JP4704843B2 - プローブ - Google Patents

プローブ Download PDF

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Publication number
JP4704843B2
JP4704843B2 JP2005222876A JP2005222876A JP4704843B2 JP 4704843 B2 JP4704843 B2 JP 4704843B2 JP 2005222876 A JP2005222876 A JP 2005222876A JP 2005222876 A JP2005222876 A JP 2005222876A JP 4704843 B2 JP4704843 B2 JP 4704843B2
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JP
Japan
Prior art keywords
deformation
probe
fulcrum
electrode
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2005222876A
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English (en)
Japanese (ja)
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JP2007040743A (ja
JP2007040743A5 (enExample
Inventor
一徳 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Electronic Materials Corp
Original Assignee
Japan Electronic Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Electronic Materials Corp filed Critical Japan Electronic Materials Corp
Priority to JP2005222876A priority Critical patent/JP4704843B2/ja
Publication of JP2007040743A publication Critical patent/JP2007040743A/ja
Publication of JP2007040743A5 publication Critical patent/JP2007040743A5/ja
Application granted granted Critical
Publication of JP4704843B2 publication Critical patent/JP4704843B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)
JP2005222876A 2005-08-01 2005-08-01 プローブ Expired - Lifetime JP4704843B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005222876A JP4704843B2 (ja) 2005-08-01 2005-08-01 プローブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005222876A JP4704843B2 (ja) 2005-08-01 2005-08-01 プローブ

Publications (3)

Publication Number Publication Date
JP2007040743A JP2007040743A (ja) 2007-02-15
JP2007040743A5 JP2007040743A5 (enExample) 2008-09-18
JP4704843B2 true JP4704843B2 (ja) 2011-06-22

Family

ID=37798885

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005222876A Expired - Lifetime JP4704843B2 (ja) 2005-08-01 2005-08-01 プローブ

Country Status (1)

Country Link
JP (1) JP4704843B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100869046B1 (ko) * 2007-02-09 2008-11-18 한국기계연구원 Ａｆｍ 프로브
JP2009236611A (ja) * 2008-03-26 2009-10-15 Sanyo Electric Co Ltd 半導体装置の製造方法
KR100984876B1 (ko) * 2008-05-08 2010-10-04 한국기계연구원 가변강성 기능을 가진 수직형 미세 접촉 프로브
JP5185686B2 (ja) * 2008-05-13 2013-04-17 日本電子材料株式会社 プローブ、及びプローブの製造方法
JP6337633B2 (ja) 2014-06-16 2018-06-06 オムロン株式会社 プローブピン
TWI783744B (zh) * 2021-10-22 2022-11-11 中華精測科技股份有限公司 懸臂式探針結構
CN220323468U (zh) * 2023-05-22 2024-01-09 黄种庆 一种测试针结构

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003232808A (ja) * 2002-02-08 2003-08-22 Nec Kyushu Ltd プローブカード

Also Published As

Publication number Publication date
JP2007040743A (ja) 2007-02-15

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