JP4819144B2 - 集積回路デバイス用のパッケージ構造およびパッケージ方法 - Google Patents
集積回路デバイス用のパッケージ構造およびパッケージ方法 Download PDFInfo
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- JP4819144B2 JP4819144B2 JP2009105525A JP2009105525A JP4819144B2 JP 4819144 B2 JP4819144 B2 JP 4819144B2 JP 2009105525 A JP2009105525 A JP 2009105525A JP 2009105525 A JP2009105525 A JP 2009105525A JP 4819144 B2 JP4819144 B2 JP 4819144B2
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Description
本発明の特徴の1つは、チップを別の大きい基板に移すという複雑なプロセスの代わりに、拡張可能基板を用いて、パッケージ前のウェハ上の隣接する2つのチップ間の間隔を広げることである。
別の実施形態によれば、本発明によって、以下のステップを含む複数の集積回路デバイスをパッケージするための方法が提供される。すなわち、複数の集積回路デバイスを有するウェハを用意することと、第1の表面および第2の表面を有する拡張可能基板であって、第2の表面は第1の表面に対向し、第1の表面はウェハを支持する、拡張可能基板を用意することと、第2の表面上に複数の反伸張層を形成することと、ウェハを切削して、集積回路デバイスを互いに分離するための複数の凹部を形成することと、拡張可能基板を引き伸ばして複数の凹部を拡大することと、凹部を満たし複数の集積回路デバイスを覆う絶縁層を形成することである。
Claims (15)
- 複数の集積回路デバイスをパッケージするための方法であって、前記方法は、
複数の集積回路デバイスを有するウェハを用意するステップと、
前記複数の集積回路デバイス上に複数の伝導性バンプを形成するステップと、
第1の表面および第2の表面を有する拡張可能基板であって、前記第2の表面は前記第1の表面に対向するとともに前記第1の表面は前記ウェハを支持する、拡張可能基板を用意するステップと、
前記ウェハと前記拡張可能基板とを粘着層で接続するステップと、
前記第2の表面上に複数の反伸張層を形成するステップと、
前記集積回路デバイスを互いに分離するための複数の凹部を前記ウェハ内に形成するステップと、
前記拡張可能基板を引き伸ばして前記複数の凹部を拡大するステップと、
前記凹部を満たし、かつ前記複数の集積回路デバイスを覆う、絶縁層を形成するステップと、
前記絶縁層および前記拡張可能基板を貫通する複数のスルー・ホールを形成するステップと、
前記スルー・ホールの内壁を覆う表面伝導層であって、外部に伸びて前記複数の伝導性バンプおよび前記複数の反伸張層を覆う表面伝導層を形成するステップと、
前記表面伝導層の一部を取り除いて、前記複数の伝導性バンプの上面に接続された第1の回路と前記複数の反伸張層の上面に接続された第2の回路とを形成するステップと、
前記第1の回路及び前記第2の回路が形成された後の表面伝導層の表面上に伝導性の保護層をメッキするステップと、
前記拡張可能基板を切断して複数の集積回路デバイスを互いに分離するステップと、
を含み、
前記拡張可能基板は、前記複数の凹部に対応する第1の部分と前記複数の凹部に対応しない第2の部分とを備え、前記拡張可能基板を引き伸ばすステップを行なったときに前記第1の部分の伸びは前記第2の部分の伸びよりも大きく、かつ複数の反伸張層によって前記第2の部分を覆って、前記拡張可能基板を引き伸ばすステップを行なったときに同第2の部分が外側に伸びることを抑える、方法。 - 前記複数の反伸張層は伝導性材料から形成される、請求項1に記載の方法。
- 前記拡張可能基板を、シリコン・ゴム、ポリイミド、ポリエチレン、およびポリプロピレンからなる群から選択される材料から形成する、請求項1に記載の方法。
- 前記複数の凹部を形成するステップを、切断刃、レーザ切断プロセス、ドライ・エッチング・プロセス、またはウェット・エッチング・プロセスを用いて行なう、請求項1に記載の方法。
- 前記絶縁層を、エポキシ、ポリイミド、ベンゾシクロブタン、液晶ポリマー、およびそれらの組み合わせからなる群から選択される材料から形成する、請求項1に記載の方法。
- 前記複数のスルー・ホールを形成するステップを、機械的穿孔プロセスまたはレーザ穿孔プロセスによって行なう、請求項1に記載の方法。
- 前記伝導性バンプを、Cu、Ag、Sn、および伝導性ポリマーからなる群から選択される材料から形成する、請求項1に記載の方法。
- 前記粘着層を、アクリル酸エステル、エポキシ、ポリウレタン、およびシリコン・ゴムからなる群から選択される材料から形成する、請求項1に記載の方法。
- 第1の回路および第2の回路を形成するステップを、フォトリソグラフィ・プロセス、印刷プロセス、電気メッキ・プロセス、または無電解メッキ・プロセスを用いて行なう、請求項1に記載の方法。
- パッケージ構造であって、前記パッケージ構造は、
集積回路デバイスと、
第1の表面および第2の表面を有する引き伸ばされた基板であって、前記第2の表面は前記第1の表面に対向するとともに前記第1の表面は前記集積回路デバイスを支持する、引き伸ばされた基板と、
前記第2の表面上に配置された反伸張層と、
前記集積回路デバイスを覆う絶縁層と、
前記集積回路デバイスに電気的に接続された伝導性バンプであって、前記絶縁層内に埋め込まれた伝導性バンプと、
前記引き伸ばされた基板と前記集積回路デバイスとを接続する粘着層と、
前記絶縁層、前記伝導性バンプ、および前記反伸張層を覆う表面伝導層と、
前記パッケージ構造の外側面上の伝導性孔であって、前記絶縁層および前記引き伸ばされた基板を貫通し、前記伝導性バンプおよび前記反伸張層を電気的に接続する伝導性孔と、
前記伝導性バンプの上方に配置された第1の回路であって、前記伝導性孔および前記伝導性バンプを接続する第1の回路と、
前記反伸張層を覆う第2の回路であって、前記伝導性孔および前記反伸張層を接続する第2の回路と、
前記第1の回路及び前記第2の回路が形成された後の表面伝導層を覆う伝導性の保護層と、
を備えるパッケージ構造。 - 前記反伸張層は伝導性材料から形成される、請求項10に記載のパッケージ構造。
- 前記引き伸ばされた基板は、シリコン・ゴム、ポリイミド、ポリエチレン、およびポリプロピレンからなる群から選択される材料から形成される、請求項10に記載のパッケージ構造。
- 前記絶縁層は、エポキシ、ポリイミド、ベンゾシクロブタン、液晶ポリマー、およびそれらの組み合わせからなる群から選択される材料から形成される、請求項10に記載のパッケージ構造。
- 前記伝導性バンプは、Cu、Ag、Sn、および伝導性ポリマーからなる群から選択される材料から形成される、請求項10に記載のパッケージ構造。
- 前記粘着層は、アクリル酸エステル、エポキシ、ポリウレタン、およびシリコン・ゴムからなる群から選択される材料から形成される、請求項10に記載のパッケージ構造。
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