims description 22
- 238000004519 manufacturing process Methods 0.000 claims description 21
- 229910052751 metal Inorganic materials 0.000 claims description 19
- 239000002184 metal Substances 0.000 claims description 19
- 229910021332 silicide Inorganic materials 0.000 claims description 18
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 18
- 238000005468 ion implantation Methods 0.000 claims description 16
- 230000001681 protective effect Effects 0.000 claims description 15
- 229920002120 photoresistant polymer Polymers 0.000 claims description 13
- 230000004913 activation Effects 0.000 claims description 12
- 238000000151 deposition Methods 0.000 claims description 7
- 150000004767 nitrides Chemical class 0.000 claims description 5
- 239000011261 inert gas Substances 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 3
- 229910052760 oxygen Inorganic materials 0.000 claims description 3
- 239000001301 oxygen Substances 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 description 15
- 238000001994 activation Methods 0.000 description 7
- 238000002955 isolation Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000002513 implantation Methods 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 239000003989 dielectric material Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 238000007725 thermal activation Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910019001 CoSi Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910000673 Indium arsenide Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- -1 Si 3 N 4 Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical group [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- 238000000231 atomic layer deposition Methods 0.000 description 1
- 229910052454 barium strontium titanate Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000000224 chemical solution deposition Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000009849 deactivation Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000002294 plasma sputter deposition Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000004151 rapid thermal annealing Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229920005573 silicon-containing polymer Polymers 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005382 thermal cycling Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/07—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common
- H01L27/0705—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common comprising components of the field effect type
- H01L27/0727—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common comprising components of the field effect type in combination with diodes, or capacitors or resistors
- H01L27/0738—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common comprising components of the field effect type in combination with diodes, or capacitors or resistors in combination with resistors only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/20—Resistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/0802—Resistors only
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- High Energy & Nuclear Physics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Bipolar Transistors (AREA)
