JP4681886B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP4681886B2 JP4681886B2 JP2004567105A JP2004567105A JP4681886B2 JP 4681886 B2 JP4681886 B2 JP 4681886B2 JP 2004567105 A JP2004567105 A JP 2004567105A JP 2004567105 A JP2004567105 A JP 2004567105A JP 4681886 B2 JP4681886 B2 JP 4681886B2
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- film
- hfo
- heat treatment
- dielectric film
- dielectric
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- 239000004065 semiconductor Substances 0.000 title claims description 29
- 239000000758 substrate Substances 0.000 claims description 41
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 9
- 238000009792 diffusion process Methods 0.000 claims description 5
- 239000002052 molecular layer Substances 0.000 claims description 2
- 238000009413 insulation Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 85
- 230000008569 process Effects 0.000 description 61
- 238000010438 heat treatment Methods 0.000 description 53
- 230000004048 modification Effects 0.000 description 26
- 238000012986 modification Methods 0.000 description 26
- 229910052760 oxygen Inorganic materials 0.000 description 24
- 238000000277 atomic layer chemical vapour deposition Methods 0.000 description 22
- 230000015572 biosynthetic process Effects 0.000 description 22
- 229910052710 silicon Inorganic materials 0.000 description 19
- 238000002407 reforming Methods 0.000 description 18
- 239000001301 oxygen Substances 0.000 description 17
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- 239000012299 nitrogen atmosphere Substances 0.000 description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 14
- 239000010703 silicon Substances 0.000 description 14
- 239000012298 atmosphere Substances 0.000 description 13
- 239000007789 gas Substances 0.000 description 12
- 238000005121 nitriding Methods 0.000 description 10
- 239000012535 impurity Substances 0.000 description 9
- 238000000151 deposition Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
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- 230000008021 deposition Effects 0.000 description 7
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 6
- 239000002994 raw material Substances 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 238000001994 activation Methods 0.000 description 5
- 229910001873 dinitrogen Inorganic materials 0.000 description 5
- 238000005468 ion implantation Methods 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- 230000004913 activation Effects 0.000 description 4
- 230000002776 aggregation Effects 0.000 description 4
- 229910052785 arsenic Inorganic materials 0.000 description 4
- -1 oxygen radicals Chemical class 0.000 description 4
- 229910052698 phosphorus Inorganic materials 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- 150000003254 radicals Chemical class 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 3
- 238000004220 aggregation Methods 0.000 description 3
- 125000004429 atom Chemical group 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 230000008859 change Effects 0.000 description 3
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- 239000013078 crystal Substances 0.000 description 3
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- 150000004706 metal oxides Chemical class 0.000 description 3
- 150000002831 nitrogen free-radicals Chemical class 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 229910018557 Si O Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- ZYLGGWPMIDHSEZ-UHFFFAOYSA-N dimethylazanide;hafnium(4+) Chemical compound [Hf+4].C[N-]C.C[N-]C.C[N-]C.C[N-]C ZYLGGWPMIDHSEZ-UHFFFAOYSA-N 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229910052914 metal silicate Inorganic materials 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910004129 HfSiO Inorganic materials 0.000 description 1
