JP4750131B2 - 3軸磁気センサのための単一パッケージの設計 - Google Patents
3軸磁気センサのための単一パッケージの設計 Download PDFInfo
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- JP4750131B2 JP4750131B2 JP2007548309A JP2007548309A JP4750131B2 JP 4750131 B2 JP4750131 B2 JP 4750131B2 JP 2007548309 A JP2007548309 A JP 2007548309A JP 2007548309 A JP2007548309 A JP 2007548309A JP 4750131 B2 JP4750131 B2 JP 4750131B2
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- sensor
- axis sensor
- substrate
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/04—Measuring direction or magnitude of magnetic fields or magnetic flux using the flux-gate principle
- G01R33/05—Measuring direction or magnitude of magnetic fields or magnetic flux using the flux-gate principle in thin-film element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/025—Compensating stray fields
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C17/00—Compasses; Devices for ascertaining true or magnetic north for navigation or surveying purposes
- G01C17/02—Magnetic compasses
- G01C17/28—Electromagnetic compasses
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/0206—Three-component magnetometers
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/18—Printed circuits structurally associated with non-printed electric components
- H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
- H05K1/183—Components mounted in and supported by recessed areas of the printed circuit board
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10007—Types of components
- H05K2201/10151—Sensor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/341—Surface mounted components
- H05K3/3431—Leadless components
- H05K3/3436—Leadless components having an array of bottom contacts, e.g. pad grid array or ball grid array components
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Electromagnetism (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Measuring Magnetic Variables (AREA)
- Structures For Mounting Electric Components On Printed Circuit Boards (AREA)
Description
Claims (3)
- 堅固な基板上にZ軸センサを取り付けることにより、センサパッケージを製造する方法であって、該堅固な基板はその上面に取り付けられたX軸センサ及びY軸センサを有するものであり、前記方法は、
前記堅固な基板の上面に溝を切り出す工程、
溝の最上部辺縁部に孔を作成する工程、
前記孔にハンダを充填する工程、
Z軸センサの1つの辺縁部にのみ入力/出力パッドを形成する工程、
前記入力/出力パッド上にハンダバンプを配置する工程、
Z軸センサを溝内へ挿入し、バンプ付き前記入力/出力パッドを基板の上面に位置させ、ハンダが充填された孔に導通させる工程、を含み、前記堅固な基板の前記上面からの前記Z軸センサの高さが、前記基板の前記上面に取り付けられた前記X軸センサおよび前記Y軸センサの高さにほぼ等しく、
前記方法はさらに、センサパッケージを封入する工程、を含む方法。 - 請求項1の方法であって、前記溝を切り出す工程は、Z軸センサの厚さに相当する幅を有する溝を作る工程を含み、溝の深さは、溝内に位置されたZ軸センサが前記堅固な基板の前記上面の上に、前記基板の前記上面に取り付けられた前記X軸センサおよび前記Y軸センサの高さにほぼ等しくなる程度に延びる、深さである、方法。
- 封入されたセンサパッケージの全高が1.2mm未満である請求項1の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/022,495 | 2004-12-22 | ||
US11/022,495 US7271586B2 (en) | 2003-12-04 | 2004-12-22 | Single package design for 3-axis magnetic sensor |
PCT/US2005/045372 WO2006068909A1 (en) | 2004-12-22 | 2005-12-15 | Single package design for 3-axis magnetic sensor |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2008525800A JP2008525800A (ja) | 2008-07-17 |
JP2008525800A5 JP2008525800A5 (ja) | 2008-09-04 |
JP4750131B2 true JP4750131B2 (ja) | 2011-08-17 |
Family
ID=36096213
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007548309A Active JP4750131B2 (ja) | 2004-12-22 | 2005-12-15 | 3軸磁気センサのための単一パッケージの設計 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7271586B2 (ja) |
EP (1) | EP1839064B1 (ja) |
JP (1) | JP4750131B2 (ja) |
KR (1) | KR101167490B1 (ja) |
CN (1) | CN101120263B (ja) |
WO (1) | WO2006068909A1 (ja) |
Families Citing this family (33)
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BRPI0608019A2 (pt) * | 2005-03-17 | 2009-11-03 | Yamaha Corp | sensor magnético e método para manufaturar um sensor magnético |
JP4904052B2 (ja) * | 2005-12-27 | 2012-03-28 | アルプス電気株式会社 | 磁気方位検出装置 |
EP2116858B1 (en) * | 2007-02-14 | 2013-01-02 | Alps Electric Co., Ltd. | Sensor chip, detecting device, and method for manufacturing detecting device |
US20090072823A1 (en) * | 2007-09-17 | 2009-03-19 | Honeywell International Inc. | 3d integrated compass package |
US7564237B2 (en) * | 2007-10-23 | 2009-07-21 | Honeywell International Inc. | Integrated 3-axis field sensor and fabrication methods |
US7790502B2 (en) * | 2007-12-10 | 2010-09-07 | Honeywell International Inc. | Method of manufacturing flexible semiconductor assemblies |
KR100950676B1 (ko) * | 2008-01-07 | 2010-03-31 | 에스티에스반도체통신 주식회사 | 3축 지자기 센서 및 그 제조 방법 |
JP5154275B2 (ja) * | 2008-03-24 | 2013-02-27 | アルプス電気株式会社 | 磁気センサパッケージ |
US7994773B2 (en) | 2008-07-11 | 2011-08-09 | Data Security, Inc. | Apparatus and method for in-field magnetic measurements |
US8963544B2 (en) * | 2008-09-29 | 2015-02-24 | The Research Institute For Electric And Magnetic Materials | Signal transmission device |
US8703543B2 (en) * | 2009-07-14 | 2014-04-22 | Honeywell International Inc. | Vertical sensor assembly method |
KR101107747B1 (ko) * | 2009-07-30 | 2012-01-20 | (주)파트론 | 플립 본딩 방식으로 실장된 플럭스게이트 소자를 갖는 전자 나침반 패키지 및 이의 제조 방법 |
KR101090990B1 (ko) * | 2009-10-27 | 2011-12-13 | 주식회사 아모센스 | 지자기 센서 및 그의 제조방법 |
US20110147867A1 (en) * | 2009-12-23 | 2011-06-23 | Everspin Technologies, Inc. | Method of vertically mounting an integrated circuit |
US20110234218A1 (en) * | 2010-03-24 | 2011-09-29 | Matthieu Lagouge | Integrated multi-axis hybrid magnetic field sensor |
US20120105058A1 (en) * | 2010-10-29 | 2012-05-03 | Iakov Veniaminovitch Kopelevitch | Magnetic field sensing |
DE102011001422A1 (de) * | 2011-03-21 | 2012-09-27 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Sensormodul und Verfahren zum Herstellen eines Sensormoduls |
US8316552B1 (en) | 2011-05-05 | 2012-11-27 | Honeywell International Inc. | Systems and methods for three-axis sensor chip packages |
CN102214589B (zh) * | 2011-05-31 | 2013-04-24 | 华亚平 | 垂直芯片电子封装方法 |
US8459112B2 (en) | 2011-06-09 | 2013-06-11 | Honeywell International Inc. | Systems and methods for three dimensional sensors |
US9360345B2 (en) | 2011-10-10 | 2016-06-07 | Honeywell International Inc. | Extended smart position sensing range using electromagnetics |
US20140005527A1 (en) * | 2012-06-29 | 2014-01-02 | General Electric Company | Method and system for dynamic referencing and registration used with surgical and interventional procedures |
US8618795B1 (en) * | 2012-06-29 | 2013-12-31 | General Electric Company | Sensor assembly for use in medical position and orientation tracking |
CN104755948B (zh) | 2012-10-12 | 2018-04-10 | 美新公司 | 单晶三轴磁场传感器 |
ITTO20121067A1 (it) | 2012-12-12 | 2014-06-13 | St Microelectronics Srl | Sensore magnetoresistivo integrato in una piastrina per il rilevamento di campi magnetici perpendicolari alla piastrina nonche' suo procedimento di fabbricazione |
JP6373642B2 (ja) * | 2013-08-05 | 2018-08-15 | ローム株式会社 | 半導体装置 |
CN104375098B (zh) * | 2013-08-15 | 2018-11-02 | 上海矽睿科技有限公司 | 磁传感装置及该装置的制备工艺 |
US10288697B2 (en) | 2015-01-13 | 2019-05-14 | Stmicroelectronics S.R.L. | AMR-type integrated magnetoresistive sensor for detecting magnetic fields perpendicular to the chip |
CN105607015A (zh) * | 2016-01-19 | 2016-05-25 | 三峡大学 | 一种三维空间磁场测量系统 |
CN106405453A (zh) * | 2016-11-15 | 2017-02-15 | 上海交通大学 | 一种三轴磁通门传感器 |
JP6932561B2 (ja) | 2017-06-15 | 2021-09-08 | キヤノン電子株式会社 | 3軸磁気検出装置および人工衛星 |
US11543465B2 (en) * | 2019-04-05 | 2023-01-03 | The Regents Of The University Of Michigan | Encapsulation methods for fluid-communicating magnetoelastic sensors |
JP7302330B2 (ja) * | 2019-06-26 | 2023-07-04 | Tdk株式会社 | 複合センサーモジュール |
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JPS61150382A (ja) * | 1984-12-25 | 1986-07-09 | Agency Of Ind Science & Technol | 触覚センサと基板との接続方法 |
US5850624A (en) * | 1995-10-18 | 1998-12-15 | The Charles Machine Works, Inc. | Electronic compass |
JP2004006752A (ja) * | 2002-03-27 | 2004-01-08 | Yamaha Corp | 磁気センサおよびその製造方法 |
JP2004151008A (ja) * | 2002-10-31 | 2004-05-27 | Ricoh Co Ltd | Miセンサ、miセンサ用のicチップおよびそのmiセンサを備えた電子装置 |
JP2004271481A (ja) * | 2003-03-12 | 2004-09-30 | Citizen Watch Co Ltd | 3軸磁気センサー |
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-
2004
- 2004-12-22 US US11/022,495 patent/US7271586B2/en active Active
-
2005
- 2005-12-15 WO PCT/US2005/045372 patent/WO2006068909A1/en active Application Filing
- 2005-12-15 CN CN2005800481462A patent/CN101120263B/zh active Active
- 2005-12-15 KR KR1020077015981A patent/KR101167490B1/ko active IP Right Grant
- 2005-12-15 JP JP2007548309A patent/JP4750131B2/ja active Active
- 2005-12-15 EP EP05854146A patent/EP1839064B1/en active Active
Patent Citations (5)
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JPS61150382A (ja) * | 1984-12-25 | 1986-07-09 | Agency Of Ind Science & Technol | 触覚センサと基板との接続方法 |
US5850624A (en) * | 1995-10-18 | 1998-12-15 | The Charles Machine Works, Inc. | Electronic compass |
JP2004006752A (ja) * | 2002-03-27 | 2004-01-08 | Yamaha Corp | 磁気センサおよびその製造方法 |
JP2004151008A (ja) * | 2002-10-31 | 2004-05-27 | Ricoh Co Ltd | Miセンサ、miセンサ用のicチップおよびそのmiセンサを備えた電子装置 |
JP2004271481A (ja) * | 2003-03-12 | 2004-09-30 | Citizen Watch Co Ltd | 3軸磁気センサー |
Also Published As
Publication number | Publication date |
---|---|
KR101167490B1 (ko) | 2012-07-19 |
EP1839064A1 (en) | 2007-10-03 |
CN101120263B (zh) | 2012-06-13 |
WO2006068909A1 (en) | 2006-06-29 |
KR20070093422A (ko) | 2007-09-18 |
EP1839064B1 (en) | 2011-09-21 |
US7271586B2 (en) | 2007-09-18 |
JP2008525800A (ja) | 2008-07-17 |
CN101120263A (zh) | 2008-02-06 |
US20050122101A1 (en) | 2005-06-09 |
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