JP4812325B2 - Scanning confocal microscope and sample information measuring method - Google Patents

Description

  The present invention relates to a scanning confocal microscope and a sample information measuring method for measuring surface information of a sample by scanning the sample with light through an optical system, and in particular, to measure surface information in the height direction of the sample. And a sample information measuring method.

  Conventionally, a scanning confocal microscope detects reflected light reflected by a sample by irradiating the sample with illumination light, using a photodetector through a confocal stop, and the focal depth of the sample is determined based on the detected amount. Acquire deep images and 3D images.

  If the relative position of the focal point of the objective lens and the sample is changed in the optical axis direction, that is, Z-scanning is performed, the amount of reflected light entering the detector through the confocal stop changes, and the surface of the sample is changed. The amount of light received by the detector is maximized when it is in focus. Therefore, the height information of the surface of the sample can be calculated from the relative position between the focal point of the objective lens and the sample when the maximum amount of received light is obtained by the detector, and by scanning the surface of the sample with light Information on the height of the surface of the entire sample can be acquired.

  A Z-scanning mechanism, which is a mechanism capable of Z-scanning, discretely and repeatedly reciprocates the light-collecting position of the objective lens and the sample along the optical axis direction. After detecting the light intensity at at least three consecutive points including the maximum brightness, calculate the maximum value of the approximated I-Z curve using the data and measure the sample information in the height direction (Z direction) (For example, refer to Patent Document 1).

Further, a technique for repeatedly observing the sample three-dimensionally by repeatedly reciprocating the Z scanning mechanism as described above has already been disclosed (for example, see Patent Document 2).
JP 2004-20443 A JP 2004-170509 A

  However, in the conventional technique (for example, Patent Document 2), it is necessary to set the measurement range in the height direction (Z direction) before performing the three-dimensional repeated observation operation. If a three-dimensional image cannot be obtained, it is necessary to once complete the three-dimensional repeated observation operation, reset the measurement range, and then perform the three-dimensional repeated observation operation again to obtain a three-dimensional image. There is a problem that it takes time (time) to obtain a three-dimensional image.

  The present invention has been made in view of the above-described drawbacks of the prior art, and a three-dimensional image acquisition for height measurement is performed while a user repeatedly performs a three-dimensional observation during a three-dimensional repeated observation operation. Provided with a scanning confocal microscope and a sample information measuring method capable of setting an optimum Z-scanning range and having a function capable of easily acquiring an accurate three-dimensional image at all times and capable of greatly improving operability For the purpose.

  In addition, the Z-scanning range can be automatically set without the user's awareness using the height information obtained in three-dimensional repeated observation, and a function that can always easily acquire an accurate three-dimensional image is provided. An object is to provide an on-board scanning confocal microscope and a sample information measurement method.

The present invention employs the following configuration in order to solve the above problems.
That is, according to one aspect of the present invention, the sample information measurement method of the present invention irradiates the sample with light from the light source through the objective lens, and determines the relative position between the condensing position of the objective lens and the sample. between the Z scanning range in acquiring discrete three-dimensional image along the optical axis direction of the converging light is changed repeatedly from the lower limit of the Z scan range limit, the lower limit from the upper limit, at each relative position Light intensity information from the sample is extracted, a plurality of light intensity information is extracted from the acquired light intensity information group, and the maximum light intensity on the change curve adapted to the extracted light intensity information is obtained. Estimating the maximum value that is information and the relative position that gives the maximum value, and using the estimated maximum value and relative position of the light intensity information as luminance information and height information, respectively, from the lower limit to the upper limit of the Z scanning range, or The above objective lens from the upper limit to the lower limit The continuously acquired for each of the relative position changes between the condensing position and the sample 3-dimensional image is repeatedly updated display of the sample that was created based on the luminance information and the height information acquired above The three-dimensional image created based on the luminance information and the height information acquired by changing the Z-scanning range when acquiring the three-dimensional image during the change. Is displayed .

