JP4713352B2 - プラズマを閉じ込めかつ流動コンダクタンスを高める方法および装置 - Google Patents
プラズマを閉じ込めかつ流動コンダクタンスを高める方法および装置 Download PDFInfo
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- JP4713352B2 JP4713352B2 JP2006021181A JP2006021181A JP4713352B2 JP 4713352 B2 JP4713352 B2 JP 4713352B2 JP 2006021181 A JP2006021181 A JP 2006021181A JP 2006021181 A JP2006021181 A JP 2006021181A JP 4713352 B2 JP4713352 B2 JP 4713352B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
- H01J37/32642—Focus rings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10S156/915—Differential etching apparatus including focus ring surrounding a wafer for plasma apparatus
Description
[0009]別の実施形態では、プラズマ処理チャンバ内で基板の処理中にプラズマを基板処理領域内に閉じ込めるように構成された装置は、1つ以上の誘電体層を有する基板支持体と、頂部電極を包囲する誘電体シールとを備え、頂部電極、誘電体シール、基板と同様に基板支持体、およびプラズマのインピーダンスが、頂部電極に供給される電圧を電圧比で低減し、かつプラズマ処理中に頂部電極に供給される残りの電圧を逆相で基板および基板支持体に供給する。
P∝(Vs)2=Vs 2 (1)
[0059]下の方程式2は、頂部電極電圧がわずかVs/2であるときのP(電力)と頂部電極からチャンバ壁までの間の電圧差との間の関係を示す。
P∝(Vs/2)2=Vs 2/4 (2)
頂部電極電圧を二分の一に低下することにより、チャンバ壁に失われ得る電力は、当初の値の四分の一に低下される。
Z=R−jXc (1)
方程式2は、容量リアクタンス(Xc)とキャパシタンスCとの間の関係を示す。
Xc=1/(2πfC) (2)
式中、fは電源電力の周波数であり、Cはキャパシタンスである。
Ztotal=Z1+1/(1/(Z2+Z3+Z4+Z5)+1/Z6 ) (3)
[0068]頂部電極は典型的に導電性材料から作られるので、そのインピーダンスZ1は主として頂部電極の抵抗から構成される。Z2、Z3、およびZ4はプラズマによって影響される。しかし、インピーダンスZ5およびZ6は、基板支持体105の誘電体層および誘電体シール130の厚さおよび誘電率を変化させることによって、調整することができる。カソードのインピーダンスの大きさはカソードのキャパシタンスに影響を及ぼし得る。Z5およびZ6は、頂部電極125に従来の電源電圧のごく一部分fVsを供給しかつカソードを頂部電極の逆相の電圧−(1−f)Vsに維持することが可能となるように、調整される。
Claims (15)
- プラズマ処理チャンバ内で基板の処理中にプラズマを基板処理領域内に閉じ込めるように構成された装置であって、
1つ以上の誘電体層を有する基板支持体と、
前記基板支持体の周囲の環状リングであって、前記環状リングと処理チャンバ壁との間に約0.8インチ〜約1.5インチのギャップ幅を有するギャップがあるように構成された環状リングと、
頂部電極の周囲の誘電体シールであって、前記誘電体シールおよび前記基板支持体のインピーダンスにより、プラズマ処理中に前記頂部電極に供給される電圧がソース電圧に対して所定の比率となるように低下させ、残りの電圧を逆相で基板支持体に供給する誘電体シールと、を備える装置。 - 前記所定の比率が、約0.1〜約0.75の間である、請求項1に記載の装置。
- 前記所定の比率が、約0.2〜約0.6の間である、請求項1に記載の装置。
- 前記誘電体シール、前記基板支持体、またはそれらの組合せのインピーダンスを調整することによって、前記所定の比率を調整することができる、請求項1に記載の装置。
- 前記環状リングの前記上層の厚さが約1/8インチ〜約1/4インチの間である、請求項1に記載の装置。
- 前記プラズマ処理チャンバ内の圧力が、プラズマ処理中に前記ギャップ幅の増加と共に減少する、請求項1に記載の装置。
- 処理中の総ガス流量が1500sccmに等しいかそれ未満である場合、前記チャンバ圧力が30ミリトール未満に維持される、請求項1に記載の装置。
- 前記プラズマ閉じ込めが前記環状リングによって、かつ/またはプラズマ処理中に前記頂部電極に供給される電圧をソース電圧に対して所定の比率に低下させることによって改善される、請求項1に記載の装置。
- プラズマ処理チャンバの処理領域内にプラズマを閉じ込めるように構成された装置であって、
基板支持体の周囲の環状リングであって、前記環状リングと処理チャンバ壁との間に約0.8インチ〜約1.5インチのギャップ幅を持つギャップがあるように構成された環状リング、を備える装置。 - 前記環状リングの前記上層の厚さが約1/8インチ〜約1/4インチの間である、請求項9に記載の装置。
- プラズマ処理チャンバの基板処理領域内にプラズマを閉じ込めるように構成された装置であって、
1つ以上の誘電体層を有する基板支持体と、
頂部電極を包囲する誘電体シールであって、前記誘電体シールおよび前記基板支持体のインピーダンスにより、プラズマ処理中に前記頂部電極に供給される電圧がソース電圧に対して所定の比率となるように低下させ、残りの電圧を逆相で基板支持体に供給する誘電体シールと、を備える装置。 - 前記所定の比率が約0.1〜約0.75の間である、請求項11に記載の装置。
- 前記所定の比率が約0.2〜約0.6の間である、請求項11に記載の装置。
- 前記誘電体シールおよび前記基板支持体のインピーダンスを調整することによって前記所定の比率を調整することができる、請求項11に記載の装置。
- 前記プラズマ閉じ込めが、プラズマ処理中に前記頂部電極に供給される電圧をソース電圧に対して所定の比率に低下させることによって改善される、請求項11に記載の装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/046,135 | 2005-01-28 | ||
US11/046,135 US20060172542A1 (en) | 2005-01-28 | 2005-01-28 | Method and apparatus to confine plasma and to enhance flow conductance |
Publications (2)
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JP2006270054A JP2006270054A (ja) | 2006-10-05 |
