JP4723658B2 - 感光性樹脂組成物及びそれに用いる感光性樹脂の製造方法 - Google Patents

感光性樹脂組成物及びそれに用いる感光性樹脂の製造方法 Download PDF

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JP4723658B2
JP4723658B2 JP2009032435A JP2009032435A JP4723658B2 JP 4723658 B2 JP4723658 B2 JP 4723658B2 JP 2009032435 A JP2009032435 A JP 2009032435A JP 2009032435 A JP2009032435 A JP 2009032435A JP 4723658 B2 JP4723658 B2 JP 4723658B2
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mass
parts
photosensitive resin
compound
resin composition
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JP2010189464A (ja
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浩志 上井
和重 荻原
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Showa Denko KK
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Showa Denko KK
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Priority to CN 201010112958 priority patent/CN101807000B/zh
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  • Materials For Photolithography (AREA)
  • Epoxy Resins (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
JP2009032435A 2009-02-16 2009-02-16 感光性樹脂組成物及びそれに用いる感光性樹脂の製造方法 Active JP4723658B2 (ja)

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JP2009032435A JP4723658B2 (ja) 2009-02-16 2009-02-16 感光性樹脂組成物及びそれに用いる感光性樹脂の製造方法
CN 201010112958 CN101807000B (zh) 2009-02-16 2010-02-03 感光性树脂组合物及其所使用的感光性树脂的制造方法

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JP2009032435A JP4723658B2 (ja) 2009-02-16 2009-02-16 感光性樹脂組成物及びそれに用いる感光性樹脂の製造方法

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JP2010189464A JP2010189464A (ja) 2010-09-02
JP4723658B2 true JP4723658B2 (ja) 2011-07-13

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105669892B (zh) * 2016-03-17 2019-07-26 上海昭和高分子有限公司 一种溶剂型共聚树脂及其组合物
CN114755884B (zh) * 2022-06-14 2022-09-16 之江实验室 一种有机无机杂化飞秒激光直写光刻胶

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1981002431A1 (en) * 1980-02-20 1981-09-03 Inst Khim Fiz An Sssr Tungstenfree hard alloy and method of making it
JP2003057821A (ja) * 2001-08-13 2003-02-28 Showa Highpolymer Co Ltd 感光性樹脂および感光性樹脂組成物
WO2010050272A1 (ja) * 2008-10-27 2010-05-06 昭和高分子株式会社 感光性樹脂組成物及びそれに用いる感光性樹脂の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101611068B (zh) * 2007-02-20 2012-07-04 昭和电工株式会社 感光性树脂的制造方法、通过该制造方法得到的感光性树脂以及感光性树脂组合物

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1981002431A1 (en) * 1980-02-20 1981-09-03 Inst Khim Fiz An Sssr Tungstenfree hard alloy and method of making it
JP2003057821A (ja) * 2001-08-13 2003-02-28 Showa Highpolymer Co Ltd 感光性樹脂および感光性樹脂組成物
WO2010050272A1 (ja) * 2008-10-27 2010-05-06 昭和高分子株式会社 感光性樹脂組成物及びそれに用いる感光性樹脂の製造方法
JP2010102270A (ja) * 2008-10-27 2010-05-06 Showa Highpolymer Co Ltd 感光性樹脂組成物及びそれに用いる感光性樹脂の製造方法

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JP2010189464A (ja) 2010-09-02
CN101807000A (zh) 2010-08-18
CN101807000B (zh) 2013-05-15

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