In the sample information measuring method of the present invention, it is desirable to measure the shape of the sample based on the set scanning range.
According to another aspect of the present invention, the scanning confocal microscope of the present invention includes an objective lens that focuses light from a light source on a sample and captures reflected light from the sample, and an optical axis of the light. Between the Z scanning range when discretely acquiring a three-dimensional image of the condensing position of the objective lens and the sample along the direction, the lower limit is the upper limit, and the lower limit is the upper limit. A Z-scanning mechanism that is repeatedly changed , a confocal stop disposed at a position conjugate with the condensing position of the objective lens, and a photodetector that detects the intensity of reflected light passing through the confocal stop. A scanning confocal microscope, wherein a plurality of light intensity information including a maximum light intensity value of a light intensity detected by the photodetector is obtained by changing a focusing position of the objective lens and a relative position of the sample. Light intensity information acquisition means to acquire, and the light intensity Extracting the obtained plurality of light intensity information from the light intensity information group by the broadcast acquisition means, the maximum value is the maximum light intensity information of the compatible change curve into a plurality of light intensity information described above extraction, the maximum value The relative position giving the light intensity information is estimated, and the maximum value and the relative position of the estimated light intensity information are respectively set as luminance information and height information from the lower limit to the upper limit, or from the upper limit to the lower limit. On the basis of the light information calculation means obtained continuously each time the relative position between the focusing position of the objective lens and the sample changes, and the luminance information and height information obtained by the light information calculation means. luminance information display means for displaying the 3-dimensional image of the sample that was created, and a Z scanning range setting means for setting a scanning range of the Z scanning mechanism, the above Z scanning range setting means, that the obtained Te And height Scanning range of the Z scanning mechanism can be altered while the above three-dimensional image created based on the bets are repeatedly updated display, the 3-dimensional images were acquired in a modified Z scanning range above It is created based on luminance information and the height information, and is displayed on the display means .

  In the scanning confocal microscope of the present invention, the Z scanning range setting means is set by the Z scanning range setting unit for setting the inputted scanning range of the Z scanning mechanism and the Z scanning range setting unit. It is desirable to provide a Z-scanning range automatic adjustment unit that adjusts the Z-scanning range scanned by the Z-scanning mechanism based on the scanning range and the height information.

  In the scanning confocal microscope according to the present invention, the Z scanning range setting unit may include a Z scanning range automatic setting unit that sets a Z scanning range to be scanned by the Z scanning mechanism based on the height information. desirable.

According to such a configuration, the user can set the Z scanning range while observing the three-dimensional image repeatedly displayed on the monitor, and can easily obtain an accurate three-dimensional image.
Furthermore, an arithmetic process is performed based on the optical information acquired by the photodetector, and an accurate three-dimensional image can be easily acquired without being noticed by the user by reflecting it in the Z scanning range.

  According to the present invention, the three-dimensional structure of the sample is repeatedly and continuously acquired, and the Z scanning range of the Z revolver is set based on the acquired light intensity information, so that an accurate three-dimensional image can be easily acquired. Can do.

Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 is a diagram showing a configuration of a scanning confocal microscope to which the first embodiment of the present invention is applied.

  In the scanning confocal microscope shown in FIG. 1, the light emitted from the light source 1 passes through the beam splitter 2 and then enters the two-dimensional scanning mechanism 3. The two-dimensional scanning mechanism 3 includes a first optical scanner 3 a and a second optical scanner 3 b, scans the light beam two-dimensionally, and guides it to the objective lens 7. The light beam incident on the objective lens 7 becomes focused light and scans the surface of the sample 8.

  The light reflected from the surface of the sample 8 is again introduced from the objective lens 7 into the beam splitter 2 via the two-dimensional scanning mechanism 3, then reflected by the beam splitter 2 and condensed on the pinhole 10 by the imaging lens 9. To do. The reflected light from the sample 8 other than the focal point is cut by the pinhole 10, and only the light passing through the pinhole 10 is detected by the photodetector 11.

  The Z revolver 6 has a plurality of objective lenses 7 and can insert an objective lens 7 having a desired magnification into an optical path for two-dimensional scanning, and is movable in the Z-axis direction. The light condensing position and the relative position of the sample 8 can be changed.

  The sample 8 is placed on the sample stage 13 and can be moved in the XY directions by the stage 14. The two-dimensional scanning mechanism 3, the Z revolver 6, the photodetector 11, and the like are controlled by a microscope control program stored in the computer 12, and the user can operate each unit through an operation screen displayed on the monitor 15.

  Here, the condensing position by the objective lens 7 is at a position optically conjugate with the pinhole 10. When the sample 8 is at the condensing position by the objective lens 7, the reflected light from the sample 8 is reflected by the pinhole 10. Condensed above and passes through the pinhole 10. When the sample 8 is at a position deviated from the condensing position by the objective lens 7, the reflected light from the sample 8 is not condensed on the pinhole 10 and does not pass through the pinhole 10.

