JP4825809B2 - 調整可能なグレーティングコンプレッサを備えたパルスレーザ光源 - Google Patents

調整可能なグレーティングコンプレッサを備えたパルスレーザ光源 Download PDF

Info

Publication number
JP4825809B2
JP4825809B2 JP2007541509A JP2007541509A JP4825809B2 JP 4825809 B2 JP4825809 B2 JP 4825809B2 JP 2007541509 A JP2007541509 A JP 2007541509A JP 2007541509 A JP2007541509 A JP 2007541509A JP 4825809 B2 JP4825809 B2 JP 4825809B2
Authority
JP
Japan
Prior art keywords
optical
pulse
pulse width
grating
repetition frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007541509A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008518488A (ja
Inventor
ローレンス シャア、
Original Assignee
イムラ アメリカ インコーポレイテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by イムラ アメリカ インコーポレイテッド filed Critical イムラ アメリカ インコーポレイテッド
Publication of JP2008518488A publication Critical patent/JP2008518488A/ja
Application granted granted Critical
Publication of JP4825809B2 publication Critical patent/JP4825809B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0057—Temporal shaping, e.g. pulse compression, frequency chirping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
    • G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
    • G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
    • G02B6/02133—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating using beam interference
    • G02B6/02138—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating using beam interference based on illuminating a phase mask
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
    • G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
    • G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
    • G02B6/02142—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating based on illuminating or irradiating an amplitude mask, i.e. a mask having a repetitive intensity modulating pattern
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
    • G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
    • G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
    • G02B6/02147—Point by point fabrication, i.e. grating elements induced one step at a time along the fibre, e.g. by scanning a laser beam, arc discharge scanning

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Mechanical Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Lasers (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Optical Integrated Circuits (AREA)
JP2007541509A 2004-12-20 2005-12-20 調整可能なグレーティングコンプレッサを備えたパルスレーザ光源 Expired - Fee Related JP4825809B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US63807204P 2004-12-20 2004-12-20
US60/638,072 2004-12-20
PCT/US2005/046537 WO2007046833A2 (en) 2004-12-20 2005-12-20 Pulsed laser source with adjustable grating compressor

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007066456A Division JP2008135673A (ja) 2004-12-20 2007-03-15 調整可能なグレーティングコンプレッサを備えたパルスレーザ光源

Publications (2)

Publication Number Publication Date
JP2008518488A JP2008518488A (ja) 2008-05-29
JP4825809B2 true JP4825809B2 (ja) 2011-11-30

Family

ID=37962936

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2007541509A Expired - Fee Related JP4825809B2 (ja) 2004-12-20 2005-12-20 調整可能なグレーティングコンプレッサを備えたパルスレーザ光源
JP2007066456A Pending JP2008135673A (ja) 2004-12-20 2007-03-15 調整可能なグレーティングコンプレッサを備えたパルスレーザ光源
JP2013000030A Expired - Fee Related JP5716757B2 (ja) 2004-12-20 2013-01-04 媒体中に導波路を製造する方法およびシステム

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2007066456A Pending JP2008135673A (ja) 2004-12-20 2007-03-15 調整可能なグレーティングコンプレッサを備えたパルスレーザ光源
JP2013000030A Expired - Fee Related JP5716757B2 (ja) 2004-12-20 2013-01-04 媒体中に導波路を製造する方法およびシステム

Country Status (4)

Country Link
US (3) US7684450B2 (enExample)
EP (1) EP1851837B1 (enExample)
JP (3) JP4825809B2 (enExample)
WO (1) WO2007046833A2 (enExample)

