JP4724369B2 - 導電粒子の製造方法 - Google Patents
導電粒子の製造方法 Download PDFInfo
- Publication number
- JP4724369B2 JP4724369B2 JP2004015152A JP2004015152A JP4724369B2 JP 4724369 B2 JP4724369 B2 JP 4724369B2 JP 2004015152 A JP2004015152 A JP 2004015152A JP 2004015152 A JP2004015152 A JP 2004015152A JP 4724369 B2 JP4724369 B2 JP 4724369B2
- Authority
- JP
- Japan
- Prior art keywords
- particles
- conductive
- insulating
- insulating layer
- core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002245 particle Substances 0.000 title claims description 68
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000010419 fine particle Substances 0.000 claims description 30
- 238000009396 hybridization Methods 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 13
- 239000002313 adhesive film Substances 0.000 description 17
- 238000009413 insulation Methods 0.000 description 14
- 239000000853 adhesive Substances 0.000 description 13
- 230000001070 adhesive effect Effects 0.000 description 13
- 229920005989 resin Polymers 0.000 description 11
- 239000011347 resin Substances 0.000 description 11
- 238000007747 plating Methods 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 8
- 239000002184 metal Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000004840 adhesive resin Substances 0.000 description 4
- 229920006223 adhesive resin Polymers 0.000 description 4
- 229920006026 co-polymeric resin Polymers 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000007771 core particle Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229920002379 silicone rubber Polymers 0.000 description 2
- 239000004945 silicone rubber Substances 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229920005573 silicon-containing polymer Polymers 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J9/00—Adhesives characterised by their physical nature or the effects produced, e.g. glue sticks
- C09J9/02—Electrically-conducting adhesives
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/20—Conductive material dispersed in non-conductive organic material
- H01B1/22—Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L24/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R4/00—Electrically-conductive connections between two or more conductive members in direct contact, i.e. touching one another; Means for effecting or maintaining such contact; Electrically-conductive connections having two or more spaced connecting locations for conductors and using contact members penetrating insulation
- H01R4/04—Electrically-conductive connections between two or more conductive members in direct contact, i.e. touching one another; Means for effecting or maintaining such contact; Electrically-conductive connections having two or more spaced connecting locations for conductors and using contact members penetrating insulation using electrically conductive adhesives
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/321—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives
- H05K3/323—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives by applying an anisotropic conductive adhesive layer over an array of pads
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/2919—Material with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/29198—Material with a principal constituent of the material being a combination of two or more materials in the form of a matrix with a filler, i.e. being a hybrid material, e.g. segmented structures, foams