FIG. 2 is a diagram showing the relationship between the relative position (Z) between the objective lens 7 and the sample 8 and the output (I) of the photodetector 11.
Hereinafter, this relationship is called an IZ curve.

As shown in FIG. 2, when the sample 8 is at the condensing position Z ₀ of the objective lens 7, the output of the photodetector 11 is maximized, and light detection is performed as the relative position between the objective lens 7 and the sample 8 increases from this position. The output of the vessel 11 decreases rapidly.

  Due to this characteristic, if the focal point is two-dimensionally scanned by the two-dimensional scanning mechanism 3 and the output of the photodetector 11 is imaged in synchronization with the two-dimensional scanning mechanism 3, only a certain height of the sample 8 is obtained. An image (confocal image) obtained by imaging and optically slicing the sample 8 is obtained. The image is displayed on the monitor 15 together with the operation screen.

Next, the operation in the Z direction will be described.
As the sample 8 measured by the scanning confocal microscope, the height (thickness in the Z direction) is different from one end to the other end in the a-plane, b-plane, and c-plane, and is thick (high). Consider a sample having three surfaces in order of b-plane, c-plane, and a-plane.

FIG. 3 is a diagram for explaining setting of the scanning range in the Z direction.
When the Z scanning range is set to a value other than zero, the revolver 6 starts to step up and down between the Z scanning ranges around the current focal position as shown in FIG.

The Z revolver 6 moves at a predetermined movement pitch ΔZ within the set Z scanning range, and a confocal image is acquired for each Z relative position.
In order to simplify the explanation, it is assumed that five confocal images are acquired, that is, the number of movements of the Z revolver 6 is four, and Z (-2), Z (-1), Z (0), Z (1 ), Z (2). At this time, light intensity information at an arbitrary point of the sample 8 is obtained.

FIG. 4 is a diagram illustrating light intensity groups at positions Z (−2) to Z (2).
Next, the light intensity information was compared at each point, and the maximum intensity was obtained (I (n), Z (n)), and the values before and after (I (n-1), Z (n-1)). , (I (n + 1), Z (n + 1)). In the case of FIG. 3, regarding the a-plane, the maximum intensity point is (Ia (-1), Za (-1)), and before and after (Ia (0), Za (0)), (Ia (-2 ), Za (-2)). Then, assuming an approximate quadratic curve passing through these three points and obtaining the extreme value thereof, the true maximum value Ia [max] and the position Za [max] of the Z revolver 6 that gives it can be obtained.

  By obtaining such information over the XY scanning range on the sample 8, an extended image focused on the entire surface and a height map image are created. The height map image is three-dimensionally displayed on the monitor 15 by being processed by the computer 12. Note that an extended image can be pasted and displayed on the surface of the three-dimensional image.

  Since the brightness and height can be extracted once with five confocal images, the step movement of the Z revolver 6 is changed from Z (−2) → Z (−1) → Z (0) → Z (1 ) → Z (2) → Z (1) → Z (0) → Z (−1) → Z (−2) →... To obtain the three-dimensional shape of the sample 8 continuously. Can do.

  Setting of the Z scanning range when the three-dimensional shape of the sample 8 is continuously acquired is performed by using a three-dimensional image repeatedly displayed on the monitor 15 by the operation panel 16 on the GUI screen shown in FIG. While observing the cross-sectional profile, the user freely sets (roughly sets) the width between the upper and lower limits or the upper and lower limits of the Z scanning range.

  Then, an optimum Z scanning range (a minimum scanning range in which a desired 3D image can be obtained) can be automatically calculated within a rough Z scanning range set by the user. ,adjust.

  The user can set the width between the upper and lower limits or the upper and lower limits of the Z scanning range while observing a three-dimensional image and a cross-sectional profile repeatedly displayed on the monitor 15 by using the operation panel 16 on the GUI screen shown in FIG. Can be set freely.

Next, a method for setting the Z scanning range in the first embodiment will be described with reference to FIG.
FIG. 6 is a flowchart showing the flow of the Z scanning range setting process in the first embodiment of the present invention.

  First, when three-dimensional display is repeatedly started in accordance with an instruction from the user in step S1, scanning is started at a default moving pitch within a predetermined Z scanning range in step S2.