- 206010021143 Hypoxia Diseases 0.000 description 1
- 229910007991 Si-N Inorganic materials 0.000 description 1
- 229910006294 Si—N Inorganic materials 0.000 description 1
- 229910006360 Si—O—N Inorganic materials 0.000 description 1
- 229910006501 ZrSiO Inorganic materials 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 150000004645 aluminates Chemical class 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000010574 gas phase reaction Methods 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 238000004335 scaling law Methods 0.000 description 1
- 150000004760 silicates Chemical class 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007725 thermal activation Methods 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 229910000314 transition metal oxide Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
Classifications
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/0228—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- H01L21/02164—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon oxide, e.g. SiO2
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- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
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Description
基板と、
前記基板上に形成されたhigh-K誘電体ゲート絶縁膜と、
前記high-K誘電体ゲート絶縁膜上に形成されたゲート電極と、
前記基板中、前記ゲート電極の両側に形成された一対の拡散領域とを備えた半導体装置であって、
前記high-K誘電体ゲート絶縁膜は、HfO 2 層とSiON分子層とを3回以上繰り返し積層した構造を有することを特徴とする半導体装置を提供する。
図3(A)〜3(D)は、本発明の第1実施例による誘電体膜の形成方法を示す。
ところで図6のTEM像では、SiO2界面酸化膜12の一部に欠陥が生じており、この欠陥に対応してシリコン基板11中に反応層ないし遷移層が形成されているのが観察される。
dangling bond をなくし、結晶化した膜中における結晶粒界の形成が抑制できる。
図10は、このようにしてシリコン基板上に形成されたhigh-K誘電体膜をキャパシタ絶縁膜としたMOSダイオード10の構成を示す。ただし図10中、先に説明した部分には同一の参照符号を付し、説明を省略する。
図14は、本発明の第4実施例で使われる改質処理装置40の構成を示す。ただし図14中、先に説明した部分には同一の参照符号を付し、説明を省略する。
図19A〜19Fは、本発明の第5実施例による半導体装置の製造工程を示す。
Claims (1)
- 基板と、
前記基板上に形成されたhigh-K誘電体ゲート絶縁膜と、
前記high-K誘電体ゲート絶縁膜上に形成されたゲート電極と、
前記基板中、前記ゲート電極の両側に形成された一対の拡散領域とを備えた半導体装置であって、
前記high-K誘電体ゲート絶縁膜は、HfO 2 層とSiON分子層とを3回以上繰り返し積層した構造を有することを特徴とする半導体装置。
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PCT/JP2003/000369 WO2004066376A1 (ja) | 2003-01-17 | 2003-01-17 | 誘電体膜の形成方法 |
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JPWO2004066376A1 JPWO2004066376A1 (ja) | 2006-05-18 |
JP4681886B2 true JP4681886B2 (ja) | 2011-05-11 |
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JP (1) | JP4681886B2 (ja) |
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Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4564310B2 (ja) * | 2004-09-01 | 2010-10-20 | 株式会社日立国際電気 | 半導体装置の製造方法 |
US7361608B2 (en) * | 2004-09-30 | 2008-04-22 | Tokyo Electron Limited | Method and system for forming a feature in a high-k layer |
JP2006269520A (ja) * | 2005-03-22 | 2006-10-05 | Renesas Technology Corp | 半導体装置およびその製造方法 |
JP4522900B2 (ja) * | 2005-03-30 | 2010-08-11 | 東京エレクトロン株式会社 | 成膜方法および記録媒体 |
JP4966582B2 (ja) * | 2006-05-02 | 2012-07-04 | 東京エレクトロン株式会社 | 基板処理方法、コンピュータ可読記録媒体、基板処理装置、および基板処理システム |
US7635634B2 (en) * | 2007-04-16 | 2009-12-22 | Infineon Technologies Ag | Dielectric apparatus and associated methods |
US20090047796A1 (en) * | 2007-08-13 | 2009-02-19 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method of Manufacturing a Dielectric Layer having Plural High-K Films |
WO2009093171A1 (en) * | 2008-01-23 | 2009-07-30 | Nxp B.V. | Improved phase control in hf- or zr-based high-k oxides |
