JP4729337B2 - ジンバル機構を備えた転写装置及び同装置を用いる転写方法 - Google Patents

ジンバル機構を備えた転写装置及び同装置を用いる転写方法 Download PDF

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Publication number
JP4729337B2
JP4729337B2 JP2005132974A JP2005132974A JP4729337B2 JP 4729337 B2 JP4729337 B2 JP 4729337B2 JP 2005132974 A JP2005132974 A JP 2005132974A JP 2005132974 A JP2005132974 A JP 2005132974A JP 4729337 B2 JP4729337 B2 JP 4729337B2
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JP
Japan
Prior art keywords
mold
frame
gimbal
movable body
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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JP2005132974A
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English (en)
Japanese (ja)
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JP2006305930A5 (enExample
JP2006305930A (ja
Inventor
光典 小久保
幸生 飯村
政和 鐘本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
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Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP2005132974A priority Critical patent/JP4729337B2/ja
Priority to US11/403,984 priority patent/US7648354B2/en
Priority to TW095114106A priority patent/TWI295623B/zh
Priority to KR1020060037888A priority patent/KR100747855B1/ko
Priority to DE102006019644.9A priority patent/DE102006019644B4/de
Publication of JP2006305930A publication Critical patent/JP2006305930A/ja
Publication of JP2006305930A5 publication Critical patent/JP2006305930A5/ja
Priority to US12/633,183 priority patent/US8318074B2/en
Application granted granted Critical
Publication of JP4729337B2 publication Critical patent/JP4729337B2/ja
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  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2005132974A 2005-04-28 2005-04-28 ジンバル機構を備えた転写装置及び同装置を用いる転写方法 Expired - Lifetime JP4729337B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2005132974A JP4729337B2 (ja) 2005-04-28 2005-04-28 ジンバル機構を備えた転写装置及び同装置を用いる転写方法
US11/403,984 US7648354B2 (en) 2005-04-28 2006-04-14 Transfer apparatus having gimbal mechanism and transfer method using the transfer apparatus
TW095114106A TWI295623B (en) 2005-04-28 2006-04-20 Transfer apparatus having gimbal mechanism and transfer method using the transfer apparatus
DE102006019644.9A DE102006019644B4 (de) 2005-04-28 2006-04-27 Übertragungseinrichung mit einem Kardangelenkmechanismus und Übertragungsverfahren unter Verwendung der Übertragungseinrichtung
KR1020060037888A KR100747855B1 (ko) 2005-04-28 2006-04-27 짐벌 기구를 구비한 전사 장치 및 전사 장치를 이용한 전사방법
US12/633,183 US8318074B2 (en) 2005-04-28 2009-12-08 Transfer apparatus having gimbal mechanism and transfer method using the transfer apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005132974A JP4729337B2 (ja) 2005-04-28 2005-04-28 ジンバル機構を備えた転写装置及び同装置を用いる転写方法

Publications (3)

Publication Number Publication Date
JP2006305930A JP2006305930A (ja) 2006-11-09
JP2006305930A5 JP2006305930A5 (enExample) 2008-05-15
JP4729337B2 true JP4729337B2 (ja) 2011-07-20

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JP2005132974A Expired - Lifetime JP4729337B2 (ja) 2005-04-28 2005-04-28 ジンバル機構を備えた転写装置及び同装置を用いる転写方法

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JP (1) JP4729337B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108962812B (zh) * 2018-09-06 2023-06-27 重庆科技学院 一种旋转型芯片卡具的使用方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63261405A (ja) * 1987-04-17 1988-10-28 Sanyo Mach Works Ltd 昇降位置決め装置
NL9100366A (nl) * 1991-02-28 1992-09-16 Philips & Du Pont Optical Werkwijze voor het vervaardigen van een schijfvormige informatiedrager, informatiedrager vervaardigd volgens de werkwijze en inrichting voor het uitvoeren van de werkwijze.
JPH08259245A (ja) * 1995-03-24 1996-10-08 Olympus Optical Co Ltd 光学素子成形装置の偏芯調整機構
JP3558936B2 (ja) * 1999-11-10 2004-08-25 日本電信電話株式会社 薄膜形成装置
JP4395704B2 (ja) * 2002-05-17 2010-01-13 コニカミノルタホールディングス株式会社 成形装置
US6939120B1 (en) * 2002-09-12 2005-09-06 Komag, Inc. Disk alignment apparatus and method for patterned media production
JPWO2004093171A1 (ja) * 2003-04-11 2006-07-06 Ｓｃｉｖａｘ株式会社 パターン形成装置、パターン形成方法
JP4313109B2 (ja) * 2003-08-01 2009-08-12 明昌機工株式会社 高精度プレス機
JP2005101201A (ja) * 2003-09-24 2005-04-14 Canon Inc ナノインプリント装置
JP4713102B2 (ja) * 2004-07-29 2011-06-29 Ｓｃｉｖａｘ株式会社 傾き調整機能付きプレス装置、傾き調整機能付きパターン形成装置、型の傾き調整方法

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JP2006305930A (ja) 2006-11-09

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