JP4812325B2 - 走査型共焦点顕微鏡および試料情報測定方法 - Google Patents

走査型共焦点顕微鏡および試料情報測定方法 Download PDF

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JP4812325B2
JP4812325B2 JP2005117152A JP2005117152A JP4812325B2 JP 4812325 B2 JP4812325 B2 JP 4812325B2 JP 2005117152 A JP2005117152 A JP 2005117152A JP 2005117152 A JP2005117152 A JP 2005117152A JP 4812325 B2 JP4812325 B2 JP 4812325B2
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scanning range
information
scanning
sample
light intensity
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JP2006293219A (ja
JP2006293219A5 (enExample
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司 入戸野
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Olympus Corp
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Olympus Corp
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  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2005117152A 2005-04-14 2005-04-14 走査型共焦点顕微鏡および試料情報測定方法 Expired - Fee Related JP4812325B2 (ja)

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JP2005117152A JP4812325B2 (ja) 2005-04-14 2005-04-14 走査型共焦点顕微鏡および試料情報測定方法

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JP2006293219A JP2006293219A (ja) 2006-10-26
JP2006293219A5 JP2006293219A5 (enExample) 2008-05-22
JP4812325B2 true JP4812325B2 (ja) 2011-11-09

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Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4937832B2 (ja) * 2007-05-23 2012-05-23 オリンパス株式会社 ３次元形状観察装置
JP5042791B2 (ja) * 2007-11-30 2012-10-03 オリンパス株式会社 膜厚測定装置
JP2009162963A (ja) * 2008-01-04 2009-07-23 Olympus Corp 共焦点顕微鏡及び走査方法
JP5942390B2 (ja) * 2011-11-15 2016-06-29 ソニー株式会社 画像取得装置、画像取得方法及び画像取得プログラム
JP6325817B2 (ja) * 2013-12-27 2018-05-16 株式会社キーエンス 拡大観察装置、拡大画像観察方法、拡大画像観察プログラム及びコンピュータで読み取り可能な記録媒体
EP3035104B1 (en) 2014-12-15 2019-02-20 Olympus Corporation Microscope system and setting value calculation method
JP6422761B2 (ja) * 2014-12-15 2018-11-14 オリンパス株式会社 顕微鏡システム、及び、ｚ位置と補正装置の設定値との関係算出方法
JP6555811B2 (ja) 2015-07-16 2019-08-07 オリンパス株式会社 顕微鏡システム、特定方法、及び、プログラム

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4179790B2 (ja) * 2002-04-17 2008-11-12 オリンパス株式会社 共焦点走査型光学顕微鏡
JP3960862B2 (ja) * 2002-06-18 2007-08-15 オリンパス株式会社 高さ測定方法
JP4290413B2 (ja) * 2002-11-18 2009-07-08 株式会社キーエンス 測定反復モードを有する共焦点顕微鏡システム
JP2004184342A (ja) * 2002-12-05 2004-07-02 Olympus Corp 共焦点走査型光学顕微鏡、高さ測定方法、及びプログラム

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