Families Citing this family (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7394591B2 (en) 2000-05-23 2008-07-01 Imra America, Inc. Utilization of Yb: and Nd: mode-locked oscillators in solid-state short pulse laser systems
US8921733B2 (en) 2003-08-11 2014-12-30 Raydiance, Inc. Methods and systems for trimming circuits
US9022037B2 (en) 2003-08-11 2015-05-05 Raydiance, Inc. Laser ablation method and apparatus having a feedback loop and control unit
US7486705B2 (en) 2004-03-31 2009-02-03 Imra America, Inc. Femtosecond laser processing system with process parameters, controls and feedback
US7885311B2 (en) * 2007-03-27 2011-02-08 Imra America, Inc. Beam stabilized fiber laser
US7508853B2 (en) 2004-12-07 2009-03-24 Imra, America, Inc. Yb: and Nd: mode-locked oscillators and fiber systems incorporated in solid-state short pulse laser systems
US7684450B2 (en) * 2004-12-20 2010-03-23 Imra America, Inc. Pulsed laser source with adjustable grating compressor
US20060207976A1 (en) * 2005-01-21 2006-09-21 Bovatsek James M Laser material micromachining with green femtosecond pulses
US8232687B2 (en) 2006-04-26 2012-07-31 Raydiance, Inc. Intelligent laser interlock system
US9130344B2 (en) * 2006-01-23 2015-09-08 Raydiance, Inc. Automated laser tuning
CN101517848B (zh) * 2006-05-11 2011-05-11 Spi激光器英国有限公司 用于提供光辐射的设备
CN101815057B (zh) * 2006-09-30 2012-06-27 中国科学院西安光学精密机械研究所 多数据率兼容型超高速自适应全光数据包速率倍增方法
WO2008091898A1 (en) * 2007-01-23 2008-07-31 Imra America, Inc. Ultrashort laser micro-texture printing
US8154793B2 (en) * 2007-05-25 2012-04-10 Cornell University Nonlinear chirped pulse fiber amplifier with pulse compression
FR2917544A1 (fr) * 2007-06-15 2008-12-19 Amplitude Systemes Sa Source d'impulsions lumineuses ultrabreves de forte energie
CA2695953C (en) * 2007-08-09 2018-05-01 Nicolas Godbout Tunable mode-locked laser
US7903326B2 (en) 2007-11-30 2011-03-08 Radiance, Inc. Static phase mask for high-order spectral phase control in a hybrid chirped pulse amplifier system
CN102006964B (zh) 2008-03-21 2016-05-25 Imra美国公司 基于激光的材料加工方法和系统
US8498538B2 (en) 2008-11-14 2013-07-30 Raydiance, Inc. Compact monolithic dispersion compensator
JP5637669B2 (ja) * 2009-09-01 2014-12-10 浜松ホトニクス株式会社 パルス幅変換装置および光増幅システム
JP5693705B2 (ja) 2010-03-30 2015-04-01 イムラ アメリカ インコーポレイテッド レーザベースの材料加工装置及び方法
US9008135B2 (en) * 2010-05-16 2015-04-14 Fianium Ltd. Tunable pulse width laser
WO2012021748A1 (en) 2010-08-12 2012-02-16 Raydiance, Inc. Polymer tubing laser micromachining
KR20140018183A (ko) 2010-09-16 2014-02-12 레이디안스, 아이엔씨. 적층 재료의 레이저 기반 처리
US8554037B2 (en) 2010-09-30 2013-10-08 Raydiance, Inc. Hybrid waveguide device in powerful laser systems
US9491441B2 (en) 2011-08-30 2016-11-08 Microsoft Technology Licensing, Llc Method to extend laser depth map range
JP2014530493A (ja) 2011-09-14 2014-11-17 イムラ アメリカ インコーポレイテッド 制御可能多波長ファイバ・レーザ光源
US10239160B2 (en) 2011-09-21 2019-03-26 Coherent, Inc. Systems and processes that singulate materials
WO2013106164A1 (en) 2012-01-13 2013-07-18 Imra America, Inc. Methods and systems for laser processing of coated substrates
US8964798B2 (en) 2012-07-12 2015-02-24 Kla-Tencor Corporation Reducing the spectral bandwidth of lasers
US9048632B1 (en) 2013-03-15 2015-06-02 Board Of Trustees Of Michigan State University Ultrafast laser apparatus
US20140276669A1 (en) * 2013-03-15 2014-09-18 Amo Development Llc. Short pulse laser with adjustable pulse length
US9878399B2 (en) * 2013-03-15 2018-01-30 Jian Liu Method and apparatus for welding dissimilar material with a high energy high power ultrafast laser
KR102163606B1 (ko) * 2013-03-27 2020-10-08 고쿠리쓰다이가쿠호진 규슈다이가쿠 레이저 어닐링 장치
JP5524381B2 (ja) * 2013-03-29 2014-06-18 浜松ホトニクス株式会社 パルス幅変換装置および光増幅システム
EP3061165A4 (en) 2013-10-21 2017-08-09 Genia Photonics Inc. Synchronized tunable mode-locked lasers
WO2015108991A2 (en) 2014-01-17 2015-07-23 Imra America, Inc. Laser-based modification of transparent materials
DE102014201752A1 (de) * 2014-01-31 2015-08-06 Siemens Aktiengesellschaft Überspannungsschutz mit einer Funkenstrecke
KR20160005802A (ko) * 2014-07-03 2016-01-18 마이크로 인스펙션 주식회사 레이저 가공장치
US9385502B1 (en) 2015-02-05 2016-07-05 Coherent, Inc. Method and apparatus for adjusting pulse parameters in a solid-state chirped-pulse amplifier system
CN105305209B (zh) * 2015-11-04 2018-07-10 南京大学 一种高重复频率的极紫外超快时间分辨光电能谱系统
US11123822B2 (en) * 2016-03-31 2021-09-21 AGC Inc. Manufacturing method for glass substrate, method for forming hole in glass substrate, and apparatus for forming hole in glass substrate
DE102016110947A1 (de) 2016-06-15 2017-12-21 Trumpf Laser Gmbh Dispersionsanpassungseinheit
US10535975B2 (en) * 2017-08-31 2020-01-14 Coherent, Inc. High power sub-400 femtosecond MOPA with solid-state power amplifier
RU2684929C1 (ru) * 2018-03-30 2019-04-16 Автономное учреждение "Технопарк - Мордовия" Устройство сжатия оптического импульса на дифракционных решетках с возможностью регулировки длительности сжатого импульса
DE102018109405B3 (de) 2018-04-19 2019-07-11 Trumpf Laser Gmbh Pulslängenanpassungseinheit, Lasersystem und Verfahren zur Pulslängenanpassung eines Laserpulses
CN109449731B (zh) * 2018-09-20 2019-09-20 深圳市大德激光技术有限公司 一种超快脉冲光纤激光器
CN112615241B (zh) * 2020-12-03 2022-10-14 天津大学 高峰值功率单频窄线宽纳秒三角形短脉冲光纤激光器
GB2628662A (en) * 2023-03-31 2024-10-02 Coherent Scotland Ltd B-integral compensation in chirped pulse amplification

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01233416A (ja) * 1988-03-14 1989-09-19 Nippon Telegr & Teleph Corp <Ntt> 光パレス圧縮装置
JPH01296688A (ja) * 1988-01-27 1989-11-30 Intelligent Surgical Lasers Inc 多波長レーザ光源
JPH10318924A (ja) * 1997-05-19 1998-12-04 Olympus Optical Co Ltd パルスレーザを備えた光学装置
US20010048788A1 (en) * 2000-01-07 2001-12-06 Yong Xie Tunable optical dispersion-slope compensation based on a nonlinearly-chirped bragg grating
JP2002502061A (ja) * 1998-01-28 2002-01-22 コヒーレント・インク 超短パルス伝送および伝播のための装置
JP2002252401A (ja) * 2001-02-22 2002-09-06 Oyokoden Lab Co Ltd レーザ装置
US20030156605A1 (en) * 2002-02-18 2003-08-21 Richardson David J. Pulsed light sources

Family Cites Families (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5084880A (en) * 1990-07-02 1992-01-28 The United States Of America As Represented By The Sectretary Of The Navy Erbium-doped fluorozirconate fiber laser pumped by a diode laser source
US5329398A (en) * 1992-11-05 1994-07-12 Novatec Laser Systems, Inc. Single grating laser pulse stretcher and compressor
CA2179268A1 (en) 1992-11-05 1995-07-27 Ming Lai Single grating laser pulse stretcher and compressor
EP0742912A1 (en) * 1994-01-19 1996-11-20 Novatec Laser Systems, Inc. Single grating laser pulse stretcher and compressor
US5499134A (en) * 1994-08-24 1996-03-12 Imra America Optical pulse amplification using chirped Bragg gratings
US5867305A (en) * 1996-01-19 1999-02-02 Sdl, Inc. Optical amplifier with high energy levels systems providing high peak powers
US5896484A (en) 1996-02-15 1999-04-20 Corning Incorporated Method of making a symmetrical optical waveguide
JP3649835B2 (ja) 1996-03-18 2005-05-18 独立行政法人科学技術振興機構 光導波路の作製方法
US5847863A (en) * 1996-04-25 1998-12-08 Imra America, Inc. Hybrid short-pulse amplifiers with phase-mismatch compensated pulse stretchers and compressors
GB2316760A (en) * 1996-08-23 1998-03-04 Univ Southampton Fabricating optical waveguide gratings
JP2007516600A (ja) * 1997-03-21 2007-06-21 イムラ アメリカ インコーポレイテッド 先進材料処理応用のためのピコ秒−ナノ秒パルス用高エネルギ光ファイバ増幅器
US5987538A (en) * 1997-08-15 1999-11-16 Compaq Computer Corporation Apparatus for initiating generation of an inter-processor interrupt by a peripheral device not directly connected to any of the multi-processor local interrupt controllers
JPH11167036A (ja) * 1997-12-04 1999-06-22 Japan Science & Technology Corp 光導波回路及び非線形光学装置
US5982963A (en) 1997-12-15 1999-11-09 University Of Southern California Tunable nonlinearly chirped grating
CA2380541A1 (en) 1999-07-29 2001-02-08 Corning Incorporated Direct writing of optical devices in silica-based glass using femtosecond pulse lasers
US6977137B2 (en) 1999-07-29 2005-12-20 Corning Incorporated Direct writing of optical devices in silica-based glass using femtosecond pulse lasers
US6573026B1 (en) 1999-07-29 2003-06-03 Corning Incorporated Femtosecond laser writing of glass, including borosilicate, sulfide, and lead glasses
CA2296924A1 (en) 2000-01-25 2001-07-25 Peter R. Herman Burst-ultrafast laser machining method