- H01L2224/29298—Fillers
- H01L2224/29399—Coating material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73203—Bump and layer connectors
- H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/831—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus
- H01L2224/83101—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus as prepeg comprising a layer connector, e.g. provided in an insulating plate member
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01004—Beryllium [Be]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01049—Indium [In]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/0105—Tin [Sn]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01051—Antimony [Sb]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/06—Polymers
- H01L2924/0665—Epoxy resin
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/06—Polymers
- H01L2924/078—Adhesive characteristics other than chemical
- H01L2924/07802—Adhesive characteristics other than chemical not being an ohmic electrical conductor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/06—Polymers
- H01L2924/078—Adhesive characteristics other than chemical
- H01L2924/0781—Adhesive characteristics other than chemical being an ohmic electrical conductor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/06—Polymers
- H01L2924/078—Adhesive characteristics other than chemical
- H01L2924/0781—Adhesive characteristics other than chemical being an ohmic electrical conductor
- H01L2924/07811—Extrinsic, i.e. with electrical conductive fillers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/02—Fillers; Particles; Fibers; Reinforcement materials
- H05K2201/0203—Fillers and particles
- H05K2201/0206—Materials
- H05K2201/0209—Inorganic, non-metallic particles
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/02—Fillers; Particles; Fibers; Reinforcement materials
- H05K2201/0203—Fillers and particles
- H05K2201/0206—Materials
- H05K2201/0224—Conductive particles having an insulating coating
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Physics & Mathematics (AREA)
- Dispersion Chemistry (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Non-Insulated Conductors (AREA)
- Combinations Of Printed Boards (AREA)
- Wire Bonding (AREA)
- Conductive Materials (AREA)
- Adhesive Tapes (AREA)
Description
なお、本発明の導電粒子は、ペースト状又はフィルム状の異方導電性接着剤のいずれにも使用することができるものである。
図1(a)(b)に示すように、本発明の異方性導電接着フィルム1は、一対の回路基板11、21の接続電極12、22の電気的な接続に用いられるもので、フィルム状の絶縁性接着剤樹脂2中に導電粒子3が分散されている。
この異方導電性接着フィルム1を用いて接続電極12、22の接続を行うには、図1(a)に示すように、回路基板11、21の間に異方導電性接着フィルム1を配置した状態で、回路基板11、21同士を熱圧着する。これにより、絶縁性接着剤樹脂2によって回路基板11、21が接着されるとともに、導電粒子3によって接続電極12、22が電気的に接続される。
図2に示すように、本実施の形態の導電粒子3は、導電性の表面を有する導電性核体30を有している。
図3(a)に示すように、まず、上記樹脂粒子30Aを核体としてその表面に金属めっき3Bを施した導電性核体30を用意する。
図5(a)に示すように、本実施の形態においても、上記樹脂粒子30Aを核体としてその表面に金属めっき3Bを施した導電性核体30を用意する。
<実施例1>
平均粒子径5μmのシリコーンゴムからなる絶縁性核体に金めっきを施した粒子に、アクリル−スチレン共重合体樹脂からなる厚さ1μmの絶縁層を形成した核体粒子を用意した。
そして、この異方性導電接着フィルムをスリット状に切断して実施例とした。
上記絶縁性核体に金めっきを施した粒子の表面に、上記ハイブリダイゼーションシステムを用いてアクリル−スチレン共重合体樹脂からなる厚さ1μmの絶縁層を形成した。
上記絶縁性核体に金めっきを施した粒子と、上記アクリル−スチレン共重合体樹脂の粒子と、上記SiO2粒子を上記ハイブリダイゼーションシステムに投入して導電粒子を作成した。
絶縁層を有しない導電粒子を用いた以外は実施例と同一の方法によって比較例1の異方導電性接着フィルムを作成した。
