JP4667965B2 - 光ビーム測定装置 - Google Patents

光ビーム測定装置 Download PDF

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Publication number
JP4667965B2
JP4667965B2 JP2005166624A JP2005166624A JP4667965B2 JP 4667965 B2 JP4667965 B2 JP 4667965B2 JP 2005166624 A JP2005166624 A JP 2005166624A JP 2005166624 A JP2005166624 A JP 2005166624A JP 4667965 B2 JP4667965 B2 JP 4667965B2
Authority
JP
Japan
Prior art keywords
light beam
wavefront
spot
imaging
test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005166624A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006343121A (ja
Inventor
宗濤 ▲葛▼
隆行 齋藤
実 黒瀬
秀雄 神田
和久 荒川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
Original Assignee
Fujifilm Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujifilm Corp filed Critical Fujifilm Corp
Priority to JP2005166624A priority Critical patent/JP4667965B2/ja
Priority to CNB2006100886997A priority patent/CN100565142C/zh
Priority to TW095119510A priority patent/TWI287619B/zh
Priority to KR1020060050712A priority patent/KR100769214B1/ko
Publication of JP2006343121A publication Critical patent/JP2006343121A/ja
Application granted granted Critical
Publication of JP4667965B2 publication Critical patent/JP4667965B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
    • G02B6/29349—Michelson or Michelson/Gires-Tournois configuration, i.e. based on splitting and interferometrically combining relatively delayed signals at a single beamsplitter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Optical Head (AREA)
JP2005166624A 2005-06-07 2005-06-07 光ビーム測定装置 Expired - Fee Related JP4667965B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2005166624A JP4667965B2 (ja) 2005-06-07 2005-06-07 光ビーム測定装置
CNB2006100886997A CN100565142C (zh) 2005-06-07 2006-06-01 光束测量装置
TW095119510A TWI287619B (en) 2005-06-07 2006-06-02 A light beam measurement device
KR1020060050712A KR100769214B1 (ko) 2005-06-07 2006-06-07 광빔 측정장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005166624A JP4667965B2 (ja) 2005-06-07 2005-06-07 光ビーム測定装置

Publications (2)

Publication Number Publication Date
JP2006343121A JP2006343121A (ja) 2006-12-21
JP4667965B2 true JP4667965B2 (ja) 2011-04-13

Family

ID=37509768

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005166624A Expired - Fee Related JP4667965B2 (ja) 2005-06-07 2005-06-07 光ビーム測定装置

Country Status (4)

Country Link
JP (1) JP4667965B2 (zh)
KR (1) KR100769214B1 (zh)
CN (1) CN100565142C (zh)
TW (1) TWI287619B (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100903264B1 (ko) * 2007-04-30 2009-06-17 광주과학기술원 파면 수차 측정 장치 및 방법
JP2009069041A (ja) 2007-09-14 2009-04-02 Fujinon Corp 光ピックアップ用波面測定装置
JP5139832B2 (ja) * 2008-02-14 2013-02-06 浜松ホトニクス株式会社 観察装置
TWI393919B (zh) * 2008-11-27 2013-04-21 Ind Tech Res Inst 光束整形器
CN110044849B (zh) * 2019-05-24 2021-08-17 易思维（杭州）科技有限公司 半封闭腔体内部缺陷检测装置
TWI729403B (zh) * 2019-05-31 2021-06-01 致茂電子股份有限公司 光電元件特性測量裝置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05340839A (ja) * 1992-06-10 1993-12-24 Olympus Optical Co Ltd 簡易干渉計
JP2000097616A (ja) * 1998-09-22 2000-04-07 Nikon Corp 干渉計
JP2001215105A (ja) * 2000-02-02 2001-08-10 Nikon Corp 干渉計、形状測定装置及び露光装置、並びに形状測定方法及び露光方法
JP2003177006A (ja) * 1995-04-07 2003-06-27 Discovision Assoc 試験経路ミラーを制御するためマイクロミラー及び圧電変換器を有する干渉計を含む光学システム
JP2004045326A (ja) * 2002-07-15 2004-02-12 Konica Minolta Holdings Inc 干渉計装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2693791B2 (ja) * 1988-10-25 1997-12-24 三菱電機株式会社 欠陥検査装置
IL100655A (en) * 1991-02-08 1994-11-28 Hughes Aircraft Co Profile gauge for interferometric laser

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05340839A (ja) * 1992-06-10 1993-12-24 Olympus Optical Co Ltd 簡易干渉計
JP2003177006A (ja) * 1995-04-07 2003-06-27 Discovision Assoc 試験経路ミラーを制御するためマイクロミラー及び圧電変換器を有する干渉計を含む光学システム
JP2000097616A (ja) * 1998-09-22 2000-04-07 Nikon Corp 干渉計
JP2001215105A (ja) * 2000-02-02 2001-08-10 Nikon Corp 干渉計、形状測定装置及び露光装置、並びに形状測定方法及び露光方法
JP2004045326A (ja) * 2002-07-15 2004-02-12 Konica Minolta Holdings Inc 干渉計装置

Also Published As

Publication number Publication date
CN1877270A (zh) 2006-12-13
CN100565142C (zh) 2009-12-02
TW200706830A (en) 2007-02-16
KR20060127803A (ko) 2006-12-13
TWI287619B (en) 2007-10-01
KR100769214B1 (ko) 2007-10-22
JP2006343121A (ja) 2006-12-21

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