JP4713352B2 true JP4713352B2 (ja) | 2011-06-29 |
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Family Applications (2)
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JP2006021181A Expired - Fee Related JP4713352B2 (ja) | 2005-01-28 | 2006-01-30 | プラズマを閉じ込めかつ流動コンダクタンスを高める方法および装置 |
JP2006003800U Expired - Fee Related JP3123883U (ja) | 2005-01-28 | 2006-05-19 | プラズマ処理チャンバ内で使用されるプロセスキット |
Family Applications After (1)
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JP2006003800U Expired - Fee Related JP3123883U (ja) | 2005-01-28 | 2006-05-19 | プラズマ処理チャンバ内で使用されるプロセスキット |
Country Status (8)
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US (3) | US20060172542A1 (ja) |
EP (1) | EP1686611B9 (ja) |
JP (2) | JP4713352B2 (ja) |
KR (2) | KR100900595B1 (ja) |
CN (2) | CN1812681B (ja) |
DE (1) | DE602006002282D1 (ja) |
SG (1) | SG124401A1 (ja) |
TW (2) | TWI333225B (ja) |
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2005
- 2005-01-28 US US11/046,135 patent/US20060172542A1/en not_active Abandoned
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2006
- 2006-01-24 TW TW095102667A patent/TWI333225B/zh active
- 2006-01-24 TW TW095208718U patent/TWM301400U/zh not_active IP Right Cessation
- 2006-01-25 SG SG200600529A patent/SG124401A1/en unknown
- 2006-01-26 KR KR1020060008360A patent/KR100900595B1/ko active IP Right Grant
- 2006-01-27 CN CN2006100032313A patent/CN1812681B/zh active Active
- 2006-01-27 CN CN200610127801XA patent/CN101008072B/zh active Active
- 2006-01-27 DE DE602006002282T patent/DE602006002282D1/de active Active
- 2006-01-27 EP EP06001700A patent/EP1686611B9/en not_active Expired - Fee Related
- 2006-01-30 JP JP2006021181A patent/JP4713352B2/ja not_active Expired - Fee Related
- 2006-05-03 US US11/381,399 patent/US7618516B2/en active Active
- 2006-05-19 JP JP2006003800U patent/JP3123883U/ja not_active Expired - Fee Related
- 2006-06-13 KR KR1020060053048A patent/KR20060087474A/ko not_active Application Discontinuation
- 2006-09-13 US US11/531,479 patent/US7674353B2/en active Active
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JPH08250470A (ja) * | 1995-03-09 | 1996-09-27 | Hitachi Ltd | プラズマ処理方法及び処理装置 |
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Also Published As
Publication number | Publication date |
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TW200627501A (en) | 2006-08-01 |
EP1686611B1 (en) | 2008-08-20 |
JP3123883U (ja) | 2006-07-27 |
CN1812681B (zh) | 2012-02-01 |
DE602006002282D1 (de) | 2008-10-02 |
US20060172542A1 (en) | 2006-08-03 |
KR20060087474A (ko) | 2006-08-02 |
CN1812681A (zh) | 2006-08-02 |
JP2006270054A (ja) | 2006-10-05 |
US20060193102A1 (en) | 2006-08-31 |
KR20060087432A (ko) | 2006-08-02 |
CN101008072A (zh) | 2007-08-01 |
US7618516B2 (en) | 2009-11-17 |
KR100900595B1 (ko) | 2009-06-02 |
TWM301400U (en) | 2006-11-21 |
US20070023145A1 (en) | 2007-02-01 |
TWI333225B (en) | 2010-11-11 |
US7674353B2 (en) | 2010-03-09 |
SG124401A1 (en) | 2006-08-30 |
EP1686611A1 (en) | 2006-08-02 |
CN101008072B (zh) | 2011-05-18 |
EP1686611B9 (en) | 2009-08-05 |
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