SiO2粒子が埋め込まれていない導電粒子を用いた以外は実施例1と同一の方法によって比較例2の異方導電性接着フィルムを作成した。
表1に示すように、実施例1〜3の異方性導電接着フィルムは、絶縁性が良く、また導通信頼性も良好であった。
2 絶縁性接着剤樹脂
3 導電粒子
30 導電性核体
30A 樹脂粒子(絶縁層核体)
30B 金属めっき(導電層)
31 絶縁層
32 絶縁性微粒子
Claims (1)
- 導電性核体と、当該導電性核体上に形成される絶縁層を構成する絶縁性粒子と、当該絶縁層に埋め込まれる絶縁性微粒子とを、ハイブリダイゼーション処理によって同時に処理することにより、前記導電性核体上の絶縁層に前記絶縁性微粒子を埋め込む工程を有することを特徴とする導電粒子の製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004015152A JP4724369B2 (ja) | 2003-09-29 | 2004-01-23 | 導電粒子の製造方法 |
PCT/JP2004/013800 WO2005031759A1 (ja) | 2003-09-29 | 2004-09-22 | 導電粒子及びこれを用いた異方導電性接着剤 |
TW093128697A TWI366835B (en) | 2003-09-29 | 2004-09-22 | Method for producing conductive particles |
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003336880 | 2003-09-29 | ||
JP2003336880 | 2003-09-29 | ||
JP2003424278 | 2003-12-22 | ||
JP2003424278 | 2003-12-22 | ||
JP2004015152A JP4724369B2 (ja) | 2003-09-29 | 2004-01-23 | 導電粒子の製造方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005209491A JP2005209491A (ja) | 2005-08-04 |
JP2005209491A5 JP2005209491A5 (ja) | 2006-03-23 |
JP4724369B2 true JP4724369B2 (ja) | 2011-07-13 |
Family
ID=34396839
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004015152A Expired - Lifetime JP4724369B2 (ja) | 2003-09-29 | 2004-01-23 | 導電粒子の製造方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4724369B2 (ja) |
TW (1) | TWI366835B (ja) |
WO (1) | WO2005031759A1 (ja) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100722493B1 (ko) * | 2005-09-02 | 2007-05-28 | 제일모직주식회사 | 절연 전도성 미립자 및 이를 이용한 이방 전도성 접착필름 |
JP4636183B2 (ja) * | 2006-09-26 | 2011-02-23 | 日立化成工業株式会社 | 異方導電性接着剤組成物、異方導電性フィルム、回路部材の接続構造、及び、被覆粒子の製造方法 |
JP2008120990A (ja) * | 2006-10-17 | 2008-05-29 | Hitachi Chem Co Ltd | 異方導電性接着剤組成物、異方導電性フィルム、回路部材の接続構造、及び、被覆粒子の製造方法 |
KR100861010B1 (ko) | 2006-12-22 | 2008-09-30 | 제일모직주식회사 | 절연성 도전 입자 및 이를 이용한 이방 도전성 필름 |
JP5074082B2 (ja) * | 2007-04-16 | 2012-11-14 | ソニーケミカル&インフォメーションデバイス株式会社 | 導電性粒子体及びこれを用いた異方性導電接続材料、並びに導電性粒子体の製造方法 |
WO2009054386A1 (ja) * | 2007-10-22 | 2009-04-30 | Nippon Chemical Industrial Co., Ltd. | 被覆導電性粉体およびそれを用いた導電性接着剤 |
KR101644849B1 (ko) * | 2009-11-30 | 2016-08-03 | 중앙대학교 산학협력단 | 이방성 도전성 접착제 및 이를 이용한 반도체 실장 방법 |
JP5476168B2 (ja) * | 2010-03-09 | 2014-04-23 | 積水化学工業株式会社 | 導電性粒子、異方性導電材料及び接続構造体 |
WO2012002508A1 (ja) * | 2010-07-02 | 2012-01-05 | 積水化学工業株式会社 | 絶縁性粒子付き導電性粒子、異方性導電材料及び接続構造体 |
JP5025825B2 (ja) * | 2010-07-28 | 2012-09-12 | 積水化学工業株式会社 | 絶縁性粒子付き導電性粒子、異方性導電材料及び接続構造体 |
JP6264731B2 (ja) * | 2012-03-06 | 2018-01-24 | 東洋インキScホールディングス株式会社 | 導電性樹脂組成物、導電性シート、電磁波シールドシートおよびこれらの製造方法、並びに導電性微粒子の製造方法 |
CN103367332B (zh) * | 2012-03-27 | 2016-03-09 | 南亚科技股份有限公司 | 封装结构 |
JP2014030026A (ja) * | 2013-08-30 | 2014-02-13 | Dexerials Corp | 異方性導電接着剤及び発光装置 |
JP6564302B2 (ja) * | 2014-10-28 | 2019-08-21 | 積水化学工業株式会社 | 絶縁性粒子付き導電性粒子、絶縁性粒子付き導電性粒子の製造方法、導電材料及び接続構造体 |
CN112863732B (zh) * | 2014-10-29 | 2023-01-17 | 迪睿合株式会社 | 连接结构体的制造方法、连接结构体以及导电材料 |
CN109742566A (zh) * | 2019-02-15 | 2019-05-10 | Oppo广东移动通信有限公司 | 显示面板以及电子装置 |
JP2022026341A (ja) | 2020-07-30 | 2022-02-10 | デクセリアルズ株式会社 | 複合導電粒子、及び複合導電粒子の製造方法 |
JP7430610B2 (ja) | 2020-08-31 | 2024-02-13 | 日本化学工業株式会社 | 被覆粒子及びその製造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03112011A (ja) * | 1989-09-26 | 1991-05-13 | Catalysts & Chem Ind Co Ltd | 異方導電性材料、異方導電性接着剤およびその異方導電性接着剤を使用した電極間を電気的に接続する方法並びにその方法により形成される電気回路基板 |
JPH04259766A (ja) * | 1991-02-14 | 1992-09-16 | Hitachi Chem Co Ltd | 回路の接続部材 |
JPH0742784U (ja) * | 1993-12-31 | 1995-08-11 | カシオ計算機株式会社 | 異方導電性接着剤 |
-
2004
- 2004-01-23 JP JP2004015152A patent/JP4724369B2/ja not_active Expired - Lifetime
- 2004-09-22 TW TW093128697A patent/TWI366835B/zh active
- 2004-09-22 WO PCT/JP2004/013800 patent/WO2005031759A1/ja active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03112011A (ja) * | 1989-09-26 | 1991-05-13 | Catalysts & Chem Ind Co Ltd | 異方導電性材料、異方導電性接着剤およびその異方導電性接着剤を使用した電極間を電気的に接続する方法並びにその方法により形成される電気回路基板 |
JPH04259766A (ja) * | 1991-02-14 | 1992-09-16 | Hitachi Chem Co Ltd | 回路の接続部材 |
JPH0742784U (ja) * | 1993-12-31 | 1995-08-11 | カシオ計算機株式会社 | 異方導電性接着剤 |
Also Published As
Publication number | Publication date |
---|---|
TW200515427A (en) | 2005-05-01 |
JP2005209491A (ja) | 2005-08-04 |
WO2005031759A1 (ja) | 2005-04-07 |
TWI366835B (en) | 2012-06-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4724369B2 (ja) | 導電粒子の製造方法 | |
KR100559937B1 (ko) | 미세회로의 접속방법 및 그에 의한 접속 구조체 | |
US6034331A (en) | Connection sheet and electrode connection structure for electrically interconnecting electrodes facing each other, and method using the connection sheet | |
JP4032439B2 (ja) | 接続部材および該接続部材を用いた電極の接続構造並びに接続方法 | |
KR101193757B1 (ko) | 이방성 도전막 및 그 제조 방법, 및 그 이방성 도전막을 이용한 접합체 | |
JP2001011503A (ja) | 新規な導電性微粒子、および該微粒子の用途 | |
KR101082238B1 (ko) | 접합체, 이 접합체의 제조 방법, 및 이 접합체에 이용되는 이방성 도전막 | |
JP5074082B2 (ja) | 導電性粒子体及びこれを用いた異方性導電接続材料、並びに導電性粒子体の製造方法 | |
JPH07161400A (ja) | 異方性導電膜、その製造方法及びそれを使用するコネ クタ | |
JP2009523306A (ja) | 異方性導電フィルムを用いた回路基板接続構造体及び接着方法、及びこれを用いた接着状態評価方法 | |
JP2648712B2 (ja) | 異方導電性接着剤およびその異方導電性接着剤を使用した電極間を電気的に接続する方法並びにその方法により形成される電気回路基板 | |
JPH08279371A (ja) | 接続部材および該接続部材を用いた電極の接続構造並びに接続方法 | |
JP3137578B2 (ja) | 異方性導電接着フィルム用導電粒子及びその製造方法並びに異方性導電接着フィルム | |
JP3542874B2 (ja) | 導電性微粒子 | |
JP2006339160A (ja) | 熱硬化性回路接続部材及びそれを用いた電極の接続構造、電極の接続方法 | |
JPS6386322A (ja) | 導電異方性接着剤シ−ト | |
JP2001155539A (ja) | 導電性微粒子、異方性導電接着剤及び導電接続構造体 | |
JPH08167328A (ja) | 異方導電フィルム | |
KR100251674B1 (ko) | 서로 마주보는 전극들을 상호접속하기 위한 접속시트, 및이 접속시트를 사용하는 전극접속구조 및 접속방법 | |
JP3367076B2 (ja) | 電気部材の接続構造及び接続方法 | |
JP5143329B2 (ja) | 回路接続体の作製方法 | |
JP2001035248A (ja) | 導電性付与粒子及びこれを用いた異方導電性接着剤 | |
JPH09147928A (ja) | 接続部材 | |
JP2001214149A (ja) | 異方導電接着剤 | |
WATANABE et al. | Flip-chip Interconnection to Various Substrates Using Anisotropic Conductive Adhesive Films |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060203 Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20060203 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060203 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20091110 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20100112 Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100112 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20101109 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20101222 Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20101222 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20110112 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20110329 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20110411 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140415 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4724369 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |