JP4780680B2 - 光変調器および光変調方法 - Google Patents
光変調器および光変調方法Info
- Publication number
- JP4780680B2 JP4780680B2 JP2008217713A JP2008217713A JP4780680B2 JP 4780680 B2 JP4780680 B2 JP 4780680B2 JP 2008217713 A JP2008217713 A JP 2008217713A JP 2008217713 A JP2008217713 A JP 2008217713A JP 4780680 B2 JP4780680 B2 JP 4780680B2
- Authority
- JP
- Japan
- Prior art keywords
- optical waveguide
- light
- slab
- optical
- waveguide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0121—Operation of devices; Circuit arrangements, not otherwise provided for in this subclass
- G02F1/0123—Circuits for the control or stabilisation of the bias voltage, e.g. automatic bias control [ABC] feedback loops
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
- G02F1/2255—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure controlled by a high-frequency electromagnetic component in an electric waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/50—Protective arrangements
- G02F2201/503—Arrangements improving the resistance to shock
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/42—Materials having a particular dielectric constant
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/21—Thermal instability, i.e. DC drift, of an optical modulator; Arrangements or methods for the reduction thereof
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Optical Integrated Circuits (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Optical Couplings Of Light Guides (AREA)
Description
ニオブ酸リチウム単結晶からなる支持基板、
ニオブ酸リチウム単結晶からなり、合波点から放射されるオフモードの光を導波し,厚さが3μm以上、20μm以下であり、一方の主面と他方の主面とを有するスラブ型光導波路、
少なくとも一対の分岐光導波路と、分岐光導波路の合波点とを含んでおり、前記スラブ型光導波路を構成するニオブ酸リチウム単結晶へのチタン拡散によって形成されている三次元光導波路、
三次元光導波路を伝搬する光を変調する信号電圧を印加するための変調用電極であって、スラブ型光導波路の前記一方の主面上に設けられている変調用電極、
支持基板とスラブ型光導波路の他方の主面とを接着し、スラブ型光導波路の屈折率よりも低い屈折率を有しており、スラブ型光導波路の下部クラッドである接着剤層、
スラブ型光導波路から放射される光を受光する光検知器、および
光検知器からの出力に基づいて、変調用電極に加わる直流バイアスを変化させることによって、光変調器の動作点を制御する制御装置を備えている。
2 支持基板 2a 支持基板2の表面 3 接着剤層 4 平板(スラブ型光導波路) 4a 平板の表面 4c 平板の端面 4d 平板の底面 5 三次元光導波路 5b、5c 一対の分岐光導波路 5f 分岐光導波路の合波点 6、11 信号光 7A、7B、7C 変調用電極 10 合波点から放射される光 13 合波点からの放射光に対する光検知器 15 制御装置 A 光検知器13からの信号 B 制御装置15からの制御信号
Claims (1)
- 三次元光導波路を伝搬する光に電圧を印加してこの光を変調する光変調器であって、
ニオブ酸リチウム単結晶からなる支持基板、
ニオブ酸リチウム単結晶からなり、前記合波点から放射されるオフモードの光を導波し,厚さが3μm以上、20μm以下であり、一方の主面と他方の主面とを有するスラブ型光導波路、
少なくとも一対の分岐光導波路と、分岐光導波路の合波点とを含んでおり、前記スラブ型光導波路を構成する前記ニオブ酸リチウム単結晶へのチタン拡散によって形成されている三次元光導波路、
前記三次元光導波路を伝搬する光を変調する信号電圧を印加するための変調用電極であって、前記スラブ型光導波路の前記一方の主面上に設けられている変調用電極、
前記支持基板と前記スラブ型光導波路の前記他方の主面とを接着し、前記スラブ型光導波路の屈折率よりも低い屈折率を有しており、前記スラブ型光導波路の下部クラッドである接着剤層、
前記スラブ型光導波路から放射される光を受光する光検知器、および
前記光検知器からの出力に基づいて、前記変調用電極に加わる直流バイアスを変化させることによって、前記光変調器の動作点を制御する制御装置を備えており、
前記光検知器へと光を伝送する1.55μm帯光ファイバーが前記スラブ型光導波路の光出射端面に取り付けられており、前記三次元光導波路が前記スラブ型光導波路の前記一方の主面側に設けられていることを特徴とする、光変調器。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008217713A JP4780680B2 (ja) | 2001-11-16 | 2008-08-27 | 光変調器および光変調方法 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001351142 | 2001-11-16 | ||
JP2001351142 | 2001-11-16 | ||
JP2008217713A JP4780680B2 (ja) | 2001-11-16 | 2008-08-27 | 光変調器および光変調方法 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002328683A Division JP2003215518A (ja) | 2001-11-16 | 2002-11-12 | 光変調器および光変調方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008282057A JP2008282057A (ja) | 2008-11-20 |