US6552301B2 (en) 2000-01-25 2003-04-22 Peter R. Herman Burst-ultrafast laser machining method
JP2001236644A (ja) * 2000-02-21 2001-08-31 Central Glass Co Ltd 固体材料の屈折率を変化させる方法
JP3531738B2 (ja) * 2000-02-22 2004-05-31 日本電気株式会社 屈折率の修正方法、屈折率の修正装置、及び光導波路デバイス
US6885683B1 (en) * 2000-05-23 2005-04-26 Imra America, Inc. Modular, high energy, widely-tunable ultrafast fiber source
US6928224B2 (en) 2001-03-09 2005-08-09 Corning Incorporated Laser-induced crystallization of transparent glass-ceramics
JP2002372731A (ja) 2001-06-15 2002-12-26 Mitsubishi Cable Ind Ltd 波長変換用、光演算用素子
US6768850B2 (en) 2001-08-16 2004-07-27 Translume, Inc. Method of index trimming a waveguide and apparatus formed of the same
US20030099452A1 (en) 2001-11-28 2003-05-29 Borrelli Nicholas F. Manipulating the size of waveguides written into substrates using femtosecond laser pulses
WO2003046625A1 (en) 2001-11-28 2003-06-05 Corning Incorporated Manipulating the size of waveguides written into substrates using femtosecond laser pulses
US6853785B2 (en) 2001-12-14 2005-02-08 3M Innovative Properties Co. Index modulation in glass using a femtosecond laser
US6760356B2 (en) 2002-04-08 2004-07-06 The Regents Of The University Of California Application of Yb:YAG short pulse laser system
US6739728B2 (en) * 2002-04-08 2004-05-25 The Regents Of The University Of California Short pulse laser stretcher-compressor using a single common reflective grating
DE10222491A1 (de) 2002-05-14 2003-11-27 Univ Schiller Jena Verfahren zur gezielten Erzeugung von Brechzahlmodifikationen im Volumen transparenter Materialien mittels Laserstrahlung und Vorrichtung zur Durchführung des Verfahrens
US6950591B2 (en) 2002-05-16 2005-09-27 Corning Incorporated Laser-written cladding for waveguide formations in glass
CA2396831A1 (en) 2002-08-02 2004-02-02 Femtonics Corporation Microstructuring optical wave guide devices with femtosecond optical pulses
JP2004295066A (ja) 2002-08-27 2004-10-21 Fujikura Ltd 光導波路の製造方法
JP3987787B2 (ja) * 2002-11-25 2007-10-10 日東電工株式会社 三次元ポリイミド光導波路の製造方法
US7218443B2 (en) * 2003-02-25 2007-05-15 Toptica Photonics Ag Generation of tunable light pulses
US6979798B2 (en) 2003-03-07 2005-12-27 Gsi Lumonics Corporation Laser system and method for material processing with ultra fast lasers
US7414780B2 (en) * 2003-06-30 2008-08-19 Imra America, Inc. All-fiber chirped pulse amplification systems
US7257302B2 (en) * 2003-06-03 2007-08-14 Imra America, Inc. In-line, high energy fiber chirped pulse amplification system
US7486705B2 (en) * 2004-03-31 2009-02-03 Imra America, Inc. Femtosecond laser processing system with process parameters, controls and feedback
US7684450B2 (en) 2004-12-20 2010-03-23 Imra America, Inc. Pulsed laser source with adjustable grating compressor
US7424185B2 (en) 2005-01-24 2008-09-09 University Of Central Florida Research Foundation, Inc. Stretching and compression of laser pulses by means of high efficiency volume diffractive gratings with variable periods in photo-thermo-refractive glass

