JP4792494B2 - 光変調器 - Google Patents
光変調器 Download PDFInfo
- Publication number
- JP4792494B2 JP4792494B2 JP2008276657A JP2008276657A JP4792494B2 JP 4792494 B2 JP4792494 B2 JP 4792494B2 JP 2008276657 A JP2008276657 A JP 2008276657A JP 2008276657 A JP2008276657 A JP 2008276657A JP 4792494 B2 JP4792494 B2 JP 4792494B2
- Authority
- JP
- Japan
- Prior art keywords
- optical waveguide
- main surface
- light
- substrate
- waveguide substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 claims description 229
- 239000000758 substrate Substances 0.000 claims description 149
- 230000001902 propagating effect Effects 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 19
- 239000012790 adhesive layer Substances 0.000 claims description 16
- 230000003014 reinforcing effect Effects 0.000 claims description 13
- 230000002787 reinforcement Effects 0.000 claims description 6
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 description 19
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 18
- 238000012545 processing Methods 0.000 description 12
- 229920005989 resin Polymers 0.000 description 11
- 239000011347 resin Substances 0.000 description 11
- 239000010936 titanium Substances 0.000 description 8
- 239000013078 crystal Substances 0.000 description 7
- OBTSLRFPKIKXSZ-UHFFFAOYSA-N lithium potassium Chemical compound [Li].[K] OBTSLRFPKIKXSZ-UHFFFAOYSA-N 0.000 description 7
- 239000013307 optical fiber Substances 0.000 description 7
- 230000000644 propagated effect Effects 0.000 description 7
- 238000013461 design Methods 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 229910052719 titanium Inorganic materials 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 4
- 238000000227 grinding Methods 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 239000006104 solid solution Substances 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 230000008033 biological extinction Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 238000000608 laser ablation Methods 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 150000003608 titanium Chemical class 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 229910052810 boron oxide Inorganic materials 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000001723 curing Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 229910000464 lead oxide Inorganic materials 0.000 description 1
- 238000004943 liquid phase epitaxy Methods 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Landscapes
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008276657A JP4792494B2 (ja) | 2007-11-01 | 2008-10-28 | 光変調器 |
| US12/260,276 US7764851B2 (en) | 2007-11-01 | 2008-10-29 | Optical modulators |
| EP08167961A EP2056159A1 (en) | 2007-11-01 | 2008-10-30 | Optical modulators |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007285036 | 2007-11-01 | ||
| JP2007285036 | 2007-11-01 | ||
| JP2008276657A JP4792494B2 (ja) | 2007-11-01 | 2008-10-28 | 光変調器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009134279A JP2009134279A (ja) | 2009-06-18 |
| JP2009134279A5 JP2009134279A5 (enrdf_load_stackoverflow) | 2010-08-05 |
| JP4792494B2 true JP4792494B2 (ja) | 2011-10-12 |
Family
ID=40866147
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008276657A Expired - Fee Related JP4792494B2 (ja) | 2007-11-01 | 2008-10-28 | 光変調器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4792494B2 (enrdf_load_stackoverflow) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011164388A (ja) | 2010-02-10 | 2011-08-25 | Fujitsu Optical Components Ltd | マッハツェンダ型光変調器 |
| JP2014194478A (ja) * | 2013-03-28 | 2014-10-09 | Fujitsu Optical Components Ltd | 光デバイスおよび送信機 |
| JP6232751B2 (ja) * | 2013-05-31 | 2017-11-22 | 富士通オプティカルコンポーネンツ株式会社 | 光変調器 |
| JP2017173661A (ja) * | 2016-03-25 | 2017-09-28 | 住友大阪セメント株式会社 | 光変調器 |
| CN113050222B (zh) * | 2021-04-16 | 2022-03-08 | 吉林大学 | 一种用于模分复用系统的可重构聚合物模式转换器 |
| WO2023244621A1 (en) | 2022-06-14 | 2023-12-21 | HyperLight Corporation | Optical device configured for stress mitigation |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2744309B2 (ja) * | 1989-12-08 | 1998-04-28 | 富士通株式会社 | 光導波路と受光素子の結合構造 |
| JPH0534526A (ja) * | 1991-07-30 | 1993-02-12 | Japan Aviation Electron Ind Ltd | 光表面実装用光学反射鏡形成方法 |
| JPH05134220A (ja) * | 1991-11-08 | 1993-05-28 | Fujitsu Ltd | 光送信機 |
| JP3995309B2 (ja) * | 1997-07-31 | 2007-10-24 | シャープ株式会社 | 光集積回路素子 |
| JP2003215518A (ja) * | 2001-11-16 | 2003-07-30 | Ngk Insulators Ltd | 光変調器および光変調方法 |
| JP2004163675A (ja) * | 2002-11-13 | 2004-06-10 | Ricoh Co Ltd | モニタ付有機導波路型光変調器および光変調装置および光集積回路 |
| JP4874685B2 (ja) * | 2005-03-25 | 2012-02-15 | 住友大阪セメント株式会社 | 光変調器 |
| JP4589884B2 (ja) * | 2006-02-21 | 2010-12-01 | 住友大阪セメント株式会社 | 光制御素子及びその製造方法 |
-
2008
- 2008-10-28 JP JP2008276657A patent/JP4792494B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009134279A (ja) | 2009-06-18 |
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