JP4765166B2 - 塗液の塗布装置 - Google Patents

塗液の塗布装置 Download PDF

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Publication number
JP4765166B2
JP4765166B2 JP2000383508A JP2000383508A JP4765166B2 JP 4765166 B2 JP4765166 B2 JP 4765166B2 JP 2000383508 A JP2000383508 A JP 2000383508A JP 2000383508 A JP2000383508 A JP 2000383508A JP 4765166 B2 JP4765166 B2 JP 4765166B2
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JP
Japan
Prior art keywords
substrate
detection
coating
coating liquid
lifting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000383508A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002177861A (ja
JP2002177861A5 (cg-RX-API-DMAC7.html
Inventor
佳久 東田
辰哉 宮川
泰樹 清水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2000383508A priority Critical patent/JP4765166B2/ja
Publication of JP2002177861A publication Critical patent/JP2002177861A/ja
Publication of JP2002177861A5 publication Critical patent/JP2002177861A5/ja
Application granted granted Critical
Publication of JP4765166B2 publication Critical patent/JP4765166B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
  • Gas-Filled Discharge Tubes (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2000383508A 2000-12-18 2000-12-18 塗液の塗布装置 Expired - Fee Related JP4765166B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000383508A JP4765166B2 (ja) 2000-12-18 2000-12-18 塗液の塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000383508A JP4765166B2 (ja) 2000-12-18 2000-12-18 塗液の塗布装置

Publications (3)

Publication Number Publication Date
JP2002177861A JP2002177861A (ja) 2002-06-25
JP2002177861A5 JP2002177861A5 (cg-RX-API-DMAC7.html) 2008-02-07
JP4765166B2 true JP4765166B2 (ja) 2011-09-07

Family

ID=18851153

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000383508A Expired - Fee Related JP4765166B2 (ja) 2000-12-18 2000-12-18 塗液の塗布装置

Country Status (1)

Country Link
JP (1) JP4765166B2 (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010171172A (ja) * 2009-01-22 2010-08-05 Eisaku Hibi 部品保持治具及び、該部品保持治具を用いた負圧吸着装置
JP6765926B2 (ja) * 2016-10-07 2020-10-07 株式会社ディスコ 加工装置
CN106733495A (zh) * 2016-12-22 2017-05-31 重庆淳祥电子科技有限公司 一种带供油墨系统的传送装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09252043A (ja) * 1996-03-14 1997-09-22 Nikon Corp 位置決め方法
JP3646747B2 (ja) * 1995-11-28 2005-05-11 東レ株式会社 塗布装置および塗布方法並びにカラーフィルタの製造装置およびその製造方法
JPH10233163A (ja) * 1996-12-17 1998-09-02 Toray Ind Inc プラズマディスプレイの製造方法および製造装置
JPH1157533A (ja) * 1997-08-14 1999-03-02 Able:Kk 薄膜形成装置用塗布ノズルおよびこの塗布ノズルを用いた薄膜形成装置

Also Published As

Publication number Publication date
JP2002177861A (ja) 2002-06-25

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