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01296688A (ja) * 1988-01-27 1989-11-30 Intelligent Surgical Lasers Inc 多波長レーザ光源
JPH01233416A (ja) * 1988-03-14 1989-09-19 Nippon Telegr & Teleph Corp <Ntt> 光パレス圧縮装置
JPH10318924A (ja) * 1997-05-19 1998-12-04 Olympus Optical Co Ltd パルスレーザを備えた光学装置
JP2002502061A (ja) * 1998-01-28 2002-01-22 コヒーレント・インク 超短パルス伝送および伝播のための装置
US20010048788A1 (en) * 2000-01-07 2001-12-06 Yong Xie Tunable optical dispersion-slope compensation based on a nonlinearly-chirped bragg grating
JP2002252401A (ja) * 2001-02-22 2002-09-06 Oyokoden Lab Co Ltd レーザ装置
US20030156605A1 (en) * 2002-02-18 2003-08-21 Richardson David J. Pulsed light sources

Also Published As

Publication number Publication date
JP2008135673A (ja) 2008-06-12
US20060285561A1 (en) 2006-12-21
US20060159137A1 (en) 2006-07-20
US20100111120A1 (en) 2010-05-06
JP5716757B2 (ja) 2015-05-13
EP1851837A2 (en) 2007-11-07
EP1851837A4 (en) 2009-11-04
US8077749B2 (en) 2011-12-13
JP2013070095A (ja) 2013-04-18
JP2008518488A (ja) 2008-05-29
WO2007046833A3 (en) 2008-10-09
US7684450B2 (en) 2010-03-23
WO2007046833A2 (en) 2007-04-26
EP1851837B1 (en) 2015-03-04

Similar Documents

Publication Publication Date Title
JP4825809B2 (ja) 調整可能なグレーティングコンプレッサを備えたパルスレーザ光源
US20060207976A1 (en) Laser material micromachining with green femtosecond pulses
US7366378B2 (en) Ultrafast laser machining system and method for forming diffractive structures in optical fibers
US8078023B2 (en) System and method for permanently writing a diffraction grating in a low phonon energy glass medium
CN104698531B (zh) 利用飞秒激光泰伯效应制备长周期光纤光栅的装置和方法
JP2008135673A5 (enExample)
CN204422809U (zh) 利用飞秒激光泰伯效应制备长周期光纤光栅的装置
JP4649927B2 (ja) レーザ誘起改質加工装置及び方法
JP2004196585A (ja) レーザビームにより材料内部に異質相を形成する方法、構造物および光部品
JP2004295066A (ja) 光導波路の製造方法
JP2005205464A (ja) レーザ加工法、構造物および光学素子
Walter et al. Adaptive spatial control of fiber modes and their excitation for high-harmonic generation
Bader et al. Polymer-based waveguides and optical switching
JP2015087729A (ja) 波長変換レーザ装置
JP3536058B2 (ja) 短パルス・レーザー光のパルス幅圧縮方法
JP2013044764A (ja) レーザ装置、疑似位相整合型の波長変換光学素子のフォトリフラクティブ効果抑制方法、露光装置及び検査装置
JP2003504688A (ja) レーザビームの強度プロファイルを形成する方法および装置
Kim et al. Sub-picosecond mode-locked laser operation in a femtosecond-laser-inscribed Yb: CaF2 channel waveguide
JP2015511324A (ja) ハロゲン化アルカリ色中心結晶に基づいた中間赤外体積ブラッググレーティング
JP4870457B2 (ja) 短パルスレーザー光のパルス幅圧縮方法およびその装置ならびに中空導波路
KR100878978B1 (ko) 레이저를 이용한 피피엘엔 도파로 소자의 제조 방법
EP4632468A1 (en) Laser beam apodizator for high-energy laser systems, high-energy laser system, and generation method of high-energy laser radiation
Gu et al. High harmonic generation in helium-filled slab waveguide
Grivas et al. Recent progress in continuous-wave Ti: sapphire waveguide lasers
Valdivia et al. F2 laser-induced visible-and infrared-confining buried waveguides in fused silica

Legal Events

Date Code Title Description
A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090602

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20090901

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20090908

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20091202

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100608

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20100907

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20100914

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20101208

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20110830

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20110912

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140916

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees