JP6355334B2 - Magnification observation apparatus, magnification image observation method, magnification image observation program, and computer-readable recording medium - Google Patents

Description

  The present invention relates to a digital microscope and a magnification observation device such as a microscope that capture and display an enlarged image, a magnification image observation method, a magnification image observation program, and a computer-readable recording medium.

  An optical microscope using an optical lens, a digital microscope, or the like is used as a magnification observation apparatus that magnifies and displays a sample such as a minute object or a subject such as a workpiece. A digital microscope is a CCD, CMOS, or the like that electrically reads reflected light or transmitted light from an observation object fixed to an observation object fixing unit incident through an optical system for each pixel arranged in a two-dimensional shape. An image received by the image sensor and electrically read is displayed on a display unit such as a display (for example, Patent Document 1).

  Some of these magnifying observation apparatuses have a function of combining images from a plurality of images (composite image mode). For example, an image having a deep focal depth (synthesized depth image) is obtained by synthesizing only the in-focus portion from the focus information among a plurality of images taken while changing the focal position with respect to an image having a shallow focal depth. It has been broken. In addition, a technique for acquiring an image with improved resolution or an image with an expanded dynamic range by so-called super-resolution technology is known. Since such a composite image is generated from a plurality of images, a corresponding processing time is required. For this reason, in order to generate and display a composite image, it is difficult to continue displaying a high-frame-rate real-time image (live video or moving image) on the display unit. Will be displayed.

  While these composite images are displayed, the display content of the display unit is a still image or a state in which the frame rate is extremely slow. For this reason, when it is desired to observe another part, it is necessary to discard these still images and switch the display content of the display unit to a through image mode in which a live video is displayed. That is, the user needs to perform an operation of switching the display on the display unit from a still image to a moving image.

  Further, in a state in which the live image is displayed on the display unit with the frame rate of the image sensor being fast, the user searches for a site to be observed with reference to the display unit and determines the field of view. In a state where the desired part is determined, since the live video is still displayed, it is necessary to execute the synthesis process again at this part. That is, it is necessary to switch to the composite image mode and change the display content on the display unit from a live video to a still image. As described above, since the necessary images are different when performing the synthesis processing necessary for observation and when searching for a desired part, the user is forced to turn on / off the composite image mode and switch the display contents each time. As a result, the operation is extremely complicated.

JP 2012-145722 A JP 2004-170574 A

  The present invention has been made to solve such conventional problems. The main object of the present invention is a magnification observation apparatus, a magnification image observation method, a magnification image observation program, and a computer readable that save labor for switching the display unit when observing a visual field for observation purposes and observing a composite image Is to provide a simple recording medium.

Means for Solving the Problems and Effects of the Invention

In order to achieve the above object, according to the first magnification observation apparatus of the present invention, the imaging target is irradiated with illumination light, the amount of reflected light or transmitted light of the illumination light is detected, and the imaging target is detected. A magnifying observation apparatus capable of capturing an image of the object, a placement unit for placing an observation object, illumination means for irradiating illumination light to the observation object, and illumination illuminated by the illumination means An imaging unit that receives reflected light or transmitted light, and a display mode for displaying an image acquired by the imaging unit, a first display mode for displaying a first display mode image at a first frame rate, a second display mode and capable of displaying by switching a display unit for displaying the second display mode image at a second frame rate higher frame rate than the image processing of the first display mode, the mounting section and the imaging Adjustable relative distance to the means And Z-axis moving mechanism, and a placing part and changeable XY axis moving mechanism relative positions of the imaging means, and scrolling means for changing the field of view of the image displayed on the display unit, Image combining means for generating a combined image obtained by combining a plurality of images taken at different positions and / or relative distances by the Z-axis moving mechanism and / or the XY-axis moving mechanism, and a display mode in the display unit The display on the display unit is automatically changed from the first display mode to the second display mode when the visual field moving operation for moving the visual field is performed by the visual field moving means in the state of the one display mode. and a display mode switching means for switching, said first display mode, it is displayed and to Rukoto of the composite image. With the above configuration, it is detected that the field of view is moved, the display on the display unit is automatically switched to the second display mode, and the image is updated more smoothly at a high frame rate. It is possible to display an image following the change of the image.

  Further, according to the second magnification observation apparatus, the visual field movement operation can be at least one of relative movement or rotation between the placement unit and the imaging unit, and an inclination of the imaging unit.

Furthermore, according to the third magnifying observation apparatus, the view movement operation, it and the moving operation by the Z-axis moving mechanism or XY axis moving mechanism.

Furthermore, according to the fourth magnifying observation apparatus, the field of view moving means further comprises a magnification adjustment means for enlarging or reducing the display magnification of the image displayed on the display unit, the scrolling The operation may further include a magnification changing operation by the magnification adjusting means.

Furthermore, according to the fifth magnification observation apparatus, the composite image to be displayed in the first display mode may be any one of a depth composite image, a 3D composite image, a pixel shifted image, a super-resolution image, and an HDR image. it can.

Furthermore, according to the sixth magnifying observation device, when it is detected that the visual field moving operation by the visual field moving means is performed while the image synthesizing means is performing the predetermined image processing, the image processing is performed. Stopping, the display mode switching means can be configured to switch from the first display mode to the second display mode. With the above configuration, when the field of view is moved at a stage where the image processing is not yet completed, the user can immediately see how the field of view moves by interrupting the image processing and quickly switching the display mode. It can be confirmed in the display mode. As a result, a user-friendly operating environment is realized by avoiding a state in which the user cannot switch the display mode of the display unit until the image processing is completed.

Furthermore, according to the seventh magnification observation apparatus, the first display mode can be a still image display.

Furthermore, according to the eighth magnification observation apparatus, the second display mode can be any one of moving image display, a through image, and a simple composite image.

Furthermore, according to the ninth magnification observation apparatus, the second display mode image can be an autofocus image that is automatically focused. With the above-described configuration, it is possible to automatically switch to the second display mode at the time of autofocus, and to cancel the autofocus and switch to the first display mode when the visual field is moved. As a result, when the movement of the visual field is completed, the focus is automatically adjusted, and when it is desired to observe another visual field, the autofocus image can be automatically canceled, so that an extremely convenient observation environment is realized.

Furthermore, according to the tenth magnification observation apparatus, the magnification observation apparatus can irradiate the imaging target with illumination light, detect the amount of reflected light or transmitted light of the illumination light, and capture an image of the imaging target. A placement unit for placing an object to be observed; illumination means for irradiating the observation object with illumination light; and reflected or transmitted light of the illumination light emitted by the illumination means. As a display mode for displaying the image acquired by the imaging means, the image acquired by the imaging means, a first display mode for displaying a first display mode image at a first frame rate, and image processing in the first display mode A display unit capable of switching and displaying a second display mode for displaying a second display mode image at a second frame rate having a high frame rate, and a field of view of the image displayed on the display unit. Visual field moving means In the state where the display mode in the display unit is the first display mode, the display in the display unit is changed from the first display mode when the visual field moving operation for moving the visual field is performed by the visual field moving unit. A display mode switching means for automatically switching to the second display mode , and a measurement means for performing a predetermined measurement process on a predetermined measurement area on the image and displaying the measurement result on the display unit And the second display mode image can be a measurement image in which the measurement result measured by the measurement unit is displayed. With the above configuration, it is possible to automatically display the measurement result for the displayed image.

Furthermore, according to the eleventh magnification observation apparatus, when the display mode switching unit switches the display on the display unit to the second display mode, the image data displayed on the display unit is stored. Can do. With the above configuration, the image saving operation is automatically executed by switching to the second display mode, and thus the user can reuse the image without being aware of the image saving operation.

Furthermore, according to the twelfth magnification observation apparatus, the magnification observation apparatus can irradiate the imaging target with illumination light, detect the amount of reflected light or transmitted light of the illumination light, and capture an image of the imaging target. A placement unit for placing an object to be observed; illumination means for irradiating the observation object with illumination light; and reflected or transmitted light of the illumination light emitted by the illumination means. As a display mode for displaying the image acquired by the imaging means, the image acquired by the imaging means, a first display mode for displaying a first display mode image at a first frame rate, and image processing in the first display mode A display unit capable of switching and displaying a second display mode for displaying a second display mode image at a second frame rate having a high frame rate, and a field of view of the image displayed on the display unit. Visual field moving means In the state where the display mode in the display unit is the first display mode, the display in the display unit is changed from the first display mode when the visual field moving operation for moving the visual field is performed by the visual field moving unit. A display mode switching unit that automatically switches to the second display mode, a first objective lens unit having a first magnification that can be optically coupled with the imaging unit aligned with an optical axis, and the imaging unit The second objective lens unit having a higher magnification than the first magnification, which can be optically coupled with the optical axis matched, and any one of the first objective lens unit and the second objective lens unit are connected to the imaging unit. Objective lens switching means for switching to a position matched with the optical axis, and the visual field movement operation may include a switching operation of the objective lens.

Furthermore, according to the thirteenth magnification observation apparatus, the magnification observation apparatus can irradiate the imaging target with illumination light, detect the amount of reflected light or transmitted light of the illumination light, and capture an image of the imaging target. A placement unit for placing an object to be observed; illumination means for irradiating the observation object with illumination light; and reflected or transmitted light of the illumination light emitted by the illumination means. As a display mode for displaying the image acquired by the imaging means, the image acquired by the imaging means, a first display mode for displaying a first display mode image at a first frame rate, and image processing in the first display mode A display unit capable of switching and displaying a second display mode for displaying a second display mode image at a second frame rate having a high frame rate, and a field of view of the image displayed on the display unit. Visual field moving means In the state where the display mode in the display unit is the first display mode, the display in the display unit is changed from the first display mode when the visual field moving operation for moving the visual field is performed by the visual field moving unit. , and a display mode switching means for automatically switching to the second display mode, the scrolling unit further head that can be tilted in the vertical plane of the image pickup means relative to the mounting section An inclination mechanism is provided, and the visual field movement operation may further include an inclination operation of the imaging means by the head inclination mechanism.

Furthermore, according to the fourteenth enlarged image observation method, the illumination target is irradiated with illumination light onto the imaging target placed on the placement unit, and the amount of light received by the reflected or transmitted light of the illumination light is measured by the imaging means. An enlarged image observation method for detecting and displaying an image of an imaging target, illuminating the observation target with illumination light or transmitted light, capturing an image with an imaging unit, and performing predetermined image processing on the display unit And displaying the first display mode image generated at the first frame rate, and displaying the first display mode image on the display unit, the relative distance between the placement unit and the imaging unit is set. A visual field changing operation for changing the visual field of the image acquired by the imaging means is detected by adjusting the Z-axis moving mechanism and / or changing the relative position between the placement unit and the imaging means by the XY axis moving mechanism. And the detection of the visual field change operation The display on the display unit is automatically displayed so that the second display mode image is displayed from the first display mode image at a second frame rate that is higher than the image processing in the first display mode. The first display mode is a composite image display in which a plurality of images taken at different positions and / or relative distances by the Z-axis movement mechanism and / or the XY-axis movement mechanism are combined. be able to. As a result, it is detected that the field of view is moved, the display on the display unit is automatically switched to the second display mode, and a smoother image update is performed at a high frame rate. It is possible to display an image following the change in the image.

Furthermore, according to the 15 magnified image observation program, placing the illumination light irradiated by the placed imaged object to the illumination means portion, in the image pickup means received light amount of the reflected light or transmitted light of the illumination light An enlarged image observation program for detecting and displaying an image of an imaging target, irradiating the observation target with illumination light or transmitted light, capturing an image with an imaging unit, and performing predetermined image processing on the display unit In the state in which the first display mode image generated by performing the display and the first display mode image displayed on the display unit, the relative distance between the mounting unit and the imaging unit is determined by the Z-axis moving mechanism. A function of detecting and changing a visual field changing operation for changing a visual field of an image acquired by the imaging unit by adjusting and / or changing a relative position between the placement unit and the imaging unit by an XY axis moving mechanism ; The display unit is triggered by detection of the change operation. The display of the display unit is automatically switched so that the second display mode image is displayed from the first display mode image at a second frame rate higher than the image processing in the first display mode. The first display mode is a composite image display in which a plurality of images taken at different positions and / or relative distances by the Z-axis movement mechanism and / or the XY-axis movement mechanism are combined. It can be Rukoto. As a result, it is detected that the field of view is moved, the display on the display unit is automatically switched to the second display mode, and a smoother image update is performed at a high frame rate. It is possible to display an image following the change in the image.

Furthermore, a recording medium or recording device readable by the sixteenth computer stores the above program. CD-ROM, CD-R, CD-RW, flexible disk, magnetic tape, MO, DVD-ROM, DVD-RAM, DVD-R, DVD + R, DVD-RW, DVD + RW, Blu-ray (registered) Trademark), HD DVD (AOD), and other magnetic disks, optical disks, magneto-optical disks, semiconductor memories, and other media that can store programs. The program includes a program distributed in a download manner through a network line such as the Internet, in addition to a program stored and distributed in the recording medium. Further, the recording medium includes a device capable of recording the program, for example, a general purpose or dedicated device in which the program is implemented in a state where the program can be executed in the form of software, firmware, or the like. Furthermore, each process and function included in the program may be executed by computer-executable program software, or each part of the process or hardware may be executed by hardware such as a predetermined gate array (FPGA, ASIC), or program software. And a partial hardware module that realizes a part of hardware elements may be mixed.

FIG. 1 is an external view of a magnification observation apparatus according to an embodiment of the present invention. FIG. 2 is a block diagram of the magnification observation apparatus according to the embodiment of the present invention. FIG. 3 is a schematic view showing the illumination unit. FIG. 4 is an image diagram showing a user interface screen of the illumination light switching screen of the enlarged image observation program. FIG. 5 is an image diagram showing a user interface screen of the brightness setting screen of the enlarged image observation program. FIG. 6 is a schematic diagram showing a magnification observation apparatus according to a modification. FIG. 7 is a schematic view showing a magnifying observation apparatus according to still another modification. FIG. 8 is a sectional view of the head portion. FIG. 9 is a perspective view showing an external configuration of an imaging system of the magnification observation apparatus. FIG. 10 is a schematic diagram showing how the head portion is swung. FIG. 11 is a perspective view showing a magnifying observation apparatus including an objective lens switching unit. FIG. 12 is a plan view showing the Bayer array of the image sensor. FIG. 13 is a plan view showing a state in which RGB data is acquired at each pixel by shifting one pixel at a time. FIG. 14 is a plan view showing a state in which RGB data is acquired in units of sub-pixels by shifting by 1/2 pixel from FIG. It is an image figure which shows the user interface screen of the white balance setting screen of an enlarged image observation program. It is an image figure which shows the user interface screen of the enlarged image observation program which displayed the list display area. It is an image figure which shows the user interface screen of the image setting screen of an enlarged image observation program. 18A and 18B are low gradation images having different exposure times, and FIG. 18C is an image diagram showing an HDR image obtained by combining FIGS. 18A and 18B. FIG. 19A to FIG. 19D are schematic diagrams showing how a depth composite image is combined. FIG. 20 is an image diagram showing a three-dimensional image. FIG. 21 is an image diagram showing a user interface screen of the measurement processing setting screen of the enlarged image observation program. 22A is an image before depth composition, FIG. 22B is a state in which the depth composition image is displayed in the first display mode, FIG. 22C is a second display mode image, and FIG. 22D is an image diagram showing the first display mode image. FIG. 23 is a flowchart showing a procedure for switching the display mode. 24A to 24C are image diagrams showing a state in which automatic measurement processing is performed. FIG. 25 is an image diagram showing a composite image that is captured while the observation object is stationary. FIG. 26 is an image diagram showing a composite image captured while moving the XY stage. FIG. 27 is a flowchart showing a display mode switching procedure including interruption processing. FIG. 28 is an image diagram showing a live video in the second display mode. FIG. 29 is an image diagram showing a composite image in the first display mode.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the embodiment shown below exemplifies a magnification observation apparatus, a magnification image observation method, a magnification image observation program, and a computer-readable recording medium for embodying the technical idea of the present invention, The present invention does not specify a magnification observation apparatus, a magnification image observation method, a magnification image observation program, and a computer-readable recording medium as follows. Further, the present specification by no means specifies the members shown in the claims to the members of the embodiments. In particular, the dimensions, materials, shapes, relative arrangements, and the like of the component parts described in the embodiments are not intended to limit the scope of the present invention unless otherwise specified, and are merely explanations. It is just an example. Note that the size, positional relationship, and the like of the members shown in each drawing may be exaggerated for clarity of explanation. Furthermore, in the following description, the same name and symbol indicate the same or the same members, and detailed description thereof will be omitted as appropriate. Furthermore, each element constituting the present invention may be configured such that a plurality of elements are constituted by the same member and the plurality of elements are shared by one member, and conversely, the function of one member is constituted by a plurality of members. It can also be realized by sharing.

  The connection between the magnification observation apparatus used in the embodiment of the present invention and the computer, printer, external storage device and other peripheral devices for operation, control, display, and other processing connected thereto is, for example, IEEE 1394, RS-232x, RS-422, serial connection such as USB, parallel connection, or communication via network such as 10BASE-T, 100BASE-TX, 1000BASE-T, etc. Do. The connection is not limited to a physical connection using a wire, but IEEE802. Wireless connection using radio waves such as wireless LAN such as x, Bluetooth (registered trademark), infrared rays, optical communication, or the like may be used. Furthermore, a memory card, a magnetic disk, an optical disk, a magneto-optical disk, a semiconductor memory, or the like can be used as a recording medium for exchanging data or storing settings. In this specification, the magnification observation apparatus and the magnification image observation method are used to include not only the magnification observation apparatus body but also a magnification observation system in which peripheral devices such as a computer and an external storage device are combined.

  Further, in this specification, the magnification observation apparatus is not limited to a system that performs magnification observation, and an apparatus or method that performs input / output, display, calculation, communication, and other processes related to imaging in hardware. An apparatus and method for realizing processing by software are also included in the scope of the present invention. For example, a general-purpose circuit or computer that incorporates software, programs, plug-ins, objects, libraries, applets, compilers, modules, macros that operate on specific programs, etc., and enables imaging itself or related processing The system also corresponds to the magnification observation apparatus of the present invention. In this specification, the computer includes a workstation, a terminal, and other electronic devices in addition to a general-purpose or dedicated electronic computer. Further, in the present specification, the program is not limited to a program that is used alone, an aspect that functions as a part of a specific computer program, software, service, etc., an aspect that is called and functions when necessary, an environment such as an OS, etc. It can also be used as a mode provided as a service, a mode that operates resident in the environment, a mode that operates in the background, and other support programs.

  Hereinafter, the magnification observation apparatus 100 according to the embodiment of the present invention will be described with reference to FIGS. The magnification observation apparatus 100 is roughly divided into an imaging system 1 and a control system 2 as shown in FIG. The imaging system 1 includes an illumination unit 60 for illuminating a sample or a workpiece or other subject that is the observation object S, and a head unit 4 that images the observation object S illuminated by the illumination unit 60. The head unit 4 includes a camera unit 10 including an image sensor 12 and a microscope lens unit 20 that is detachably attached to the tip of the camera unit 10. The microscope lens unit 20 constitutes an imaging optical system (lens optical system) composed of a plurality of optical lenses. Here, the microscope lens unit 20 includes an objective lens unit 25. The head unit 4 functions as an imaging unit that receives reflected light or transmitted light of illumination light.

  In addition, the imaging system 1 serves as a placement unit 30 on which the observation object S is placed, and a first focus adjustment unit that adjusts the focus by changing the relative distance between the placement unit 30 and the head unit 4 in the optical axis direction. And an upper stage elevator 16 for driving the upper Z stage and the upper Z stage. On the other hand, the head unit 4 also includes an upper Z stage as a second focus adjustment unit that adjusts the focal point by changing the relative distance from the mounting unit in the optical axis direction. The observation object S placed on the placement unit 30 is incident via the imaging optical system 11 and reflected from the observation object S or irradiated from the bottom surface side of the observation object S. The transmitted light is electrically read by the image sensor 12 of the camera unit 10.

  Further, the control system 2 includes a main body unit 50 having a display unit 52 that displays an enlarged image captured by the camera unit 10. The camera unit 10 is connected to the main body unit 50 via the cable unit 3. In the example of FIG. 1, the display unit 52 is provided integrally with the main body unit 50, but the display unit may be a separate member from the main body unit. The cable unit 3 transmits illumination light from the main body unit 50 to the head unit 4 side in addition to an electrical cable for transmitting image information obtained by the imaging element of the camera unit 10 to the carrier unit 50 side. An optical cable 3b is provided. The cable portion 3 can be integrated with the electrical cable and the optical cable 3b, or these can be provided individually.

  Furthermore, the placement unit 30 can be moved in a plane in addition to the movement in the height direction, that is, the Z direction by the lower stage elevator 35. Specifically, an XY stage that can move in the X-axis direction and the Y-axis direction is provided. In addition, a rotatable stage (θ stage) that rotates the placement unit 30 may be provided.

  A block diagram of the main body 50 is shown in FIG. As shown in this figure, the main body 50 indicates focal length information related to the relative distance between the stage 30 and the imaging optical system 11 in the optical axis direction when the focal point is adjusted by the lower stage elevator 35, substantially perpendicular to the optical axis direction. A storage unit 53, a display unit 52 for displaying an image read by the image sensor 12, a head unit 4 and a lower stage elevator, as a focal length information storage unit for storing together with the two-dimensional position information of the observation object S in the plane 35 and an interface 54 for communicating data. The magnification observation apparatus 100 captures an observation image using the image sensor 12 that electrically reads reflected light or transmitted light from the observation object S fixed to the mounting unit 30 incident via the imaging optical system 11. And displayed on the display unit 52.

The storage unit 53 is a lens identification information storage unit that stores lens identification information and lens aberration information, or a wavelength component storage unit that stores a wavelength component with less aberration in each lens unit in association with aberration information of the lens unit. Also works. The storage unit 53 is configured by a hard disk, a semiconductor memory, or the like. An individual storage unit may be provided for each database.
(Lens identification information)

  The lens identification information includes information such as the lens type, the position of the focal length, and the length of the lens barrel. As described above, since the imaging system 1 and the control system 2 are connected via the cable unit 3, the control system 2 can perform appropriate control by determining the type of lens currently mounted. For example, by grasping the physical length of the microscope lens unit 20, when the microscope lens unit 20 is lowered on the stage on the Z, the lower limit movement that can be lowered so as not to contact the observation object S or the mounting unit 30. You can keep track of the distance and limit it so that it doesn't fall any further.

  In addition to directly recording the information of the microscope lens unit as the lens type information, only the identification information of the microscope lens unit, for example, the model, is recorded, and the detailed information of the microscope lens unit corresponding to the model is stored in the main body unit 50 in advance. It can also be stored in the section 53 or the like as a lookup table associated with the model. As a result, when the main body unit 50 acquires the model that is the lens identification information through the camera unit, the main unit 50 acquires the detailed information corresponding to the model with reference to the storage unit 53, and stores the detailed information in the microscope lens unit based on the acquired information. It is possible to perform matching control. With this method, it is possible to grasp necessary information on the main body unit 50 side while reducing the amount of information to be held on the microscope lens unit side.

  Further, the magnifying observation apparatus 100 includes an imaging condition for setting conditions for capturing an image with the camera unit 10, an operation unit 55 for performing various other necessary settings and operations, and a set area. A control unit 51 that calculates the height in the optical axis direction of the observation object S corresponding to the set area based on the focal length information stored in the storage unit 53 relating to a part or all of the corresponding observation object S. Is provided. The magnification observation apparatus 100 can calculate an average height (depth) in the optical axis direction of the observation object S corresponding to a region designated by using the imaging element 12.

  The control unit 51 is configured to simultaneously display on the display unit 52 a plurality of observation images picked up from the optical field shift control unit 81 that operates the optical path shift unit 14 and the same field of view of the observation object S using a plurality of illumination filters. An image selection unit 82 that can select one, an imaging condition setting unit 83 that sets an image observation condition including the type of illumination filter used for imaging the observation image selected by the image selection unit 82, as an imaging condition, Image processing means for performing predetermined image processing, automatic synthesis means 84 for automatically performing an operation of synthesizing the observation images by the image synthesis means 85 to obtain a color high-resolution image observation image, a plurality of interchangeable different specifications Based on the aberration information of the microscope lens unit currently mounted on the camera unit among the microscope lens unit, the influence of the aberration of this microscope lens unit is relatively small among a plurality of wavelength components. Wavelength selection means 86 capable of selecting a long component, illumination light selection means 87 capable of selectively switching to any one of a plurality of different wavelength bands included in the wavelength band of light emitted from the illumination light source 65, and display unit Magnification adjustment means 89a for enlarging or reducing the display magnification of the image displayed on 52, display position changing means 89b for moving the display position of the image displayed on display section 52, and a plurality of different provisional imaging conditions When the magnification adjustment unit 89a adjusts the magnification of one simple image in a state where a plurality of simple images are displayed as a list in the list display area, the magnification of one simple image is also obtained. In addition to being adjusted in conjunction with this, when the display position changing means 89b changes the display position of one simple image, the display position of another simple image is also changed in conjunction with this. Functions such as an interlock adjustment unit 89d that adjusts the display magnification and display position of each simple image, and a display mode switching unit 89e that automatically switches the display on the display unit 52 from the second display mode to the first display mode are realized. . The image processing unit functions as an image combining unit 85 that combines, for example, at least two observation images obtained by capturing the same observation object S using different illumination filters. The control unit 51 can be composed of a gate array such as an ASIC or FPGA.