JP4780680B2 true JP4780680B2 (ja) | 2011-09-28 |
Family
ID=19163494
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008217713A Expired - Lifetime JP4780680B2 (ja) | 2001-11-16 | 2008-08-27 | 光変調器および光変調方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US6904186B2 (ja) |
EP (1) | EP1315021B1 (ja) |
JP (1) | JP4780680B2 (ja) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5278986B2 (ja) * | 2004-09-29 | 2013-09-04 | 日本碍子株式会社 | 光変調器 |
WO2006090863A1 (ja) * | 2005-02-22 | 2006-08-31 | Ngk Insulators, Ltd. | 光変調器 |
JP4183716B2 (ja) | 2006-03-29 | 2008-11-19 | 住友大阪セメント株式会社 | 光導波路素子 |
JP4847177B2 (ja) * | 2006-03-30 | 2011-12-28 | 住友大阪セメント株式会社 | 光変調素子 |
EP4220138A1 (en) * | 2006-09-01 | 2023-08-02 | Pacific Biosciences of California, Inc. | Substrates, systems and methods for analyzing materials |
US8207509B2 (en) | 2006-09-01 | 2012-06-26 | Pacific Biosciences Of California, Inc. | Substrates, systems and methods for analyzing materials |
JP5421595B2 (ja) * | 2007-02-14 | 2014-02-19 | 日本碍子株式会社 | 進行波型光変調器 |
JP2008209449A (ja) * | 2007-02-23 | 2008-09-11 | Ngk Insulators Ltd | 波長変換素子 |
JP4187771B2 (ja) * | 2007-03-30 | 2008-11-26 | 住友大阪セメント株式会社 | 光制御素子 |
JP4445977B2 (ja) * | 2007-03-30 | 2010-04-07 | 住友大阪セメント株式会社 | 光制御素子 |
JP4589354B2 (ja) * | 2007-03-30 | 2010-12-01 | 住友大阪セメント株式会社 | 光変調素子 |
US7764851B2 (en) * | 2007-11-01 | 2010-07-27 | Ngk Insulators, Ltd. | Optical modulators |
JP5166450B2 (ja) * | 2008-01-31 | 2013-03-21 | 日本碍子株式会社 | 光導波路デバイス |
CA2737505C (en) | 2008-09-16 | 2017-08-29 | Pacific Biosciences Of California, Inc. | Substrates and optical systems and methods of use thereof |
EP2537053B1 (en) | 2010-02-19 | 2016-11-02 | Pacific Biosciences of California, Inc. | An analytical device comprising an optode array chip |
US8994946B2 (en) | 2010-02-19 | 2015-03-31 | Pacific Biosciences Of California, Inc. | Integrated analytical system and method |
US9036954B2 (en) | 2011-04-01 | 2015-05-19 | Intel Corporation | Optical waveguide structure |
US9372308B1 (en) | 2012-06-17 | 2016-06-21 | Pacific Biosciences Of California, Inc. | Arrays of integrated analytical devices and methods for production |
EP2936222B1 (en) | 2012-12-18 | 2019-07-03 | Pacific Biosciences Of California, Inc. | An optical analytical device |
US9624540B2 (en) | 2013-02-22 | 2017-04-18 | Pacific Biosciences Of California, Inc. | Integrated illumination of optical analytical devices |
US9606068B2 (en) | 2014-08-27 | 2017-03-28 | Pacific Biosciences Of California, Inc. | Arrays of integrated analytical devices |
US9684220B2 (en) * | 2014-12-11 | 2017-06-20 | Intel Corporation | Electro-optical modulator with bias control |
EP4220256A1 (en) | 2015-03-16 | 2023-08-02 | Pacific Biosciences of California, Inc. | Analytical system comprising integrated devices and systems for free-space optical coupling |
CN114691585B (zh) | 2015-05-07 | 2023-10-13 | 加利福尼亚太平洋生物科学股份有限公司 | 多处理器流水线架构 |
EP4425153A2 (en) | 2015-06-12 | 2024-09-04 | Pacific Biosciences Of California, Inc. | Integrated target waveguide devices and systems for optical coupling |
JP2017129834A (ja) * | 2015-08-21 | 2017-07-27 | Tdk株式会社 | 光導波路素子およびこれを用いた光変調器 |
KR102562454B1 (ko) * | 2016-05-11 | 2023-08-01 | 엘지디스플레이 주식회사 | 표시장치 |
CN113281945A (zh) * | 2021-06-22 | 2021-08-20 | 北京世维通科技股份有限公司 | Mz型光强度调制器总成及制备方法 |
CN113281946A (zh) * | 2021-06-22 | 2021-08-20 | 北京世维通科技股份有限公司 | Mz型光强度调制器总成 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2738078B2 (ja) | 1989-11-01 | 1998-04-08 | 富士通株式会社 | 光変調器 |
JP2800368B2 (ja) | 1990-05-18 | 1998-09-21 | 富士通株式会社 | 光変調器 |
KR0134763B1 (ko) * | 1992-04-21 | 1998-04-23 | 다니이 아끼오 | 광도파로소자와 그 제조방법 |
US5515195A (en) * | 1993-06-25 | 1996-05-07 | Optivision Incorporated | Optical bus using controllable optical devices |
US5488503A (en) * | 1995-02-09 | 1996-01-30 | Hughes Aircraft Company | Low-power, stabilized, photonic modulator system |
US5627929A (en) | 1995-05-04 | 1997-05-06 | Sandia Corporation | Integrated optical XY coupler |
JP3717605B2 (ja) * | 1996-09-05 | 2005-11-16 | 富士通株式会社 | 光変調器モジュール |
JP3742477B2 (ja) * | 1997-02-17 | 2006-02-01 | 富士通株式会社 | 光変調器 |
DE60021996T2 (de) | 1999-12-15 | 2006-06-08 | Ngk Insulators, Ltd., Nagoya | Optischer Wanderwellenmodulator und Verfahren zu seiner Herstellung |
JP4408558B2 (ja) * | 1999-12-15 | 2010-02-03 | 日本碍子株式会社 | 進行波形光変調器およびその製造方法 |
JP2001209018A (ja) * | 2000-01-26 | 2001-08-03 | Nec Corp | モニタ付き光変調器 |
JP3696024B2 (ja) | 2000-02-02 | 2005-09-14 | 住友大阪セメント株式会社 | 出力光モニタ付光導波路型変調器 |
JP4375597B2 (ja) * | 2001-11-16 | 2009-12-02 | 日本碍子株式会社 | 光導波路デバイスおよび進行波形光変調器 |
-
2002
- 2002-11-12 US US10/291,678 patent/US6904186B2/en not_active Expired - Lifetime
- 2002-11-14 EP EP02257849.6A patent/EP1315021B1/en not_active Expired - Lifetime
-
2008
- 2008-08-27 JP JP2008217713A patent/JP4780680B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1315021A3 (en) | 2004-01-28 |
US6904186B2 (en) | 2005-06-07 |
JP2008282057A (ja) | 2008-11-20 |
US20030138180A1 (en) | 2003-07-24 |
EP1315021B1 (en) | 2014-10-08 |
EP1315021A2 (en) | 2003-05-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4780680B2 (ja) | 光変調器および光変調方法 | |
JP4911529B2 (ja) | 光変調器 | |
JP4375597B2 (ja) | 光導波路デバイスおよび進行波形光変調器 | |
JP3742477B2 (ja) | 光変調器 | |
JP3199402B2 (ja) | マッハツェンダー型光導波路デバイス | |
WO2012124830A1 (ja) | 光変調素子 | |
JP2800368B2 (ja) | 光変調器 | |
JP2738078B2 (ja) | 光変調器 | |
US7474812B2 (en) | Monitor photodetector equipped optical modulator | |
JP4792494B2 (ja) | 光変調器 | |
JP2001215371A (ja) | モニタ付光導波路型素子 | |
JP2003215518A (ja) | 光変調器および光変調方法 | |
US7764851B2 (en) | Optical modulators | |
CN101523262A (zh) | 光学器件及光学器件的制造方法 | |
JP5133930B2 (ja) | 光変調器モジュール | |
JP2002182050A (ja) | 出力光モニタ付光導波路型素子 | |
JP4987335B2 (ja) | 光デバイス | |
JP4536679B2 (ja) | 光導波路型光変調器及び出力光モニタ付光導波路型光変調器 | |
JP5168076B2 (ja) | 光スイッチ、光スイッチの製造方法、画像表示装置及び画像形成装置 | |
JPH01276117A (ja) | 音響光学素子 | |
JPH11281854A (ja) | 光ファイバ接続装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20080827 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100805 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20101001 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20101006 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20101026 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20110630 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20110630 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140715 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4780680 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
EXPY | Cancellation because of completion of term |