- Bipolar Integrated Circuits (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
Claims (20)
- 精密ポリシリコン・レジスタを製造するための方法であって、
ポリシリコン層を含む少なくとも1つのポリシリコン・レジスタ・デバイス領域と、少なくとも1つの他のタイプのデバイス領域とを含む構造体を準備するステップと、
前記準備するステップに引き続き、前記少なくとも1つの他のタイプのデバイス領域においてイオン注入及び活性化アニールを選択的に行うステップと、
前記選択的に行うステップに引き続き、前記少なくとも1つのポリシリコン・レジスタ・デバイス領域における前記ポリシリコン層を覆う保護誘電体層を形成するステップと、
前記形成するステップに引き続き、前記少なくとも1つのポリシリコン・レジスタ・デバイス領域における前記ポリシリコン層に所定の抵抗値を与えるステップと
を含み、前記ポリシリコン層に所定の抵抗値を与えるステップが前記ポリシリコン層へのイオン注入を含む、前記方法。 - 精密ポリシリコン・レジスタを製造するための方法であって、
ポリシリコン層を含む少なくとも1つのポリシリコン・レジスタ・デバイス領域と、少なくとも1つの他のタイプのデバイス領域とを含む構造体を準備するステップと、
前記準備するステップに引き続き、前記少なくとも1つの他のタイプのデバイス領域においてイオン注入及び活性化アニールを選択的に行うステップと、
前記選択的に行うステップに引き続き、前記少なくとも1つのポリシリコン・レジスタ・デバイス領域における前記ポリシリコン層を覆う保護誘電体層を形成するステップと、
前記形成するステップに引き続き、前記少なくとも1つのポリシリコン・レジスタ・デバイス領域における前記ポリシリコン層においてイオン注入及び活性化アニールを行うステップと
を含む、前記方法。 - 前記少なくとも1つのポリシリコン・レジスタ・デバイス領域は、半導体基板と、該基板の上に配置された任意の第1誘電体層と、前記基板又は前記任意の第1誘電体層の上に配置された前記ポリシリコン層と、前記ポリシリコン層の上に配置された第2誘電体層とを含む、請求項1又は2に記載の方法。
- 前記少なくとも1つの他のタイプのデバイス領域は、バイポーラ・トランジスタ・デバイス、CMOSデバイス、又はそれらの組合せを含む、請求項1又は2に記載の方法。
- 前記選択的にイオン注入を行うステップの際に前記少なくとも1つのポリシリコン・レジスタ・デバイス領域を保護するために、前記少なくとも1つのポリシリコン・レジスタ・デバイス領域の上にパターン形成されたフォトレジストを形成するステップをさらに含む、請求項1又は2に記載の方法。
- 前記保護誘電体層は、酸化物、窒化物、酸窒化物、又はこれらの組合せである、請求項1又は2に記載の方法。
- 前記少なくとも1つの他のタイプのデバイス領域における又は前記ポリシリコン層への前記イオン注入はp型ドーパント又はn型ドーパントを含む、請求項1に記載の方法。
- 前記ポリシリコン層への前記イオン注入は、前記ポリシリコン層に約1×1014から約1×1021原子/cm3のドーパント濃度を与える、請求項7に記載の方法。
- 前記ポリシリコン層への前記イオン注入後にアニール・ステップをさらに含む、請求項1に記載の方法。
- 前記アニール・ステップは、必要に応じて約10%未満の酸素と混合させることができる不活性ガス環境において行われる、請求項9に記載の方法。
- 前記ポリシリコン層に所定の抵抗値を与えるステップの後に、前記ポリシリコン層の端部を露出させるステップをさらに含む、請求項1に記載の方法。
- 前記露出させたポリシリコン層の上にシリサイド・コンタクトを設けるステップをさらに含む、請求項11に記載の方法。
- 前記シリサイド・コンタクトはシリサイド化プロセスを用いて形成される、請求項12に記載の方法。
- 前記シリサイド化プロセスは、導電性金属を堆積させ、アニールして前記導電性金属とその下のポリシリコン層との反応を生じさせ、それによって前記シリサイド・コンタクトを形成するステップを含む、請求項13に記載の方法。
- 前記導電性金属は、Co、Ni、Ti、W、及びそれらの合金からなる群から選択される、請求項14に記載の方法。
- 前記導電性金属はCo又はTiである、請求項15に記載の方法。
- 前記少なくとも1つの他のタイプのデバイス領域における又は前記ポリシリコン層における前記イオン注入はp型ドーパント又はn型ドーパントを含む、請求項2に記載の方法。
- 前記ポリシリコン層における前記イオン注入は、前記ポリシリコン層に約1×10 14 から約1×10 21 原子/cm 3 のドーパント濃度を与える、請求項17に記載の方法。
- 前記ポリシリコン層における前記活性化アニールは、必要に応じて約10%未満の酸素と混合させることができる不活性ガス環境において行われる、請求項2に記載の方法。
- 前記ポリシリコン層においてイオン注入及び活性化アニールを行うステップの後に、前記ポリシリコン層の端部を露出させるステップをさらに含む、請求項2に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/605,439 | 2003-09-30 | ||
US10/605,439 US7112535B2 (en) | 2003-09-30 | 2003-09-30 | Precision polysilicon resistor process |
PCT/US2004/032406 WO2005034202A2 (en) | 2003-09-30 | 2004-09-30 | Precision polysilicon resistor process |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007507904A JP2007507904A (ja) | 2007-03-29 |
JP4829793B2 true JP4829793B2 (ja) | 2011-12-07 |
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Application Number | Title | Priority Date | Filing Date |
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JP2006534157A Expired - Fee Related JP4829793B2 (ja) | 2003-09-30 | 2004-09-30 | 精密ポリシリコン・レジスタ・プロセス |
Country Status (6)
Country | Link |
---|---|
US (1) | US7112535B2 (ja) |
EP (1) | EP1671362A4 (ja) |
JP (1) | JP4829793B2 (ja) |
KR (1) | KR100800358B1 (ja) |
CN (1) | CN100411107C (ja) |
WO (1) | WO2005034202A2 (ja) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7060612B2 (en) * | 2004-08-26 | 2006-06-13 | International Business Machines Corporation | Method of adjusting resistors post silicide process |
US7285472B2 (en) * | 2005-01-27 | 2007-10-23 | International Business Machines Corporation | Low tolerance polysilicon resistor for low temperature silicide processing |
CN100409415C (zh) * | 2005-12-06 | 2008-08-06 | 上海华虹Nec电子有限公司 | 一种在集成电路中使用α多晶硅的方法 |
JP5010151B2 (ja) * | 2006-01-30 | 2012-08-29 | オンセミコンダクター・トレーディング・リミテッド | 半導体装置の製造方法 |
US7749822B2 (en) | 2007-10-09 | 2010-07-06 | International Business Machines Corporation | Method of forming a resistor and an FET from the metal portion of a MOSFET metal gate stack |
US20090101988A1 (en) * | 2007-10-18 | 2009-04-23 | Texas Instruments Incorporated | Bipolar transistors with resistors |
TW201013925A (en) * | 2008-09-17 | 2010-04-01 | Grand Gem Semiconductor Co Ltd | MOS transistor having reverse current limiting and a voltage converter applied with the MOS transistor |
US8031100B2 (en) * | 2009-04-24 | 2011-10-04 | Intersil Americas Inc. | Fine resistance adjustment for polysilicon |
JP5381350B2 (ja) * | 2009-06-03 | 2014-01-08 | 富士通セミコンダクター株式会社 | 半導体装置及びその製造方法 |
US8053317B2 (en) * | 2009-08-15 | 2011-11-08 | International Business Machines Corporation | Method and structure for improving uniformity of passive devices in metal gate technology |
US8097520B2 (en) * | 2009-08-19 | 2012-01-17 | International Business Machines Corporation | Integration of passive device structures with metal gate layers |
CN102110593B (zh) * | 2010-12-15 | 2012-05-09 | 无锡中微晶园电子有限公司 | 一种提高多晶硅薄膜电阻稳定性的方法 |
US8809175B2 (en) * | 2011-07-15 | 2014-08-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Methods of anneal after deposition of gate layers |
US8981527B2 (en) * | 2011-08-23 | 2015-03-17 | United Microelectronics Corp. | Resistor and manufacturing method thereof |
US8884370B2 (en) | 2012-04-27 | 2014-11-11 | International Business Machines Corporation | Narrow body field-effect transistor structures with free-standing extension regions |
US10256134B2 (en) | 2017-06-09 | 2019-04-09 | Globalfoundries Inc. | Heat dissipative element for polysilicon resistor bank |
CN108321147A (zh) * | 2018-02-05 | 2018-07-24 | 华大半导体有限公司 | 一种改变多晶电阻阻值的方法 |
CN110729402B (zh) * | 2019-10-21 | 2023-03-07 | 上海华虹宏力半导体制造有限公司 | 一种多晶硅电阻的制作方法 |
CN114284432A (zh) * | 2021-12-14 | 2022-04-05 | 武汉新芯集成电路制造有限公司 | 多晶硅电阻器件及其制作方法、光子检测器件及其制作方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0498868A (ja) * | 1990-08-17 | 1992-03-31 | Fuji Electric Co Ltd | 半導体装置用多結晶シリコン抵抗およびその製造方法 |
JP2000223581A (ja) * | 1999-01-28 | 2000-08-11 | Mitsumi Electric Co Ltd | バイポーラ型半導体装置の製造方法、バイポーラ型半導体装置 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4225877A (en) * | 1978-09-05 | 1980-09-30 | Sprague Electric Company | Integrated circuit with C-Mos logic, and a bipolar driver with polysilicon resistors |
US4502894A (en) * | 1983-08-12 | 1985-03-05 | Fairchild Camera & Instrument Corporation | Method of fabricating polycrystalline silicon resistors in integrated circuit structures using outdiffusion |
US4679170A (en) * | 1984-05-30 | 1987-07-07 | Inmos Corporation | Resistor with low thermal activation energy |
US4604789A (en) * | 1985-01-31 | 1986-08-12 | Inmos Corporation | Process for fabricating polysilicon resistor in polycide line |
US4929570A (en) * | 1986-10-06 | 1990-05-29 | National Semiconductor Corporation | Selective epitaxy BiCMOS process |
EP0369336A3 (en) * | 1988-11-14 | 1990-08-22 | National Semiconductor Corporation | Process for fabricating bipolar and cmos transistors on a common substrate |
JPH05275619A (ja) | 1992-03-24 | 1993-10-22 | Sony Corp | 半導体装置の製造方法 |
JPH0846139A (ja) * | 1994-05-06 | 1996-02-16 | Texas Instr Inc <Ti> | ポリシリコン抵抗器とその作成法 |
US5506158A (en) * | 1994-07-27 | 1996-04-09 | Texas Instruments Incorporated | BiCMOS process with surface channel PMOS transistor |
US5585302A (en) * | 1995-08-10 | 1996-12-17 | Sony Corporation | Formation of polysilicon resistors in the tungsten strapped source/drain/gate process |
US6069398A (en) * | 1997-08-01 | 2000-05-30 | Advanced Micro Devices, Inc. | Thin film resistor and fabrication method thereof |
US6027964A (en) * | 1997-08-04 | 2000-02-22 | Advanced Micro Devices, Inc. | Method of making an IGFET with a selectively doped gate in combination with a protected resistor |
US6184103B1 (en) * | 1998-06-26 | 2001-02-06 | Sony Corporation | High resistance polysilicon SRAM load elements and methods of fabricating therefor |
TW371353B (en) * | 1998-07-29 | 1999-10-01 | United Microelectronics Corp | Method of producing MOS resistor and capacitor bottom electrode |
US5959335A (en) * | 1998-09-23 | 1999-09-28 | International Business Machines Corporation | Device design for enhanced avalanche SOI CMOS |
SE513116C2 (sv) * | 1998-11-13 | 2000-07-10 | Ericsson Telefon Ab L M | Polykiselresistor och sätt att framställa sådan |
US6436747B1 (en) * | 1999-04-21 | 2002-08-20 | Matsushita Electtric Industrial Co., Ltd. | Method of fabricating semiconductor device |
US6255185B1 (en) * | 1999-05-19 | 2001-07-03 | International Business Machines Corporation | Two step anneal for controlling resistor tolerance |
-
2003
- 2003-09-30 US US10/605,439 patent/US7112535B2/en not_active Expired - Lifetime
-
2004
- 2004-09-30 CN CNB2004800283594A patent/CN100411107C/zh not_active Expired - Fee Related
- 2004-09-30 JP JP2006534157A patent/JP4829793B2/ja not_active Expired - Fee Related
- 2004-09-30 WO PCT/US2004/032406 patent/WO2005034202A2/en active Application Filing
- 2004-09-30 KR KR1020067004184A patent/KR100800358B1/ko not_active IP Right Cessation
- 2004-09-30 EP EP04789451A patent/EP1671362A4/en not_active Withdrawn
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0498868A (ja) * | 1990-08-17 | 1992-03-31 | Fuji Electric Co Ltd | 半導体装置用多結晶シリコン抵抗およびその製造方法 |
JP2000223581A (ja) * | 1999-01-28 | 2000-08-11 | Mitsumi Electric Co Ltd | バイポーラ型半導体装置の製造方法、バイポーラ型半導体装置 |
Also Published As
Publication number | Publication date |
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US7112535B2 (en) | 2006-09-26 |
JP2007507904A (ja) | 2007-03-29 |
WO2005034202A2 (en) | 2005-04-14 |
CN1860591A (zh) | 2006-11-08 |
EP1671362A2 (en) | 2006-06-21 |
KR100800358B1 (ko) | 2008-02-04 |
CN100411107C (zh) | 2008-08-13 |
US20050070102A1 (en) | 2005-03-31 |
EP1671362A4 (en) | 2010-04-28 |
KR20060072130A (ko) | 2006-06-27 |
WO2005034202A3 (en) | 2005-11-10 |
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