The operation unit 55 is connected to the main body unit 50 or the computer in a wired or wireless manner, or is fixed to the computer. Examples of the general operation unit 55 include various pointing devices such as a mouse, keyboard, slide pad, track point, tablet, joystick, console, jog dial, digitizer, light pen, numeric keypad, touch pad, and accu point. In addition to the operation of the operation program for magnification observation, these operation units 55 can be used for operations of the magnification observation apparatus 100 itself and its peripheral devices. Furthermore, using a touch screen or touch panel on the display itself that displays the interface screen, the user can directly input or operate the screen by hand, or use voice input or other existing input means, Or these can also be used together. In the example of FIG. 1, the operation unit 55 is configured by a pointing device such as a mouse.
(Lighting unit 60)

  The illumination unit 60 generates illumination light that illuminates the observation object S imaged on the image sensor 12. The illumination light source of the illumination unit 60 is built in the main body unit 50, and illumination light is transmitted to the illumination unit 60 of the head unit 4 through the optical cable 3 b. Note that the illumination unit 60 may be of any type that is built into the head unit 4 or a separate unit that is detachable from the head unit 4. As the illumination method of illumination light, epi-illumination, transmission illumination, or the like can be used as appropriate. The epi-illumination is an illumination method in which illumination light is dropped from above the observation object, and includes ring illumination, coaxial epi-illumination, and the like. The illumination unit 60 shown in FIG. 1 includes a coaxial incident illumination unit 62 (see FIG. 3) for irradiating the observation object S with coaxial incident light, and a ring illumination for irradiating ring-shaped illumination light from a ring-shaped light source. A unit 63 and a transmission illumination unit 64 for irradiating transmitted light are provided. These lights are connected to the main body 50 via the optical cable 3b. The main body 50 includes a connector for connecting the optical cable 3b, and incorporates an illumination light source 65 for sending light to the optical cable 3b via the connector (see FIG. 3). Further, the ring illumination unit 63 can switch between all-around illumination and side illumination. In order to realize this, there are a configuration in which a plurality of LEDs are arranged in a ring shape as the ring illumination unit 63, a configuration in which some LEDs are turned ON / OFF, a configuration in which a turret mask that cuts a part of illumination light is arranged, etc. Available. The illumination light control unit 66 performs lighting control and switching of the illumination light. The illumination light control unit 66 includes an illumination light switching unit 61 for switching illumination light.

Details of the illumination unit 60 are shown in the schematic cross-sectional view of FIG. The illumination unit 60 includes a coaxial incident illumination unit 62 and a ring illumination unit 63. The coaxial epi-illumination is a method of irradiating from the same direction as the imaging surface of the camera, and is also called bright field illumination. The coaxial epi-illumination is effective when looking at unevenness of a mirror workpiece, such as a silicon wafer or an LCD panel. Lighting control of the illumination unit 60 is performed by the illumination light control unit 66. The illumination light control unit 66 includes an illumination light switching unit 61. The illumination switching unit 61 can switch between the coaxial incident illumination unit 62 and the ring illumination unit 63. The illumination switching unit 61 can also be configured to mix the coaxial epi-illumination unit 62 and the ring illumination unit 63 at different ratios.
(Enlarged image observation program)

  An example of a user interface screen constituting one aspect of the illumination light switching means is shown in FIG. FIG. 4 is a user interface screen of a magnified image observation program for operating the magnification observation apparatus 100. Such an operation screen can be displayed on the display unit 52 of the magnifying observation apparatus 100 or an externally connected computer monitor. The user performs various settings and operations of the magnification observation apparatus 100 from the displayed screen. The enlarged image observation program is incorporated in the main body unit 50.

In the examples of user interface screens of these programs, it goes without saying that the layout, shape, display method, size, color scheme, pattern, etc. of each input field and button can be changed as appropriate. By changing the design, the layout can be made easier to display, easier to evaluate and judge, and easy to operate. For example, the detailed setting screen can be displayed as a separate window, or a plurality of screens can be displayed within the same display screen. On the user interface screens of these programs, the operation unit 55 is used to specify ON / OFF operations, numerical values, command inputs, and the like for virtually provided buttons and input fields. Here, the imaging conditions and the like are set with an input device connected to a computer in which the program is incorporated. In this specification, “pressing” includes not only physically touching and operating buttons, but also clicking or selecting with an input unit and pseudo-pressing. Input / output devices constituting the operation unit and the like are connected to a computer by wire or wirelessly, or are fixed to the computer or the like. Examples of general input units include various pointing devices such as a mouse, keyboard, slide pad, track point, tablet, joystick, console, jog dial, digitizer, light pen, numeric keypad, touch pad, and accu point. These input / output devices are not limited to program operations, and can be used for hardware operations such as the magnification observation apparatus 100. Furthermore, a touch screen or a touch panel is used for the display itself of the display unit 52 that displays the interface screen, so that the user can directly input or operate the screen by hand, or voice input or other existing input. Means can be used, or these can be used in combination.
(Lighting switching screen 110)

The user interface screen of the enlarged image observation program shown in FIG. 4 shows an illumination switching screen 110 as one form of illumination condition setting means for setting illumination conditions for the illumination unit. In the illumination switching screen 110, a display area 111 is provided on the left side, and an operation area 112 is provided on the right side. The operation area 112 displays a menu in the form of a ribbon on the left side, and the contents that can be operated on the right side are switched according to the selected ribbon. Here, the setting contents can be further switched by switching a plurality of tabs. In the example of FIG. 4, the “brightness / lighting” ribbon 113 in the operation area 112 is selected, and the “lighting” tab 114 is further selected. Then, the direction and brightness of each illumination light are set in the “epi-illumination” setting field 115 provided in the upper stage of the “illumination” tab 114 and the “transmission illumination” setting field 116 provided in the lower stage. For example, when the “ON” button 117 in the “epi-illumination” setting field 115 is pressed, the ring illumination is turned on, and the brightness is designated from 0 to 255. The brightness is specified by a numerical value or a slider. The image is bright when the light intensity value is large, and dark when it is small. When the “ring illumination” button 118 is pressed, the entire circumference of the annular ring illumination is turned on. When the “ring irradiance” button 119 is pressed, only a part of the annular illumination is turned on. By irradiating illumination light from an oblique direction, for example, it is possible to observe with emphasis on scratches and irregularities on the surface of the observation object. On the other hand, in the “transmission illumination” setting field 116, similarly, when the “ON” button 120 is pressed, the transmission illumination is turned on, and the brightness is designated by a numerical value or the slider 121. In this example, ring illumination is turned on and transmitted illumination is turned off. However, the balance can be adjusted by turning on both illuminations according to the purpose of observation.
(Brightness setting screen 122)

When the “illumination” tab 114 is selected in the operation area 112 from the illumination switching screen 110 in FIG. 4, the screen is switched to the brightness setting screen 122 in FIG. 5. On this screen, the shutter speed (exposure time) and gain at the time of imaging by the camera unit can be adjusted as the brightness of the image. When the shutter speed is slow (exposure time is long), the image is bright, and when it is fast (short exposure time), the image is dark. Here, the shutter speed can be selected from radio, auto, manual, supercharge, or preset. When the shutter gain value is increased, the image becomes brighter, and when the shutter gain value is decreased, the image becomes darker. Here, auto, manual, or preset can be selected as the gain.
(Illumination light source 65)

  As the illumination light source 65, a semiconductor light emitting element such as a light emitting diode (LED) or a semiconductor laser (Laser Diode: LD) can be used. For example, as shown in FIG. 3, LEDs 65r, 65g, and 65b having wavelength ranges of R, G, and B are prepared, and illumination light is switched to red, green, and blue by turning on each LED, or white color is obtained by mixing these colors. Light can be obtained. Moreover, white LED can also be prepared separately. In particular, since the LED is excellent in ON / OFF responsiveness, there is an advantage that the measurement throughput can be improved. It also has features such as long life, low power consumption, low heat generation, and resistance to mechanical shock. Or it can also be set as the light source using wavelength conversion members, such as the fluorescent substance excited by the ultraviolet-ray of visible light, or visible light. Thereby, even one LED can emit white light. Further, an LED capable of emitting ultraviolet light or infrared light in addition to visible light can be used as a light source. For example, observation with infrared light is useful for analysis of defective products, tissue distribution of living tissue, and the like. The illumination light source is not limited to the semiconductor light emitting element, and a halogen lamp, a xenon lamp, an HID lamp, or the like may be used as a white light source that emits white light in a wide wavelength range. Moreover, it is good also as a light source which can irradiate not only visible light but infrared light. In particular, a halogen lamp is preferable because the wavelength range of the emission wavelength is wide. In addition to using a single light source, a plurality of light sources can be provided, and these can be turned on simultaneously to make mixed color light illumination light, or can be switched to illuminate.

  The illumination light source is not limited to the configuration built in the main body. For example, it can also be provided on the placement unit or the microscope lens unit. As a modification, the magnification observation apparatus 400 illustrated in FIG. 6 includes a transmission illumination light source 65B as an illumination light source on the placement unit 30 side. 7 includes an illumination light source 65C for coaxial epi-illumination and ring illumination on the microscope lens unit 20 side. With such a configuration, there is an advantage that it is not necessary to transmit illumination light from the main body side to the head side with an optical fiber or the like, and the configuration can be simplified by reducing the number of cables drawn to the outside. Also, inside the head portion side, the light from the illumination light source is branched by an optical fiber, and a semiconductor light emitting element such as a high-intensity LED may be provided for direct illumination. In particular, an LED is small in size and generates a small amount of heat as compared with a conventional halogen lamp or the like, has a long life, and can be made maintenance-free.

  In this way, by preparing an illumination light source that can emit red, green, and blue light, a filter such as a conventional white light source can be eliminated, and mechanical operation such as filter switching is not required, and only an electrical signal is generated. Stable and high-speed illumination light switching is realized. Further, since LEDs have a long life, maintenance work such as replacement of a light bulb can be saved. Furthermore, since the semiconductor light emitting element is smaller than the bulb, there is an advantage that a plurality of types of light emitting elements can be arranged in a space-saving manner. Furthermore, for example, by providing an infrared light emitting element or an ultraviolet light emitting element, it is possible to easily switch the illumination light to not only visible light but also infrared light, ultraviolet light, and the like. In addition, the cooling fan can be reduced in size or omitted with low power consumption, and excellent in quietness. In this way, an illumination light source including a plurality of light emitting elements having different wavelength ranges can be controlled by the illumination light selecting means 87, and a light emitting element having a desired wavelength range can be selected and turned on to emit illumination light.

In addition to the three primary colors RGB, these complementary colors (for example, cyan, magenta, and yellow) can be used as appropriate for the illumination light source and illumination filter means. In addition, a filter that transmits ultraviolet light or infrared light can be used as a filter.
(Coaxial epi-illumination observation)

  A sectional view of the head portion 4 is shown in FIG. The head unit 4 includes a coaxial epi-illumination unit 62 for irradiating the observation target with the coaxial epi-illumination light, and a camera unit 10 having an imaging device that receives reflected light of the illumination light irradiated by the coaxial epi-illumination unit 62. The objective lens unit 25 optically coupled to the camera unit 10 with the optical axis aligned, and the phase delay element 90 disposed with the optical axis aligned with the objective lens unit 25 are provided. The illumination unit 60 includes a coaxial incident illumination unit 62 and a ring illumination unit 63. The head unit 4 includes a camera unit 10, a polarization beam splitter 28, and an objective lens unit 25. These are optically coupled in a state where the optical axes AX coincide with each other, and constitute an imaging optical system. In the objective lens unit 25, a phase delay element 90 is disposed on the optical axis AX. On the other hand, the ring illumination light is directly applied to the observation object S without being introduced into the imaging optical system. The phase delay element 90 may be a λ / 4 plate, a λ plate, a (1/2) λ plate, a (3/4) λ plate, a (5/8) λ plate, etc. Four plates are used. Note that the λ / 4 plate is preferably arranged to be inclined with respect to the optical axis AX so that reflection does not occur at this boundary surface. (Support base 40)

An example of the external configuration of the imaging system 1 of the magnification observation apparatus 100 is shown in FIG. The imaging system 1 shown in this figure includes a placement unit 30 on which the observation object S is placed and a support base 40 that supports the head unit 4. The support base 40 includes a stage fixing mechanism 42 that holds the mounting unit 30 in a horizontal plane or a state in which the mounting unit 30 can move up and down, and a head tilting mechanism 44 that tilts the head unit 4 while holding the mounting unit 30. . The stage fixing mechanism 42 and the head tilting mechanism 44 are fixed to the base portion 41. The base portion 41 is formed in a flat plate shape, so that the support base 40 can be stably provided.
(Stage fixing mechanism 42)

The stage fixing mechanism 42 fixes the mounting unit 30 to the support base 40 through one or more moving mechanisms that can move the mounting unit 30 in the horizontal plane (XY axis direction) and in the vertical direction (Z axis direction). ing. Specifically, here, as a moving mechanism, a Z-axis direction moving mechanism (first focus adjustment unit) for moving the mounting unit 30 in the Z-axis direction, and a mechanism for moving the mounting unit 30 in the XY-axis direction. An XY axis movement mechanism and a rotation movement mechanism for rotating the placement unit 30 in the θ direction can be used. In the example shown in FIG. 9, the lower stage elevator 35 is realized by the slider 32 fixed to the base 41 so as to be movable up and down as the Z-axis moving mechanism, and further, the intermediate stage fixed on the slider 32 as the rotational moving mechanism. The mounting portion 30 can be rotated by the connecting portion 34, and the mounting portion 30 can be moved in the XY-axis direction by an XY stage fixed on the intermediate connecting portion 34 as an XY axis moving mechanism. These XY axis movement mechanism, Z axis movement mechanism, and rotation movement mechanism function as visual field moving means for changing the visual field of the image displayed on the display unit 52.
(Head tilt mechanism 44)

  On the other hand, the head tilting mechanism 44 tilts the head unit 4 with respect to the mounting unit 30, as shown in the perspective view of FIG. A moving part 46 and a head fixing part 48 for fixing the head part 4 to the swinging part 46 are provided. The oscillating portion 46 includes an oscillating column 47 provided in a posture protruding upward from the base portion 41, and an oscillating shaft 45. The head fixing portion 48 includes a head arm 49 that fixes the head portion 4 to the swing column 47 in a substantially parallel posture. The swing column 47 is provided with a swing shaft 45 at the lower end, and is supported by the base portion 41 so as to turn around the swing shaft 45. The head arm 49 is fixed by clamping the swing column 47 at an intermediate position from the upper portion of the swing column 47 so as to hold the head unit 4 above the placement unit 30. A fixing mechanism for fixing the head unit 4 is provided at the tip of the head arm 49. Here, the fixing mechanism is formed in a ring shape surrounding the outer periphery of the head portion 4, and the head portion 4 is inserted into the center of the ring shape, and is fixed by being screwed with a set screw from a plurality of surrounding positions.

  On the upper surface of the base portion 41, a block 41a that extends downward is fixed, and a bearing portion 41b is formed above the block 41a. The bearing portion 41b includes a pair of guide portions 41c that are fixed apart from each other, and the pair of guide portions 41c are formed in a concave shape in a side view. Each guide portion 41c opens a circular hole formed with an axis parallel to the Y-axis direction as a central axis. A rocking shaft 45 is fitted in these holes along the Y-axis direction. In this example, a scale is provided on the swing shaft 45 so that the angle at which the head portion 4 is swung can be seen with the scale.

  By tilting the head unit 4 with respect to the mounting unit 30 by the head tilting mechanism 44, tilt observation in which the observation object S is observed from an oblique direction can be performed. In particular, the head unit 4 can be observed from either the left or right direction by swinging the head unit 4 from the vertical position and swinging the pivot shaft 45 as the rotation axis, and the observation freedom from different viewpoints can be increased. It becomes possible. In such tilted observation, eucentric observation is required in which the visual field does not change even when the head unit 4 is tilted. For this reason, in tilt observation, it is desirable to adjust the height of the mounting portion 30 in advance so that the observation surface of the observation object S coincides with the center of the swing shaft 45.

Further, as shown in the perspective view of FIG. 11, the magnifying observation apparatus 200 has the first objective lens portion 25 </ b> A and the second objective lens portion 25 </ b> B provided at the tip of the head portion 4 on the surface on which the head portion 4 is swung. An objective lens switching means 26 is provided for switching by swinging in a vertical plane. Thus, when the objective lens unit 25 is switched in a state where the head unit 4 is tilted, the objective lens unit 25 is switched when the objective lens unit 25 is tilted by making the swing surface of the head unit 4 orthogonal to the swing surface for switching the objective lens unit 25. A situation in which the tip of the lens comes into contact with the observation object can be avoided. At this time, the objective lens portions are designed in advance so that the lengths are equal.
(Camera unit 10)

The head unit 4 includes a camera unit 10 having an image sensor and a microscope lens unit 20 that is detachably attached to the tip of the camera unit 10. The camera unit 10 includes an imaging element 12 that electrically reads reflected light incident through the imaging optical system 11 from the observation object S illuminated by the illumination unit 60. In this example, the imaging device 12 uses a CMOS, but other light receiving devices such as a CCD can also be used. In addition to the objective lens unit 25, the microscope lens unit 20 includes a lens body 21 and a mount unit 22 that is attached to an end surface of the lens body 21 and forms a lens connection surface. The mount portion 22 is electrically connected to the microscope lens portion 20 via a flexible lens side cable 24. Thereby, the lens identification information of the microscope lens unit 20 is sent to the lens side connection terminal of the mount unit 20 via the lens side cable 24.
(Optical path shifting means 14)

Furthermore, the magnification observation apparatus 100 can also include an optical path shift unit 14 for relatively shifting the detection position of the image sensor 12 and an optical path shift control unit 81 for operating the optical path shift unit 14. Specifically, for three or more target pixel groups, the pixel interval of the image sensor so that the light reception signal makes a round at the position of each pixel of the image sensor constituting the target pixel group and the received light amount is detected at each position. The detection position of one of the image sensors constituting the target pixel group is relatively shifted by the optical path shift means 14 by the amount of displacement corresponding to.
(Optical path shift control means 81)

  On the other hand, when the sample S is irradiated with illumination light of a predetermined wavelength via the illumination filter selected by the filter selection unit 88, the optical path shift control unit 81 is an image sensor corresponding to the wavelength region among the plurality of image sensors. The optical path shift means 14 is operated so as to detect the amount of received light. As a result, the selection of the illumination filter and the image sensor and the pixel shift can be linked, and the user can perform high-speed switching without cumbersome switching or illumination light and the combination of the illumination filter and the image sensor corresponding to the illumination light. A resolution observation image can be easily acquired.

  In the example of FIG. 2, the optical path shift means 14 is provided in the camera unit 10, and a higher resolution than that of the CMOS can be obtained by pixel shifting. For example, as described in Patent Document 2 for the single plate type and Patent Document 3 for the three-plate type, the pixel shift (pixel shift) is performed by using a piezoelectric element or the like so that adjacent elements and elements (pixels) A pixel shift that physically shifts the element in the space between the two images, for example, by synthesizing an image captured by shifting the sample S by half the pixel pitch and an image before the shift, to achieve high resolution. is there. In addition, the color reproducibility is also improved by acquiring RGB data at each pixel by shifting by one pixel pitch. As typical image shifting mechanisms, there are an image sensor driving method in which the image sensor 12 is moved by an actuator AC, an LPF tilt method in which the LPF is tilted, a lens moving method in which the lens is moved, and the like.

When the pixel shifting function is executed, as shown in FIG. 12, in the state where the image pickup elements are arranged for each pixel in a matrix with a Bayer array, the optical path shifting means 14 has a 2 × 2 adjacent area as shown in FIG. It can be switched to shift to the pixel position. As a result, the image pickup devices having different light receiving characteristics arranged in a Bayer array are shifted by the optical path shift means 14 so as to make a round for adjacent 2 × 2 pixels of interest, and light reception signals are transmitted at all 2 × 2 pixel positions. It is possible to obtain a high-resolution observation image. Note that the shift amount by which the image sensor is relatively shifted by the optical path shift means 14 is moved four times counterclockwise four times in total in the example of FIG. 13 as the amount of displacement corresponding to the pixel interval of the image sensor. However, it is also possible to move only two adjacent pixels such as up and down, left and right, or 3 pixels. Further, the movement amount is not limited to one pixel of the image sensor, and may be set to 1/2 pixel or 1/3 pixel as shown in FIG. By adjusting the amount of movement according to the peak position and range of the light receiving sensitivity of each pixel constituting the image sensor, the amount of received light can be improved even with a moving amount of one pixel or less, so that high resolution can be achieved. Thus, the amount of displacement corresponding to the pixel interval of the image sensor is not limited to the pixel pitch or an integer multiple thereof, and includes fractional multiples such as 1/2 pixel and 1/3 pixel.
(Display unit 52)

  Further, such image data and setting contents held in the storage unit 53 can be displayed on the display unit 52. The display unit 52 can use a monitor such as a CRT, a liquid crystal display, or an organic EL. In addition, an operation unit 55 is connected to the control unit 51 for a user to perform various operations. The operation unit 55 is an input device such as a console or a mouse. In this example as well, the display unit and the operation unit can be integrated with the main body unit 50 or can be external members. Furthermore, if a display part is comprised with a touch panel, a display part and an operation part can also be comprised integrally.

  Here, the operation of the lower stage elevator 35 will be described. The main body unit 50 inputs control data related to the control of the stepping motor 37 to the motor control circuit 36, whereby the optical axis direction of the mounting unit 30 and the head unit 4 having the imaging optical system 11 and the imaging element 12. The relative distance at, here, the height in the z direction is changed. Specifically, the main body 50 controls the rotation of the stepping motor 37 by inputting control data necessary for controlling the lower stage elevator 35 to the motor control circuit 36, and the height z ( z position) is moved up and down. The stepping motor 37 generates a rotation signal corresponding to the rotation. Based on the rotation signal input via the motor control circuit 36, the main body 50 determines the height z of the mounting unit 30 as information regarding the relative distance between the mounting unit 30 and the imaging optical system 11 in the optical axis direction. Remember. The placement unit 30 functions as an observation positioning unit that positions the observation position with respect to the observation object S.

  Needless to say, the lower stage elevator 35 is not limited to such an electric type, and may be manually raised and lowered.

  Furthermore, in the present embodiment, not only the relative distance in the optical axis direction between the mounting unit 30 and the imaging optical system 11 is changed by changing the height of the mounting unit 30, but also the height of the imaging optical system, That is, the height of the head part 4 can also be changed. The head unit 4 is connected to the main body unit 50 and the cable unit 3. Thereby, the data acquired by the head part 4 is sent to the main body part 50 via the cable part 3, and a required process can be performed on the main body part 50 side. In addition to providing the mounting unit in the microscope main body, the mounting unit may be provided in a head unit that is a separate member from the main body, or an imaging unit in which the stage is omitted may be provided in the head unit. The imaging unit from which the stage is omitted can be mounted on a mounting stand or can be held by the user.

  The image sensor 12 can electrically read the amount of received light for each pixel arranged two-dimensionally in the x and y directions. The image of the observation object S formed on the image sensor 12 is converted into an electrical signal in accordance with the amount of received light in each pixel of the image sensor 12, and further converted into digital data in the image sensor control circuit 13. The main body 50 uses the digital data converted by the image sensor control circuit 13 as the received light data D in a plane (x and y directions in FIG. 2) substantially perpendicular to the optical axis direction (z direction in FIG. 2). The information is stored in the storage unit 53 together with pixel arrangement information (x, y) as the two-dimensional position information of the observation object S. Here, the in-plane substantially perpendicular to the optical axis direction does not need to be a plane strictly forming 90 ° with respect to the optical axis, and the shape of the observation object S is determined by the resolution of the imaging optical system and the imaging element. Any observation surface may be used as long as it is within a recognizable inclination range.

In the above description, an example in which the observation object S is placed on the placement unit 30 is shown as an example of the placement unit 30. For example, instead of the placement unit, an arm is attached and the observation target is attached to the tip of the arm. It can also be set as the structure which fixes the thing S. FIG. Further, the head unit 4 can be used by being attached to the camera attachment unit 43, and can be arranged at a desired position and angle by a method such as hand-holding so as to be detachable.
(Control unit 51)

The control unit 51 controls the captured observation image to be displayed after being converted to a resolution that can be displayed by the display unit 52. In the magnifying observation apparatus 100 of FIG. 1, the camera unit 10 displays an observation image obtained by imaging the observation object S with the imaging element 12 on the display unit 52. In general, the performance of an image sensor such as a CMOS or CCD often exceeds the display capability of the display unit, so in order to display a captured observation image on a single screen, the resolution is displayed on a single screen by thinning the image. Reduced to the possible size and reduced. When the reading resolution when reading with the camera unit 10 is the first resolution, the display unit 52 displays the second resolution lower than the first resolution.
(Simple imaging condition generation function)

When observing an observation object using the magnifying observation apparatus 100, it is necessary to set an imaging condition for acquiring an image. For example, when there are a plurality of illumination units 40, the imaging conditions include selection of illumination light, type and direction of illumination light, shutter speed (exposure time) of the camera unit, screen brightness and contrast, white balance, or imaging. As post-processing, various types of imaging parameters such as various types of image processing such as various filters can be cited (here, the post-processing parameters after imaging are also referred to as “imaging parameters”). The imaging conditions also include illumination conditions for setting illumination light. As an example, FIGS. 4 and 15 to 17 show a user interface screen of an enlarged image observation program as one form of the imaging condition setting unit 83 for setting such imaging conditions. In these drawings, FIG. 4 shows the illumination switching screen 110 as one form of illumination condition setting means for setting the illumination condition of the illumination unit 40 as described above. 15 shows a white balance setting screen 124 for setting white balance, FIG. 16 shows a list display area, and FIG. 17 shows an example of an image setting screen. In the white balance setting screen 124 of FIG. 15, white balance, that is, the color of an image can be adjusted. In the list display area of FIG. 16, by selecting a desired simple image from simple images respectively captured with simple imaging conditions that are simply set, the simple imaging conditions set for the simple images are captured. It can be set as a condition. In the image setting screen of FIG. 17, various imaging conditions are set. As described above, when the imaging condition is set and changed by the imaging condition setting unit 83, the display mode switching unit 89e described later determines that an image changing operation has been performed, and switches the display mode.
(Simple imaging condition setting function)

  It is troublesome to individually set such imaging conditions. In addition, since some imaging parameters are correlated, it may be difficult for a novice user to know which imaging parameter has to be adjusted in order to obtain a desired image. Therefore, the magnifying observation apparatus according to the present embodiment simply generates a plurality of provisional imaging conditions that combine various imaging parameters in advance, and further displays a list of simple images acquired under each simple imaging condition. A simple imaging condition setting function is provided. According to this, by allowing the user to select a desired simple image from the list-displayed simple images, the simple imaging condition that acquired the simple image can be set as a regular imaging condition. Even a user who is not familiar with the operation can easily obtain an image visually close to a desired image. In addition, each imaging parameter can be finely adjusted with respect to the selected simple imaging condition, thereby obtaining an advantage that the imaging condition setting operation can be easily performed. Such a simple imaging condition generation function is realized by the simple imaging condition generation unit 89c of the control unit 51.

A plurality of different simple imaging conditions generated by the simple imaging condition generation unit 89c are set from the control unit to the illumination unit 40 and the camera unit 10, respectively, and each simple image is easily captured. Since the simple image captured here is for the purpose of displaying a list as a list for comparison with the user, it is not necessary to acquire a fine image, and simple imaging is sufficient. Specifically, the resolution and frame rate are reduced or the calculation processing for image generation is simplified, so that the image can be obtained in a shorter time than normal imaging. Thereby, a plurality of simple images with different simple imaging conditions can be acquired in a short time (sometimes referred to as a preview in the sense of preliminary imaging). The simple imaging condition generation unit 89c can make the impression of the obtained simple image stand out by setting the imaging parameters whose appearance effects are easily changed.
(List display function)

  Further, the magnification observation apparatus 100 has a list display function for displaying a list of simple images that are simply acquired under a plurality of different simple imaging conditions generated by the simple imaging condition generation unit 89c in a list display area of the display unit. ing. An example of a list display is shown in the list display screen 130 of FIG. In the example of FIG. 16, to execute the list display function, the “image quality improvement” ribbon 131 in the operation area 112 is selected, and the “optimum image selection” tab 132 is further selected. The display area 111 is switched to the list display area 134 by pressing an “execute optimum image” button 133 provided in the upper part of the “optimum image selection” tab 132. In the list display area 134, simple images captured under each simple imaging condition are displayed side by side. In this example, nine simple imaging conditions are generated by the simple imaging condition generation unit 89c, and nine simple images captured simply under each simple imaging condition are displayed. Each simple image is subjected to different image processing and lighting effects, and the user selects a desired simple image according to the observation purpose. In the example of FIG. 16, nine list display images 136 similar to the list display area 134 are also displayed in the operation area 112. Since the arrangement of the list display images 136 matches the arrangement of the list display areas 134, the user determines a desired simple image while comparing each simple image in the larger list display area 134, and is at a corresponding position. An image is selected from the list display image 136 in the operation area 112 by a mouse click or the like. As a result, a simple imaging condition corresponding to the selected simple image is called, and this simple imaging condition is input as a normal imaging condition. Further, the user can further finely adjust the imaging conditions as necessary.

In the example of FIG. 16, when the “image setting” tab 138 is selected, the list display screen 130 is switched to the image setting screen 140 of FIG. Here, fine adjustment of edge enhancement, gamma correction, offset, and monochrome setting can be performed as imaging parameters. In this example, edge enhancement, gamma correction, and offset are adjusted with a slider, and monochrome settings are selected with a radio button to select the degree of shadow enhancement. Here, the edge enhancement is an imaging parameter for enhancing the outline portion of the image to make it easy to observe scratches and fine objects. The larger the value, the stronger the edge enhancement is applied. The gamma correction is an adjustment to the luminance histogram for each pixel included in the image, and is used for enhancing contrast and gradation. Further, the offset adjustment is also a luminance histogram adjustment, which is used when making the entire image brighter or darker. Further, according to the setting conditions here, a new simple imaging condition can be generated and the list display function can be executed again. In addition, by pressing the “Adjust HDR parameter” button provided at the bottom of the list display image 136 from the screen of FIG. 16, the screen shifts to a detailed composite parameter setting screen for generating an HDR image.
(Image composition means 85)

In addition, this magnification observation apparatus has a dynamic range expansion photographing mode suitable for a dynamic range expansion application as a composite image photographing mode in which a composite image is acquired by the composite image generation means 85, and a resolution improvement in which brightness resolution is improved and contrast is enhanced. A shooting mode is provided. In the dynamic range expansion shooting mode, a composite image having a wider dynamic range than the original image is generated. On the other hand, in the resolution-enhanced shooting mode, a composite image is generated with a luminance resolution that is higher than that of the original image in a dynamic range narrower than the dynamic range of the image sensor.
(HDR image)

  In the dynamic range expansion photographing mode, so-called HDRI is imaged. HDRI (High Dynamic Range Image: hereinafter referred to as “HDR image”) is an image that has a dynamic range, that is, a ratio of the minimum light amount and the maximum light amount that is significantly higher than that of a conventional image. For example, in a standard computer monitor, 8-bit to 24-bit color is adopted as a standard color expression and can be expressed in 256 to 16.77 million gradations, but in reality there are more colors, The human eye is adjusting the pupil size and adjusting it to a standard brightness that seems to be appropriate. Therefore, an HDR image having more color information that exceeds the display capability of the monitor is used. For such HDR image acquisition, a known method is used, such as combining a plurality of images obtained by imaging the same observation target at the same position under different imaging conditions (typically, the exposure time of the imaging device). it can. For example, a high gradation HDR image can be obtained by combining a plurality of low gradation images captured by changing the dynamic range of the luminance region. As an example, low gradation images having different exposure times as shown in FIGS. 18A and 18B are combined to generate a high gradation HDR image as shown in FIG. 18C.

In contrast to the above-described shooting for expanding the dynamic range, it is also possible to perform shooting with improved resolution so that a fine pattern can be displayed with a narrow dynamic range. In the resolution-enhanced shooting mode, an image in which the imaging condition is changed more finely in a dynamic range narrower than that of the original image can be synthesized to obtain a synthesized image with improved luminance resolution than the original image. Note that the synthesized image obtained here is not an HDR image in terms of character because the dynamic range is not expanded, but is a high-gradation image similar to the HDR image and is included in the HDR image for convenience in this specification. In this specification, the HDR image is used in a sense that the dynamic range is wider than the dynamic range that can be displayed on the display unit, but is not limited thereto, and is wider than the dynamic range that can be imaged by the imaging element of the imaging unit. It can also be handled as meaning an image or an image having a specific number of bits such as 24 bits or more, 32 bits or more.
(Depth composite image)

Furthermore, this magnified observation device can capture a depth composite image in addition to the HDR image as a composite image by the composite image generation means 85. When the height difference of the measurement target portion of the object S exceeds the depth of field, the depth composite image is in focus from the observation images captured individually with different height directions as shown in FIGS. 19A to 19D. This is an image synthesized by extracting only the matching part.
The depth compositing process that generates the depth composite image captures multiple still images while moving the Z position, and combines the in-focus area to synthesize the in-focus image over the entire screen. To do. In this case, several to several hundreds of photographs are required depending on the combination of the range in the Z direction to be photographed and other image composition processing (high dynamic range processing or super-resolution processing described later).

In addition, as another synthesized image synthesized by the synthesized image generating unit 85, a high-resolution image, a super-resolution image, and an automatic measurement process using a three-dimensional image or a pixel shifting function can be used. The three-dimensional image is an image in which the in-focus height is estimated by combining depth synthesis processing and Z-stage position information (FIG. 20). Specifically, when creating the depth composite image, the coordinate information of the Z-axis movement mechanism (Z stage) is stored, and a stereoscopic image is generated using the height information for each pixel. Further, a high-resolution image by the pixel shifting function is obtained by combining images captured at each position by shifting four positions of 2 rows × 2 columns by shifting one pixel at a time in an image sensor having a Bayer array as shown in FIG. . Thereby, RGB data can be acquired in each pixel, and an image with high resolution (FIG. 13) can be obtained without performing Bayer interpolation. Furthermore, by using the pixel shift of the subpixel together, it is possible to obtain RGB data while obtaining data between pixels, and obtain a higher resolution image (FIG. 14). Furthermore, a super-resolution image is obtained by obtaining luminance information using only a specific wavelength component by pixel-shifted shooting, thereby generating a high-resolution image that eliminates the effects of lens aberration and long-wavelength components. . The super-resolution image is obtained by shooting a plurality of images by pixel-shifted shooting or the like, and an image before blurring due to the lens is estimated based on the probability distribution model and the point spread function. Furthermore, the automatic measurement process is a process of automatically measuring an image by pattern matching or the like and combining and displaying a measurement result such as a dimension on the image.
(One-click measurement function)

  Here, the measurement process will be described. The measurement process is a process for measuring a specified part in a state where an image to be measured is displayed. The measurement process includes a manual measurement process manually performed by the user and an automatic measurement process automatically performed according to preset manual measurement process conditions. The automatic measurement process further includes a one-click measurement performed at a timing designated by the user and a fully automatic measurement process automatically performed at a timing when an image is input. First, the one-click measurement function will be described based on the user interface screen of the enlarged image observation program in FIG. This figure shows a user interface screen of the measurement processing setting screen 160 for setting measurement processing. The one-click measurement function is a function in which measurement processing is performed when a user designates (clicks) a region to be measured on the measurement processing target image MI displayed in the left display area 111 with a mouse or the like. In the screen of FIG. 21, first, an image used for pattern matching executed for an input image in the measurement process and an item to be measured are designated. Here, an image used for pattern matching is designated as a measurement template image TI. In the example of FIG. 21, a measurement template image TI is set in the operation area 112. The set measurement template image TI is displayed in the measurement template setting field 162 in the operation area 112. In addition, the region to be measured and the type of measurement are specified for the measurement template image TI.

  Further, an input image to be subjected to measurement processing, that is, a measurement processing target image MI is displayed in the display area 111. In this state, when the “automatic measurement” button 165 in the one-click automatic measurement setting field 164 provided in the middle stage of the operation area 112 is pressed and clicked around the part to be measured on the measurement processing target image MI, registration is performed. The measurement template image TI and pattern matching are executed, and the same measurement as the measurement item set in the measurement template image TI is executed, and the result is displayed as a measurement result display 166 on the display area 111. . In the example of FIG. 21, the length of the chip resistance included in the input image is designated as a measurement item, and the state in which the measurement process is performed on two of the chip resistances displayed in the display area 111 is 2. One measurement result display 166 is shown.

  The above one-click measurement function requires the user to specify the area on the measurement processing target image. The input image is automatically pattern-matched to the specified area and the measurement process is executed. The result may be displayed on the display unit. Such a fully automatic measurement process is also included as one of the image processes. In the fully automatic measurement process, pattern matching is performed within the image to be measured when the field of view stops moving, a region with a high degree of matching is extracted, and the result of automatic measurement is displayed on the display (details) Will be described later).

Furthermore, a high-resolution color image can be acquired using the image composition means 85. If observation is performed with illumination light having a short wavelength, an image with high resolution can be obtained. By utilizing this property and using blue illumination light and pixel shifting, a high-resolution monochromatic image can be obtained. However, this image has only blue information and is not a full color image. Therefore, a full color image using white illumination light is acquired separately, and the color information (chromaticity, saturation) of the full color image is superimposed on the luminance information of the single color image by the image synthesis means 85, so that the composite color with high resolution is obtained. An image can be obtained. In other words, among single-plate image sensors, an image sensor that can capture illumination light with a short wavelength, specifically, a monochrome high-resolution image is captured using a blue image sensor, and a color observation image taken separately. Can be combined with the high-resolution monochrome observation image to obtain a color high-resolution observation image (luminance composite image).
(Display mode automatic switching function)

  In the magnifying observation apparatus, after such a composite image is displayed, the field of view may be moved or the imaging conditions may be changed in order to capture another composite image. In such a case, conventionally, the first display mode for temporarily displaying the still image of the composite image is stopped, and the display on the display unit 52 is changed to the second display mode for displaying the moving image (through image or live video). After switching, it is necessary to perform the above-described visual field search and imaging condition adjustment work. This is because, in the first display mode, it takes a long time to generate one image, so it takes time to update the display content of the display unit 52, and it is inappropriate for searching the field of view. This is because it is necessary to switch to a moving image with a high frame rate that can be drawn with. Then, when the field of view and imaging conditions are adjusted in the second display mode at a high frame rate, and the state in which imaging is possible is completed, this time, the mode is switched to the first display mode again to generate a synthesized image and display the obtained synthesized image. Will be performed. As described above, conventionally, it is necessary to manually switch the display mode on the display unit from still image display to moving image display, and there is a problem that the operation is complicated.

  Therefore, in the present embodiment, when a still image is displayed and an operation for changing the image (image change operation) such as a change of field of view or a change in shooting conditions is detected, this is automatically used as a trigger. A display mode automatic switching function is provided for switching the screen displayed on the display unit 52 to a live image. As a result, the live video can be continuously displayed on the display unit 52 while the field of view is moving or until the shooting conditions are stabilized. Then, when the visual field is stationary and the photographing conditions are stabilized, the composition process is automatically executed again to display a composite image. That is, when the stillness of the visual field or the determination of the photographing condition is detected, the display mode is automatically switched to the first display mode. With such a configuration, the user can save the trouble of switching the display mode of the display unit from a still image to a moving image, and an easy-to-use operating environment is realized.

For example, let us consider a state in which a depth synthesized image as shown in FIG. 22B obtained by performing depth synthesis on an observed image as shown in FIG. 22A is obtained. At this time, a still image in the first display mode is displayed on the display unit 52. From this state, when the user operates the visual field moving means (for example, the XY axis moving mechanism or the Z axis moving mechanism) to move the visual field in order to obtain the depth composite image in the next visual field, as shown in FIG. 22C. The display on the display unit 52 is automatically switched to the live image in the second display mode. When the user determines a desired field of view, the mode is automatically switched to the first display mode, the depth synthesis process is executed, and a new depth synthesized image as shown in FIG. 22D is obtained.
(Display mode switching means 89e)

  Here, automatic switching between the second display mode and the first display mode in the display unit 52 is performed by the display mode switching unit 89e. For example, switching from the first display mode to the second display mode is performed when an image change operation is performed by the image change unit. Here, the image changing means accepts an image changing operation for changing the image acquired by the imaging means in a state where the display unit 52 displays the first display mode image processed in the first display mode. It is means of. For example, when the operation of the visual field moving means for moving the visual field, display magnification, working distance, etc. is detected, or when the operation of the image adjusting means such as image brightness or shutter speed is detected, the display mode switching means 89e Switching from the first display mode to the second display mode is performed.

  Conversely, switching from the second display mode to the first display mode is performed when the image changing operation by the image changing means is completed. The determination of termination can be made immediately after the movement of the visual field by the visual field moving means is completed, or after a predetermined time has elapsed (for example, about several seconds).

  As described above, the display mode switching unit 89e detects the image change operation in which any change is applied to the image acquired by the imaging unit by the image changing unit including the visual field moving unit and the image adjusting unit. Switching from the one display mode to the second display mode is automatically executed.

  Further, the second display mode image may be displayed not only while moving the field of view but also while changing the shooting conditions. For example, while the brightness of the image displayed on the display unit 52 is manually adjusted to an appropriate brightness, the image is updated by increasing the frame rate as the second display mode, that is, the live video. Thus, the image is switched according to the value adjusted in real time, so that the adjustment becomes easy. Then, after the adjustment work is completed, image processing such as synthesis processing is automatically executed, so that it can be used without stress.

Here, the imaging conditions include, for example, adjustment of exposure time (brightness), gain (brightness), illumination (how to apply light quantity and light), or various image processing such as edge enhancement, gamma correction, and application of image filter processing. Is mentioned. During the adjustment work of these setting items and the execution of image processing, the second display mode is set, and when the user's adjustment is completed, that is, when the input is stopped or when the execution of the image processing command is completed, The image processing unit executes a combining process to which these settings and image processing are applied.
(Display mode switching operation)

  The procedure of the display mode switching operation by the display mode switching means 89e will be described based on the flowchart of FIG. First, in step S2301, information on the microscope lens unit attached to the camera unit is acquired. Examples of lens information include lens type and magnification. This information can be acquired by either automatic recognition or user input. In the case of automatic recognition, the lens identification information held on the microscope lens unit side can be acquired by the main body unit reading through the camera unit. In the case of user input, the type or attribute of the camera unit worn by the user is input from the console or the magnified image observation program.

  In step S2302, the composition process is executed and the display mode of the display unit 52 is set to the first display mode. Here, generation and display of a composite image are executed as the composite processing. Specifically, based on the information of the microscope lens unit obtained in step S2301, the control unit determines the moving amount and moving speed of the lens, and acquires a plurality of images while changing the focus position by operating the lens. Then, the image synthesizing means executes the synthesizing process. The display mode of the display unit 52 is automatically set to the first display mode by the display mode switching unit 89e, and a composite image that is a still image is displayed as the first display mode image.

  In step S2303, it is determined whether there has been any image change operation for changing the image. Here, it is determined whether or not there is a visual field moving operation by the visual field moving means such as an XY-axis moving mechanism or a Z-axis moving mechanism. If there is no image change operation, the process returns to step S2303 and is repeated. On the other hand, if there is an image change operation, the process advances to step S2304 to execute the input image change operation, and the display mode switching unit 89e switches the display mode from the first display mode to the second display mode. For example, when the placement unit is moved, the display is switched from the still image display to the live video, the user can check the moving field of view with the moving image, and can follow the change of the image in real time. In step S2305, it is determined whether the execution of the image change operation has been completed. Here, it is determined whether or not the movement of the placement unit has been completed. If it has not been completed, the process returns to step S2305 to wait for completion. When the execution of the image change operation is completed, the process returns to step S2301 to repeat the above loop. If there is no change in the microscope lens unit, step S2301 may be skipped and the process may proceed to step S2302. In this way, the display mode is automatically switched to the second display mode when the image change operation is detected, and is automatically switched to the first display mode when the image change operation is completed, whereby the user switches the display content of the display unit 52. Therefore, operation and observation can be performed with appropriate display contents, and usability is improved.

In the combining process in step S2302, movement in the Z direction is not limited to moving the microscope lens unit with the upper stage elevator, and the placement unit may be moved with the lower stage elevator. Also, a plurality of images may be acquired by changing the focus position by changing the focus adjustment focus ring provided in the microscope lens unit. Regarding the movement amount and movement speed of the microscope lens unit, for example, when the magnification of the lens is low, the movement amount is increased (the synthesis range is widened) to increase the movement speed. In addition, when the depth of field is shallow, it is possible to move the placement unit so that the in-focus portions in each image are well connected in the Z direction by reducing the moving amount and slowing the moving speed. .
(Detection of image change operation)

  For the detection of the image change operation for switching from the first display mode to the second display mode such as live video, when the visual field moving means such as the Z-axis moving mechanism or the XY-axis moving mechanism is electrically operated, these The display mode of the display unit 52 is switched at a timing when the control unit issues a movement command. The switching from the second display mode to the first display mode is performed automatically by, for example, issuing a stop command for the visual field moving unit described above or detecting a movement completion notification by the display mode switching unit 89e, thereby automatically combining the depth, etc. The image processing is executed and the display mode is switched. Alternatively, a sensor for detecting the movement of the placement unit may be provided in the placement unit, and the second display mode may be set only while the sensor detects the movement. The sensor can detect the movement in the XYZ direction and the θ direction, and can switch the display mode regardless of the direction in which the placement unit moves.

  Furthermore, an image change can be used to determine the start and end of such an image change operation. For example, the image processing unit checks the degree of change of the image by image processing, and if the degree of change of the image exceeds a certain value, it is regarded as moved. On the contrary, when the degree of change becomes smaller than a certain value, it is determined to stop. As a parameter for determining the degree of change of an image, for example, a luminance change amount between frames or a movement amount of a feature point is used. With this method, the member relating to the image changing means does not need to be electrically operated, and can be handled manually. For example, since there is no need to incorporate a motor or sensor into an XY stage that is an XY axis moving mechanism, there is an advantage that the manufacturing cost can be reduced and the configuration can be simplified.

The visual field moving operation is not only the movement of the visual field in the XY direction by the XY axis moving mechanism described above, but also the rotational movement in the θ direction by the rotational moving mechanism, the movement in the Z direction by the Z axis moving mechanism, and the adjustment of the focus position. In addition, it includes enlargement / reduction of field of view and adjustment of magnification, for example, switching of an objective lens. The tilting of the head unit 4 by the head tilting mechanism 44 is also included in such a visual field moving operation. For example, in the magnifying observation apparatus shown in FIG. 10, when an angle sensor is provided and a tilting operation by the head tilt mechanism 44 is detected, the second display mode (live image) is performed during the tilting operation, and the first display mode (still image) is completed after tilting. ) And a composite image generation process can be executed.
(Autofocus processing)

  In image autofocus processing, a still image at a focused position is taken while moving the Z position. In this case, it is necessary to perform shooting processing for the range to be searched in the height direction. Usually, dozens of images are taken at a uniform pitch and combined. The autofocus process may be automatically executed in addition to a configuration in which a dedicated execution button is provided and the user manually executes the autofocus process. For example, autofocus is automatically executed with the movement of the field of view stopped. Whether or not the movement of the visual field has stopped can be determined when there is no input of an operation signal from the visual field moving means, or when a change in the image is detected and the amount of change becomes a predetermined value or less. For example, when the live image does not change for a certain time (for example, several seconds), it is determined that the field of view has stopped moving, autofocus is executed, and the display mode switching means changes the display mode from the second display mode to the first display. You can switch to mode and display a still image (autofocus image) in focus. Furthermore, when the visual field moving means is operated in this state, the first display mode is switched to the second display mode, the display on the display unit becomes a live image, and the image is updated almost in real time so that the visual field can be easily searched. The When stopped again, autofocus is automatically executed and an autofocus image is displayed. As a result, a still image in focus is always displayed when the user stops moving the field of view, making it easier to check details, and when the field of view moves, the user simply performs a field of view movement operation. In addition, the display mode of the display unit is switched from a still image to a moving image, and it is possible to confirm a change in the visual field, thereby realizing an extremely convenient observation environment.

  Further, the synthesized image synthesized by the synthesized image generating unit 85 can be an HDR image, a three-dimensional image having height information, a high-resolution image by a pixel shifting function, a super-resolution image, or the like in addition to the depth synthesized image as described above. . In the image composition processing for generating such a composite image, it is necessary to capture a plurality of images and process them. For this reason, since it takes a certain time to generate a composite image, it is difficult to display it in real time. Generally, a composite image is displayed as a still image or displayed with an extremely slow frame rate. . However, in such a first display mode with a slow frame rate, it is inefficient to search for a site to be observed. Therefore, when searching for a field of view, that is, when an image change operation is being performed, the display can be performed with a light load, and thus the frame rate can be improved. It is configured to switch to the first display mode.

  However, the present invention does not necessarily limit the second display mode to live video. For example, by simplifying the synthesis process and creating a simple synthesized image that can be generated in a shorter time than the normal synthesis process, An update display of a simple composite image that can be updated at a rate may be used. For example, while changing the field of view or changing the shooting conditions, the display mode is switched to the second display mode.In this case, the image synthesis process is performed in the second display mode instead of the live image, but the synthesis process itself is simplified. By synthesizing the simple synthesized image, the frame rate can be made higher than that of the normal synthesized image, and the movement to the target site can be facilitated. As simple image processing executed in the first display mode for displaying such a simple composite image, image processing with a reduced number of shots can be used. For example, in the case of a simple depth composite image, the shooting pitch between the original images is set wide to reduce the number of shots required for combining one simple depth composite image. In the case of HDR images, the number of shots can also be reduced by increasing the exposure time difference between the original images. In this way, by reducing the number of images taken for image synthesis, it is possible to suppress a decrease in the frame rate and make it easier to find a target site. By reducing the number of shots by this method, the quality of the simple composite image is slightly degraded, but it can be used sufficiently for the purpose of searching for the target part. Rather, it is better to prioritize the improvement of the frame rate than the image quality of the simple composite image. Efficient work can be done.

  Similarly, the first display mode is not necessarily limited to still images, and can be a composite image with a slow frame rate. In particular, such observation can also be used for observation applications that do not frequently change the field of view or applications that do not cause a problem even if the influence of afterimages is large. As described above, the present invention does not limit the first display mode to a still image that has undergone image processing and the second display mode to a live image, and the frame rate of the second display mode is higher than the frame rate of the first display mode. It is sufficient if the speed is increased, and the frame rate in each display mode and the content of the processing can be appropriately adjusted according to the observation application and the like according to the balance between the image change operation and the image processing.

In the above example, the image processing for generating the composite image by the image combining means has been described as the first display mode. However, the first display mode is not limited to the generation of the composite image, and may be other image processing. For example, auto focus, edge enhancement, storage processing of obtained image data, fully automatic measurement processing for an image, and the like can be given.
(Fully automatic measurement process)

  In the fully automatic measurement process, for example, a measurement position is specified for a captured image in advance, a partial image including the measurement position and teaching data storing a relative position of the measurement position with respect to the partial image are created, and the teaching data is created from the newly captured image. The position / position of the part that matches is specified, and the measurement recorded in the teaching data is performed. For example, when a partial image including a measurement position as shown in FIG. 24A is acquired in advance as teaching data, the first display mode is set. Then, during the visual field movement, the mode is switched to the second display mode (live video in FIG. 24B), pattern matching is performed after the movement, and when the measurement process is automatically performed, the mode is switched to the second display mode as shown in FIG. 24C. As described above, the automatic measurement process is stopped during the visual field movement, and the automatic measurement is performed after the visual field is determined, so that the user can perform the measurement only by the visual field movement operation without performing the automatic measurement ON / OFF operation every time. Therefore, an environment with excellent operability is realized. Note that, as described above, such measurement processing can be executed at the position and timing specified by the user, as well as automatically performed on the input image.

As described above, according to the magnifying observation apparatus according to the present embodiment, after generating and displaying a composite image having a deep focal depth once, the display content of the display unit 52 is triggered when the movement of the visual field is detected. Automatically switches to live video for display. As a result, the user searches for the target part while viewing the live video and determines the field of view. After that, when the completion of the movement of the visual field is detected, the depth composition process is automatically executed, and the depth composition image is displayed. This allows the user to look for live images with a fast frame rate and search for the target part.After confirming the target part, the user can automatically observe a deep image. Efficient observation is possible with the trouble of turning ON / OFF.
(Image change operation detection function)

  Further, the detection of the image change operation such as the visual field movement operation is performed by the display mode switching means, but it can also be performed by another member. For example, dedicated image change operation detection means may be provided. Alternatively, the image changing operation can be detected by a control unit configured by a general-purpose IC or the like. Further, the image change operation detection function may be turned ON / OFF. For example, while the image change operation detection function is turned on, automatic switching of the display mode by the display mode switching means is effective, and when the image change operation detection function is turned off, the user manually displays the display unit as in the past. The manual switching mode is used to switch the contents.

  The display mode switching unit 89e is a unit that automatically switches the display content of the display unit between the first display mode image and the second display mode image as described above. Needless to say, it is possible to provide means for switching the display contents.

  Here, the switching from the second display mode to the first display mode and the image processing for obtaining the first display mode image are not necessarily performed simultaneously. In particular, the first display mode image is actually generated after the image processing operation for generating the first display mode image is started by detecting that the image changing operation such as the visual field moving operation is performed. Thus, it may take a certain time to replace the display content of the display unit with this image. For example, in order to obtain a composite image, a process of synthesizing an image after capturing a plurality of original images is required, and therefore, several seconds to several tens of seconds are required. Therefore, the display content of the display unit is actually updated at the timing when the second display mode image is generated. In other words, it is not the timing at which an image change operation such as a visual field movement operation is detected, but a timing later than this.

In this specification, display mode switching basically refers to the timing at which the display content of the display unit is switched to the first display mode image and the second display mode image. Even if the display content of the display unit has not yet been switched, necessary image processing is performed inside the magnification observation apparatus. Therefore, it can be understood that the display mode is switched when the processing of the image processing unit starts generating the first display mode image. For example, depending on the content of the image processing, there are those that can generate the second display mode image almost simultaneously with the start of the image processing. In this case, it is the fact that the image processing start of the image processing unit and the display content of the display unit are switched. You can tie them up.
(Interruption of processing)

  On the other hand, since there is a waiting time until the first display mode image is displayed after the user performs an image changing operation such as a visual field moving operation, the user again moves the visual field during this waiting time. It is also possible to perform operations such as changing the magnification and switching to tilt observation. However, in this case, if the display on the display unit is not switched to the second display mode until the designated image processing is finished, the display is not updated during that time, so the user must confirm the observation image. I can't do it, and I'm inconvenienced.

  On the other hand, it is also conceivable to continuously shoot a composite image every time the visual field is moved and to search the visual field while displaying the composite image as it is. However, since it is generally necessary to shoot a plurality of still images for generating a composite image, it takes time to synthesize and delays display. In addition, if a composite image is forcibly generated while the image being photographed is not stationary, the obtained image may be displayed in a broken manner. For example, in an example in which a live image is displayed in which a composite image is created by combining 3CCD imaging by pixel shift and high dynamic range processing to create a composite image from 10 or more images, and the object to be observed is displayed. FIG. 25 shows a composite image CI1 captured while still, and FIG. 26 shows a composite image CI2 captured while moving the XY stage. In this way, it is difficult to construct an accurate image when displaying a composite image while moving it. Further, as described above, the display delay cannot be ignored, which is extremely inconvenient for performing the positioning operation.

Therefore, in the present embodiment, even when image processing is being performed in the first display mode, when an image change operation such as a visual field movement operation is newly input, the display mode switching means It is also possible to display the second display mode image by interrupting the process. As a result, the user can quickly confirm a desired image without causing an extra waiting time, thereby realizing an easy-to-use observation environment.
(Suspend processing procedure)

  A display mode switching procedure including such interruption processing will be described with reference to the flowchart of FIG. First, in the state where observation is started, it is assumed that the second display mode image is displayed in step S2701. In this state, in step S2702, it is determined whether an image change operation such as a visual field movement operation is detected. When not detected, it returns to step S2702 and repeats a process. On the other hand, when an image change operation such as movement of the visual field is detected, the process proceeds to step S2703, and image processing is started by the image processing means. For example, when the image processing is image synthesis processing, an image necessary for generating a composite image is captured. On the other hand, in step S2704, it is determined whether a new image change operation has been detected.

  If an image change operation is detected, the process jumps to step S2704-1 to stop the current image processing, and proceeds to step S2709 to display the second display mode image. For example, when the user moves the XY stage during the generation of the composite image, the display unit immediately switches to the live video, and the moving image can be confirmed.

  On the other hand, if an image change operation is not detected, the process proceeds to step S2705 and image processing is continued. For example, in the case of image composition, photographing of the original image is continued. In step S2706, it is determined whether or not the intended image processing has been completed. In the case of image composition, it is determined whether shooting of all images necessary for image composition has been completed. If not, the process returns to step S2704 to repeat the above-described processing. That is, the imaging of the image is continued while confirming whether a new image changing operation is detected. When all necessary images are acquired in this way and generation of the composite image is completed, for example, when the desired image processing is completed, the process proceeds to step S2707, the display mode is switched to the first display mode, and the first display is performed. Display the mode image. In step S2708, it is determined whether a new image change operation has been detected. If not, the process returns to step S2708 to continue displaying the first display mode image. If detected, the process advances to step S2709 to switch to the second display mode and display the second display mode image. Further, in step S2710, it is detected whether or not the image change operation has been completed. If it has not been completed, the process returns to step S2709 and the process is repeated. Start. In this way, it is possible to repeat the same operation and switch the display mode as appropriate, and when there is a new image change operation during the image processing, the image processing can be interrupted and switched to the second display mode image. Responsiveness can be improved without forcing the user to wait until the image is switched.

  Thus, for example, when the placement unit is stationary, a composite image is displayed, and when the movement of the placement unit is detected, the display is switched to a live video display suitable for this movement, and when the rest is stationary, generation of the composite image is started again. Then, a necessary image can be taken and switched to the display of the composite image. As described above, the display method of the display unit is appropriately switched according to the user's operation, so that the user can easily grasp the movement when moving the mounting unit, and can easily perform the positioning operation for capturing the composite image to be observed. . As described above, in order to capture a composite image and display a still image, or to display a moving image for visual field or positioning, conventionally, a user manually performs an operation of switching display on the display unit with an input unit or the like. There was a need. For example, since observation is performed at a high magnification, the field of view is narrow. Therefore, in order to perform positioning, an operation of moving the placement unit and executing image synthesis is repeated. For example, FIG. 28 shows a live video LI in the second display mode, and FIG. 29 shows a composite image CI in the first display mode. As shown in FIG. 28, in the live video LI, it is difficult to focus on the entire screen, the details cannot be confirmed, and in order to confirm the focused image in a wide range, FIG. It depends on the composite image CI as shown. However, since the composite image is a still image, in such positioning and visual field search, an operation for switching the display on the display unit between the moving image (FIG. 28) and the still image (FIG. 29) every time the visual field is moved. It was necessary to repeat this, and it took a lot of time and effort. On the other hand, in the present embodiment, the operation for changing the image is used as a trigger, the display mode of the display unit is changed from a still image to a moving image, and the recognition of the end of the image change operation is further used as a trigger for the still image. By returning, the labor of such switching can be saved, and seamless display mode switching can be realized. As a result, when the display mode is switched appropriately, the user can easily grasp the movement when the observation target is moving, the positioning for photographing the composite image to be used as an observation method is facilitated, and the observation environment is extremely easy to use. Is realized.

  28 and 29 are a height range setting screen 170 for setting a height range for capturing an image for generating a composite image. The height range setting screen 170 shown in these figures displays the depth composite image MI in the left image display area 111 and provides a height range setting field in the right operation area 112. In the height range setting field, a height range manual designation field 172 for manually designating the height range is provided in the upper stage, and a height graph display field 173 is provided in the middle stage. In the height range manual designation field 172, an upper limit and a lower limit of the height range can be entered numerically. On the other hand, in the height graph display column 173, a height graph (in this case, a projection diagram PI) is displayed on the right side, and a slider indicating the movement of the height in the Z-axis direction is displayed on the left side. The slider includes an overall slider 174 that indicates the entire height range, and an enlarged slider 175 in which a part of the overall slider 174 is enlarged. The enlargement slider 175 is provided with an upper limit operation knob 176 indicating the upper limit of the height range and a lower limit operation knob 177 indicating the lower limit. When the user operates these upper limit operation knob 176 and lower limit operation knob 177 with a mouse drag or the like, the height range changes continuously, and the upper limit bar 178 and lower limit bar 179 displayed in the height graph are accordingly changed. Also move together. Further, the upper limit and lower limit numerical values of the height range in the height range manual designation field 172 also change. These are set so that when any one of the height range setting means is operated, the other height range setting means is also changed in conjunction with it. Thereby, the user can set the height range by a desired method. In this figure, when the “automatic composition mode” button 192 is pressed, the image composition processing is executed after the height range is automatically set on the magnification observation apparatus side.

  The magnifying observation apparatus, the magnifying image observing method, the magnifying image observing program, and the computer-readable recording medium of the present invention can be suitably used for a microscope, a reflection / transmission type digital microscope, a digital camera, and the like. In addition, when the present technology is applied to a fluorescence microscope, reflected light or transmitted light from an observation target with respect to illumination light can be read as excitation light.

DESCRIPTION OF SYMBOLS 100, 200, 400, 500 ... Magnification observation apparatus 1 ... Imaging system 2 ... Control system 3 ... Cable part; 3b ... Optical cable 4 ... Head part 10 ... Camera part 11 ... Imaging optical system 12 ... Imaging element; Element control circuit; 14 ... Optical path shift means 16 ... Upper stage elevator 20 ... Microscope lens part; 21 ... Lens body 22 ... Mount part; 24 ... Lens side cable 25 ... Objective lens part; 25A ... First objective lens; Second objective lens 26 ... objective lens switching means 28 ... polarization beam splitter 29 ... illumination connection part; 29b ... connection connector 30 ... mounting part 32 ... slider 34 ... intermediate connection part 35 ... lower stage elevator 36 ... motor control circuit 37 ... Stepping motor 40 ... Support base 41 ... Base; 41a ... Block; 41b ... Bearing part; 41c ... Guide part 42 ... Stage fixing mechanism 43 Camera mounting portion 44 ... head tilting mechanism 45 ... oscillating shaft 46 ... oscillating portion 47 ... oscillating column 48 ... head fixing portion 49 ... head arm 50 ... main body portion; 51 ... control portion; 52 ... display portion 53 ... memory 54: Interface; 55 ... Operation unit 60 ... Illumination unit 61 ... Illumination switching unit 62 ... Coaxial epi-illumination unit 63 ... Ring illumination unit 64 ... Transmission illumination unit 65 ... Illumination light source; 65r, 65g, 65b ... LED
65B ... Transmitted illumination light source; 65C ... Ring illumination light source 66 ... Illumination light control unit 81 ... Optical path shift control unit 82 ... Image selection unit 83 ... Imaging condition setting unit 84 ... Automatic synthesis unit 85 ... Image synthesis unit 86 ... Wavelength selection Means 87 ... Illumination light selection means 88 ... Imaging element selection means 89a ... Magnification adjustment means; 89b ... Display position change means; 89c ... Simple imaging condition generator 89d ... Interlock adjustment means; 89e ... Display mode switching means 90 ... Phase delay element 110: Illumination switching screen 111 ... display area 112 ... operation area 113 ... "brightness / illumination" ribbon 114 ... "illumination" tab 115 ... "epi-illumination" setting field 116 ... "transmission illumination" setting field 117 ... "ON" button 118 ... "Ring illumination" button 119 ... "Ring shot" button 120 ... "ON" button 121 ... Slider 122 ... Brightness setting screen 124 ... Weight balance setting screen 130 ... List display screen 131 ... "Image quality improvement" ribbon 132 ... "Optimum image selection" tab 133 ... "Execute optimum image" button 134 ... List display area 136 ... List display image 138 ... "Image setting" tab 140 ... Image setting screen 160 ... Measurement processing setting screen 162 ... Measurement template setting field 164 ... One-click automatic measurement setting field 165 ... "Automatic measurement" button 166 ... Measurement result display 170 ... Height range setting screen 172 ... Manual height range Designation field 173 ... Height graph display field 174 ... Overall slider 175 ... Enlargement slider 176 ... Upper limit operation knob 177 ... Lower limit operation knob 178 ... Upper limit bar 179 ... Lower limit bar 180 ... Manual additional shooting setting screen 182 ... 3D image display field 184 ... Boundary plane 192 ... "Automatic synthesis mode" button S ... Observation object AX ... Optical axis MI ... Measurement processing target image TI ... measurement template image PI ... projection view LI ... live video CI, CI1, CI2 ... synthetic image

Claims (16)

An enlargement observation apparatus capable of irradiating an imaging target with illumination light, detecting the amount of reflected light or transmitted light of the illumination light, and capturing an image of the imaging target,
A placement unit for placing an object to be observed;
Illuminating means for irradiating the observation object with illumination light;
Imaging means for receiving reflected light or transmitted light of the illumination light irradiated by the illumination means;
As a display mode for displaying an image acquired by the imaging means, a first display mode for displaying a first display mode image at a first frame rate, and a frame rate higher than image processing in the first display mode A display unit capable of switching and displaying a second display mode for displaying a second display mode image at a second frame rate;
A Z-axis movement mechanism capable of adjusting a relative distance between the placement unit and the imaging unit; and an XY-axis movement mechanism capable of changing a relative position between the placement unit and the imaging unit, and displayed on the display unit. Visual field moving means for changing the visual field of the image being
Image combining means for generating a combined image obtained by combining a plurality of images captured at different positions and / or relative distances by the Z-axis moving mechanism and / or the XY-axis moving mechanism;
In the state where the display mode in the display unit is the first display mode, the display in the display unit is changed from the first display mode, triggered by the visual field moving operation for moving the visual field by the visual field moving unit. A display mode switching means for automatically switching to the second display mode;
The magnification observation apparatus in which the first display mode is display of the composite image. The magnification observation device according to claim 1,
The magnification observation apparatus, wherein the visual field movement operation is at least one of a relative movement or rotation between the placement unit and the imaging unit, and an inclination of the imaging unit. The magnification observation apparatus according to claim 1 or 2,
The magnification observation apparatus, wherein the visual field movement operation is a movement operation by the Z-axis movement mechanism or the XY-axis movement mechanism. The magnification observation apparatus according to claim 3,
The visual field moving means further includes a magnification adjusting means for enlarging or reducing the display magnification of the image displayed on the display unit,
The magnification observation apparatus, wherein the visual field moving operation further includes a magnification changing operation by the magnification adjusting means. The magnification observation device according to claim 1,
The magnified observation device, wherein the composite image to be displayed in the first display mode is any one of a depth composite image, a 3D composite image, a pixel shifted image, a super-resolution image, and an HDR image. A magnification observation device according to any one of claims 1 to 5,
When it is detected that the visual field moving operation by the visual field moving means is performed while the image synthesizing means is performing the predetermined image processing, the image processing is stopped and the display mode switching means performs the first display. A magnification observation apparatus configured to perform switching from the mode to the second display mode. The magnification observation apparatus according to any one of claims 1 to 6,
The magnification observation apparatus, wherein the first display mode is a still image display. A magnification observation device according to any one of claims 1 to 7,
The magnification observation apparatus, wherein the second display mode is any one of a moving image display, a through image, and a simple composite image. A magnification observation apparatus according to any one of claims 1 to 8,
The magnification observation apparatus, wherein the second display mode image is an autofocus image that is automatically focused. An enlargement observation apparatus capable of irradiating an imaging target with illumination light, detecting the amount of reflected light or transmitted light of the illumination light, and capturing an image of the imaging target,
A placement unit for placing an object to be observed;
Illuminating means for irradiating the observation object with illumination light;
Imaging means for receiving reflected light or transmitted light of the illumination light irradiated by the illumination means;
As a display mode for displaying an image acquired by the imaging means, a first display mode for displaying a first display mode image at a first frame rate, and a frame rate higher than image processing in the first display mode A display unit capable of switching and displaying a second display mode for displaying a second display mode image at a second frame rate;
Visual field moving means for changing the visual field of the image displayed on the display unit;
In the state where the display mode in the display unit is the first display mode, the display in the display unit is changed from the first display mode, triggered by the visual field moving operation for moving the visual field by the visual field moving unit. Display mode switching means for automatically switching to the second display mode;
A predetermined measurement process is performed on a predetermined measurement area on the image, and a measurement unit capable of displaying the measurement result on the display unit is provided.
The magnification observation apparatus, wherein the second display mode image is a measurement image displaying a measurement result measured by the measurement unit. A magnification observation apparatus according to any one of claims 1 to 10,
When the display mode switching means switches the display on the display unit to the second display mode, saving of image data displayed on the display unit is executed. An enlargement observation apparatus capable of irradiating an imaging target with illumination light, detecting the amount of reflected light or transmitted light of the illumination light, and capturing an image of the imaging target,
A placement unit for placing an object to be observed;
Illuminating means for irradiating the observation object with illumination light;
Imaging means for receiving reflected light or transmitted light of the illumination light irradiated by the illumination means;
As a display mode for displaying an image acquired by the imaging means, a first display mode for displaying a first display mode image at a first frame rate, and a frame rate higher than image processing in the first display mode A display unit capable of switching and displaying a second display mode for displaying a second display mode image at a second frame rate;
Visual field moving means for changing the visual field of the image displayed on the display unit;
In the state where the display mode in the display unit is the first display mode, the display in the display unit is changed from the first display mode, triggered by the visual field moving operation for moving the visual field by the visual field moving unit. Display mode switching means for automatically switching to the second display mode;
A first objective lens unit having a first magnification that can be optically coupled with the imaging means and the optical axis aligned;
A second objective lens portion having a higher magnification than the first magnification, optically coupled with the imaging means and the optical axis,
An objective lens switching means for switching any one of the first objective lens section and the second objective lens section to a position coincident with the optical axis of the imaging means;
The magnification observation apparatus, wherein the visual field movement operation includes a switching operation of the objective lens. An enlargement observation apparatus capable of irradiating an imaging target with illumination light, detecting the amount of reflected light or transmitted light of the illumination light, and capturing an image of the imaging target,
A placement unit for placing an object to be observed;
Illuminating means for irradiating the observation object with illumination light;
Imaging means for receiving reflected light or transmitted light of the illumination light irradiated by the illumination means;
As a display mode for displaying an image acquired by the imaging means, a first display mode for displaying a first display mode image at a first frame rate, and a frame rate higher than image processing in the first display mode A display unit capable of switching and displaying a second display mode for displaying a second display mode image at a second frame rate;
Visual field moving means for changing the visual field of the image displayed on the display unit;
In the state where the display mode in the display unit is the first display mode, the display in the display unit is changed from the first display mode, triggered by the visual field moving operation for moving the visual field by the visual field moving unit. Display mode switching means for automatically switching to the second display mode,
The visual field moving unit further includes a head tilting mechanism capable of tilting the imaging unit in a vertical plane with respect to the mounting unit.
The magnification observation apparatus, wherein the visual field moving operation further includes a tilting operation of the imaging means by the head tilting mechanism. Magnified image observation that illuminates the imaging target placed on the placement unit with illumination means, and detects the amount of reflected or transmitted light of the illumination light detected by the imaging means, and displays the image of the imaging target A method,
A step of irradiating an observation target with illumination light or transmitted light, picking up an image with an image pickup means, and displaying a first display mode image generated by performing predetermined image processing on the display unit at a first frame rate When,
In the state where the first display mode image is displayed on the display unit, the relative distance between the mounting unit and the imaging unit is adjusted by a Z-axis moving mechanism, and / or the relative distance between the mounting unit and the imaging unit is adjusted. Detecting a visual field changing operation of changing a position with an XY axis moving mechanism and changing a visual field of an image acquired by the imaging unit;
Triggered by the detection of the visual field changing operation, the display on the display unit is displayed from the first display mode image at the second display mode image at a second frame rate that is higher than the image processing in the first display mode. Automatically switching the display of the display unit,
The enlarged image observation method, wherein the first display mode is a composite image display in which a plurality of images taken at different positions and / or relative distances are combined by the Z-axis movement mechanism and / or the XY-axis movement mechanism. Magnified image observation that illuminates the imaging target placed on the placement unit with illumination means, and detects the amount of reflected or transmitted light of the illumination light detected by the imaging means, and displays the image of the imaging target A program,
A function of irradiating an observation object with illumination light or transmitted light, capturing an image with an imaging unit, and displaying a first display mode image generated by performing predetermined image processing on a display unit;
In the state where the first display mode image is displayed on the display unit, the relative distance between the mounting unit and the imaging unit is adjusted by a Z-axis moving mechanism, and / or the relative distance between the mounting unit and the imaging unit is adjusted. A function of detecting a visual field changing operation for changing a visual field of an image acquired by the imaging unit by changing a position by an XY axis moving mechanism;
Triggered by the detection of the visual field changing operation, the display on the display unit is displayed from the first display mode image at the second display mode image at a second frame rate that is higher than the image processing in the first display mode. The computer realizes the function of automatically switching the display of the display unit,
An enlarged image observation program in which the first display mode is a display of a composite image obtained by combining a plurality of images captured at different positions and / or relative distances by the Z-axis movement mechanism and / or the XY-axis movement mechanism.   A computer-readable recording medium or a recorded device on which the program according to claim 15 is recorded.