US8524616B2 (en) * | 2008-11-12 | 2013-09-03 | Microchip Technology Incorporated | Method of nonstoichiometric CVD dielectric film surface passivation for film roughness control |
US8492247B2 (en) | 2010-08-17 | 2013-07-23 | International Business Machines Corporation | Programmable FETs using Vt-shift effect and methods of manufacture |
JP2012104569A (ja) * | 2010-11-08 | 2012-05-31 | Hitachi Kokusai Electric Inc | 半導体装置の製造方法及び基板処理装置 |
US8633119B2 (en) * | 2011-05-10 | 2014-01-21 | Applied Materials, Inc. | Methods for manufacturing high dielectric constant films |
US8633114B2 (en) | 2011-05-10 | 2014-01-21 | Applied Materials, Inc. | Methods for manufacturing high dielectric constant films |
JP2013058559A (ja) * | 2011-09-07 | 2013-03-28 | Tokyo Electron Ltd | 半導体装置の製造方法及び基板処理システム |
US9099461B2 (en) | 2012-06-07 | 2015-08-04 | International Business Machines Corporation | Method of manufacturing scaled equivalent oxide thickness gate stacks in semiconductor devices and related design structure |
CN102703880B (zh) * | 2012-06-12 | 2014-01-15 | 浙江大学 | 利用原子层沉积制备高精度光学宽带抗反射多层膜的方法 |
TW201408810A (zh) * | 2012-07-12 | 2014-03-01 | Applied Materials Inc | 用於沉積貧氧金屬膜的方法 |
JP5447632B2 (ja) * | 2012-11-29 | 2014-03-19 | 東京エレクトロン株式会社 | 基板処理装置 |
WO2017149205A1 (en) * | 2016-03-04 | 2017-09-08 | Beneq Oy | A plasma etch-resistant film and a method for its fabrication |
CN107694588A (zh) * | 2016-08-08 | 2018-02-16 | 松下电器产业株式会社 | 光半导体的制造方法、光半导体和制氢装置 |
CN106653591A (zh) * | 2016-12-12 | 2017-05-10 | 东莞市广信知识产权服务有限公司 | 一种在GaN表面生长高K介质的方法 |
CN106783976A (zh) * | 2016-12-12 | 2017-05-31 | 东莞市广信知识产权服务有限公司 | 一种GaN沟道MOS界面结构 |
KR20230170095A (ko) * | 2021-04-22 | 2023-12-18 | 어플라이드 머티어리얼스, 인코포레이티드 | 수퍼사이클 원자 층 증착에 의한 신규의 비정질 하이-k 금속 산화물 유전체들의 방법들 및 애플리케이션들 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3432997B2 (ja) * | 1996-04-23 | 2003-08-04 | 株式会社東芝 | 半導体装置に使用する絶縁膜 |
JPH11177057A (ja) | 1997-12-09 | 1999-07-02 | Nec Corp | 半導体装置の製造方法 |
US6306777B1 (en) * | 1999-08-13 | 2001-10-23 | Advanced Micro Devices, Inc. | Flash memory having a treatment layer disposed between an interpoly dielectric structure and method of forming |
DE10049257B4 (de) | 1999-10-06 | 2015-05-13 | Samsung Electronics Co., Ltd. | Verfahren zur Dünnfilmerzeugung mittels atomarer Schichtdeposition |
US6348420B1 (en) * | 1999-12-23 | 2002-02-19 | Asm America, Inc. | Situ dielectric stacks |
KR100367404B1 (ko) * | 1999-12-31 | 2003-01-10 | 주식회사 하이닉스반도체 | 다층 TaON박막을 갖는 커패시터 제조방법 |
JP2001257344A (ja) * | 2000-03-10 | 2001-09-21 | Toshiba Corp | 半導体装置及び半導体装置の製造方法 |
US6984591B1 (en) | 2000-04-20 | 2006-01-10 | International Business Machines Corporation | Precursor source mixtures |
KR20020064624A (ko) | 2001-02-02 | 2002-08-09 | 삼성전자 주식회사 | 반도체소자의 유전체막 및 그 제조방법 |
US6844604B2 (en) * | 2001-02-02 | 2005-01-18 | Samsung Electronics Co., Ltd. | Dielectric layer for semiconductor device and method of manufacturing the same |
JP2002231903A (ja) * | 2001-02-06 | 2002-08-16 | Sanyo Electric Co Ltd | 誘電体素子およびその製造方法 |
JP2002343790A (ja) * | 2001-05-21 | 2002-11-29 | Nec Corp | 金属化合物薄膜の気相堆積方法及び半導体装置の製造方法 |
US6960537B2 (en) * | 2001-10-02 | 2005-11-01 | Asm America, Inc. | Incorporation of nitrogen into high k dielectric film |
US6921702B2 (en) * | 2002-07-30 | 2005-07-26 | Micron Technology Inc. | Atomic layer deposited nanolaminates of HfO2/ZrO2 films as gate dielectrics |
US6706581B1 (en) * | 2002-10-29 | 2004-03-16 | Taiwan Semiconductor Manufacturing Company | Dual gate dielectric scheme: SiON for high performance devices and high k for low power devices |
EP1570525B1 (en) | 2002-12-09 | 2015-12-02 | Imec | Method for forming a dielectric stack |
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