JP6325817B2 - Magnification observation apparatus, magnification image observation method, magnification image observation program, and computer-readable recording medium - Google Patents

Description

  The present invention relates to a digital microscope and a magnification observation device such as a microscope that capture and display an enlarged image, a magnification image observation method, a magnification image observation program, and a computer-readable recording medium.

  An optical microscope using an optical lens, a digital microscope, or the like is used as a magnification observation apparatus that magnifies and displays a sample such as a minute object or a subject such as a workpiece. The digital microscope irradiates illumination light to an observation target sample placed on a stage via an optical system, and applies reflected light or transmitted light from the sample to each pixel arranged two-dimensionally. The image is received by an image sensor such as a CCD or CMOS, which is electrically read, and the electrically read image is displayed on a display unit such as a display (for example, Patent Document 1). Such a magnifying observation apparatus adjusts the focus by moving an optical lens facing the stage in the Z-axis (height) direction. In general, movement in the Z-axis direction is performed by a head portion in which a lens and a camera are integrally formed.

  In such a magnification observation apparatus, a plurality of images are photographed while changing the position of the lens and the sample in the Z-axis direction with respect to an image having a shallow depth of focus, and the obtained image is in focus. A depth synthesis process (also called “focus synthesis”, “multi-focus”, etc.) is known in which matching pixels are extracted and synthesized into a single image (depth synthesis image). In order to obtain such a depth composite image (also referred to as “focused image”, “multi-focus image”, etc.), it is necessary to appropriately determine the height range for capturing an image while changing the focal position. For this reason, before synthesizing the image, the in-focus position is shifted while watching the live video, the lower end and the upper end of the height range are set in advance, and the image in the set range is synthesized. However, this method requires a user to set the height range accurately, and the operation is complicated.

JP 2006-337470 A

  The present invention has been made to solve such conventional problems. A main object of the present invention is to provide a magnification observation apparatus, a magnification image observation method, and a magnification image observation program that can easily set a height range when combining a plurality of images taken at different heights. And providing a computer-readable recording medium.

Means for Solving the Problems and Effects of the Invention

In order to achieve the above object, according to the first magnification observation apparatus of the present invention, a placement unit for placing an observation object, and an observation object placed on the placement unit described above A camera unit for capturing an image, a lens unit optically coupled with the camera unit so as to coincide with an optical axis, and an imaging condition setting for setting an imaging condition for capturing an image with the camera unit Z axis moving means capable of automatically adjusting the working distance between the observation portion and the observation surface of the observation object placed on the placement portion, and XY capable of changing the relative position between the placement portion and the lens portion An axis moving mechanism, a height range setting unit that sets a height range in which the relative height between the object placed on the mounting unit and the lens unit is changed by the Z-axis moving unit, and the height The height is set by the Z-axis moving means within the height range set by the range setting means. Height information extracted different image synthesizing means for a plurality of images captured by the relative distance to generate a composite synthetic image, the height information included in each pixel of the synthesized image by the image combining means has generated Extraction means, display means including a height graph display area for displaying a height graph indicating the distribution of height information extracted by the height information extraction means, and a height direction as the height graph, A projection showing the distribution of the highest height information when the distribution of height information extracted by the height information extraction means is projected in the direction of the orthogonal side surface, or the height extracted by the height information extraction means A height graph generating means for generating a histogram of information , wherein the display means displays the projection diagram or histogram as the height graph in the height graph display area, and overlays the height graph, The high The upper limit of the height range set by the range setting means can be displayed. With the above configuration, it is possible to visually confirm the distribution of height information included in each pixel of the generated composite image , so whether the set height range was appropriate or what height range was inappropriate Therefore, it is possible to determine whether to set the appropriate imaging condition for the composite image.

Further , the above configuration makes it easy to visually confirm the validity of the set height range.

Furthermore, according to the second magnification observation apparatus, the height graph display area can display the height graph up to a range exceeding the upper limit of the height range set by the height range setting means. With the above-described configuration, information existing outside the height range can be visually recognized, so that it is easy to visually confirm in which direction the upper limit or the lower limit of the height range is to be changed.

Furthermore, according to the third magnifying observation device, the height range setting means determines the height range based on the depth of focus of the optical lens system based on the information of the optical lens system included in the lens unit. Can be automatically set as a predetermined range set in advance.

Furthermore, according to the fourth magnification observation apparatus, the height range can be arbitrarily adjusted by the height range setting means.

Furthermore, according to the fifth magnifying observation device, the relative distance between the mounting portion and the lens portion can be adjusted by moving the lens portion side with the Z-axis moving means.

Furthermore, according to the sixth magnifying observation device, the lens unit and the camera unit integrally form a head unit, and the head unit is moved by the Z-axis moving unit, and the mounting unit described above. The relative distance between the lens portion and the lens portion can be adjusted.

Furthermore, according to the seventh magnifying observation device, it is possible to further include illumination means for irradiating the observation target with illumination light.

Furthermore, according to the eighth magnified image observation method, the magnified image observation method displays an image obtained by capturing an observation object, and is used to capture an image of the observation object placed on the placement unit. Adjusting the distance between the camera unit and the lens unit whose optical axis coincides with the observation surface of the observation object and moving the lens unit in the height direction; and setting the lens within the height range. Moving the unit from one limit position toward the other limit position, taking a plurality of images with different heights with the imaging means, and determining the in-focus position from the plurality of taken images. A step of generating a combined image by combining and displaying the combined image obtained by the image combining process on the display means, extracting height information contained in each pixel of the combined image , and calculating a distribution of the height information the height graph showing the side orthogonal to the height direction A step of generating a projection diagram showing a distribution of the highest height information when the distribution of the extracted height information is projected in a direction, or a histogram of the extracted height information; and Displaying as the height graph, displaying the upper limit of the set height range in the height graph display area so as to overlap the height graph, and the combined depth image and height displayed on the display means A step of prompting resetting of the height range as needed while comparing with the graph. As a result, the distribution of height information contained in each pixel of the generated composite image can be visually confirmed, so whether the set height range was appropriate, and if it is inappropriate, what height range it is It is possible to determine whether to set with reference to the height graph, and it becomes easy to set an appropriate composite image capturing condition.

Furthermore, according to the ninth enlarged image observation program, an enlarged image observation program for displaying an image obtained by imaging an observation object, which images an image of the observation object placed on the placement unit A function of setting a height range in which the lens unit having the optical axis coincided with the imaging means for adjusting the distance to the observation surface of the observation object and moving in the height direction, and within the height range The lens unit is moved from one limit position toward the other limit position, and a function of capturing a plurality of images with different heights with the imaging unit and a plurality of captured images are in focus. A function for generating a composite image by combining positions, a function for displaying a composite image obtained by image composition processing on a display means, and extracting height information contained in each pixel of the composite image to obtain height information As a height graph showing the distribution of A projection view showing the distribution of the highest height information when projecting the distribution of the extracted height information in the side surface direction orthogonal to the direction, or a function of generating a histogram of the extracted height information, The computer can realize a function of displaying a projection map or a histogram as the height graph, and displaying the upper limit of the set height range on the height graph display area so as to overlap the height graph. With the above configuration, it is possible to visually confirm the distribution of height information included in each pixel of the generated composite image , so whether the set height range was appropriate or what height range was inappropriate Therefore, it is possible to determine whether to set the appropriate imaging condition for the composite image.

The tenth computer-readable recording medium or recorded device stores the above program. CD-ROM, CD-R, CD-RW, flexible disk, magnetic tape, MO, DVD-ROM, DVD-RAM, DVD-R, DVD + R, DVD-RW, DVD + RW, Blu-ray (registered) Trademark), HD DVD (AOD), and other magnetic disks, optical disks, magneto-optical disks, semiconductor memories, and other media that can store programs. The program includes a program distributed in a download manner through a network line such as the Internet, in addition to a program stored and distributed in the recording medium. Further, the recording medium includes a device capable of recording the program, for example, a general purpose or dedicated device in which the program is implemented in a state where the program can be executed in the form of software, firmware, or the like. Furthermore, each process and function included in the program may be executed by computer-executable program software, or each part of the process or hardware may be executed by hardware such as a predetermined gate array (FPGA, ASIC), or program software. And a partial hardware module that realizes a part of hardware elements may be mixed.

1 is an external view of a magnification observation apparatus according to an embodiment of the present invention. It is a block diagram of the magnification observation device concerning one embodiment of the present invention. It is the schematic which looked at the magnification observation apparatus from the front. It is a flowchart of the Eucentric magnification observation method. It is the schematic of the magnification observation apparatus which the stage moved to the lowest position. It is the schematic of the magnification observation apparatus with which the focus of the camera part corresponded to the rocking | fluctuation axis. It is the schematic of the magnification observation apparatus which mounted the observation target object on the stage located in the lowest position. It is the schematic of the magnification observation apparatus which raised the stage and matched the observation object surface with the rocking | fluctuation axis. It is the schematic of the magnification observation apparatus which positioned the new observation object surface on the rocking | fluctuation axis. It is the schematic of the magnification observation apparatus which moved the stage and matched the new observation object surface with the rocking | fluctuation axis. It is a flowchart of the depth synthetic image creation method. It is a figure which shows the depth synthetic | combination image and projection figure which are displayed on a display means. It is a figure which shows the depth synthetic | combination image and projection figure which are displayed on a display means. It is a figure which shows 3D display image as a depth synthetic | combination image. It is a figure which shows 3D display image as a depth synthetic | combination image. It is a figure which shows the histogram as a height graph. It is a figure which shows the histogram as a height graph. It is a figure which shows the depth synthetic | combination image and 3D image which are displayed on a display means. It is a figure which shows the depth synthetic | combination image displayed on a display means, a projection figure, and 3D image. It is a figure which shows the calculation method of height information. It is a figure which shows the calculation method of height information. It is a figure which shows the depth synthetic | combination image and projection figure which are displayed on a display means. It is a perspective view which shows a camera side connection surface. It is a perspective view which shows a lens side connection surface. It is a disassembled perspective view of the lens part and camera part of a head part.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the embodiment shown below exemplifies a magnification observation apparatus, a magnification image observation method, a magnification image observation program, and a computer-readable recording medium for embodying the technical idea of the present invention, The present invention does not specify a magnification observation apparatus, a magnification image observation method, a magnification image observation program, and a computer-readable recording medium as follows. Further, the present specification by no means specifies the members shown in the claims to the members of the embodiments. In particular, the dimensions, materials, shapes, relative arrangements, and the like of the component parts described in the embodiments are not intended to limit the scope of the present invention unless otherwise specified, and are merely explanations. It is just an example. Note that the size, positional relationship, and the like of the members shown in each drawing may be exaggerated for clarity of explanation. Furthermore, in the following description, the same name and symbol indicate the same or the same members, and detailed description thereof will be omitted as appropriate. Furthermore, each element constituting the present invention may be configured such that a plurality of elements are constituted by the same member and the plurality of elements are shared by one member, and conversely, the function of one member is constituted by a plurality of members. It can also be realized by sharing.

  The connection between the magnification observation apparatus used in the embodiment of the present invention and the computer, printer, external storage device and other peripheral devices for operation, control, display, and other processing connected thereto is, for example, IEEE 1394, RS-232x, RS-422, serial connection such as USB, parallel connection, or communication via network such as 10BASE-T, 100BASE-TX, 1000BASE-T, etc. Do. The connection is not limited to a physical connection using a wire, but IEEE802. Wireless connection using radio waves such as wireless LAN such as x, Bluetooth (registered trademark), infrared rays, optical communication, or the like may be used. Furthermore, a memory card, a magnetic disk, an optical disk, a magneto-optical disk, a semiconductor memory, or the like can be used as a recording medium for exchanging data or storing settings. In this specification, the magnification observation apparatus and the magnification image observation method are used to include not only the magnification observation apparatus body but also a magnification observation system in which peripheral devices such as a computer and an external storage device are combined.

  Further, in this specification, the magnification observation apparatus is not limited to a system that performs magnification observation, and an apparatus or method that performs input / output, display, calculation, communication, and other processes related to imaging in hardware. An apparatus and method for realizing processing by software are also included in the scope of the present invention. For example, a general-purpose circuit or computer that incorporates software, programs, plug-ins, objects, libraries, applets, compilers, modules, macros that operate on specific programs, etc., and enables imaging itself or related processing The system also corresponds to the magnification observation apparatus of the present invention. In this specification, the computer includes a workstation, a terminal, and other electronic devices in addition to a general-purpose or dedicated electronic computer. Further, in the present specification, the program is not limited to a program that is used alone, an aspect that functions as a part of a specific computer program, software, service, etc., an aspect that is called and functions when necessary, an environment such as an OS, etc. It can also be used as a mode provided as a service, a mode that operates resident in the environment, a mode that operates in the background, and other support programs.

  Hereinafter, the magnifying observation apparatus 100 according to an embodiment of the present invention will be described with reference to FIGS. Two directions orthogonal to each other in the horizontal plane are defined as an X axis and a Y axis, and a direction perpendicular to the X axis and the Y axis is defined as a Z axis. As shown in FIG. 1A, the magnifying observation apparatus 100 includes an illuminating unit 2 for illuminating an observation target (or a work or other subject) S, and a camera unit 3 for imaging the observation target S illuminated by the illuminating unit 2. And a main body 5 having display means 4 for displaying an enlarged image captured by the camera unit 3. The camera unit 3 is connected to the main body unit 5 via the cable unit 7 as the head unit 6. At the tip of the camera unit 3, a lens unit 20 having the optical axis aligned with that of the camera unit 3 is provided. The lens unit 20 is composed of a plurality of optical lenses. The head portion 6 is attached to the attachment member 25 and can be moved in the optical axis direction of the optical system 9 by the upper stage elevating portion 31. The magnification observation apparatus 100 further electrically transmits reflected light or transmitted light from the stage 8 on which the observation object S is placed and the observation object S placed on the stage 8 incident through the optical system 9. An imaging device 12 to be read and a lower stage elevating unit 13 as a focus adjusting unit that adjusts a focal point by changing a relative distance in the optical axis direction of the optical system 9 between the stage 8 and the head unit 6 are provided. The upper stage elevating part 31 and the lower stage elevating part 13 are attached to a base part 42 that is in contact with an installation surface on which the magnification observation apparatus 100 is installed.

  As shown in FIG. 2, the main body unit 5 is a surface that is substantially perpendicular to the optical axis direction, with focal length information regarding the relative distance between the stage 8 and the optical system 9 in the optical axis direction when the focus is adjusted by the lower stage elevating unit 13. As a focal length information storage unit that stores together with the two-dimensional position information of the observation object S in the inside, a display unit 4 that displays an image read by the image sensor 12, a head unit 6, and a lower stage elevating unit 13 The upper stage elevating unit 31 and the interface 15 for communicating data are provided. The magnification observation apparatus 100 captures and displays an observation image using an imaging element 12 that electrically reads reflected light or transmitted light from an observation object S fixed to a stage 8 that is incident via an optical system 9. It is displayed on the means 4.

  Furthermore, the magnification observation apparatus 100 is configured such that the operation unit 16 is a region setting unit capable of setting a region on the image displayed by the display unit 4 and a part of the observation object S corresponding to the region set by the region setting unit or Based on the focal length information stored in the memory unit 14 for all, a control unit 19 is provided for calculating the height in the optical axis direction of the observation object S corresponding to the region set by the region setting unit. The magnification observation apparatus 100 can calculate an average height (depth) in the optical axis direction of the observation object S corresponding to a region designated by using the imaging element 12.

The operation unit 16 is connected to the main unit 5 or the computer by wire or wirelessly, or is fixed to the computer. Examples of the general operation unit 16 include various pointing devices such as a mouse, keyboard, slide pad, track point, tablet, joystick, console, jog dial, digitizer, light pen, numeric keypad, touch pad, and accu point. In addition to the operation of the operation program for magnification observation, these operation units 16 can be used for operations of the magnification observation apparatus 100 itself and its peripheral devices. Furthermore, using a touch screen or touch panel on the display itself that displays the interface screen, the user can directly input or operate the screen by hand, or use voice input or other existing input means, Or these can also be used together. In the example of FIG. 1, the operation unit 16 is configured by a pointing device such as a mouse.
(Lighting means 2)

The illumination unit 2 generates illumination light that illuminates the observation object S imaged on the image sensor 12. The illumination light source of the illumination unit 2 is built in the main body unit 5, and the illumination light is transmitted to the illumination unit 2 of the head unit 6 through the optical fiber 21. The illuminating means 2 can be incorporated in the head unit 6 or can be separated from the head unit 6. As the illumination method of illumination light, epi-illumination, transmission illumination, or the like can be used as appropriate. The illuminating means 2 shown in FIG. 1 includes an epi-illumination 2A for irradiating the observation object S with epi-illumination and a transmissive illumination 2B for irradiating transmitted light. These lights are connected to the main body 5 via the optical fiber 21. The main body 5 includes a connector 22 for connecting the optical fiber 21 and incorporates an illumination light source for sending light to the optical fiber 21 through the connector 22. The epi-illumination 2A is a ring-shaped illumination. The ring-shaped illumination can be switched between all-around illumination and side illumination. In order to realize this, a turret-type mask that cuts a part of the illumination light, a configuration in which a plurality of LEDs are arranged in a ring shape as ring-shaped illumination, and a part of the LEDs are turned on / off can be used.
(Lighting source)

As the illumination light source, a semiconductor light emitting element such as an LED (Light Emitting Diode) or an LD (Laser Diode) can be used. For example, white light can be obtained by preparing 32 an LED having an RGB wavelength range. In particular, since the LED is excellent in ON / OFF responsiveness, there is an advantage that the measurement throughput can be improved. It also has features such as long life, low power consumption, low heat generation, and resistance to mechanical shock. Or it can also be set as the light source using wavelength conversion members, such as the fluorescent substance excited by the ultraviolet-ray of visible light, or visible light. Thereby, even one LED can emit white light. Further, an LED capable of emitting ultraviolet light or infrared light in addition to visible light can be used as a light source. For example, observation with infrared light is useful for analysis of defective products, tissue distribution of living tissue, and the like. The illumination light source is not limited to the semiconductor light emitting element, and a halogen lamp, a xenon lamp, an HID lamp, or the like may be used as a white light source that emits white light in a wide wavelength range. Moreover, it is good also as a light source which can irradiate not only visible light but infrared light. In particular, a halogen lamp is preferable because the wavelength range of the emission wavelength is wide. In addition to using a single light source, a plurality of light sources can be provided, and these can be turned on simultaneously to make mixed color light illumination light, or can be switched to illuminate.
(Camera unit 3)

The camera unit 3 includes an image sensor 12 that electrically reads reflected light incident from the observation object S illuminated by the illumination unit 2 via the optical system 9. In this example, the imaging device 12 uses a CMOS, but other light receiving devices such as a CCD can also be used.
(Display means 4)

Image data and setting contents held in the memory unit 14 can be displayed on the display means 4. As the display means 4, a monitor such as a CRT, a liquid crystal display, or an organic EL can be used. An operation unit 16 is connected to the control unit 19 for the user to perform various operations. The operation unit 16 is an input device such as a console or a mouse. In this example as well, the display means 4 and the operation unit 16 can be integrated with the main body unit 5 or can be external members. Furthermore, if the display means 4 is comprised with a touch panel, the display means 4 and the operation part 16 can also be comprised integrally.
(Height graph display area)

  The display unit 4 includes a height graph display area for displaying a height graph. The height graph is a chart showing a distribution state of height information extracted by the height information extracting means. Details will be described later.

  The main body unit 5 inputs control data related to the control of the stepping motor 29 to the motor control circuit 28, whereby the relative distance in the optical axis direction between the stage 8 and the head unit 6 having the optical system 9 and the image sensor 12. Here, the height in the z direction is changed. Specifically, the main body 5 controls the rotation of the stepping motor 29 by inputting control data necessary for controlling the lower stage elevating unit 13 to the motor control circuit 28, and the height z (z direction) of the stage 8. Up and down). The stepping motor 29 generates a rotation signal corresponding to the rotation. The main body 5 stores the height z of the stage 8 as information on the relative distance between the stage 8 and the optical system 9 in the optical axis direction based on the rotation signal input via the motor control circuit 28. The stage 8 functions as an observation positioning unit that positions the observation position with respect to the observation object S.

  The main body 5 changes the height in the optical axis direction of the head 6 having the image sensor 12 by inputting control data related to the control of the stepping motor 33 to the motor control circuit 32. Specifically, the main body unit 5 controls the rotation of the stepping motor 33 by inputting control data based on the type information of the lens unit 11 necessary for controlling the upper stage elevator 31 to the motor control circuit 32. The height z (position in the z direction) of the head unit 6 having the image sensor 12 is raised and lowered. The stepping motor 33 generates a rotation signal corresponding to the rotation. The main body 5 stores the height z of the head 6 as information on the relative distance between the stage 8 and the optical system 9 in the optical axis direction based on the rotation signal input via the motor control circuit 32.

The image sensor 12 can electrically read the amount of received light for each pixel arranged two-dimensionally in the x and y directions. The image of the observation object S formed on the image sensor 12 is converted into an electric signal according to the amount of received light at each pixel of the image sensor 12, and further converted into digital data in the image sensor control circuit 17. The main body 5 uses the digital data converted by the image sensor control circuit 17 as received light data D in a plane (x and y directions in FIG. 2) substantially perpendicular to the optical axis direction (z direction in FIG. 2). The information is stored in the memory unit 14 together with pixel arrangement information (x, y) as two-dimensional position information of the observation object S. Here, the in-plane substantially perpendicular to the optical axis direction does not need to be a plane strictly forming 90 ° with respect to the optical axis, and the shape of the observation object S is recognized by the resolution of the optical system and the image sensor. Any observation surface may be used as long as it is within a possible range of inclination.
(Control means 19)

The control unit 19 controls the captured observation image to be converted into a resolution that can be displayed by the display unit 4 and displayed. In the magnifying observation apparatus 100 of FIG. 2, the camera unit 3 displays an observation image obtained by imaging the observation object S by the imaging element 12 on the display unit 4. In general, the performance of the image sensor 12 such as a CMOS or CCD often exceeds the display capability of the display means 4. Therefore, in order to display the captured observation image on one screen, the resolution is reduced to one screen by thinning the image or the like. Is reduced to a size that can be displayed with, and is reduced. When the reading resolution when reading by the camera unit 3 is the first resolution, the display unit 4 displays the second resolution lower than the first resolution. The control means 19 realizes the functions of an image composition means for generating a composite image, which will be described later, and a height information extraction means 24 for extracting height information contained in the composite image generated by the image composition means.
(Stage 8)

The stage 8 installed on the upper surface side of the lower stage elevating unit 13 is driven by, for example, a stepping motor and can move in the X-axis direction and the Y-axis direction. Can be matched to the axis. Further, the stage 8 is attached to a rotatable θ stage 35 with the Z axis as a rotation center axis, and the user can rotate and observe the observation target surface that matches the optical axis of the camera unit.
(Support base 40)

An example of the external configuration of the imaging system 101 of the magnification observation apparatus 100 is shown in FIG. The imaging system 101 shown in this figure includes a mounting unit for mounting the observation object S and a support base 40 for supporting the head unit 6. The support base 40 includes a stage fixing mechanism 44 that holds the mounting portion in a horizontal plane or a state in which the mounting portion can be moved up and down, and a head tilt mechanism 45 that tilts the head portion 6 while holding the mounting portion. The stage fixing mechanism 44 and the head tilting mechanism 45 are fixed to the base portion 42. The base part 42 is formed in a flat plate shape, and makes the support base 40 stably stand by.
(Stage fixing mechanism 44)

The stage fixing mechanism 44 fixes the mounting unit to the base unit 42 via one or more moving mechanisms that can move the mounting unit in the horizontal plane (XY axis direction) and the vertical direction (Z axis direction). . Specifically, here, as a moving mechanism, a Z-axis direction moving mechanism (first focus adjustment unit) for moving the mounting unit in the Z-axis direction, and an XY axis for moving the mounting unit in the XY-axis direction A moving mechanism and a rotating mechanism for rotating the mounting portion in the θ direction can be used. In the example shown in FIG. 3, the lower stage elevator 13 is realized as a Z-axis moving mechanism, and the mounting portion can be rotated by an intermediate connecting portion 38 fixed on the θ stage 35 as a rotational moving mechanism. As the XY axis moving mechanism, the stage can be moved in the XY axis direction by the stage 8 fixed on the intermediate connecting portion 38.
(Head tilt mechanism 45)

  The head tilting mechanism 45, which is a swinging mechanism, includes an upper stage lift 31 that is swingably connected to the base part 42 via a swinging shaft 37 in order to tilt the head unit 6 with respect to the mounting unit. An attachment member 25 for fixing the head unit 6 to the upper stage elevator 31 is provided. The upper stage elevator 31 is provided with a swing shaft 37 at the lower end, and is supported by the base portion 42 so as to turn around the swing shaft 37. The upper stage elevator 31 can swing around a swing shaft 37 provided in the base portion 42 in a posture parallel to the stage 8. A fixing mechanism for fixing the head unit 6 is provided at the tip of the mounting member 25. Here, the fixing mechanism is formed in a ring shape surrounding the outer periphery of the head portion 6, and the head portion 6 is inserted into the center of the ring shape, and is fixed by being screwed with a set screw from a plurality of surrounding positions.

On the upper surface of the base portion 42, a block that spreads downward is fixed, and a bearing portion is formed on the upper portion of the block. The bearing portion includes a pair of guide portions that are fixed apart from each other, and the pair of guide portions are formed in a concave shape in a side view. Each guide portion opens a circular hole formed with an axis parallel to the Y-axis direction as a central axis. A rocking shaft 37 is fitted in these holes along the Y-axis direction.
(Planar observation)

  For example, when the user presses an initialization button (not shown), the main unit 5 inputs control data of the stepping motor 29 to the motor control circuit 28, the lower stage elevator 13 is driven, and the stage 8 is at the lowest position. Move to. The state at this time is shown in FIG.

  The main body unit 5 inputs control data based on the type information of the lens unit 20 to the motor control circuit 32, and the upper stage elevator 31 has a height z (position in the z direction) of the head unit 6 having the image sensor 12. ). If it is assumed that the observation target S is placed on the stage 8 and the height of the observation target surface matches the height of the swing shaft 37, the main body 5 is focused on the camera unit 3. The head unit 6 is held at a height z that matches the surface. The state at this time is shown in FIG.

  When the type information of the lens unit 20 necessary for controlling the height z (position in the z direction) of the head unit 6 is not stored in the main body unit 5, the main body unit 5 moves the head unit 6 to a predetermined value. The head unit 6 moved to the uppermost position is moved down from the uppermost position. If it is assumed that the observation target S is placed on the stage 8 and the height of the observation target surface matches the height of the swing shaft 37, the main body 5 is focused on the camera unit 3. The head unit 6 is held at a height z that matches the surface.

  Next, the user places the observation object S on the upper surface of the stage 8 positioned at the lowest position. The state at this time is shown in FIG. Since the stage 8 is located at the lowest position, when the observation object S is placed on the stage 8, the observation object S is prevented from coming into contact with the head unit 6 having the image sensor 12. Can do.

The main body unit 5 moves the stage 8 and the θ stage 35, which are mounting units, along the Z axis so that the focus of the camera unit 3 matches the observation target surface of the observation target S mounted on the stage 8. The observation object surface of the observation object S is aligned with the swing shaft 37. The state at this time is shown in FIG. When the observation target surface is not located on the optical axis of the camera unit 3, the main body unit 5 moves the stage 8 in the X-axis direction and / or the Y-axis direction so as to move the observation target surface to the light of the camera unit 3. After being positioned on the axis, the stage 8 and the θ stage 35 are raised along the Z axis so that the observation target surface of the observation target S matches the swinging axis 37. Using the display unit 4, the user can perform planar observation of the observation target surface of the observation target S that matches the swing axis 37. The user can also perform planar observation with the main body unit 5 driving the θ stage 35 and rotating the observation target surface.
(Tilt observation)

When performing tilt observation with the head unit 6 being swung, the user manually swings the upper stage elevator 31 around the rocking shaft 37 and tilts the head unit 6 for observation. The surface can be tilted. At this time, with the head unit 6 tilted, the focus of the camera unit 3 matches the observation target surface, and the observation target surface displayed on the display unit 4 during the planar observation is the screen of the display unit 4. Without moving up, it is possible to perform eucentric observation, which is observation in a state where it is displayed as it is at the position displayed during planar observation.
(Depth synthesis)

  A procedure for performing the depth synthesis when the observation object S is observed in plane or tilted will be described based on the flowchart of the depth synthesized image creation method shown in FIG. First, in step S1101, the height range is automatically set by the control means. Here, the head unit 6 captures a plurality of images of the observation object S while changing the focal position. Here, the height range in which the depth synthesis is performed first is automatically set by the control unit based on the characteristics of the lens unit currently mounted, for example. Here, the lens identification information of the lens unit is read, and the control means automatically sets the height range from the magnification and focus range of the lens. Next, in step S1102, the control unit 19 combines the plurality of images obtained to create a depth composite image 61. Furthermore, the created depth composite image 61 is displayed on the display means 4.

In step S1103, the height information of the observation target is collected. Here, the height information extraction unit 24 extracts the height information included in the depth composite image 61 created by the control unit 19. In step S1104, the height information extraction unit 24 creates a height graph based on the extracted height information. Next, in step S1105, the created height graph is displayed on the display unit 4 together with the depth composite image. Let In step S1106, it is determined whether or not the height range needs to be adjusted. Here, the user is prompted to input whether or not the height range needs to be reset while referring to the depth composite image and the height graph displayed on the display means. If not necessary, the process ends. If resetting is necessary, the process proceeds to step S1107, the height range is adjusted, the process returns to step S1102, and the above procedure is repeated. In this way, the depth composite image is once created with the initial settings, and then the user is referred to the obtained image to prompt resetting as necessary. Therefore, it is not necessary to set an optimum value in the height range, and an appropriate depth composite image can be obtained efficiently in a short time.
(Height graph)

The height graph is a chart showing the distribution state of the height information extracted by the height information extraction means as described above. For the height graph, forms such as a projection diagram, a histogram, and a 3D image 64 can be used. Examples of the height graph display area are shown in FIGS. 12 to 13 and FIGS. 16 to 19. In these drawings, FIGS. 12 to 13 show projection diagrams 62 as height graphs, FIGS. 16 to 17 show histograms 63, and FIGS. 18 to 19 show 3D images 64.
(Projection)

  By displaying the height graph side by side with the composite image on the display means 4, it is possible to easily perform the adjustment operation of the height range while comparing them. As an example in FIG. 12, a projection diagram 62 is shown as a depth composite image 61 and a height graph indicating the height information included in the depth composite image 61. Here, it is the depth synthetic | combination image 61 synthesize | combined in the height range of an initial setting, and the blur part exists in the center. A projection diagram 62, which is one form of the height graph, shows a profile in which the height information of each pixel included in the depth composite image is scanned in the vertical direction of the depth composite image and the highest height information is plotted. Yes. In the example of FIG. 12, the depth composite image has an aspect like a side view as viewed from below in the drawing.

  The projection view is not limited to this configuration, and for example, a profile obtained by scanning the depth composite image in the horizontal direction and plotting the highest height information may be used. Alternatively, as shown in FIG. 20, a cutting line may be set on the depth composite image, and the profile of the cross section at the cutting line may be displayed as a projection view. In particular, the profile of the cutting line does not need to scan the height information over a wide area, and it is sufficient to extract only the height information on the cutting line, so that the processing speed can be increased. Further, in magnified observation, the attention area of the observation object S is often arranged and observed near the center of the display screen of the display unit 4, so that scanning is performed only on the straight line 69 near the center of the display screen. It is possible to improve the processing speed by omitting the process of extracting the height information of various areas. In addition, the cutting line can be a vertical direction, a horizontal direction, an oblique line, an arbitrary line segment, a free curve, or the like on the depth composite image. Furthermore, even when a line-shaped profile is set, not only when the line width is set to one pixel, it is also possible to extract height information of a plurality of pixels and use these average values. As a result, the influence of noise can be reduced by averaging.

  Furthermore, since the data displayed in the height graph is sufficient as a guideline for resetting the height range, it is not necessary to perform an accurate calculation and can be simplified as appropriate. For example, instead of using the height information of all the pixels included in the selected area, the calculation may be performed by thinning out every several pixels. Thereby, the number of data to be scanned can be reduced and the processing speed can be improved.

  Furthermore, in the example of FIG. 12, the height graph, which is a projection view, is displayed side by side on the right side of the depth composite image, but by displaying the projection view side by side below or above the depth composite image, It may be easy for the user to understand sensuously that the projected view is seen from the side. Or you may comprise so that a user may arrange | position a height graph by arbitrary layouts.

Furthermore, although the example which displays the one height graph in one line was demonstrated in the above example, it is good also as a structure which displays a some height graph. For example, as shown in FIG. 21, it is possible to display a plurality of height graphs by setting a plurality of lines on the depth composite image and displaying the cross-sectional profiles of the respective lines.
(Upper limit bar 65, lower limit bar 66)

  Furthermore, an upper limit bar 65 and a lower limit bar 66 indicating the height range in which the depth synthesis is performed can be displayed in an overlapping manner on the height graph. In the example shown in the projection view of FIG. 12, since the central portion of the height range set by the upper limit bar 65 and the lower limit bar 66 exceeds the upper limit bar 65, the observation object S further moves upward in the central portion. It is surmised that it has a protruding portion. Therefore, when resetting the height range, by expanding the height range upward, there is no out-of-focus part, and the depth composite image 61 in which the entire observation object S is in focus is obtained. It is possible to predict from the projection map.

  FIG. 13 shows a depth composite image 61 and a projection diagram 62 in which the height range is expanded upward and the depth composition is performed again. In the projection view 62 shown in this figure, since the center protruding portion is included in the height range set by the upper limit bar 65 and the lower limit bar 66, there is no out-of-focus portion and the entire observation object S is in focus. It can be confirmed that a combined depth composite image 61 is obtained. In this way, by looking at the projection diagram 62 of the observation object S, the height range for capturing and synthesizing the image of the observation object while changing the focal position should be expanded upward or expanded downward. I can guess.

  In addition, the height range setting may be changed by the user dragging and moving the upper limit bar 65 and the lower limit bar 66 with a mouse or the like on the projection view. When the positions of the upper limit bar 65 and the lower limit bar 66 are changed, the imaging condition setting means for setting the imaging condition for depth synthesis according to the position automatically sets the height range to a numerical value corresponding to the height on the projection view. specify. As a result, the user can easily set the height range, so that fine adjustment can be made sensuously without checking specific numerical values.

In addition, since the height of the part exceeding the upper limit bar 65 cannot be originally measured, an accurate profile is not obtained. FIG. 14 shows a 3D image obtained by three-dimensionally displaying the projection view shown in FIG. 12, and FIG. 15 shows a 3D image of the projection view shown in FIG. As shown in FIG. 14, if the upper limit of the height range is inappropriate, the shape of the center portion is not reproduced, while the 3D image with the correct height range is not It can be confirmed that the shape is correctly reproduced. Also, when such a 3D image is used for resetting the height range, it becomes easier to confirm the direction in which the height range should be expanded. The projections shown in FIGS. 12 and 13 are views of the 3D display image 67 shown in FIGS. 14 and 15 as viewed from the direction of the arrows.
(histogram)

Next, the case where the histogram 63 is used as the height graph will be described with reference to FIGS. In these drawings, the horizontal axis indicates the number of pixels of the observation object S, and the vertical axis indicates the height in the Z direction captured by the camera unit 3. FIG. 16 shows a histogram 63 of the depth composite image obtained in the initial height range set by the control means 19. Looking at this histogram 63, it is estimated that the upper limit of the height range is too low because the number of pixels of the observation object S is large near the upper limit of the height range. FIG. 17 shows a histogram 63 when the upper limit of the height range is expanded upward from the state of FIG. In the histogram 63, the pixel of the observation object S does not exist near the upper limit of the height range, and the observation object S is included in the height range set in FIG. 17, in other words, the height range. Is assumed to be set correctly. Also in this example, the height range may be changed from the histogram by dragging the upper and lower lines of the height range with the mouse.
(3D image)

  Furthermore, the case where the 3D image 64 is used as a height graph is shown in FIG. In FIG. 18, the upper limit and the lower limit of the height range are displayed on the plane 68. Thereby, the part exceeding the height range can be easily confirmed three-dimensionally and visually. Further, marks can be attached to the upper and lower height positions to indicate these positions. In the example of FIG. 18, the upper limit height position is indicated by □ and the lower limit is indicated by ◯, respectively. The user can adjust the height range by dragging the upper limit □ or the lower limit ◯ while checking the 3D image 64.

Further, as shown in FIG. 19, a 3D image 64 and a projection diagram 62 can be used in combination as a height graph. In this way, it is possible to easily determine whether the height range should be expanded upward or downward intuitively. The combination of the height graphs is not limited to the above example, and may be a combination of a histogram and a 3D image, or a combination of a histogram, a 3D image, and a projection view.
(Height range setting means)

The height range is set by the height range setting means. As an example of such height range setting means, an example of a user interface screen of the enlarged image observation program is shown in FIG. The height range setting screen 170 shown in this figure displays the depth composite image MI in the left image display area 111 and provides a height range setting field in the right operation area 112. In the height range setting field, a height range manual designation field 172 for manually designating the height range is provided in the upper stage, and a height graph display field 173 is provided in the middle stage. In the height range manual designation field 172, an upper limit and a lower limit of the height range can be entered numerically. On the other hand, in the height graph display column 173, a height graph (in this case, a projection diagram PI) is displayed on the right side, and a slider indicating the movement of the height in the Z-axis direction is displayed on the left side. The slider includes an overall slider 174 that indicates the entire height range, and an enlarged slider 175 in which a part of the overall slider 174 is enlarged. The enlargement slider 175 is provided with an upper limit operation knob 176 indicating the upper limit of the height range and a lower limit operation knob 177 indicating the lower limit. When the user operates these upper limit operation knob 176 and lower limit operation knob 177 with a mouse drag or the like, the height range changes continuously, and the upper limit bar 178 and lower limit bar 179 displayed in the height graph are accordingly changed. Also move together. Further, the upper limit and lower limit numerical values of the height range in the height range manual designation field 172 also change. These are set so that when any one of the height range setting means is operated, the other height range setting means is also changed in conjunction with it. Thereby, the user can set the height range by a desired method.
(Physical connection mechanism)

Further, the microscope apparatus 100 includes a physical connection mechanism that physically connects the camera unit 3 and the lens unit 20 in a relatively non-rotatable state and that is detachable. Specifically, the camera unit 3 includes a camera side connection surface 71 for physically connecting to the lens unit 20. The lens unit 20 includes a lens side connection surface 73 that is physically joined to the camera side connection surface 71. An example of the camera side connection surface 71 is shown in the perspective view of FIG. 23, and an example of the lens side connection surface 73 is shown in the perspective view of FIG. As shown in these drawings, the camera side connection surface 71 and the lens side connection surface 73 are mechanically connected by a physical connection mechanism, specifically, an engagement structure or a fitting structure. For example, in the example of FIGS. 23 and 24, a columnar protrusion is formed in the center of the camera-side connection surface 71 so as to protrude in a columnar shape, and an arcuate collar is formed on the edge of the side surface of the columnar protrusion. It partially protrudes. On the other hand, the lens-side connection surface 73 has a cylindrical recess into which a columnar protrusion can be inserted at the center, and further, a slit for engaging the collar portion is formed on the inner surface of the cylindrical recess. . By partially notching the slit, the columnar protrusion can be inserted into the cylindrical depression, and the camera side connection surface 71 is rotated relative to the lens side connection surface 73, so that the collar portion becomes the slit. The camera unit 3 and the lens unit 20 can be connected in a locked state by being guided and engaged. Moreover, the camera part 3 and the lens part 20 can be easily separated by rotating the camera part 3 and the lens part 20 relatively to release the locked state. Note that the relatively non-rotatable state in the above-described physical connection mechanism means a state where the camera unit 3 and the lens unit 20 are coupled in the locked state, and the camera unit 3 and the lens are coupled or detached during the coupling operation. It does not mean an operation of releasing the locked state or the locked state by relatively rotating the unit 20. Further, the above engagement structure is an example, and in the present invention, a known configuration can be appropriately employed as a physical connection mechanism for detachably connecting the camera unit 3 and the lens unit 20.
(Electrical connection mechanism)

  Furthermore, the camera unit 3 and the lens unit 20 are provided with an electrical connection mechanism for electrical connection with each other. Specifically, the camera unit includes a camera side connection terminal 72 for electrically connecting to the lens unit 20 on the camera side connection surface 71. Similarly, the lens unit 20 includes a lens-side connection terminal 74 that is electrically connected to the camera-side connection terminal 72 when the lens unit 20 is attached to the camera unit 3 on the lens-side connection surface 73. The camera side connection terminal 72 and the lens side connection terminal 74 are disposed on the camera side connection surface 71 and the lens side connection surface 73, respectively. The physical connection mechanism connects the camera side connection surface 71 and the lens side connection surface 73 to each other. Therefore, in the mechanically connected state, that is, in the rotation position of the lens unit 20 and the camera unit 3 in the locked state, the position and size of the corresponding camera side connection terminal 72 and lens side connection terminal 74 are brought into contact with each other. The shape is designed. In other words, when the camera unit 3 and the lens unit 20 are connected by a physical connection mechanism, the connection of the electrical connection mechanism is realized at the same time. As a result, unlike the prior art, it is not necessary to electrically connect the lens unit to the control system or the imaging system via a separate cable or the like. As a result, an advantage of simplifying the operation at the time of lens replacement can be obtained particularly in observation in which the lens is frequently replaced. Also, the number of cables is reduced, which is advantageous in terms of handling.

  In the example of FIGS. 23 and 24, the camera side connection terminal 72 and the lens side connection terminal 74 are provided on the circumferential portions of the camera side connection surface 71 and the lens side connection surface 73, respectively. With such an arrangement, when the head unit 4 and the camera unit 3 are connected, the terminal comes into contact with other terminals and the surface is rubbed, so that dust and foreign matters on the surface are scraped off to avoid an increase in contact resistance. it can. However, the terminal arrangement structure is not limited to this example. In the example of FIGS. 23 and 24, the camera side connection terminal 72 and the lens side connection terminal 74 are each provided with seven terminals, but the number of terminals is not limited to this.

Furthermore, the camera unit 3 can mount a plurality of lens units 20 having different specifications interchangeably. Each lens unit 20 holds lens type information indicating the type of each lens unit 20, and can transmit the lens type information via the lens side connection terminal 74. That is, by physically attaching the lens unit 20 to the camera unit 3 by the physical connection mechanism, electrical connection by the electrical connection mechanism can be achieved at the same time. As a result, the main body unit 5 can acquire the type of the lens unit 20 that is currently mounted without a cable, so that it is possible to perform appropriate operation control according to the type of the lens unit that is currently connected.
(Lens type information)

  The lens type information includes information such as the lens type, the position of the focal length, and the length of the lens barrel. As described above, since the imaging system 101 and the control system 102 are connected via the cable unit 7, appropriate control can be performed by determining the type of the lens currently mounted by the control system 102. For example, by grasping the physical length of the lens unit 20, when the lens unit 20 is lowered on the Z-stage, the lower limit moving distance that can be lowered without touching the observation object S or the placement unit is grasped. Thus, it is possible to limit so as not to descend more than this.

  In addition to directly recording lens part information as lens type information, only lens part identification information, for example, a model type, is recorded, and detailed information of the lens part corresponding to one type is stored in advance in the memory part 14 of the main body part 5 or the like. In addition, it can be stored as a lookup table associated with the model. As a result, when the main body unit 5 acquires the model that is the lens identification information through the camera unit 3, the main unit 5 acquires detailed information corresponding to the model with reference to the memory unit 14, and the lens unit 20 based on the acquired information. It is possible to perform control that matches the above. With this method, it is possible to grasp necessary information on the main body unit 5 side while reducing the amount of information to be held on the lens unit side.

  In the microscope apparatus, there is a case where it is desired to rotate the camera unit around the optical axis with respect to the mounting unit. For example, when the observation object is moved on the placement unit, the up / down / left / right movement direction of the image displayed on the screen of the display means is sensibly similar to the up / down / left / right movement direction of the actual observation object. It is desirable to match. Also, in the tilt observation in which the lens unit is tilted at the upper part of the mounting unit, it is easier to grasp the change of the image sensuously when the tilt direction is set to the vertical direction than to the horizontal direction of the display means. There are many cases. In order to realize such observation, it is necessary to physically rotate the camera unit with respect to the mounting unit.

  However, it is not always necessary to rotate the lens unit attached to the tip of the camera unit. On the contrary, since the lens part tends to increase in size especially as the magnification is increased, the lens part becomes heavier and a certain mechanical strength is required for holding the lens part. For this reason, if the lens unit is made to be rotatable while maintaining sufficient rigidity, the task of rotating the heavy and large lens unit becomes cumbersome for the user, and the configuration becomes complicated and the cost increases. was there. In addition, since the lens unit is fixed in a posture that protrudes from the camera unit to the mounting unit side, it is necessary to take care that the lens unit does not come into contact with the object to be observed. Is inconvenient.

  Therefore, a configuration is conceivable in which the lens unit is fixed to the support base, while the camera unit is rotatable around the optical axis relative to the lens unit. However, in this case, there is a problem that the structure for attaching and detaching the camera unit and the lens unit becomes complicated. In other words, the lens part, which tends to be heavier than the camera part in general, has a mechanical structure that can be attached and detached when necessary while fixing it so that it does not come off the tip of the camera part. It is not easy to have a configuration that allows rotation with the part. In particular, as the rigidity and reliability of the connection part is increased, the attachment / detachment becomes more difficult or troublesome. There was also a concern that it could be very cumbersome.

Therefore, in the present embodiment, the connecting portion between the lens unit 20 and the camera unit 3 and the part that relatively rotates the camera unit 3 are separated, so that the detachable structure of the lens unit 20 and the camera unit 3 and the camera unit are separated. It succeeded in simplifying the structure which rotates 3 relatively to the surroundings of an optical axis. Specifically, as shown in FIG. 25, the lens unit 20 is provided with a mount unit 26, and the camera unit 3 and the lens unit 20 are detachably connected via the mount unit 26, while the mount unit 26 and the lens body. 27 is rotatable.
(Mount 26)

The lens unit 20 shown in FIG. 25 includes a lens body 27 composed of a plurality of optical lenses, and a mount unit 26 that is attached to the end surface of the lens body 27 and forms the lens-side connection surface 73. The mount unit 26 includes a mount-side camera connection surface 34 a for connecting to the camera unit 3 and a mount-side lens connection surface 34 b for connecting to the lens body 27 on the back surface side. The mount-side camera connection surface 34 a is a lens-side connection surface 73 including a lens-side connection terminal 74. Therefore, the mount-side camera connection surface 34 a is provided with a physical connection mechanism that is detachably connected to the camera-side connection surface 71 of the camera unit 3. As such a physical coupling mechanism, the same configuration as that in FIG. In other words, in the physical coupling mechanism, the camera unit 3 and the lens unit 20 are not allowed to rotate around the optical axis, and are fixed at a predetermined rotation position, that is, a rotation angle.
(Rotating mechanism)

  On the other hand, the mount side lens connection surface 34 b is connected to the lens body 27 so as to be rotatable around the optical axis of the camera unit 3. For this reason, the connection surface between the mount side lens connection surface 34b and the lens body 27 is provided with a rotation mechanism. As the rotation mechanism, in the example of FIG. 25, the mount column portion protruding from the center of the mount portion 26 is inserted into a cylindrical body formed at the edge of the lens body 27 and further opened on the side surface of the cylindrical body. The cylindrical body and the mount column portion are connected by the advance of the set screw screwed into the screw hole. When the set screw is loosened, the lens body 27 and the mount portion 26 can be rotated relative to each other, and can be fixed at this rotational angle by fastening the set screw at a predetermined rotational position. Note that the example of the rotation mechanism is not limited to this configuration, and a known configuration that can hold the lens unit 20 around the optical axis of the camera unit and can hold the lens unit 20 at an arbitrary angle can be appropriately employed.

  In the example of FIG. 25, the mount portion 26 and the lens body 27 are separated for convenience of explanation, but actually the mount portion 26 and the lens body 27 cannot be separated, and are connected so as to be rotatable around the optical axis. doing.

  As a modification, the mount portion can be fixed to the head tilt mechanism. Since the head tilting mechanism is physically connected to the mounting unit, the position of the mount unit is fixed with respect to the mounting unit, and the lens unit mounted on the mounting unit is also connected to the mounting unit. Position is fixed. As a result, it is possible to avoid a situation in which the lens unit comes into contact with the observation object as compared with a configuration in which the lens unit is movable.

  In this way, the connection surface between the camera unit 3 and the mount unit 26 is configured to be detachable, and the connection surface between the mount unit 26 and the lens body 27 is rotatable so that the camera unit 3 can be moved with respect to the mounting unit. While allowing rotation around the optical axis, the camera unit 3 can be held in a predetermined posture, and the degree of freedom of magnification observation can be increased.

  With the mount unit 26 described above, the camera unit 3 can be held with respect to the mounting unit at an arbitrary rotation angle around the optical axis of the camera unit 3. As a result, the camera unit 3 can be adjusted to an arbitrary rotation angle and imaged regardless of the attitude of the lens unit 20 around the optical axis, that is, the rotation angle. The control means 19 can create a depth composite image 61 by combining a plurality of images captured by the camera unit 3 at an arbitrary angle and display them on the display means 4. The height information extraction unit 24 can calculate the height information of the observation object S at an arbitrary rotation angle based on the depth composite image 61 created by the control unit 19. Based on the height information of the observation object S calculated by the height information extraction unit 24, the control unit 19 creates a projection diagram 62, a histogram 63, a 3D image 64, and the like, which are height graphs of arbitrary rotation angles. be able to.

  The microscope apparatus of the present invention can be suitably used for a digital microscope such as a reflection type and a transmission type, and a digital camera. In addition, when the present technology is applied to a fluorescence microscope, reflected light or transmitted light from an observation target with respect to illumination light can be read as excitation light.

DESCRIPTION OF SYMBOLS 100 ... Magnification observation apparatus 101 ... Imaging system 102 ... Control system 2 ... Illumination means 2A ... Epi-illumination illumination 2B ... Transmission illumination S ... Observation object 3 ... Camera part 4 ... Display means 5 ... Main-body part 6 ... Head part 7 ... Cable part DESCRIPTION OF SYMBOLS 8 ... Stage 9 ... Optical system 10 ... Optical axis 12 ... Imaging element 13 ... Lower stage raising / lowering part 14 ... Memory part 15 ... Interface 16 ... Operation part 17 ... Imaging element control circuit 19 ... Control means 20 ... Lens part 21 ... Optical fiber DESCRIPTION OF SYMBOLS 22 ... Connector 24 ... Height information extraction means 25 ... Mounting member 26 ... Mount part 27 ... Lens main body 28, 32 ... Motor control circuit 29, 33 ... Stepping motor 31 ... Upper stage raising / lowering part 34a ... Mount side camera connection surface 34b ... Mount-side lens connection surface 35... Θ stage 37... Oscillating shaft 38. Intermediate connecting portion 40. Support base 42. Tilt mechanism 61 ... Depth composite image 62 ... Projection diagram 63 ... Histogram 64 ... 3D image 65 ... Upper limit bar 66 ... Lower limit bar 67 ... 3D display image 68 ... Plane 69 ... Straight line 71 ... Camera side connection surface 72 ... Camera side connection terminal 73 ... lens side connection surface 74 ... lens side connection terminal 112 ... operation area 172 ... height range manual designation field 173 ... height graph display field 174 ... overall slider 175 ... enlargement slider 176 ... upper limit operation knob 177 ... lower limit operation knob 178 ... Upper limit bar 179 ... Lower limit bar

Claims (10)

A placement unit for placing an object to be observed;
A camera unit for capturing an image of the observation object placed on the placement unit;
A lens unit optically coupled with the camera unit aligned with the optical axis;
An imaging condition setting unit for setting imaging conditions when an image is captured by the camera unit;
Z-axis moving means capable of automatically adjusting the relative height between the observation surface of the observation object placed on the placement portion and the lens portion;
An XY axis moving mechanism capable of changing a relative position between the mounting portion and the lens portion;
A height range setting means for setting a height range in which the relative height between the object placed on the placing portion and the lens portion is changed by the Z-axis moving means;
Image synthesizing means for generating a synthesized image obtained by synthesizing a plurality of images taken at different relative distances changed by the Z-axis moving means within the height range set by the height range setting means; ,
Height information extraction means for extracting height information contained in each pixel of the composite image generated by the image composition means;
Display means including a height graph display area for displaying a height graph indicating a distribution of height information extracted by the height information extraction means ;
As the height graph, a projection diagram showing the distribution of the highest height information when the distribution of height information extracted by the height information extraction means is projected in the side surface direction orthogonal to the height direction, or the height A height graph generating means for generating a histogram of height information extracted by the height information extracting means ,
The display means displays the projection or histogram as the height graph in the height graph display area, and overlaps the height graph to set an upper limit of the height range set by the height range setting means. Magnifying observation device that displays . The magnification observation device according to claim 1 ,
The magnified observation apparatus, wherein the height graph display area can display the height graph up to a range exceeding an upper limit of a height range set by the height range setting means. The magnification observation apparatus according to claim 1 or 2 ,
The height range setting means can automatically set the height range as a predetermined range preset based on the depth of focus of the optical lens system based on the information of the optical lens system included in the lens unit. A magnifying observation apparatus characterized by comprising: A magnifying observation apparatus according to claim 1 to 3,
The magnification observation apparatus characterized in that the height range setting means can arbitrarily adjust the height range. The magnification observation device according to any one of claims 1 to 4 ,
The magnifying observation apparatus characterized in that the Z-axis moving means can adjust the relative distance between the mounting portion and the lens portion by moving the lens portion side. The magnification observation apparatus according to any one of claims 1 to 5 ,
The lens part and the camera part together constitute a head part,
The magnifying observation apparatus characterized in that the Z-axis moving means can adjust the relative distance between the mounting portion and the lens portion by moving the head portion. The magnification observation apparatus according to any one of claims 1 to 6 , further comprising:
A magnification observation apparatus comprising illumination means for irradiating an observation target with illumination light. An enlarged image observation method for displaying an image obtained by imaging an observation object,
Move the camera unit for taking an image of the observation object placed on the placement part and the lens part with the same optical axis in the height direction by adjusting the distance from the observation surface of the observation object A step of setting a height range to be performed;
Capturing a plurality of images of different heights with the imaging means while moving the lens unit from one limit position toward the other limit position within the height range; and
Synthesizing in-focus positions from a plurality of captured images to generate a composite image; and
The composite image obtained by the image composition processing is displayed on the display means, and height information contained in each pixel of the composite image is extracted, and a height graph showing the distribution of the height information is orthogonal to the height direction. Generating a projection diagram showing a distribution of the highest height information when the distribution of the extracted height information is projected in a lateral direction, or a histogram of the extracted height information;
Displaying the projection or histogram as the height graph, and displaying the upper limit of the set height range in a height graph display area overlapping the height graph;
A step of prompting resetting of the height range as necessary while comparing the depth composite image displayed on the display means and the height graph;
An enlarged image observation method comprising: An enlarged image observation program for displaying an image obtained by imaging an observation object,
Move the imaging unit for capturing the image of the observation object placed on the placement part and the lens part whose optical axis is aligned with the distance from the observation surface of the observation object in the height direction. A function to set the height range to be
A function of capturing a plurality of images of different heights with the imaging means while moving the lens unit from one limit position toward the other limit position within the height range;
A function of generating a composite image by combining in-focus positions from a plurality of captured images;
A function of displaying the composite image obtained by the image composition processing on the display means;
When the height information included in each pixel of the composite image is extracted and the distribution of the extracted height information is projected in a side surface direction orthogonal to the height direction as a height graph indicating the distribution of height information A projection view showing the distribution of the highest height information, or a function of generating a histogram of the extracted height information;
A function of displaying the projection map or histogram as the height graph and displaying the upper limit of the set height range on the height graph display area so as to overlap the height graph is realized by a computer. Enlarged image observation program. A computer-readable recording medium or a recorded device on which the program according to claim 9 is recorded.