  Next, in step S3, the user repeatedly observes the three-dimensional shape image or the cross-sectional profile constructed by the three-dimensional shape display function on the monitor 15, and the rough Z scanning range is displayed on the GUI screen shown in FIG. If the operation panel 16 is set, Z scanning is performed within the set range.

In step S4, the minimum value and the maximum value of the Z relative position are extracted from the constructed height image.
Next, in step S5, the lower limit value of Z scanning is calculated from the minimum value of the Z relative position extracted in step S4. For example, as shown in FIG. 7, the lower limit value is set to (minimum value of Z relative position−predetermined moving pitch × 2). In step S6, the upper limit value of Z scanning is calculated from the maximum value of the Z relative position extracted in step S4. For example, as shown in FIG. 7, the upper limit value is set to (multiple of minimum moving pitch equal to (maximum value of Z relative position−minimum value of Z relative position) + predetermined moving pitch × 4).

In step S7, the lower limit value and upper limit value of the Z scanning range calculated in steps S5 and S6 are reflected in the three-dimensional image capturing range.
Finally, in step S8, if the displayed image is a desired three-dimensional shape image, the Z scanning range setting process is terminated. If the displayed image is not a desired three-dimensional shape image, the process returns to step S3 and the subsequent processing repeat.

  As described above, the Z scanning range can be automatically set while the user repeatedly observes the three-dimensional shape on the monitor while displaying the three-dimensional image. Furthermore, since an appropriate Z scanning range (minimum scanning range in which a desired three-dimensional image can be obtained) is automatically calculated and set from the Z scanning range set by the user, the three-dimensional image is captured. Since an extra Z scanning range is omitted, it is possible to obtain a highly accurate three-dimensional image for time reduction and height measurement.

  In the description of the first embodiment, the minimum value and the maximum value of the Z relative position are extracted from the constructed height image, the upper limit value and the lower limit value of the Z scan range are calculated, and then the Z scan is performed. Although reflected in the range, the vertical interval of the Z scanning range may be calculated from the minimum value and the maximum value of the Z relative position and reflected in the Z scanning range. For example, the center position may be calculated from the maximum value and the minimum value of the Z relative position, and the Z scanning range may be expanded or contracted evenly from the center position.

Next, a second embodiment to which the present invention is applied will be described.
In addition to the scanning confocal microscope of the first embodiment, the scanning confocal microscope according to the second embodiment also automates the setting of a rough Z scanning range by the user, and an appropriate scanning range. Z scanning range automatic setting means for automatically performing all of the above.

A method for setting the Z scanning range of the Z revolver 6 in the second embodiment will be described.
After obtaining five confocal images by the configuration of the scanning confocal microscope shown in the first embodiment, the maximum value and the minimum value of the Z relative position of an arbitrary sample 8 are extracted. Based on the extracted Z relative position information, the Z scanning range of the Z revolver 6 or the lower limit value and the upper limit value of the Z scanning range are automatically calculated and set.

Next, a setting method of the Z scanning range in the second embodiment will be described with reference to FIG.
FIG. 8 is a flowchart showing the flow of the Z scanning range setting process in the second embodiment of the present invention.

First, in step S11, three-dimensional display is repeatedly started by an instruction from the user. At this time, default values are set for the movement pitch and the Z scanning range.
Next, in step S12, Z scanning is started within the default range, and an extended image is constructed. In step S13, the minimum value and the maximum value of the Z relative position are extracted from the height image constructed in step S12.

  Next, in step S14, the minimum height value extracted in step S13 is compared with the lower limit value of the Z scanning range including the margin. For example, the minimum value of the Z relative position extracted in step S13 is compared with the lower limit value of the default Z scanning range and a threshold value that can be set in advance.

  If the lower limit value of the Z scanning range including the margin is equal to or greater than the minimum height value extracted in step S13, that is, the minimum value of the Z relative position height in any sample 8 is the Z scanning range. If it is not included (step S14: YES), in step S15, the lower limit value of the Z scanning range is expanded by the margin (threshold value) to obtain the lower limit value of the Z scanning range in the next scanning.

  On the other hand, if the lower limit value of the Z scanning range including the margin is smaller than the minimum height value extracted in step S13, that is, the minimum value of the Z relative position height in any sample 8 is within the Z scanning range. If it is included (step S14: NO), in step S16, the minimum height value extracted in step S13 is compared with the lower limit value of the Z scanning range including the margin. For example, the minimum value of the Z relative position extracted in step S13 is compared with the lower limit value of the default Z scanning range + the preset threshold value + scanning pitch.

  If the lower limit value of the Z scanning range including the margin is equal to or greater than the minimum height value extracted in step S13 (step S16: YES), the lower limit value of the Z scanning range is set to 1 pitch in step S17. The value is reduced by an amount corresponding to the lower limit value of the Z scanning range in the next scanning.

  Next, in step S18, the maximum height value extracted in step S13 is compared with the upper limit value of the Z scanning range including the margin. For example, the maximum value of the Z relative position extracted in step S13 is compared with the upper limit value of the default Z scanning range—the above threshold value.

  If the upper limit value of the Z scanning range including the margin is less than the maximum height value extracted in step S13, that is, the maximum value of the Z relative position height in any sample 8 is the Z scanning range. If it is not included (step S18: YES), in step S19, the upper limit value of the Z scanning range is expanded by the margin (threshold value) to obtain the upper limit value of the Z scanning range in the next scanning.

  On the other hand, if the upper limit value of the Z scanning range including the margin is larger than the maximum height value extracted in step S13 (step S18: NO), the maximum height value extracted in step S13 and the margin are set. The upper limit value of the included Z scanning range is compared. For example, the maximum value of the Z relative position extracted in step S13 is compared with the upper limit value of the default Z scanning range−the preset threshold value−pitch.

  If the upper limit value of the Z scanning range including the margin is less than the maximum height value extracted in step S13, that is, the maximum value of the Z relative position height in a certain sample is included in the Z scanning range. If this is the case (step S20: YES), in step S21, the upper limit value of the Z scan range is reduced by one pitch to obtain the upper limit value of the Z scan range in the next scan.

Next, in step S22, these upper limit value and lower limit value are reflected in the Z scanning range in the acquisition of a three-dimensional image for measurement.
Finally, in step S23, if the displayed image is a desired three-dimensional shape image, the Z scanning range setting process is terminated. If the displayed image is not a desired three-dimensional shape image, the process returns to step S13 and the subsequent processing. repeat.

With the above operation, automatic setting of the Z scanning range in acquiring a three-dimensional image for measurement is realized.
As a result, the optimum Z scanning range (minimum scanning range in which a desired three-dimensional image can be obtained) is automatically calculated and set with a simple operation with the push of a button. In addition, since an unnecessary Z scanning range is omitted, it is possible to obtain a highly accurate three-dimensional image for time reduction and height measurement.

  Note that, instead of using the position information of the Z relative position, luminance information may be used as the determination reference in step S14, step S16, step S18, and step S20 in FIG. For example, the luminance information may be referred to at each of the upper and lower limits of the Z scanning range, and if it is darker than a certain percentage, it may be prevented from further expansion.

  As mentioned above, although each embodiment to which the present invention is applied has been described, the configuration of the scanning confocal microscope to which the present invention is applied is not limited to the configuration shown in FIG. 1 and is applied to various scanning confocal microscopes. Can do.

  For example, a structure in which a Nipo or Nipkow disk having a plurality of minute openings spirally formed on a disk may be rotated at high speed. At this time, a two-dimensional image sensor such as a CCD is used as a photodetector as the above-mentioned Nippon disk also serves as a minute aperture arranged at a position conjugate with the condensing position of the objective lens. Furthermore, instead of the two-dimensional light scanning mechanism, a configuration in which the focused light of the objective lens is scanned on one line of the sample by a one-dimensional light scanner to measure the cross-sectional shape of the sample.

  Further, as a moving mechanism that relatively moves the focusing position of the objective lens 7 and the position of the sample 8, a stage mechanism that moves the position of the sample 8 instead of the Z revolver 6 that moves the objective lens 7 may be used. .

  In addition, the present invention is not limited to the above configuration, and the present invention can be applied to various scanning confocal microscopes. That is, the scanning confocal microscope and the sample information measuring method to which the present invention is applied are not limited to the above-described embodiments as long as the functions are executed, and do not depart from the gist of the present invention. Various configurations or shapes can be taken within the scope.

It is a figure which shows the structure of the scanning confocal microscope to which the 1st Embodiment of this invention is applied. It is a figure which shows the relationship between the relative position (Z) of the objective lens 7 and the sample 8, and the output (I) of the photodetector 11. FIG. It is a figure for demonstrating the setting of the scanning range of a Z direction. It is a figure which shows the light intensity group in the position of Z (-2) to Z (2). It is a figure which shows the example of the operation panel GUI of Z scanning range specification. It is a flowchart which shows the flow of the Z scanning range setting process in the 1st Embodiment of this invention. It is a figure which shows the example of the Z scanning range setting in 1st Embodiment. It is a flowchart which shows the flow of the Z scanning range setting process in the 2nd Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Light source 2 Beam splitter 3 Two-dimensional scanning mechanism 3a 1st optical scanner 3b 2nd optical scanner 6 Z revolver 7 Objective lens 8 Sample 9 Imaging lens 10 Pinhole 11 Photodetector 12 Computer 13 Sample stand 14 Stage 15 Monitor 16 Operation panel

Claims (5)

Irradiate the sample with light from the light source through the objective lens,
The lower limit of the Z-scanning range between the Z-scanning range when a three-dimensional image is discretely acquired along the optical axis direction of the focused light and the relative position between the focusing position of the objective lens and the sample. from the upper limit is varied repeatedly to lower from the upper limit,
Obtain light intensity information from the sample at each relative position,
Extracting a plurality of light intensity information from the acquired light intensity information group,
A maximum value that is the maximum light intensity information on the change curve that matches the plurality of extracted light intensity information, and the relative position that gives the maximum value,
The estimated maximum value and relative position of the light intensity information are set as luminance information and height information, respectively , from the lower limit to the upper limit of the Z scanning range or from the upper limit to the lower limit. Acquire continuously whenever the position changes ,
Changing the Z scanning range when acquiring the three-dimensional image while the three-dimensional image of the sample created based on the acquired luminance information and height information is repeatedly updated and displayed ;
A sample information measuring method , comprising: displaying the three-dimensional image created based on the luminance information and the height information acquired in the changed Z scanning range . Based on the scan the ranges set forth above, the sample information measuring method according to claim 1, characterized in that for measuring the shape of the specimen. An objective lens that focuses the light from the light source on the sample and captures the reflected light from the sample;
From the lower limit of the Z-scanning range between the Z-scanning range when discretely acquiring the three-dimensional image of the focusing position of the objective lens and the relative position of the sample along the optical axis direction of the light An upper limit, a Z scanning mechanism that repeatedly changes from an upper limit to a lower limit ,
A confocal stop disposed at a position conjugate with the condensing position of the objective lens;
A scanning confocal microscope comprising a photodetector for detecting the intensity of reflected light passing through the confocal stop,
Light intensity information acquisition means for acquiring a plurality of light intensity information including the maximum light intensity value of the light intensity detected by the photodetector by changing the focusing position of the objective lens and the relative position of the sample;
Extracting a plurality of light intensity information from the light intensity information group acquired by the light intensity information acquisition means , a maximum value that is the maximum light intensity information on the change curve that matches the extracted light intensity information , Estimating the relative position that gives the light intensity information of the maximum value, the maximum value and relative position of the estimated light intensity information, respectively, as the luminance information and the height information from the lower limit to the upper limit of the Z scanning range, or An optical information calculation means that continuously obtains every time the relative position between the focusing position of the objective lens and the sample changes from the upper limit to the lower limit ;
Display means for displaying a three-dimensional image of the sample created based on the luminance information and height information acquired by the optical information calculation means ;
Z scanning range setting means for setting a scanning range of the Z scanning mechanism ,
The Z scanning range setting means can change the scanning range of the Z scanning mechanism while the three-dimensional image created based on the acquired luminance information and height information is repeatedly updated and displayed. The three-dimensional image is created based on the luminance information and the height information acquired in the changed Z scanning range, and displayed on the display means;
Scanning confocal microscope according to claim. The Z scanning range setting means includes
A Z-scanning range setting unit for setting the input scanning range of the Z-scanning mechanism;
A Z scanning range automatic adjustment unit for adjusting a Z scanning range scanned by the Z scanning mechanism based on the scanning range set by the Z scanning range setting unit and the height information;
The scanning confocal microscope according to claim 3 , further comprising: The Z scanning range setting means includes a Z scanning range automatic setting unit for setting a Z scanning range to be scanned by the Z scanning mechanism based on the height information,
The scanning confocal microscope according to claim 3 , further comprising: