JP4804830B2 - 多層膜の成膜方法および成膜装置 - Google Patents

多層膜の成膜方法および成膜装置 Download PDF

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Publication number
JP4804830B2
JP4804830B2 JP2005247313A JP2005247313A JP4804830B2 JP 4804830 B2 JP4804830 B2 JP 4804830B2 JP 2005247313 A JP2005247313 A JP 2005247313A JP 2005247313 A JP2005247313 A JP 2005247313A JP 4804830 B2 JP4804830 B2 JP 4804830B2
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film
refractive index
vapor deposition
film forming
layer
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Japanese (ja)
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JP2007063574A5 (enExample
JP2007063574A (ja
Inventor
利展 伊藤
永寧 杜
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Showa Shinku Co Ltd
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Showa Shinku Co Ltd
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  • Optical Filters (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Physical Vapour Deposition (AREA)
JP2005247313A 2005-08-29 2005-08-29 多層膜の成膜方法および成膜装置 Expired - Lifetime JP4804830B2 (ja)

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JP2005247313A JP4804830B2 (ja) 2005-08-29 2005-08-29 多層膜の成膜方法および成膜装置

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JP2005247313A JP4804830B2 (ja) 2005-08-29 2005-08-29 多層膜の成膜方法および成膜装置

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JP2007063574A JP2007063574A (ja) 2007-03-15
JP2007063574A5 JP2007063574A5 (enExample) 2009-02-12
JP4804830B2 true JP4804830B2 (ja) 2011-11-02

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Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011008070A (ja) * 2009-06-26 2011-01-13 Ricoh Co Ltd マイクロミラー装置
JP5552784B2 (ja) * 2009-09-29 2014-07-16 大日本印刷株式会社 多層膜反射鏡
JP2013109004A (ja) * 2011-11-17 2013-06-06 Daishinku Corp 光学フィルタおよびその製造方法
JP6392912B2 (ja) * 2017-01-31 2018-09-19 学校法人東海大学 成膜方法
WO2020230443A1 (ja) 2019-05-16 2020-11-19 株式会社村田製作所 圧電デバイス
JPWO2021074953A1 (ja) * 2019-10-15 2021-11-04 学校法人東海大学 成膜方法及び成膜装置
JP7440399B2 (ja) * 2020-12-21 2024-02-28 グローブライド株式会社 釣具
JP7597700B2 (ja) * 2021-12-08 2024-12-10 グローブライド株式会社 釣具及び釣具の表面処理方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5910901A (ja) * 1982-07-12 1984-01-20 Nippon Kogaku Kk <Nikon> 光学積層物
JPS62124268A (ja) * 1985-11-25 1987-06-05 Toshiba Corp 五酸化タンタル膜の製造方法
JP3184031B2 (ja) * 1993-08-25 2001-07-09 富士通株式会社 光半導体素子装置及び光半導体装置の製造方法
JPH08254612A (ja) * 1995-03-15 1996-10-01 Canon Inc 多層膜光学部品およびその製造方法
JPH10206630A (ja) * 1996-11-19 1998-08-07 Asahi Optical Co Ltd 多層膜光学フィルター及びその形成方法並びに光源
JPH10186130A (ja) * 1996-12-25 1998-07-14 Toppan Printing Co Ltd 光干渉フィルターの製造方法
JP2003277911A (ja) * 2002-03-22 2003-10-02 Olympus Optical Co Ltd 光学薄膜
JP2005308968A (ja) * 2004-04-20 2005-11-04 Olympus Corp 光学多層膜及び光学素子

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