JP4789424B2 - 気体圧力測定装置及び気体圧力測定方法 - Google Patents

気体圧力測定装置及び気体圧力測定方法 Download PDF

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Publication number
JP4789424B2
JP4789424B2 JP2004104139A JP2004104139A JP4789424B2 JP 4789424 B2 JP4789424 B2 JP 4789424B2 JP 2004104139 A JP2004104139 A JP 2004104139A JP 2004104139 A JP2004104139 A JP 2004104139A JP 4789424 B2 JP4789424 B2 JP 4789424B2
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acoustic wave
surface acoustic
gas
path
pressure
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JP2004104139A
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Japanese (ja)
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JP2005291790A (ja
JP2005291790A5 (https=
Inventor
教尊 中曽
慎悟 赤尾
一司 山中
宣生 竹田
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Toppan Inc
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Toppan Inc
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JP2004104139A 2004-03-31 2004-03-31 気体圧力測定装置及び気体圧力測定方法 Expired - Lifetime JP4789424B2 (ja)

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JP2004104139A JP4789424B2 (ja) 2004-03-31 2004-03-31 気体圧力測定装置及び気体圧力測定方法

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JP2004104139A JP4789424B2 (ja) 2004-03-31 2004-03-31 気体圧力測定装置及び気体圧力測定方法

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JP2005291790A JP2005291790A (ja) 2005-10-20
JP2005291790A5 JP2005291790A5 (https=) 2005-12-02
JP4789424B2 true JP4789424B2 (ja) 2011-10-12

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008026100A (ja) * 2006-07-20 2008-02-07 Toppan Printing Co Ltd 真空度測定装置
JP4952124B2 (ja) * 2006-08-04 2012-06-13 凸版印刷株式会社 弾性表面波素子

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06103230B2 (ja) * 1990-11-30 1994-12-14 日本電素工業株式会社 ストレンゲージ
EP1154570B1 (en) * 1999-12-17 2016-03-09 Tohoku Techno Arch Co., Ltd. Saw device
JP3823699B2 (ja) * 2000-07-12 2006-09-20 凸版印刷株式会社 球状弾性表面波素子
JP3974766B2 (ja) * 2001-10-09 2007-09-12 凸版印刷株式会社 弾性表面波素子
JP3772780B2 (ja) * 2002-03-29 2006-05-10 凸版印刷株式会社 マイクロフルーイッドチップ及びマイクロフルーイッドチップアレイ
US20070041870A1 (en) * 2003-03-26 2007-02-22 Kazushi Yamanaka Sensor head, gas sensor and sensor unit
JP4426803B2 (ja) * 2003-09-19 2010-03-03 凸版印刷株式会社 弾性表面波素子及び弾性表面波素子を用いた環境差異検出装置
JP4426802B2 (ja) * 2003-09-19 2010-03-03 凸版印刷株式会社 弾性表面波素子及び弾性表面波素子を用いた環境差異検出装置
JP4389552B2 (ja) * 2003-11-11 2009-12-24 凸版印刷株式会社 弾性波素子および弾性波素子を用いた環境差異検出装置
JP4495948B2 (ja) * 2003-11-12 2010-07-07 凸版印刷株式会社 弾性表面波素子アレイ
KR100535405B1 (ko) * 2003-12-30 2005-12-08 현대자동차주식회사 타이어의 압력 및 온도 측정용 표면탄성파 센서

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